Spraying clamp for electrostatic chuck for semiconductor

Abstract

The utility model relates to the technical field of spraying clamps, and discloses a spraying clamp for an electrostatic chuck for a semiconductor, which comprises a workbench, a barrier component, an air bag, a connecting column, a clamping block, a sliding rail, a ventilation pipe, a fan and the electrostatic chuck. At the moment, a fan is started, external air can be sucked into a mounting pipe by the fan and then transmitted into an air bag through a ventilation pipe, and the air in the air bag is gradually expanded after being increased, so that a connecting column and a clamping block are pushed to move forwards to abut against the periphery of the part, and the situation that paint is sprayed on the workbench in the spraying process can be prevented; and the top area of the electrostatic chuck is smaller than the occupied area of the part, so that the paint can be prevented from falling on the surface of the chuck to pollute and damage the chuck.

Description

Technical Field

[0001] The utility model relates to the technical field of spraying fixtures, in particular to a spraying fixture used for an electrostatic chuck for semiconductors. Background Art

[0002] The spraying fixture can provide a stable and reliable support platform to ensure that the position and posture of the sprayed object remain unchanged during the spraying process. By using the fixture, the sprayed object can be prevented from moving, deforming or being damaged during the spraying process, thereby improving the quality and efficiency of the spraying.

[0003] Although traditional spraying fixtures for electrostatic chucks for semiconductors can provide a stable and reliable support platform, some paint will inevitably fall onto the workbench and chuck during the paint spraying process. Not only is it difficult to clean, but if it falls on the chuck, it will also cause contamination and damage to the chuck. Utility Model Content

[0004] In order to solve the problems existing in the background technology, the utility model provides a spraying fixture for an electrostatic chuck for semiconductors that can prevent materials from falling onto a workbench and an electrostatic chuck during the spraying process.

[0005] In response to the problems in the prior art, the utility model provides a spraying fixture for an electrostatic suction cup for semiconductors, comprising a workbench, the barrier assembly being fixedly mounted on the workbench, the barrier assembly comprising a mounting frame, an airbag, a connecting column, a clamping block, a slide rail, a ventilation pipe, a support block, a mounting tube, a fan and a screen, the outer wall of the airbag being fixedly connected to one end of the ventilation pipe and one end of the connecting pipe, one end of the connecting column being fixedly connected to the inner wall of the airbag, one side of the clamping block being fixedly connected to the other end of the connecting column, multiple groups of the slide rails being fixedly mounted on the workbench, a group of clamping blocks being slidably connected to the slide rails, one end of the ventilation pipe being fixedly connected to the outer wall of the airbag and being fixedly connected to the mounting frame, the fan being mounted inside the mounting tube, the bottom of the electrostatic suction cup being fixedly connected to the upper end of the slide rail, and the top area of the electrostatic suction cup being smaller than the area of the semiconductor part.

[0006] Specifically, the other end of the ventilation pipe is fixedly connected to one end of the mounting pipe, two groups of support blocks are fixedly installed on the outer wall of the ventilation pipe close to the mounting pipe, the support blocks are fixedly connected to the lower end of the workbench, and the other end of the mounting pipe is fixedly installed with a group of screens, which are located at the lower end of the fan.

[0007] Specifically, a set of mounting frames are fixedly installed on the workbench, and the mounting frames are located on the periphery of the airbag. The mounting frames are fixedly connected to the connecting pipe, and the other end of the connecting pipe is fixedly connected to the air inlet of the electric air outlet valve, and the air outlet of the electric air outlet valve is fixedly connected to one end of the air outlet pipe.

[0008] Specifically, a group of material boxes are fixedly installed on the workbench, a group of pumps are fixedly installed on the material boxes, a feed port is opened on the material box, the feed port is located on one side of the pump, the discharge port of the pump is fixedly connected to one end of the spray pipe, and multiple groups of supporting legs are fixedly installed on the bottom of the workbench.

[0009] Beneficial effects of the utility model:

[0010] (1) The utility model is a spraying fixture for an electrostatic suction cup for semiconductors. When a semiconductor part is placed on it, the part will be adsorbed and fixed. At this time, the fan is started, and the fan will suck the external air into the inside of the installation tube, and then transmit it to the inside of the airbag through the ventilation pipe. When the gas in the airbag increases, it will gradually expand, thereby pushing the connecting column and the clamping block to move forward, thereby supporting the parts around, which can prevent the paint from being sprayed on the workbench during the spraying process. In addition, the top area of the electrostatic suction cup is smaller than the area occupied by the part, which can prevent the paint from falling on the surface of the suction cup and causing pollution and damage to it. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0013] Figure 2 It is a top view of the overall structure of the utility model;

[0014] Figure 3 This is a bottom elevation view of the overall structure of the present invention;

[0015] Figure 4 for Figure 3 Enlarged view of point A in the middle.

