Gas mixing device and semiconductor process system

Abstract

The utility model relates to a gas mixing device and a semiconductor process system. The gas mixing device comprises a gas mixing unit, a gas inlet unit, a mixing unit and a gas exhaust unit, the gas mixing device has the advantages that the gas inlet unit is communicated with the gas supply device, mixed gas is conveyed to the gas mixing unit, mixed gas flow pushes the mixing unit to rotate and further pushes the mixed gas to move towards the gas mixing unit, and the uniformly mixed gas is input into other process equipment through the gas exhaust unit; the structure is simple, the number of movable structures is small, all the movable structures can move spontaneously, and external power equipment is not needed; meanwhile, the gas tightness is good, the device can be used for mixing various gases, the application range is wide, the gas leakage risk is avoided, and the problems that gas mixing needs to be driven by a motor, the gas tightness of a mixing device is poor, multiple movable parts are likely to break down, and use is limited are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor process gas mixing devices, in particular to a gas mixing device and a semiconductor process system. Background Art

[0002] In modern industry and science and technology, gas mixing technology has a wide range of applications, such as welding, food processing, semiconductor manufacturing, environmental testing, pharmaceutical production, etc. These fields have extremely high requirements for the accuracy, uniformity and stability of gas mixing.

[0003] Chinese utility model patent CN220610097U discloses a gas mixing device, comprising a housing, a plurality of connecting pipes extending through the side walls of the housing, a first mixing assembly for mixing gases rotating within the housing, a second mixing assembly for further mixing gases within the housing, and a plurality of outlet pipes at the bottom of the housing. During use, different gases are first connected to the connecting pipes on the housing through the pipes so that the gases can enter the housing. A rotary motor is then turned on to rotate, which drives a rotating rod and a plurality of rotating plates mounted on the rotating rod to rotate. The rotating plates rotate to turbulently affect the different gases entering the housing and allow the different gases to be fully mixed. A stirring motor is then turned on to rotate, which drives a stirring rod at its output end and a plurality of stirring plates mounted on the stirring rod to rotate. The stirring rod rotates, further mixing the gases passing through the stirring rod. Finally, the mixed gases in the housing are discharged through the connection to the outlet pipe.

[0004] While the mixing device described in the aforementioned patent is capable of mixing gases to a certain extent, it still presents several practical challenges. First, the gas mixing method relies solely on the stirring of optional blades driven by an electric motor, resulting in poor airtightness. Second, the excessive number of moving parts increases the likelihood of device failure. Furthermore, the device cannot be used in ultra-clean semiconductor pipelines or for mixing flammable, explosive, toxic, hazardous, or corrosive gases. Furthermore, it cannot provide real-time information on ventilation status.

[0005] There is no effective solution to the problems in the existing technology, such as gas mixing requiring motor drive, poor air tightness of the mixing device, many moving parts prone to failure, limited use, and inability to reflect ventilation status. Utility Model Content

[0006] The purpose of the utility model is to address the deficiencies in the prior art and provide a gas mixing device and a semiconductor process system to solve the problems existing in the related art, such as the need for motor drive for gas mixing, poor air tightness of the mixing device, many moving parts prone to failure, limited use, and inability to reflect ventilation status.

[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0008] The first aspect of the present invention is to provide a gas mixing device, comprising:

[0009] A gas mixing unit, used for gas mixing;

[0010] an air intake unit, the air intake unit being disposed inside the gas mixing unit, the first end of the air intake unit being disposed at the first end of the gas mixing unit and being in communication with the gas supply device, the second end of the air intake unit being disposed near the second end inside the gas mixing unit, and being configured to obtain mixed gas from the gas supply device and supply the mixed gas to the gas mixing unit;

[0011] a mixing unit, the mixing unit being arranged at the second end of the interior of the gas mixing unit and being arranged close to the second end of the gas inlet unit, and being configured to rotate under the action of the mixed gas supplied by the gas inlet unit to perform secondary mixing on the mixed gas;

[0012] An exhaust unit is provided at the second end of the gas mixing unit and is connected to other process equipment for supplying mixed gas to the other process equipment.

[0013] In some embodiments, the gas mixing unit includes:

[0014] a shell element, wherein the air intake unit and the mixing unit are provided inside the shell element for providing secondary mixing of the gas;

[0015] a first air intake element, which is disposed at a first end of the shell element and is in communication with the air intake unit and a gas supply device, respectively, and is used to supply a mixed gas to the air intake unit;

[0016] A first exhaust element is provided at the first end of the shell element and is communicated with the exhaust unit for supplying the mixed gas to the exhaust unit.

[0017] In some embodiments, the air intake unit includes:

[0018] a second air intake element, the second air intake element being disposed inside the air mixing unit, the first end of the second air intake element being disposed at the first end of the air mixing unit and being in communication with a gas supply device, for obtaining mixed gas from the gas supply device;

[0019] A third air intake element is arranged at an angle, a first end of the third air intake element is connected to the second end of the second air intake element, and a second end of the third air intake element is arranged close to the second end of the gas mixing unit, for obtaining mixed gas from the gas mixing unit and supplying mixed gas to the mixing unit.

