Sealed storage device and cleaning equipment
By designing a sealed storage device, the loss problem of volatile drug liquid in the tank cleaning machine is solved, safe storage and efficient utilization of drug liquid is achieved, and production costs and safety risks are reduced.
Patent Information
- Application Number
- CN202422144541.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-02
- Publication Date
- 2025-08-12
- Estimated Expiration
- 2034-09-02
AI Technical Summary
During the production process of Micro-LED chips, the volatile liquid in the tank of the tank cleaning machine will gradually evaporate when it is idle, resulting in an increase in the loss of non-essential liquids, increasing production costs and causing harm to the environment and personnel safety.
A sealed storage device is designed, including a sealing tank, a process tank, a pipetting assembly and a cooling member. The pipetting assembly is used to store the volatile drug liquid in the sealing tank. The cooling member cools the drug liquid to prevent volatilization, reduces losses, and when necessary, the drug liquid is returned to the process tank for cleaning operation.
Effectively reduce the loss of the drug liquid, reduce production costs, reduce harm to the environment and personnel, prevent the sealing groove from swelling and cracking, and ensure the normal operation of the cleaning equipment.
Smart Images
Figure CN223218263U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chip manufacturing, in particular to a sealed storage device and cleaning equipment. Background Art
[0002] During the production of Micro-LED chips, the volatile liquid in the process tank of the tank cleaning machine will gradually evaporate when the tank cleaning machine is idle, resulting in unnecessary liquid loss, increasing production costs, and posing a threat to production personnel and environmental safety. Utility Model Content
[0003] In order to solve the problems existing in the prior art, one of the purposes of the present invention is to provide a sealed storage device.
[0004] The utility model provides the following technical solutions:
[0005] A sealed storage device comprising:
[0006] Sealed tank for storing volatile liquid medicine;
[0007] Process tank, used for cleaning operations;
[0008] a liquid transfer assembly connecting the sealing groove and the process groove, the liquid transfer assembly being used to transfer the volatile liquid in the process groove to the sealing groove, and vice versa; and
[0009] The cooling element is arranged inside the sealing groove.
[0010] As a further optional solution for the sealed storage device, the cooling member includes a cooling pipe, which is coiled inside the sealing groove and has a cooling medium flowing through it.
[0011] As a further optional solution for the sealed storage device, the sealed storage device further includes an air pressure balancing component, and the air pressure balancing component is arranged in the sealing groove.
[0012] As a further optional solution for the sealed storage device, the air pressure balance component includes an air pressure balance pipe, one end of which is connected to the sealing groove, and an exhaust valve is provided on the air pressure balance pipe.
[0013] As a further optional solution to the sealed storage device, the pipetting assembly includes:
[0014] A liquid inlet pipeline, one end of which is connected to the sealing tank and the other end of which is connected to the process tank, wherein a liquid inlet valve is provided on the liquid inlet pipeline;
[0015] a liquid return pipeline, one end of which is connected to the sealing tank and the other end of which is connected to the process tank, wherein a liquid return valve is provided on the liquid return pipeline; and
[0016] A pump is provided in the liquid inlet pipeline or the liquid return pipeline.
[0017] As a further optional solution for the sealed storage device, the sealing tank is lower than the process tank, and the pump is arranged in the liquid return pipeline.
[0018] As a further optional solution for the sealed storage device, the liquid inlet pipeline includes a first pipe section, one end of which is passed through the top of the sealing groove, the other end of the first pipe section is connected to the bottom of the process groove, and the liquid inlet valve is arranged on the first pipe section.
[0019] As a further optional solution for the sealed storage device, the liquid inlet pipeline also includes a second pipe section, which is arranged in the sealing groove, one end of the second pipe section is connected to the first pipe section, and the other end of the second pipe section extends to the bottom of the sealing groove.
[0020] As a further optional solution to the sealed storage device, the pipetting assembly further includes a filter, and the filter is arranged in the liquid return line.
[0021] Another object of the present invention is to provide a cleaning device.
[0022] The utility model provides the following technical solutions:
[0023] A cleaning device comprises the above-mentioned sealed storage device.
[0024] The embodiments of the present utility model have the following beneficial effects:
[0025] When using the above-mentioned sealed storage device, it is set on the cleaning equipment. When the cleaning equipment is idle, the pipetting component transfers the volatile liquid medicine in the process tank to the sealing tank, and uses the sealing tank to store the volatile liquid medicine to prevent the volatile liquid medicine from contacting with the outside air, thereby preventing the volatile liquid medicine from volatilizing into the surrounding environment, thereby reducing unnecessary liquid medicine loss, reducing production costs, and reducing hazards to production personnel and environmental safety. At the same time, the cooling component set in the sealing tank can cool down the volatile liquid medicine entering the sealing tank, preventing the volatile liquid medicine from volatilizing too much in the sealing tank and causing the sealing tank to burst. When production is required, the pipetting component transfers the volatile liquid medicine in the sealing tank to the process tank so that the cleaning equipment can perform cleaning operations on the product or material.