[0016] In the figure: 1. Workbench; 110. Support foot; 111. Material box; 112. Pump; 113. Spray pipe; 2. Barrier assembly; 210. Mounting frame; 211. Air bag; 212. Connecting column; 213. Clamping block; 214. Slide rail; 215. Ventilation pipe; 216. Support block; 217. Mounting pipe; 218. Fan; 219. Screen; 3. Electric exhaust valve; 310. Connecting pipe; 311. Exhaust pipe. DETAILED DESCRIPTION

[0017] In order to make the technical methods, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0018] like Figure 1-4 As shown, in response to the problems in the prior art, the utility model provides a spraying fixture for an electrostatic chuck for semiconductors, comprising a workbench 1, wherein the barrier assembly 2 is fixedly mounted on the workbench 1, wherein the barrier assembly 2 includes a mounting frame 210, an air bag 211, a connecting column 212, a clamping block 213, a slide rail 214, a ventilation pipe 215, a support block 216, a mounting pipe 217, a fan 218, and a screen 219. One end of the ventilation pipe 215 and one end of the connecting pipe 310 are fixedly connected to the outer wall of the air bag 211, and one end of the connecting column 212 is fixedly mounted on the outer wall of the air bag 211. One end of the ventilation pipe 215 is fixedly connected to the inner wall of the airbag 211, one side of the clamping block 213 is fixedly connected to the other end of the connecting column 212, and multiple groups of the slide rails 214 are fixedly installed on the workbench 1. A group of clamping blocks 213 are slidably connected to the slide rail 214. One end of the ventilation pipe 215 is fixedly connected to the outer wall of the airbag 211 and is fixedly connected to the mounting frame 210. The fan 218 is installed inside the mounting tube 217. The bottom of the electrostatic suction cup 114 is fixedly connected to the upper end of the slide rail 214, and the top area of the electrostatic suction cup 114 is smaller than the area of the semiconductor part.

[0019] Preferably, the other end of the ventilation pipe 215 is fixedly connected to one end of the mounting pipe 217, and two groups of support blocks 216 are fixedly installed on the outer wall of the ventilation pipe 215 close to the mounting pipe 217, and the support block 216 is fixedly connected to the lower end of the workbench 1, and the other end of the mounting pipe 217 is fixedly installed with a group of screens 219, and the screens 219 are located at the lower end of the fan 218, and a group of mounting frames 210 are fixedly installed on the workbench 1, and the mounting frames 210 are located on the periphery of the airbag 211, and the mounting frames 210 and the connecting pipe 310 are fixedly connected, and the other end of the connecting pipe 310 is fixedly connected to the air inlet of the electric outlet valve 3, and the air outlet of the electric outlet valve 3 is fixedly connected to one end of the outlet pipe 311.

[0020] Preferably, a group of material boxes 111 are fixedly installed on the workbench 1, and a group of pumps 112 are fixedly installed on the material box 111. A feed port is opened on the material box 111, and the feed port is located on one side of the pump 112. The discharge port of the pump 112 is fixedly connected to one end of the spray pipe 113, and multiple groups of supporting legs 110 are fixedly installed on the bottom of the workbench 1.

[0021] (1) In the present invention, after placing the semiconductor part on the electrostatic suction cup 114, the electrostatic suction cup 114 is started, which will adsorb and fix the part. At this time, the fan 218 is started, and the fan 218 will suck the external air into the inside of the mounting tube 217, and then transmit it to the inside of the air bag 211 through the ventilation pipe 215. When the gas in the air bag 211 increases, it will gradually expand, thereby pushing the connecting column 212 and the clamping block 213 to move forward, so as to press against the four sides of the part. The fan 218 is stopped, which can prevent the paint from being sprayed on the workbench 1 during the spraying process. In addition, the top area of the electrostatic suction cup 114 is smaller than the area occupied by the part, which can prevent the paint from falling on the electrostatic suction cup 114 and causing pollution and damage to it.

[0022] (2) In the present invention, the pump 112 is started, which draws the paint inside the material box 111 into the spray pipe 113 and sprays it onto the parts. When the spraying is completed, the electric air outlet valve 3 is opened. At this time, the gas in the air bag 211 enters the air outlet pipe 311 from the connecting pipe 310, and is finally blown onto the parts, allowing the paint on the parts to dry quickly and speeding up work efficiency. A set of air inlet valves is installed in the ventilation pipe 215. When the parts are dried, the fan 218 is also started. Its rotation speed at this moment is lower than the rotation speed when the electric air outlet valve 3 is just closed, so as to ensure that there is a continuous flow of wind blowing out from the air outlet pipe 311, and at the same time ensure that the paint on the surface of the parts is dried, which is convenient and practical.

