Cleaning equipment for quartz products

Abstract

The utility model relates to the technical field of quartz product cleaning, in particular to quartz product cleaning equipment which comprises a cleaning device, a rotating disc is installed in the cleaning device, a plurality of limiting grooves are formed in the upper end face of the rotating disc, and a containing disc is placed on the upper end face of the rotating disc. A limiting disc is installed in the cleaning device, a plurality of limiting holes matched with the limiting grooves are formed in the upper end face of the limiting disc in a penetrating mode, a plurality of quartz rods penetrate through the multiple limiting holes correspondingly, the lower end faces of the quartz rods are placed in a placing disc, the quartz rods are stably cleaned, then a rotating disc is rotated, and the quartz rods are placed in the placing disc; and secondly, two groups of electromagnetic plates are attracted to each other, so that the placing disc can move upwards, the quartz rods can be conveniently moved out of the cleaning device, and the effect that the quartz rods are conveniently taken out and placed is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz product cleaning, in particular to a quartz product cleaning device. Background Art

[0002] Quartz products mainly refer to a variety of products made of quartz glass materials, including quartz glass tubes, quartz glass rods, quartz glass sheets, quartz glass ingots, fused quartz glass tubes (furnace core tubes), fused quartz glass rods, quartz glass boats, quartz glass crucibles, etc.

[0003] Among them, quartz rods are the core components of semiconductor equipment and need to be polished and cleaned during the processing process.

[0004] At present, during the cleaning process of quartz rods, it is inconvenient to place the quartz rods to be cleaned in the cleaning device, and it is also inconvenient to take out the cleaned quartz rods. In addition, most of the cleaning is static, which reduces the cleaning effect. Therefore, it is necessary to propose a cleaning device for quartz products to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide a quartz product cleaning device, which has the characteristics of comprehensively cleaning multiple quartz rods, improving the cleaning effect, and facilitating the removal and placement of the quartz rods.

[0006] To achieve the above-mentioned objectives, the utility model provides the following technical solutions: a cleaning device for quartz products, comprising a cleaning device, a rotating disk installed inside the cleaning device, a plurality of limit slots provided on the upper end surface of the rotating disk, a placing disk placed on the upper end surface of the rotating disk, a motor fixedly connected to the output end of the rotating disk installed on the lower end surface of the cleaning device, a limit disk installed inside the cleaning device, a plurality of limit holes matching the limit slots provided on the upper end surface of the limit disk, a connecting rod installed between the upper end surface of the placing disk and the limit disk, sliding slots installed on the left and right sides of the cleaning device, the upper end surfaces of the two sliding slots are slidably connected to cylinders, and the output ends of the two cylinders are installed with horizontal plates, and electromagnetic plates that can attract each other are installed on the opposite side of the two horizontal plates and the left and right sides of the limit disk.

[0007] In order to clean the quartz rod in the cleaning device, as a preferred cleaning equipment for quartz products of the present invention, the upper end surface of the cleaning device is installed with a mounting cover, a plurality of branch pipes are installed inside the mounting cover, the upper end surface of the mounting cover is installed with a connecting pipe connected to the plurality of branch pipes, and the lower end surfaces of the plurality of branch pipes are connected to a plurality of nozzles.

[0008] In order to make the water contact with the quartz rod smoothly, as a preferred embodiment of the quartz product cleaning device of the present invention, the rotating disk, the placement disk and the limiting disk are all in a mesh structure.

[0009] In order to collect wastewater from cleaning quartz rods, as a preferred embodiment of the cleaning equipment for quartz products of the present invention, a liquid collecting chamber is installed on the lower end surface of the cleaning device, and a drain pipe is connected to the right side of the liquid collecting chamber.

[0010] In order to ensure stable rotation of the rotating disk, as a preferred embodiment of the cleaning device for quartz products of the present invention, a rotating groove is provided on the inner wall of the cleaning device, and a rotating block rotatably connected to the rotating groove is fixedly connected to the outer wall of the rotating disk.