[0026] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.
[0028] Figure 1 The figure shows the overall structure of a sealed storage device provided by an embodiment of the present utility model;
[0029] Figure 2 A partial structural diagram of a sealed storage device provided by an embodiment of the present utility model is shown;
[0030] Figure 3 A schematic diagram showing the discharge of volatile chemical liquid from the process tank into the sealing tank;
[0031] Figure 4 A schematic diagram showing the volatile chemical solution flowing back from the sealing tank into the process tank.
[0032] Description of main component symbols:
[0033] 100-sealing groove; 200-pipetting assembly; 210-liquid inlet pipeline; 211-liquid inlet valve; 212-first pipe section; 213-second pipe section; 220-liquid return pipeline; 221-liquid return valve; 230-pump; 240-filter; 300-cooling element; 400-air pressure balance assembly; 410-air pressure balance pipe; 411-exhaust valve; 500-process tank. DETAILED DESCRIPTION
[0034] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.
[0035] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. Conversely, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.
[0036] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.
[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.
[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the template description herein are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0039] Example
[0040] This embodiment provides a sealed storage device, specifically a sealed storage device for volatile liquid based on a tank-type cleaning machine.
[0041] Please also refer to Figure 1 and Figure 2 The sealed storage device includes a sealing tank 100, a process tank 500, a pipetting component 200 and a cooling member 300.
[0042] The sealing tank 100 is used to store volatile liquid chemicals, and the cooling element 300 is disposed inside the sealing tank 100. The process tank 500 is used for cleaning operations.
[0043] It can be understood that the sealing tank 100 has a closed tank body, which can isolate the volatile liquid medicine stored in the sealing tank 100 from the external air.
[0044] In addition, the pipetting assembly 200 connects the sealing tank 100 and the process tank 500. When in use, the pipetting assembly 200 transfers the volatile liquid in the process tank 500 to the sealing tank 100, and transfers the volatile liquid in the sealing tank 100 to the process tank 500.
[0045] When using the above-mentioned sealed storage device, it is set on the cleaning equipment. When the cleaning equipment is idle, the pipetting component 200 transfers the volatile liquid in the process tank 500 to the sealing tank 100, and uses the sealing tank 100 to store the volatile liquid to prevent the volatile liquid from contacting with the external air, and then prevent the volatile liquid from volatilizing into the surrounding environment, thereby reducing unnecessary liquid loss, reducing production costs, and reducing hazards to production personnel and environmental safety. At the same time, the cooling member 300 set in the sealing tank 100 can cool down the volatile liquid entering the sealing tank 100, preventing the volatile liquid from volatilizing too much in the sealing tank 100 and causing the sealing tank 100 to burst. When production is required, the pipetting component 200 transfers the volatile liquid in the sealing tank 100 to the process tank 500 so that the cleaning equipment can perform cleaning operations on the product or material.
[0046] In some embodiments, the pipetting assembly 200 includes an inlet line 210 , a return line 220 , and a pump 230 .
[0047] One end of the liquid inlet pipe 210 is connected to the sealing tank 100 , and the other end of the liquid inlet pipe 210 is connected to the process tank 500 . A liquid inlet valve 211 is provided on the liquid inlet pipe 210 .
[0048] Similarly, one end of the liquid return line 220 is connected to the sealing tank 100 , and the other end of the liquid return line 220 is connected to the process tank 500 . A liquid return valve 221 is provided on the liquid return line 220 .
[0049] In addition, a pump 230 is provided on the liquid inlet pipe 210 or the liquid return pipe 220 .
[0050] For example, the sealing tank 100 can be located above the process tank 500. When the return valve 221 is opened, the volatile chemical solution in the sealing tank 100 flows back into the process tank 500 under the action of gravity. Accordingly, the pump 230 is located on the liquid inlet line 210. When the liquid inlet valve 211 is opened, the pump 230 is activated to transfer the volatile chemical solution in the process tank 500 into the sealing tank 100.
[0051] Alternatively, the sealing tank 100 can be located below the process tank 500. When the liquid inlet valve 211 is opened, the volatile chemical solution in the process tank 500 is discharged into the sealing tank 100 under the action of gravity. Accordingly, the pump 230 is located on the liquid return line 220. When the liquid return valve 221 is opened, the pump 230 is activated to transfer the volatile chemical solution in the sealing tank 100 back to the process tank 500.
[0052] In this embodiment, the sealing tank 100 is lower than the process tank 500 , and the pump 230 is disposed on the liquid return line 220 .