[0023] Working principle: First, place the semiconductor part on the electrostatic suction cup 114, then start the electrostatic suction cup 114, which will adsorb and fix the part. At this time, start the fan 218, and the fan 218 will suck the external air into the installation tube 217, and then transmit it to the inside of the air bag 211 through the ventilation pipe 215. When the gas in the air bag 211 increases, it will gradually expand, thereby pushing the connecting column 212 and the clamping block 213 to move forward, so as to press against the four sides of the part. Stop starting the fan 218, which can prevent the paint from being sprayed on the workbench 1 during the spraying process. The top area of the electrostatic suction cup 114 is smaller than the area occupied by the part, which can prevent the paint from falling on the electrostatic suction cup. 114, causing pollution and damage to it. At this time, start the pump 112, which will draw the paint inside the material box 111 into the spray pipe 113 and spray it on the parts. When the spraying is completed, open the electric air outlet valve 3. At this time, the gas in the airbag 211 will enter the air outlet pipe 311 from the connecting pipe 310, and finally blow onto the parts, allowing the paint on the parts to dry quickly and speed up work efficiency. A set of air inlet valves are installed in the ventilation pipe 215. When the parts are dried, the fan 218 will also start. Its rotation speed at this moment is lower than the rotation speed when the electric air outlet valve 3 is just closed, so as to ensure that there is a continuous flow of wind blowing out from the air outlet pipe 311, while ensuring that the paint on the surface of the parts is dried, which is convenient and practical.

[0024] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of protection claimed by the present invention.

Claims

1. A spraying fixture for an electrostatic chuck for a semiconductor, characterized in that: including a workbench (1); A barrier assembly (2), wherein the barrier assembly (2) is fixedly mounted on the workbench (1), and the barrier assembly (2) includes a mounting frame (210), an air bag (211), a connecting column (212), a clamping block (213), a slide rail (214), a ventilation pipe (215), a support block (216), a mounting pipe (217), a fan (218), and a screen (219); An airbag (211), one end of the ventilation pipe (215) and one end of the connecting pipe (310) being fixedly connected to the outer wall of the airbag (211); a connecting column (212), one end of which is fixedly connected to the inner wall of the airbag (211); A clamping block (213), one side of the clamping block (213) is fixedly connected to the other end of the connecting column (212); Slide rails (214), wherein a plurality of groups of the slide rails (214) are fixedly mounted on the workbench (1), and a group of clamping blocks (213) are slidably connected to the slide rails (214); a ventilation pipe (215), one end of which is fixedly connected to the outer wall of the airbag (211) and is also fixedly connected to the mounting frame (210); a fan (218), the fan (218) being mounted inside the mounting tube (217); An electrostatic chuck (114) has a bottom portion fixedly connected to an upper end of a slide rail (214), and a top area of the electrostatic chuck (114) is smaller than an area of a semiconductor component.

2. A spraying fixture for an electrostatic chuck for a semiconductor according to claim 1, characterized in that: The other end of the ventilation pipe (215) is fixedly connected to one end of the mounting pipe (217); two groups of support blocks (216) are fixedly installed on the outer wall of the ventilation pipe (215) near the mounting pipe (217); and the support blocks (216) are fixedly connected to the lower end of the workbench (1).

3. The spraying fixture for an electrostatic chuck for a semiconductor according to claim 2, characterized in that: A set of screens (219) is fixedly mounted on the other end of the mounting tube (217), and the screens (219) are located at the lower end of the fan (218).

4. The spraying fixture for an electrostatic chuck for a semiconductor according to claim 2, characterized in that: A set of mounting frames (210) are fixedly mounted on the workbench (1). The mounting frames (210) are located outside the airbag (211). The mounting frames (210) are fixedly connected to the connecting pipe (310).

5. The spraying fixture for an electrostatic chuck for a semiconductor according to claim 4, characterized in that: The other end of the connecting pipe (310) is fixedly connected to the air inlet of the electric air outlet valve (3), and the air outlet of the electric air outlet valve (3) is fixedly connected to one end of the air outlet pipe (311).

6. The spraying fixture for an electrostatic chuck for a semiconductor according to claim 2, characterized in that: A group of material boxes (111) are fixedly installed on the workbench (1), a group of pumps (112) are fixedly installed on the material boxes (111), a feed port is opened on the material box (111), and the feed port is located on one side of the pump (112), and the discharge port of the pump (112) is fixedly connected to one end of a spray pipe (113), and a plurality of support legs (110) are fixedly installed on the bottom of the workbench (1).

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