[0011] In order to control the normal operation of the motor and the cylinder, as a preferred embodiment of the quartz product cleaning device of the present invention, a controller is installed on the left side of the liquid collecting chamber, and the motor and the cylinder are electrically connected to the controller.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0013] The utility model firstly allows a plurality of quartz rods to pass through a plurality of limiting holes respectively and places the lower end surfaces of the quartz rods in the placement tray, so that the quartz rods are stably cleaned, then the rotating tray is rotated, prompting the placement tray to drive the limiting tray to rotate via the connecting rod, thereby fully cleaning the plurality of quartz rods and improving the cleaning effect, and secondly, the two sets of electromagnetic plates are attracted to each other, thereby allowing the placement tray to move upward, making it easy to move the plurality of quartz rods out of the cleaning device, thereby achieving the effect of facilitating the removal and placement of the quartz rods. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is the overall structural diagram of the utility model;

[0015] Figure 2 This is an overall cross-sectional structural diagram of the utility model;

[0016] Figure 3 This is a structural diagram of the rotating disk of the present utility model.

[0017] In the figure: 1. Cleaning device; 101. Rotating groove; 2. Rotating disk; 201. Limiting groove; 202. Placing disk; 203. Rotating block; 204. Connecting rod; 205. Limiting disk; 206. Limiting hole; 207. Electromagnetic plate; 208. Motor; 3. Sliding groove; 301. Cylinder; 302. Horizontal plate; 4. Liquid collecting chamber; 401. Drain pipe; 5. Mounting cover; 501. Connecting pipe; 502. Branch pipe; 503. Nozzle. DETAILED DESCRIPTION

[0018] See also Figures 1 to 3, a cleaning device for quartz products, including a cleaning device 1, a rotating disk 2 is installed inside the cleaning device 1, and a plurality of limiting grooves 201 are opened on the upper end surface of the rotating disk 2, and a placing disk 202 is placed on the upper end surface of the rotating disk 2, and a motor 208 with an output end fixedly connected to the rotating disk 2 is installed on the lower end surface of the cleaning device 1, and a limiting disk 205 is installed inside the cleaning device 1, and a plurality of limiting holes 206 matching the limiting grooves 201 are opened on the upper end surface of the limiting disk 205, and a connecting rod 204 is installed between the upper end surface of the placing disk 202 and the limiting disk 205, and sliding grooves 3 are installed on the left and right sides of the cleaning device 1, and the upper end surfaces of the two sliding grooves 3 are slidably connected with cylinders 301, and the output ends of the two cylinders 301 are both installed with horizontal plates 302, and the opposite side of the two horizontal plates 302 and the left and right sides of the limiting disk 205 are installed with electromagnetic plates 207 that can attract each other.

[0019] In this embodiment: multiple quartz rods are respectively passed through multiple limiting holes 206 and the lower end surfaces of the quartz rods are placed in the placement tray 202. The quartz rods can be limited by the limiting tray 205, so that the quartz rods can be stably cleaned. Then the motor 208 is started, and the motor 208 drives the rotating disk 2 to rotate, prompting the placement tray 202 to drive the limiting tray 205 to rotate through the connecting rod 204, so that the multiple quartz rods can be fully cleaned and the cleaning effect is improved. Secondly, the cylinder 301 drives the horizontal plate 302 to move in the direction close to the cleaning device 1 until the left and right sets of electromagnetic plates 207 are attracted to each other, and then the cylinder 301 can push the limiting tray 205 to move upward, prompting the connecting rod 204 to drive the placement tray 202 to move upward, so as to facilitate the removal of multiple quartz rods from the cleaning device 1, thereby achieving the effect of facilitating the removal and placement of the quartz rods.

[0020] As a technical optimization solution of the present invention, the upper end surface of the cleaning device 1 is installed with a mounting cover 5, a plurality of branch pipes 502 are installed inside the mounting cover 5, a connecting pipe 501 connected to the plurality of branch pipes 502 is installed on the upper end surface of the mounting cover 5, and a plurality of nozzles 503 are connected to the lower end surfaces of the plurality of branch pipes 502.

[0021] In this embodiment: the mounting cover 5 is placed on the upper end surface of the cleaning device 1, and the connecting pipe 501 is connected to the external water source pipeline, and the external water source is sprayed out from the nozzle 503 through multiple branch pipes 5, thereby facilitating the cleaning of the quartz rod in the cleaning device 1.

[0022] As a technical optimization solution of the present invention, the rotating disk 2, the placement disk 202 and the limiting disk 205 all have a mesh structure.

[0023] In this embodiment, the rotating disk 2, the placing disk 202 and the limiting disk 205 are all in a mesh structure, so that water can smoothly contact the quartz rod.

[0024] As a technical optimization solution of the present invention, a liquid collecting chamber 4 is installed on the lower end surface of the cleaning device 1 , and the right side of the liquid collecting chamber 4 is connected to a drain pipe 401 .