[0020] In some embodiments, the mixing unit comprises:

[0021] a first supporting element, the first supporting element being disposed at a second end inside the gas mixing unit;

[0022] A plurality of blade elements are rotatably arranged at the end of the first supporting element and arranged near the second end of the air inlet unit, and are used to rotate under the action of the mixed gas to perform secondary mixing on the mixed gas.

[0023] In some embodiments, the exhaust unit includes:

[0024] The second exhaust element is arranged at the second end of the gas mixing unit and is connected to other process equipment for supplying mixed gas to other supply equipment.

[0025] In some embodiments, the gas mixing device further comprises:

[0026] The diversion unit is arranged at the second end of the air inlet unit and is used to divert the mixed gas.

[0027] In some embodiments, the diversion unit includes:

[0028] a base element, the base element being disposed at the second end of the air inlet unit;

[0029] A plurality of diverter elements are distributed on the base element and are used to divert the mixed gas.

[0030] In some embodiments, the gas mixing device further comprises:

[0031] A plurality of first flow guiding units are arranged inside the gas mixing unit and downstream of the mixing unit, and are used to guide the secondary mixed gas in a first direction.

[0032] In some embodiments, the first flow guiding unit includes:

[0033] a second supporting element, the second supporting element being disposed inside the gas mixing unit;

[0034] A plurality of first flow guiding elements are distributed on the second supporting element and are used to guide the secondary mixed mixed gas in a first direction.

[0035] In some embodiments, the gas mixing device further comprises:

[0036] A plurality of second flow guiding units are arranged inside the gas mixing unit and located upstream and / or downstream of the plurality of first flow guiding units, and are used to guide the secondary mixed gas in a second direction, wherein the second direction is opposite to the first direction.

[0037] In some embodiments, the second flow guiding unit includes:

[0038] a third supporting element, the third supporting element being disposed inside the gas mixing unit and located upstream and / or downstream of the first flow guiding unit;

[0039] A plurality of second flow-guiding elements are distributed on the third supporting element and are used to guide the secondary mixed mixed gas in a second direction.

[0040] In some embodiments, the gas mixing device further comprises:

[0041] An energy conversion unit is provided outside the gas mixing unit and connected to the mixing unit, and is used for converting the kinetic energy generated by the mixing unit into electrical energy under the action of the mixing unit.

[0042] In some embodiments, the gas mixing device further comprises:

[0043] An indicating unit is provided outside the gas mixing unit and connected to the energy conversion unit for indicating.

[0044] A second aspect of the present invention is to provide a semiconductor process system, comprising:

[0045] A gas mixing device as described in any one of the first aspects.

[0046] The present invention adopts the above technical solution, and compared with the prior art, has the following technical effects:

[0047] The utility model provides a gas mixing device and a semiconductor process system, which utilize an air intake unit to be connected with a gas supply device and transport the mixed gas to the gas mixing unit, the mixed air flow drives the mixing unit to rotate, and then drives the mixed gas to move toward the gas mixing unit, and the evenly mixed mixed gas is input into other process equipment through the exhaust unit; the structure is simple, with few active structures, and both can move spontaneously without the aid of external power equipment; at the same time, it has good air tightness and no risk of gas leakage, which solves the problems that gas mixing requires motor drive, the mixing device has poor air tightness, many active parts are prone to failure, and the use is limited; and a diversion unit is provided to make the gas output uniformly, and the first guide unit and the second guide unit are tilted in opposite directions and are evenly distributed in the gas mixing unit, so as to promote the diffusion of the mixed gas and avoid the accumulation of the mixed gas; at the same time, an energy conversion unit and an indication unit are provided, and the kinetic energy of the gas mixing unit is converted into electrical energy so that the indication unit can indicate, thereby solving the problem of not being able to respond to the ventilation status. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Figure 1 is a schematic diagram of a gas mixing device according to an embodiment of the present invention (1);

[0049] Figure 2 is a schematic diagram of a gas mixing unit according to an embodiment of the present utility model;

[0050] Figure 3 is a schematic diagram of an air intake unit according to an embodiment of the present utility model;

[0051] Figure 4 is a schematic diagram of a mixing unit according to an embodiment of the present utility model;

[0052] Figure 5 is a schematic diagram of an exhaust unit according to an embodiment of the present utility model;

[0053] Figure 6 is a schematic diagram of a gas mixing device according to an embodiment of the present invention (II);

[0054] Figure 7 is a schematic diagram of a diversion unit according to an embodiment of the present utility model;

[0055] Figure 8 is a schematic diagram of a gas mixing device according to an embodiment of the present invention (III);

[0056] Figure 9 is a schematic diagram of a first flow guide unit according to an embodiment of the present utility model;

[0057] Figure 10 is a schematic diagram of a gas mixing device according to an embodiment of the present utility model (four);

[0058] Figure 11is a schematic diagram of a second flow guide unit according to an embodiment of the present utility model;

[0059] Figure 12 is a schematic diagram of a gas mixing device according to an embodiment of the present utility model (V);

[0060] Figure 13 is a schematic diagram of a gas mixing device according to an embodiment of the present utility model (six);

[0061] Figure 14 Schematic diagram of a gas mixing device according to an embodiment of the present invention (VII).

