Plasma etching machine with alarm prompt

Abstract

The utility model discloses a plasma etching machine table with an alarm prompt in the field of semiconductor plasma etching, which comprises a machine table, a door body capable of being opened is arranged on the front side of the machine table, a hollow working chamber is arranged in the machine table, and a horizontal upper limiting plate and a horizontal lower supporting plate are respectively arranged in the working chamber. Two parallel longitudinal guide rails are arranged on the lower supporting plate, a feeding tool is placed on the two guide rails, two sliding grooves corresponding to the two guide rails are formed in the bottom of the feeding tool, a left limiting seat and a right limiting seat are correspondingly arranged on the lower supporting plate and located on the left side and the right side of the feeding tool respectively, and the left limiting seat and the right limiting seat are both longitudinally arranged. A plurality of supporting seats are arranged at the bottom of the machine table; an induction support is arranged on the edge of the door body, a proximity switch is arranged on the side face of the machine table corresponding to the induction support, and the proximity switch is connected with the PLC. According to the utility model, the feeding efficiency is improved, and part of wafer products are prevented from becoming defective products and being scrapped without the operation of the procedure.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor plasma etching, and in particular relates to a plasma etching machine with an alarm prompt. Background Art

[0002] A plasma etcher is a high-precision micro-nano processing device that can accurately etch the surfaces of various materials to create various microstructures. It can also decompose organic matter such as dirt and grease on the surface to achieve the purpose of cleaning. This technology is widely used in the field of integrated circuits.

[0003] Current plasma etching machines for processing semiconductor wafers have the following drawbacks: wafers must be placed into the machine one by one, which not only reduces loading efficiency but also easily leads to wafer damage and inconveniences in wafer positioning. Furthermore, the machine does not display the operating status of the product after it is placed inside, making it impossible for operators to know whether the equipment has processed the wafer. Furthermore, the naked eye cannot determine whether the product has been processed, making it impossible to ensure product quality consistency. As a result, some products are scrapped as defective products because they do not undergo this process. Utility Model Content

[0004] The purpose of the utility model is to provide a plasma etching machine with an alarm prompt, which uses a loading tool to feed wafers into the machine for processing, thereby improving loading efficiency and making the loading action safer, ensuring that the wafers are processed by the machine, and avoiding that some wafer products are scrapped as defective products without undergoing this process.

[0005] The purpose of the present utility model is achieved as follows: a plasma etching machine with an alarm prompt, comprising a machine, an openable door body is provided on the front side of the machine, a hollow working chamber is provided inside the machine, a horizontal upper limit plate and a lower support plate are respectively provided in the working chamber, two longitudinal guide rails parallel to each other are provided on the lower support plate, a loading tool is placed on the two guide rails, two slide grooves are provided at the bottom of the loading tool corresponding to the two guide rails, a left limit seat and a right limit seat are respectively provided on the left and right sides of the loading tool on the lower support plate, the left limit seat and the right limit seat are both longitudinally arranged, and a plurality of support seats are provided at the bottom of the machine; an induction bracket is provided on the edge of the door body, and a proximity switch is provided on the side of the machine corresponding to the induction bracket, and the proximity switch is connected to the PLC controller.

[0006] The utility model installs a proximity switch at the working door of the equipment, and determines whether the working door of the equipment is opened by the on-off state of the proximity switch. The working solenoid valve control line of the equipment is connected to the PLC input terminal of the auxiliary machine of the equipment. The PLC controller senses the state of the control line and determines whether the working solenoid valve of the equipment is working. The wafer is sent into the interior of the machine for processing through the loading tool, which improves the loading efficiency and makes the loading action safer. During operation, the first step is that the operator needs to open the equipment working door when placing the product into the equipment. At this time, the installed proximity switch will be on and off once, and the PLC can use this as a basis to determine that the product has been placed in the equipment by the operator; the second step is that after the PLC determines that the product has entered the equipment, it starts timing (this time can be modified by the equipment engineer). Within the set time, the PLC receives the action signal of the solenoid valve that must be operated on the equipment. The PLC records the action time signal, and the human-machine interface displays that the product has been operated on by the equipment, and the operator can safely send it to the next process; the third step is that if the PLC does not receive the action signal of the solenoid valve that must be operated on the equipment within the set time, the PLC sends an alarm signal to the three-color light, the three-color light turns red and buzzes, and the human-machine interface displays that the product has not been operated on by the equipment, prompting the operator to come and re-operate in time; the fourth step is that after the first product completes the work, the operator reopens the equipment working door, and the PLC resets the timing time.