[0025] In this embodiment, wastewater from cleaning the quartz rods can be collected through the liquid collecting chamber 4 , and the collected wastewater can be discharged through the drain pipe 401 .

[0026] As a technical optimization solution of the present invention, a rotation groove 101 is opened on the inner wall of the cleaning device 1, and a rotating block 203 rotatably connected to the rotation groove 101 is fixedly connected to the outer wall of the rotating disk 2.

[0027] In this embodiment, the rotating disk 2 can rotate stably by the cooperation between the rotating groove 101 and the rotating block 203 .

[0028] As a technical optimization solution of the present invention, a controller is installed on the left side of the liquid collecting chamber 4, and the motor 208 and the cylinder 301 are both electrically connected to the controller.

[0029] In this embodiment, the motor 208 and the cylinder 301 can be controlled by the controller to work normally.

[0030] Working principle: First, multiple quartz rods are respectively passed through multiple limiting holes 206 and the lower end surfaces of the quartz rods are placed in the placement plate 202. The quartz rods can be limited by the limiting plate 205 to ensure stable cleaning of the quartz rods. Then, the installation cover 5 is placed on the upper end surface of the cleaning device 1, and the connecting pipe 501 is connected to the external water source pipeline. The external water source is sprayed from the nozzle 503 through multiple branch pipes 502, thereby facilitating the cleaning of the quartz rods in the cleaning device 1. Then, the motor 208 is started to drive the rotating disk 2 to rotate. , prompting the placement plate 202 to drive the limit plate 205 to rotate through the connecting rod 204, thereby fully cleaning multiple quartz rods and improving the cleaning effect. Then, the cylinder 301 drives the horizontal plate 302 to move toward the cleaning device 1 until the left and right sets of electromagnetic plates 207 are attracted to each other, and then the cylinder 301 can push the limit plate 205 to move upward, prompting the connecting rod 204 to drive the placement plate 202 to move upward, thereby facilitating the removal of multiple quartz rods from the cleaning device 1, thereby achieving the effect of facilitating the removal and placement of the quartz rods.

[0031] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A quartz product cleaning device, comprising a cleaning device (1), characterized in that: A rotating disk (2) is installed inside the cleaning device (1), a plurality of limiting grooves (201) are provided on the upper end surface of the rotating disk (2), a placement disk (202) is placed on the upper end surface of the rotating disk (2), a motor (208) whose output end is fixedly connected to the rotating disk (2) is installed on the lower end surface of the cleaning device (1), a limiting disk (205) is installed inside the cleaning device (1), a plurality of limiting grooves (201) are provided on the upper end surface of the limiting disk (205) A hole (206) is formed, a connecting rod (204) is installed between the upper end surface of the placement plate (202) and the limiting plate (205), sliding grooves (3) are installed on the left and right sides of the cleaning device (1), the upper end surfaces of the two sliding grooves (3) are slidably connected to the cylinders (301), the output ends of the two cylinders (301) are installed with horizontal plates (302), and electromagnetic plates (207) that can attract each other are installed on the opposite side of the two horizontal plates (302) and the left and right sides of the limiting plate (205).

2. A quartz product cleaning device according to claim 1, characterized in that: The upper end surface of the cleaning device (1) is provided with a mounting cover (5), a plurality of branch pipes (502) are installed inside the mounting cover (5), a connecting pipe (501) connected to the plurality of branch pipes (502) is installed on the upper end surface of the mounting cover (5), and the lower end surfaces of the plurality of branch pipes (502) are connected to a plurality of nozzles (503).

3. The quartz product cleaning device according to claim 1, characterized in that: The rotating disk (2), the placing disk (202) and the limiting disk (205) all have a mesh structure.

4. The quartz product cleaning device according to claim 1, characterized in that: A liquid collecting chamber (4) is installed on the lower end surface of the cleaning device (1), and a drain pipe (401) is connected to the right side of the liquid collecting chamber (4).

5. The quartz product cleaning device according to claim 1, characterized in that: The inner wall of the cleaning device (1) is provided with a rotating groove (101), and the outer wall of the rotating disk (2) is fixedly connected with a rotating block (203) rotatably connected to the rotating groove (101).

6. A quartz product cleaning device according to claim 4, characterized in that: A controller is installed on the left side of the liquid collecting chamber (4), and the motor (208) and the cylinder (301) are both electrically connected to the controller.

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