[0062] The accompanying drawings are as follows:

[0063] 10. Gas mixing unit; 11. Shell element; 12. First air intake element; 13. First air exhaust element;

[0064] 20. Air intake unit; 21. Second air intake component; 22. Third air intake component;

[0065] 30. Mixing unit; 31. First supporting element; 32. Blade element;

[0066] 40. Exhaust unit; 41. Second exhaust element;

[0067] 50. Diverter unit; 51. Base element; 52. Diverter element;

[0068] 60. First guide unit; 61. Second support element; 62. First guide element;

[0069] 70. Second guide unit; 71. Third support element; 72. Second guide element;

[0070] 80. Energy conversion unit;

[0071] 90. Indication unit. DETAILED DESCRIPTION

[0072] In order to make the purpose, technical solutions and advantages of this application more clearly understood, the present application is described and illustrated below in conjunction with the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application. Based on the embodiments provided in this application, all other embodiments obtained by ordinary technicians in this field without making any creative work are within the scope of protection of this application.

[0073] Obviously, the drawings described below are merely examples or embodiments of the present application. Those skilled in the art can, without inventive effort, apply the present application to other similar scenarios based on these drawings. Furthermore, it is also understood that, although the effort involved in such a development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, changes in design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as an insufficiency of the content disclosed in this application.

[0074] References to "embodiments" in this application mean that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it refer to independent or alternative embodiments that are mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described in this application may be combined with other embodiments unless there is a conflict.

[0075] Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by persons of ordinary skill in the art to which this application belongs. The terms "a," "an," "an," "the," and similar expressions used herein do not denote limitations on quantity and may refer to either the singular or the plural. The terms "comprise," "include," "have," and any variations thereof, used herein, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or elements (units) is not limited to the listed steps or elements but may also include steps or elements not listed, or may include other steps or elements inherent to the process, method, product, or apparatus. The terms "connected," "connected," "coupled," and similar expressions used herein are not limited to physical or mechanical connections but may include electrical connections, whether direct or indirect. As used herein, "plurality" means two or more. "And / or" describes an association between associated objects, indicating that three possible relationships exist. For example, "A and / or B" may mean: A exists alone; A and B exist simultaneously; or B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific order for the objects.

[0076] Example 1

[0077] This embodiment relates to the gas mixing device of the present utility model.

[0078] An illustrative embodiment of the present invention is as follows: Figure 1 As shown, a gas mixing device includes a gas mixing unit 10, an air intake unit 20, a mixing unit 30, and an exhaust unit 40. The gas mixing unit 10 is used for gas mixing; the air intake unit 20 is arranged inside the gas mixing unit 10, the first end of the gas intake unit 20 is arranged at the first end of the gas mixing unit 10 and is connected to the gas supply device, and the second end of the gas intake unit 20 is arranged near the second end inside the gas mixing unit 10, for obtaining mixed gas from the gas supply device and supplying the mixed gas to the gas mixing unit 10; the mixing unit 30 is arranged at the second end inside the gas mixing unit 10 and is arranged near the second end of the gas intake unit 20, for rotating under the action of the mixed gas supplied by the gas intake unit 20 to perform secondary mixing on the mixed gas; the exhaust unit 40 is arranged at the second end of the gas mixing unit 10 and is connected to other process equipment, for supplying mixed gas to other process equipment.

[0079] like Figure 2 As shown, the gas mixing unit 10 includes a shell element 11, a first gas inlet element 12, and a first gas exhaust element 13. The shell element 11 is internally provided with an gas inlet unit 20 and a mixing unit 30 for secondary gas mixing. The first gas inlet element 12 is disposed at a first end of the shell element 11 and is in communication with the gas inlet unit 20 and the gas supply device, respectively, for supplying mixed gas to the gas inlet unit 20. The first gas exhaust element 13 is disposed at a first end of the shell element 11 and is in communication with the gas exhaust unit 40, for supplying mixed gas to the gas exhaust unit 40.

[0080] In some embodiments, the shell element 11 is an air storage tank or an air storage box.

[0081] The first air inlet element 12 is disposed through the side wall of the shell element 11 .

[0082] The size of the first air inlet element 12 matches that of the shell element 11. Generally, the radial size (such as outer diameter) of the first air inlet element 12 is smaller than the radial size (such as outer diameter, length, width) of the cross section of the shell element 11 in which it is located.

[0083] In some embodiments, the first air inlet component 12 is an air inlet.

[0084] The first exhaust element 13 is disposed through the side wall of the shell element 11 .

[0085] The size of the first exhaust element 13 matches that of the shell element 11. Generally, the radial size (eg, outer diameter) of the first exhaust element 13 is smaller than the radial size (eg, outer diameter, length, width) of the cross section of the shell element 11 in which it is located.

[0086] In some embodiments, the first exhaust element 13 is an exhaust port.