[0053] Furthermore, the liquid inlet pipeline 210 includes a first pipe section 212. One end of the first pipe section 212 is disposed through the top of the sealing tank 100, and the other end of the first pipe section 212 is connected to the bottom of the process tank 500. In addition, a liquid inlet valve 211 is disposed on the first pipe section 212.
[0054] When the liquid inlet valve 211 is opened, the volatile chemical liquid in the process tank 500 flows into the first pipe section 212 under the action of gravity, and then is discharged into the sealing tank 100 through the first pipe section 212. Because the first pipe section 212 is installed at the top of the sealing tank 100, it is difficult for the volatile chemical liquid to remain in the first pipe section 212. Therefore, when the liquid inlet valve 211 is closed again, the volatile chemical liquid is completely sealed in the sealing tank 100.
[0055] Furthermore, the liquid inlet pipeline 210 further includes a second pipe section 213 . The second pipe section 213 is disposed in the sealing groove 100 , one end of the second pipe section 213 is connected to the first pipe section 212 , and the other end of the second pipe section 213 extends to the bottom of the sealing groove 100 .
[0056] When the liquid inlet valve 211 is opened, the volatile chemical liquid in the process tank 500 flows sequentially through the first pipe section 212 and the second pipe section 213 under the action of gravity, and is directly discharged into the bottom of the sealing tank 100. During this process, the volatile chemical liquid is less likely to splash, which can reduce the volatilization of the volatile chemical liquid in the sealing tank 100.
[0057] Furthermore, the pipetting assembly 200 further includes a filter 240 , and the filter 240 is disposed on the liquid return line 220 .
[0058] When the volatile liquid in the sealing tank 100 flows back into the process tank 500 through the liquid return line 220 , the filter 240 filters the volatile liquid to remove impurities in the volatile liquid, thereby ensuring the cleaning effect of the cleaning equipment.
[0059] In other embodiments, the pipetting assembly 200 may also be composed of a pipetting line and a pump 230 disposed on the pipetting line, wherein the pump 230 is a centrifugal pump, a diaphragm pump, or the like that can rotate forward and backward.
[0060] In some embodiments, the cooling member 300 is a cooling pipe that is coiled inside the sealing groove 100 and has a cooling medium flowing therein.
[0061] During use, the cooling medium flowing through the cooling tube exchanges heat with the volatile liquid in the sealing groove 100 through the tube wall of the cooling tube, takes away the heat of the volatile liquid, and cools the volatile liquid, thereby preventing the volatile liquid from volatilizing too much in the sealing groove 100 and causing the sealing groove 100 to burst.
[0062] It is understood that the cooling pipe is externally connected to a refrigeration device, and the cooling medium releases the absorbed heat at the refrigeration device and circulates between the cooling pipe and the refrigeration device. For example, the cooling medium can be cooling water.
[0063] In other embodiments, the cooling element 300 may also be a semiconductor refrigeration sheet, which is in contact with the wall of the sealing groove 100 and exchanges heat with the volatile liquid in the sealing groove 100 through the wall of the sealing groove 100 to cool the volatile liquid.
[0064] Furthermore, the sealed storage device further includes an air pressure balance component 400 , which is disposed on the sealing groove 100 .
[0065] When in use, the air pressure balancing assembly 400 can keep the air pressure inside and outside the sealing groove 100 balanced, which is conducive to the volatile liquid being smoothly discharged into the sealing groove 100 and flowing out of the sealing groove 100.
[0066] In some embodiments, the air pressure balance assembly 400 includes an air pressure balance pipe 410 . One end of the air pressure balance pipe 410 is connected to the sealing groove 100 , and an exhaust valve 411 is provided on the air pressure balance pipe 410 .
[0067] When the volatile chemical solution in the process tank 500 is discharged into the sealing tank 100, the exhaust valve 411 opens to allow the air in the sealing tank 100 to be discharged, which facilitates the smooth discharge of the volatile chemical solution into the sealing tank 100. After the volatile chemical solution has completely entered the sealing tank 100, the exhaust valve 411 closes to keep the sealing tank 100 sealed.
[0068] When the volatile chemical solution in the sealing tank 100 flows back to the process tank 500 , the exhaust valve 411 is opened again to allow external air to enter the sealing tank 100 to avoid a negative pressure state in the sealing tank 100 that may damage the sealing tank 100 .
[0069] Illustratively, one end of the pressure balance tube 410 is connected to the top of the sealing tank 100 , and the other end of the pressure balance tube 410 extends into the process tank 500 .
[0070] In other embodiments, the air pressure balance component 400 may also be an airbag disposed on the wall of the sealing groove 100. For example, the airbag is located in the sealing groove 100, and the inner cavity of the airbag is communicated with the outside of the sealing groove 100.