[0007] Compared with the existing technology, the beneficial effects of the present invention are: 1. Preventing the machine from flowing into the next station without operation, resulting in product abnormalities; 2. Reminding the operator to take out the product in time after the machine operation is completed, thereby improving operation efficiency; 3. The wafer is sent into the machine for processing through the loading tool, thereby improving loading efficiency and making the loading action safer.

[0008] As a further improvement of the present invention, the inner wall of the working chamber is circular.

[0009] As a further improvement to the present invention, the loading tool comprises two vertical side panels, one on each side, with a horizontal upper and lower panel positioned between the upper and lower portions of each panel. Opposite sides of each panel are provided with a plurality of mounting blocks arranged sequentially from top to bottom, each with a groove defined on the outer side of the mounting blocks. A wafer is placed between the grooves of each of the two corresponding mounting blocks, and each wafer is fed into the machine using the loading tool.

[0010] As a further improvement of the present invention, a guide seat is provided at the bottom of each side plate, and a slide groove is provided at the bottom of the guide seat. When the feeding tool enters the machine, it is guided by the guide rail, and the two limit seats limit the left and right positions of the feeding tool.

[0011] As a further improvement to the present invention, a three-color light alarm is installed on the top of the machine. This light is connected to a PLC controller, which also connects the machine's operating solenoid valve. When the machine is operating, the operating solenoid valve must actuate, providing a signal to the PLC controller. When no product is being processed, the three-color light alarm sounds. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a three-dimensional structural diagram of the utility model.

[0013] Figure 2 This is a vertical cross-sectional view of the loading tool.

[0014] Figure 3 for Figure 2 Enlarged view of point A in the middle.

[0015] Figure 4 This is a connection diagram between the PLC controller, proximity switch, three-color light alarm, and working solenoid valve.

[0016] Among them, 1 machine, 2 door body, 3 working chamber, 4 upper limit plate, 5 lower support plate, 6 guide rail, 7 loading tool, 701 side plate, 702 upper plate, 703 lower plate, 704 mounting seat, 8 slide, 9 left limit seat, 10 right limit seat, 11 support seat, 12 induction bracket, 13 proximity switch, 14 PLC controller, 15 groove, 16 guide seat, 17 three-color light alarm, 18 working solenoid valve. DETAILED DESCRIPTION

[0017] like Figure 1-4 As shown, a plasma etching machine with an alarm prompt is provided, including a machine 1, an openable door body 2 is provided on the front side of the machine 1, a hollow working chamber 3 is provided inside the machine 1, and the inner wall of the working chamber 3 is circular; a horizontal upper limit plate 4 and a lower support plate 5 are respectively provided in the working chamber 3, and two longitudinal guide rails 6 parallel to each other are provided on the lower support plate 5, and a loading tool 7 is placed on the two guide rails 6, and two slide grooves 8 are provided at the bottom of the loading tool 7 corresponding to the two guide rails 6, and a left limit seat 9 and a right limit seat 10 are respectively provided on the left and right sides of the loading tool 7 on the lower support plate 5, and the left limit seat 9 and the right limit seat 10 are both longitudinally arranged, and a plurality of support seats 11 are provided at the bottom of the machine 1; an induction bracket 12 is provided on the edge of the door body 2, and a proximity switch 13 is provided on the side of the machine 1 corresponding to the induction bracket 12, and the proximity switch 13 is connected to the PLC controller 14.

[0018] The loading tool 7 comprises two vertical side panels 701, each corresponding to the other. A horizontal upper panel 702 and lower panel 703 are positioned between the upper and lower portions of each side panel 701, respectively. Opposing sides of each side panel 701 are a plurality of mounting blocks 704, arranged sequentially from top to bottom. Grooves 15 are defined on the outer sides of each mounting block 704. A wafer is placed between the grooves 15 of each corresponding mounting block 704, and each wafer is then fed into the machine 1 using the loading tool 7. A guide block 16 is positioned at the bottom of each side panel 701, with a chute 8 disposed therein. As the loading tool 7 enters the machine 1, it is guided by a guide rail 6, with two stop blocks limiting the left and right positions of the loading tool 7.