[0087] like Figure 3 As shown, the air intake unit 20 includes a second air intake component 21 and a third air intake component 22. The second air intake component 21 is disposed inside the air mixing unit 10, with a first end of the second air intake component 21 disposed at the first end of the air mixing unit 10 and in communication with the gas supply device for obtaining mixed gas from the gas supply device; the third air intake component 22 is disposed at an angle, with a first end of the third air intake component 22 connected to the second end of the second air intake component 21, and a second end of the third air intake component 22 disposed near the second end of the air mixing unit 10 for obtaining mixed gas from the air mixing unit 10 and supplying the mixed gas to the mixing unit 30.

[0088] Specifically, the second air intake component 21 is disposed inside the shell component 11 and communicates with the first air intake component 12 .

[0089] The second air intake element 21 and the first air intake element 12 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to bolt connection.

[0090] The dimensions of the second air inlet element 21 match those of the shell element 11. Generally, the radial dimensions (e.g., outer diameter, length, and width) of the second air inlet element 21 are smaller than the radial dimensions (e.g., outer diameter, length, and width) of the cross section of the shell element 11 in which the second air inlet element 21 is located, and the axial dimensions (e.g., height and length) of the second air inlet element 21 are smaller than the axial dimensions (e.g., height) of the shell element 11.

[0091] The size of the second air intake element 21 matches the size of the first air intake element 12. Generally, the radial size (such as outer diameter, length, width) of the second air intake element 21 is not less than the radial size (such as outer diameter, length, width) of the first air intake element 12.

[0092] In some embodiments, the second air intake component 21 is a first air intake pipe.

[0093] The inclination angle between the third air inlet element 22 and the second air inlet element 21 is A, wherein 90°<A<180°. Preferably, 120°≤A≤150°.

[0094] The third air intake element 22 and the second air intake element 21 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding; the detachable connection includes but is not limited to bolt connection and clamping.

[0095] The size of the third air inlet element 22 matches the size of the second air inlet element 21. Generally, the radial size (such as the outer diameter) of the third air inlet element 22 is equal to the radial size (such as the outer diameter) of the second air inlet element 21.

[0096] The size of the third air inlet element 22 matches the size of the shell element 11. Generally, the sum of the axial dimensions (such as height and length) of the third air inlet element 22 and the second air inlet element 21 is smaller than the axial dimension (such as height) of the shell element 11.

[0097] In some embodiments, the third air intake component 22 is a second air intake pipe.

[0098] like Figure 4 As shown, the mixing unit 30 includes a first support element 31 and a plurality of blade elements 32. The first support element 31 is disposed at the second end of the interior of the gas mixing unit 10; the plurality of blade elements 32 are rotatably disposed at the end of the first support element 31 and are disposed near the second end of the air intake unit 20, and are configured to rotate under the action of the mixed gas to perform secondary mixing on the mixed gas.

[0099] Specifically, the first support element 31 is connected to the shell element 11 and is located inside the shell element 11 ; a plurality of blade elements 32 are disposed near the third air inlet element 22 .

[0100] The first support element 31 and the shell element 11 are connected in a fixed connection or a detachable connection, wherein the fixed connection includes but is not limited to welding; the detachable connection includes but is not limited to bolt connection.

[0101] The size of the first support element 31 matches the size of the shell element 11. Generally, the radial size (such as outer diameter) of the first support element 31 is smaller than the radial size (such as inner diameter, length, width) of the cross section of the shell element 11 in which it is located.

[0102] In some embodiments, the first support element 31 includes a first support rod and a second support rod. The top end of the first support rod is connected to the shell element 11; the top end of the second support rod is connected to the bottom end of the first support rod. The bottom end of the second support rod is provided with a plurality of blade elements 32, which are arranged obliquely with respect to the first support rod.

[0103] The inclination angle between the second support rod and the first support rod is B. 90°<B<180°. Preferably, 120°≤B≤150°.

[0104] Generally, the tilt angle B is equal to the tilt angle A.

[0105] The plurality of blade elements 32 are distributed around the first support element 31 as a central axis.

[0106] The size of the blade elements 32 matches the size of the first support element 31. Generally, the radial size (such as the outer diameter) of the cross section formed by the plurality of blade elements 32 is greater than the radial size (such as the outer diameter) of the first support element 31.

[0107] The dimensions of the blade elements 32 match those of the shell element 11. Generally, the radial dimensions (such as outer diameter) of the cross section formed by the plurality of blade elements 32 are smaller than the radial dimensions (such as inner diameter, length, width) of the shell element 11.

[0108] In some of these embodiments, the blade element 32 is a blade.

[0109] like Figure 5 As shown, the exhaust unit 40 includes a second exhaust component 41. The second exhaust component 41 is disposed at the second end of the gas mixing unit 10 and is connected to other process equipment for supplying mixed gas to other supply equipment.

[0110] Specifically, the second exhaust element 41 is connected to the first exhaust element 13 .

[0111] The second exhaust element 41 and the first exhaust element 13 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to bolt connection.

[0112] The size of the second exhaust element 41 matches the size of the first exhaust element 13. Generally, the radial size (eg, outer diameter) of the second exhaust element 41 is not smaller than the radial size (eg, outer diameter) of the first exhaust element 13.