[0071] When the volatile chemical liquid in the process tank 500 is discharged into the sealing tank 100, the airbag is exhausted and shrinks, and the reduced volume of the airbag is equal to the volume of the volatile chemical liquid discharged into the sealing tank 100, so that the air pressure inside and outside the sealing tank 100 remains balanced, which is conducive to the smooth discharge of the volatile chemical liquid into the sealing tank 100.
[0072] When the volatile liquid in the sealing groove 100 flows back to the process groove 500, the airbag absorbs air and expands, and the increased volume of the airbag is equal to the volume of the volatile liquid flowing out of the sealing groove 100. It can also keep the air pressure inside and outside the sealing groove 100 balanced, avoiding the occurrence of a negative pressure state in the sealing groove 100 and causing damage to the sealing groove 100.
[0073] In summary, when the sealed storage device is used, it is placed on the cleaning equipment, and the sealing tank 100 and the process tank 500 are connected respectively by the liquid inlet pipe 210 and the liquid return pipe 220 .
[0074] Please combine Figure 3 When the cleaning equipment is idle, the liquid inlet valve 211 and the exhaust valve 411 are opened, and the volatile liquid in the process tank 500 is discharged into the sealing tank 100 under the action of gravity. After the volatile liquid has completely entered the sealing tank 100, the liquid inlet valve 211 and the exhaust valve 411 are closed, and the sealing tank 100 is used to store the volatile liquid to prevent the volatile liquid from contacting with the outside air, thereby preventing the volatile liquid from volatilizing into the surrounding environment, thereby reducing unnecessary liquid loss, reducing production costs, and reducing hazards to production personnel and environmental safety. At the same time, the cooling pipe arranged in the sealing tank 100 can cool the volatile liquid entering the sealing tank 100 to prevent the sealing tank 100 from bursting due to excessive volatilization of the volatile liquid in the sealing tank 100.
[0075] Please combine Figure 4 When production is required, the return valve 221 and the exhaust valve 411 are opened, and the pump 230 is started to transfer the volatile liquid in the sealing tank 100 back to the process tank 500 so that the cleaning equipment can clean the product or material.
[0076] See also Figure 1 This embodiment also provides a cleaning device, specifically a tank-type cleaning machine for cleaning Micro-LED chips, Micro-OLED chips, wafers, etc. The cleaning device includes the above-mentioned sealed storage device.
[0077] In all examples shown and described herein, any specific values should be interpreted as merely exemplary and not limiting, and thus other examples of the exemplary embodiments may have different values.
[0078] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.
[0079] The above-described embodiments merely represent several implementation methods of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the scope of the present invention, all of which fall within the scope of protection of the present invention.
Claims
1. A sealed storage device, characterized in that: include: Sealed tank for storing volatile liquid medicine; Process tank, used for cleaning operations; a liquid transfer assembly connected to the sealing groove and the process groove, the liquid transfer assembly being used to transfer the volatile liquid in the process groove to the sealing groove, and vice versa; as well as The cooling element is arranged inside the sealing groove.
2. The sealed storage device according to claim 1, characterized in that The cooling element includes a cooling pipe, which is coiled inside the sealing groove and has a cooling medium flowing through it.
3. The sealed storage device according to claim 1, characterized in that The sealed storage device further includes an air pressure balancing component, which is disposed in the sealing groove.
4. The sealed storage device according to claim 3, characterized in that The air pressure balance component includes an air pressure balance pipe, one end of which is connected to the sealing groove, and an exhaust valve is provided on the air pressure balance pipe.
5. The sealed storage device according to any one of claims 1 to 4, characterized in that: The pipetting assembly comprises: A liquid inlet pipeline, one end of which is connected to the sealing tank and the other end of which is connected to the process tank, wherein a liquid inlet valve is provided on the liquid inlet pipeline; a liquid return pipeline, one end of which is connected to the sealing tank and the other end of which is connected to the process tank, wherein a liquid return valve is provided on the liquid return pipeline; and A pump is provided in the liquid inlet pipeline or the liquid return pipeline.
6. The sealed storage device according to claim 5, characterized in that: The sealing tank is lower than the process tank, and the pump is arranged on the liquid return pipeline.
7. The sealed storage device according to claim 6, characterized in that The liquid inlet pipeline includes a first pipe section, one end of which is passed through the top of the sealing groove, the other end of which is connected to the bottom of the process groove, and the liquid inlet valve is arranged on the first pipe section.
8. The sealed storage device according to claim 7, characterized in that The liquid inlet pipeline further includes a second pipe section, which is disposed in the sealing groove. One end of the second pipe section is connected to the first pipe section, and the other end of the second pipe section extends to the bottom of the sealing groove.
9. The sealed storage device according to claim 5, characterized in that: The pipetting assembly further includes a filter, which is arranged in the liquid return line.
10. A cleaning device, characterized in that: A sealed storage device comprising the sealing material according to any one of claims 1 to 9.