[0019] A tri-color light alarm 17 is installed on the top of machine 1. This light is connected to the PLC controller 14, and the machine's operating solenoid valve 18 is also connected to the PLC controller 14. When machine 1 is operating, the solenoid valve 18 must actuate, providing a signal to the PLC controller 14. When no product is being processed, the tri-color light alarm 17 sounds.

[0020] The utility model installs a proximity switch 13 at the working door of the equipment, and determines whether the working door of the equipment is opened by the on-off state of the proximity switch 13. The control line of the working solenoid valve 18 of the equipment is connected to the PLC input end of the auxiliary machine 1 of the equipment. The PLC controller 14 senses the state of the control line to determine whether the working solenoid valve 18 of the equipment is working; the wafer is sent into the interior of the machine 1 for processing through the loading tool 7, thereby improving the loading efficiency and making the loading action safer. During operation, the first step is that the operator needs to open the equipment working door when putting the product into the equipment. At this time, the installed proximity switch 13 will be turned on and off once, and the PLC can use this as a basis to determine that the product has been placed in the equipment by the operator; the second step is that after the PLC determines that the product has entered the equipment, it starts timing (this time can be modified by the equipment engineer). Within the set time, the PLC receives the action signal of the solenoid valve 18 that must be worked on by the equipment. The PLC records the action time signal, and the human-machine interface displays that the product has been worked on by the equipment, and the operator can safely send it to the next process; the third step is that if the PLC does not receive the action signal of the solenoid valve 18 that must be worked on by the equipment within the set time, the PLC sends an alarm signal to the three-color light, the three-color light turns red and buzzes, and the human-machine interface displays that the product has not been worked on by the equipment, prompting the operator to come and re-operate in time; the fourth step is that after the first product completes the work, the operator reopens the equipment working door, and the PLC resets the timing time. The advantages of the present invention are: 1. It prevents machine 1 from flowing into the next station without operation, resulting in product abnormalities; 2. It reminds the operator to remove the product in time after the machine 1 completes the operation, thereby improving operation efficiency; 3. The wafer is fed into the interior of the machine 1 for processing through the loading tool 7, thereby improving loading efficiency and making the loading action safer.

[0021] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solutions disclosed in the present invention, technicians in this field can make some substitutions and deformations of some technical features therein according to the disclosed technical content without creative labor, and these substitutions and deformations are all within the protection scope of the present invention.

Claims

1. A plasma etching machine with an alarm prompt, comprising a machine, characterized in that: An openable door is provided on the front side of the machine, and a hollow working chamber is provided inside the machine. A horizontal upper limit plate and a lower support plate are respectively provided in the working chamber, and two longitudinal guide rails parallel to each other are provided on the lower support plate. Loading tools are placed on the two guide rails, and two slide grooves are provided at the bottom of the loading tool corresponding to the two guide rails. A left limit seat and a right limit seat are respectively provided on the left and right sides of the loading tool on the lower support plate, and the left limit seat and the right limit seat are both longitudinally arranged. A number of support seats are provided at the bottom of the machine; an induction bracket is provided at the edge of the door body, and a proximity switch is provided on the side of the machine corresponding to the induction bracket, and the proximity switch is connected to the PLC controller.

2. A plasma etching machine with an alarm prompt according to claim 1, characterized in that: The inner wall of the working chamber is circular.

3. A plasma etching machine with alarm prompt according to claim 1 or 2, characterized in that: The loading tool includes two corresponding vertical side panels on the left and right, and a horizontal upper plate and a lower plate are respectively provided between the upper and lower parts of the two side panels. The opposite sides of the two side panels are provided with a plurality of mounting seats arranged in sequence from top to bottom, and a groove is provided on the outer side of the mounting seat.

4. The plasma etching machine with alarm prompt according to claim 3, characterized in that: A guide seat is provided at the bottom of each side plate, and a slide groove is opened at the bottom of the guide seat.

5. A plasma etching machine with alarm prompt according to claim 1 or 2, characterized in that: A three-color light alarm is provided on the top of the machine, the three-color light alarm is connected to the PLC controller, and the working solenoid valve of the machine is also connected to the PLC controller.

Images