[0113] The size of the second exhaust element 41 matches the size of the shell element 11. Generally, the radial size (such as outer diameter) of the second exhaust element 41 is smaller than the radial size (such as outer diameter, length, width) of the cross section of the shell element 11 in which it is located.

[0114] In some embodiments, the second exhaust component 41 is an exhaust pipe.

[0115] The use method of this utility model:

[0116] The gas supply device delivers the mixed gas to the second gas inlet element 21 through the first gas inlet element 12, and the mixed gas is output to the plurality of blade elements 32 by the third gas inlet element 22. The airflow drives the blade elements 32 to rotate relative to the first support element 31, thereby driving the mixed gas flow to flow downwardly of the shell element 11, and is output to other process equipment through the first exhaust element 13 and the second exhaust element 41.

[0117] The technical effects of the utility model are as follows:

[0118] The air intake unit is connected to the gas supply device, and the mixed gas is transported to the gas mixing unit. The mixed air flow drives the mixing unit to rotate, and then drives the mixed gas to move toward the gas mixing unit. The evenly mixed mixed gas is input into other process equipment through the exhaust unit. The structure is simple, with few moving structures, and can move spontaneously without the aid of external power equipment. At the same time, it has good air tightness and can be used for mixing multiple gases. It has a wide range of uses and no risk of gas leakage, which solves the problems of gas mixing requiring motor drive, poor air tightness of the mixing device, many moving parts prone to failure, and limited use.

[0119] Example 2

[0120] This embodiment is a variation of embodiment 1.

[0121] like Figure 6 As shown, the gas mixing device further includes a flow dividing unit 50. The flow dividing unit 50 is provided at the second end of the air inlet unit 20 and is used to divide the mixed gas.

[0122] like Figure 7 As shown, the flow diversion unit 50 includes a base element 51 and a plurality of flow diversion elements 52. The base element 51 is disposed at the second end of the air inlet unit 20; the plurality of flow diversion elements 52 are distributed on the base element 51 for diverting the mixed gas.

[0123] Specifically, the base element 51 is disposed at the second end of the third air inlet element 22 and communicates with the third air inlet element 22 .

[0124] The base element 51 and the third air inlet element 22 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to welding and integral molding; the detachable connection includes but is not limited to threaded connection and clamping.

[0125] The size of the base element 51 matches the size of the third air inlet element 22. Generally, the radial size (eg, outer diameter) of the connecting end of the base element 51 is not less than the radial size (eg, outer diameter) of the third air inlet element 22.

[0126] In some embodiments, the base element 51 is a connection base.

[0127] A plurality of diverter elements 52 are distributed in an array along the top of the base element 51 .

[0128] The size of the diverter element 52 matches the size of the base element 51. Generally, the radial size (such as the outer diameter) of the diverter element 52 is smaller than the radial size (such as the outer diameter) of the second end of the base element 51.

[0129] In some embodiments, the diverter element 52 is a diverter hole.

[0130] The method of using this embodiment is as follows:

[0131] The mixed gas is input into the base element 51 through the third gas inlet element 22 and flows evenly to the plurality of blade elements 32 through the plurality of flow diversion elements 52 .

[0132] The other usage methods are exactly the same as those in Example 1 and are not described here in detail.

[0133] The technical effects of this embodiment are as follows:

[0134] By setting up the diversion unit, the mixed gas can be output evenly, thereby enhancing the mixing uniformity of the gas.

[0135] Example 3

[0136] This embodiment is a variation of Embodiment 1 and Embodiment 2.

[0137] like Figure 8 As shown, the gas mixing device further includes a plurality of first flow guiding units 60. The plurality of first flow guiding units 60 are disposed inside the gas mixing unit 10 and downstream of the mixing unit 30, and are used to guide the secondary mixed gas in a first direction.

[0138] Specifically, a plurality of first air guiding units 60 are distributed inside the shell element 11 .

[0139] The plurality of first air guiding units 60 are arranged at intervals along the length direction (or width direction) and / or height direction of the shell element 11 .

[0140] The first air guide units 60 are arranged in an array within the shell element 11. Specifically, the first air guide units 60 are arranged in a rows and b columns, where a ≥ 1, b ≥ 1, and a*b ≥ 2. This arrangement can be one column with multiple rows, one row with multiple columns, or multiple columns with multiple rows.

[0141] like Figure 9 As shown, the first flow guiding unit 60 includes a second support element 61 and a plurality of first flow guiding elements 62. The second support element 61 is disposed inside the gas mixing unit 10; the plurality of first flow guiding elements 62 are distributed around the second support element 61 for guiding the secondary mixed gas in a first direction.

[0142] Specifically, the second supporting element 61 is disposed inside the shell element 11 , and both ends of the second supporting element 61 are respectively connected to the shell element 11 .

[0143] The second support element 61 is connected to the shell element 11 in a fixed connection or a detachable connection, wherein the fixed connection includes but is not limited to welding; the detachable connection includes but is not limited to bolt connection.

[0144] The dimensions of the second support element 61 match those of the shell element 11. Generally, the radial dimension (e.g., outer diameter) of the second support element 61 is smaller than the radial dimension (e.g., outer diameter) of the cross section of the shell element 11 where its end portion is located, and the length of the second support element 61 is equal to the axial dimension (e.g., width, length) of the shell element 11.

[0145] In some embodiments, the second supporting element 61 is a second supporting rod.

[0146] In some embodiments, the first air guiding element 62 is arrow-shaped.

[0147] A plurality of first flow guiding elements 62 are distributed at intervals along the axial direction of the second supporting element 61 .

[0148] The first flow-guiding element 62 and the second support element 61 are connected in a fixed connection or a detachable connection, wherein the fixed connection includes but is not limited to welding; the detachable connection includes but is not limited to bolt connection.

[0149] The dimensions of the first flow-guiding element 62 match those of the second support element 61. Generally, the radial dimensions (e.g., outer diameter, length, width) of the first flow-guiding element 62 are larger than the radial dimensions (e.g., outer diameter) of the second support element 61, and the thickness of the first flow-guiding element 62 is smaller than the length of the second support element 61.

[0150] In some embodiments, the first guide element 62 is a first guide vane.

[0151] The method of using this embodiment is as follows:

[0152] The airflow drives the blade element 32 to rotate relative to the first support element 31 , thereby driving the mixed airflow to flow downwardly of the shell element 11 . After being guided by the first guide element 62 , the mixed airflow is evenly output to other process equipment through the first exhaust element 13 and the second exhaust element 41 .

[0153] The technical effects of this embodiment are as follows:

[0154] The first flow guide unit is provided to promote the diffusion of the mixed gas, so that the gas is evenly distributed in the entire gas mixing unit, thereby solving the problem that the gas is easily accumulated above the tank body.

[0155] Example 4

[0156] This embodiment is a variation of the third embodiment.

[0157] like Figure 10As shown, the gas mixing device further includes a plurality of second flow guiding units 70. The plurality of second flow guiding units 70 are disposed inside the gas mixing unit 10 and are located upstream and / or downstream of the plurality of first flow guiding units 60, and are configured to guide the secondary mixed gas in a second direction, wherein the second direction is opposite to the first direction.

[0158] Specifically, a plurality of second air guiding units 70 are distributed inside the shell element 11 .

[0159] The plurality of second air guiding units 70 are arranged at intervals along the length direction (or width direction) and / or height direction of the shell element 11 .

[0160] The second air guide units 70 are arranged in an array within the shell element 11. Specifically, the second air guide units 70 are arranged in c rows and d columns, where c ≥ 1, d ≥ 1, and c*d ≥ 2. This arrangement can be one column with multiple rows, one row with multiple columns, or multiple columns with multiple rows.

[0161] Generally, a plurality of first air guide units 60 form at least one row, and a plurality of second air guide units 70 form at least one row. The number of rows (a) formed by the plurality of first air guide units 60 matches the number of rows (c) formed by the plurality of second air guide units 70. Generally, a>c, a=c, and a<c. For example, there may be two rows of first air guide units 60 and one row of second air guide units 70, or two rows of first air guide units 60 and two rows of second air guide units 70, or two rows of first air guide units 60 and three rows of second air guide units 70.

[0162] Generally, a plurality of first air guide units 60 form at least one row, and a plurality of second air guide units 70 form at least one row. The number of rows (b) formed by the plurality of first air guide units 60 matches the number of rows (d) formed by the plurality of second air guide units 70. Generally, b>d, b=d, or b<d. For example, there may be two rows of first air guide units 60 and one row of second air guide units 70, or two rows of first air guide units 60 and two rows of second air guide units 70, or two rows of first air guide units 60 and three rows of second air guide units 70.

[0163] When the number of rows of the first air guiding units 60 is different from the number of rows of the second air guiding units 70 , a plurality of first air guiding units 60 and a plurality of second air guiding units 70 are arranged in an alternating manner.

[0164] like Figure 11 、 Figure 12As shown, the second flow guiding unit 70 includes a third support element 71 and a plurality of second flow guiding elements 72. The third support element 71 is disposed inside the gas mixing unit 10 and is located upstream and / or downstream of the first flow guiding unit 60; the plurality of second flow guiding elements 72 are distributed around the third support element 71 to guide the secondary mixed gas in a second direction.

[0165] Specifically, the third supporting element 71 is disposed inside the shell element 11 , and both ends of the third supporting element 71 are respectively connected to the shell element 11 .

[0166] The third support element 71 is connected to the shell element 11 in a fixed connection or a detachable connection, wherein the fixed connection includes but is not limited to welding; the detachable connection includes but is not limited to bolt connection.

[0167] The dimensions of the third support element 71 match those of the shell element 11. Generally, the radial dimension (e.g., outer diameter) of the third support element 71 is smaller than the radial dimension (e.g., outer diameter) of the cross section of the shell element 11 where its end portion is located, and the length of the third support element 71 is equal to the axial dimension (e.g., width, length) of the shell element 11.

[0168] The size of the third support element 71 matches the size of the second support element 61. Generally, the radial size (such as the outer diameter) of the third support element 71 is equal to the radial size (such as the outer diameter) of the second support element 61, and the length of the third support element 71 is equal to the length of the second support element 61.

[0169] In some embodiments, the third supporting element 71 is a third supporting rod.

[0170] In some embodiments, the second air guiding element 72 is arrow-shaped.

[0171] A plurality of second flow guiding elements 72 are distributed at intervals along the axial direction of the third supporting element 71 .

[0172] The second flow-guiding element 72 and the third support element 71 are connected in a fixed connection or a detachable connection, wherein the fixed connection includes but is not limited to welding; the detachable connection includes but is not limited to bolt connection.

[0173] The dimensions of the second flow-guiding element 72 match those of the third support element 71. Generally, the radial dimensions (e.g., outer diameter, length, width) of the second flow-guiding element 72 are larger than the radial dimensions (e.g., outer diameter) of the third support element 71, and the thickness of the second flow-guiding element 72 is smaller than the length of the third support element 71.

[0174] The dimensions of the second flow-guiding element 72 match those of the first flow-guiding element 62. Generally, the radial dimensions (e.g., outer diameter, length, and width) of the second flow-guiding element 72 are equal to the radial dimensions (e.g., outer diameter, length, and width) of the first flow-guiding element 62, and the axial dimensions (e.g., length, height, and thickness) of the second flow-guiding element 72 are equal to the axial dimensions (e.g., length, height, and thickness) of the first flow-guiding element 62.

[0175] The number of second flow guiding elements 72 in each second flow guiding unit 70 matches the number of first flow guiding elements 62 in each first flow guiding unit 60. Generally, the number of second flow guiding elements 72 can be equal to the number of first flow guiding elements 62, the number of second flow guiding elements 72 can be greater than the number of first flow guiding elements 62, or the number of second flow guiding elements 72 can be less than the number of first flow guiding elements 62.

[0176] In some embodiments, the second guide element 72 is a second guide vane.

[0177] The method of using this embodiment is as follows:

[0178] The airflow drives the blade element 32 to rotate relative to the first support element 31, thereby driving the mixed airflow to flow downwardly of the shell element 11. After passing through the first guide element 62 and the second guide element 72, the mixed airflow is evenly distributed in the shell element 11. Under the push of the blade element 32, the mixed airflow is evenly output to the first exhaust element 13 and the second exhaust element 41 to other process equipment.

[0179] The technical effects of this embodiment are as follows:

[0180] By setting up a first guide unit and a second guide unit to guide the mixed gas in the gas mixing unit, the diffusion of the mixed gas is promoted, and the guide direction of the second guide unit is opposite to the guide direction of the first guide unit, which further promotes the gas to be evenly distributed in the entire gas mixing unit, thereby solving the problem of gas easily accumulating above the tank body.

[0181] Example 5

[0182] This embodiment is a variation of Embodiments 1 to 4.

[0183] like Figure 13 As shown, the gas mixing device further includes an energy conversion unit 80. The energy conversion unit 80 is disposed outside the gas mixing unit 10 and connected to the mixing unit 30, and is configured to convert the kinetic energy generated by the mixing unit 30 into electrical energy.

[0184] Specifically, the energy conversion unit 80 is disposed outside the shell element 11 and connected to the first support element 31 , and is configured to convert kinetic energy generated by the rotation of the blade elements 32 under the action of the blade elements 32 into electrical energy.

[0185] The energy conversion unit 80 is connected to the shell element 11 in a detachable manner, wherein the detachable connection manner includes but is not limited to bolt connection.

[0186] The size of the energy conversion unit 80 matches the size of the shell element 11. Generally, the radial size (such as outer diameter, length, width) of the energy conversion unit 80 is smaller than the radial size (such as outer diameter, length, width) of the cross section of the shell element 11 in which it is located.

[0187] In some embodiments, the energy conversion unit 80 includes, but is not limited to, a generator.

[0188] Furthermore, if Figure 14 As shown, the gas mixing device further includes an indication unit 90. The indication unit 90 is disposed outside the gas mixing unit 10 and connected to the energy conversion unit 80 for indication.

[0189] Specifically, the indicating unit 90 is disposed outside the housing element 11 and is connected to the energy conversion unit 80 .

[0190] The indicating unit 90 is connected to the housing element 11 in a detachable manner, wherein the detachable connection manner includes but is not limited to a bolt connection.

[0191] The size of the indicator unit 90 matches the size of the shell element 11. Generally, the radial size (such as outer diameter, length, width) of the indicator unit 90 is smaller than the radial size (such as outer diameter, length, width) of the cross section of the shell element 11 in which it is located.

[0192] In some embodiments, the indicating unit 90 includes but is not limited to an indicator light.

[0193] The method of using this embodiment is as follows:

[0194] The energy conversion unit 80 converts the kinetic energy of the rotation of the blade element 32 into electrical energy;

[0195] When the blade element 32 rotates, the indicating unit 90 indicates due to being energized;

[0196] When the blade element 32 stops rotating, the indicating unit 90 does not indicate.

[0197] The technical effects of this embodiment are as follows:

[0198] By setting up an energy conversion unit, the kinetic energy generated by the mixing unit can be converted into electrical energy so that the indicating unit can indicate, which can not only reflect the ventilation status in the mixing unit in real time, but also save energy and solve the problem of not being able to reflect the ventilation status.

[0199] Example 6

[0200] This embodiment relates to the semiconductor process system of the present utility model.

[0201] An exemplary embodiment of the present invention is a semiconductor process system, comprising the gas mixing device according to any one of embodiments 1 to 5, wherein the gas mixing device is in communication with the process equipment.

[0202] Specifically, the exhaust unit 40 of the gas mixing device is in communication with other process equipment.

[0203] More specifically, the second exhaust element 41 is in communication with other process equipment.

[0204] In some embodiments, the process equipment includes but is not limited to chemical vapor deposition (CVD) equipment, plasma enhanced chemical vapor deposition (PECVD) equipment, dry etching equipment, and ion implantation equipment.

[0205] The above description is only a preferred embodiment of the present invention and does not limit the implementation method and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A gas mixing device, characterized in that: include: A gas mixing unit, used for gas mixing; an air intake unit, the air intake unit being disposed inside the gas mixing unit, the first end of the air intake unit being disposed at the first end of the gas mixing unit and being in communication with the gas supply device, the second end of the air intake unit being disposed near the second end inside the gas mixing unit, and being configured to obtain mixed gas from the gas supply device and supply the mixed gas to the gas mixing unit; a mixing unit, the mixing unit being arranged at the second end of the interior of the gas mixing unit and being arranged close to the second end of the gas inlet unit, and being configured to rotate under the action of the mixed gas supplied by the gas inlet unit to perform secondary mixing on the mixed gas; An exhaust unit is provided at the second end of the gas mixing unit.

2. The gas mixing device according to claim 1, characterized in that: The gas mixing unit comprises: a shell element, wherein the air intake unit and the mixing unit are provided inside the shell element for providing secondary mixing of the gas; a first air intake element, which is disposed at a first end of the shell element and is in communication with the air intake unit and a gas supply device, respectively, and is used to supply a mixed gas to the air intake unit; A first exhaust element is provided at the first end of the shell element and is communicated with the exhaust unit for supplying the mixed gas to the exhaust unit.

3. The gas mixing device according to claim 1, characterized in that The air intake unit comprises: a second air intake element, the second air intake element being disposed inside the air mixing unit, the first end of the second air intake element being disposed at the first end of the air mixing unit and being in communication with a gas supply device, for obtaining mixed gas from the gas supply device; A third air intake element is arranged at an angle, a first end of the third air intake element is connected to the second end of the second air intake element, and a second end of the third air intake element is arranged close to the second end of the gas mixing unit, for obtaining mixed gas from the gas mixing unit and supplying mixed gas to the mixing unit.

4. The gas mixing device according to claim 1, characterized in that The mixing unit comprises: a first supporting element, the first supporting element being disposed at a second end inside the gas mixing unit; A plurality of blade elements are rotatably arranged at the end of the first supporting element and arranged near the second end of the air inlet unit, and are used to rotate under the action of the mixed gas to perform secondary mixing on the mixed gas.

5. The gas mixing device according to claim 1, characterized in that: The exhaust unit comprises: A second exhaust component is provided at the second end of the gas mixing unit.

6. The gas mixing device according to any one of claims 1 to 5, characterized in that: Also includes: A diversion unit, which is provided at the second end of the air inlet unit and is used to divert the mixed gas; and / or a plurality of first flow guiding units, each of which is disposed inside the gas mixing unit and downstream of the mixing unit, and is configured to guide the secondary mixed gas in a first direction; and / or An energy conversion unit is provided outside the gas mixing unit and connected to the mixing unit, and is used for converting the kinetic energy generated by the mixing unit into electrical energy under the action of the mixing unit.

7. The gas mixing device according to claim 6, characterized in that: The diversion unit comprises: a base element, the base element being disposed at the second end of the air inlet unit; A plurality of diverter elements, wherein the diverter elements are distributed on the base element and are used to divert the mixed gas; and / or The first flow guiding unit includes: a second supporting element, the second supporting element being disposed inside the gas mixing unit; A plurality of first flow guiding elements are distributed on the second supporting element and are used to guide the secondary mixed mixed gas in a first direction.

8. The gas mixing device according to claim 6, characterized in that: Also includes: a plurality of second flow guiding units, each of which is disposed inside the gas mixing unit and located upstream and / or downstream of the plurality of first flow guiding units, and is configured to guide the secondary mixed gas in a second direction, wherein the second direction is opposite to the first direction; and / or An indicating unit is provided outside the gas mixing unit and connected to the energy conversion unit for indicating.

9. The gas mixing device according to claim 8, characterized in that: The second flow guiding unit includes: a third supporting element, the third supporting element being disposed inside the gas mixing unit and located upstream and / or downstream of the first flow guiding unit; A plurality of second flow-guiding elements are distributed on the third supporting element and are used to guide the secondary mixed mixed gas in a second direction.

10. A semiconductor process system, characterized in that: include: The gas mixing device according to any one of claims 1 to 9.

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