Silicon rod orientation device

Abstract

The utility model discloses a silicon rod orientation device which comprises a base, a vertical frame and a lifting lead screw set, the vertical frame is arranged on the upper surface of the base, the lifting lead screw set is arranged in the vertical frame, an X-ray orientation head is arranged at the movable end of the lifting lead screw set, the silicon rod orientation device further comprises scissor lifting sets, a driving set and a lifting table, and the two scissor lifting sets are arranged on one side of the base; a driving group for providing power for the scissor lifting group is arranged on the front side of the base; through the arrangement of the tray and the moving wheels, a worker can conveniently push a silicon rod to the lifting bottom plate, so that the safety coefficient of feeding is improved, through the arrangement of the lifting table, the lifting bottom plate and the scissor lifting set, the tray can be lifted to a proper height, and through the arrangement of the rotating set, the rotating angle of the silicon rod can be adjusted, so that the safety coefficient of feeding is improved. Therefore, the silicon rod orientation efficiency is improved, and the safety coefficient is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a silicon rod orienting instrument. Background Art

[0002] Silicon rod orientation is an important step in semiconductor material processing. It involves accurately determining the crystal orientation of single crystal silicon rods to ensure the performance and quality of subsequent processing and applications.

[0003] When orienting existing large-sized silicon rods, the silicon rods are usually glued to a pallet, and the pallet is placed on the top plate by an electric lift hydraulic forklift. This method requires an electric lift hydraulic forklift to wait nearby, which increases the cost of silicon rod processing. If the worker drops the silicon rod from the pallet while lifting it to the appropriate position, it is likely to cause a safety hazard. Therefore, this application proposes a silicon rod orienting instrument to solve this problem. Summary of the Invention

[0004] The technical problem to be solved by the present application is to overcome the existing defects and provide a silicon rod orienting instrument that can effectively solve the problems in the background technology.

[0005] To achieve the above-mentioned objectives, the present application provides the following technical solutions: a silicon rod orienting instrument, comprising a base, a stand and a lifting screw group, wherein the upper surface of the base is provided with a stand, the interior of the stand is provided with a lifting screw group, the movable end of the lifting screw group is provided with an X-ray orientation head, and further comprising a scissors lifting group, a driving group and a lifting platform, two scissors lifting groups are provided on one side of the base, a driving group that provides power to the scissors lifting group is provided on the front side of the base, a lifting platform is provided on the upper surface of the scissors lifting group, one end of the lifting platform is connected to the lifting base plate by a connecting rod, two second guide rails are provided on the lifting base plate, a rotating group is slidably connected to the second guide rail through a slider, a tray is provided above the rotating group, silicon rods are provided on the upper surface of the tray, and moving wheels are provided on the lower surface of the tray.

[0006] Furthermore, it also includes a hydraulic cylinder, a pull block and a handle. The hydraulic cylinder is arranged on the vertical frame, the telescopic end of the hydraulic cylinder is provided with a pull block, the handle is provided below the pull block, and the handle is installed on the rotating group.

[0007] Furthermore, two first guide rails are provided on the upper surface of the base, and the first guide rails correspond to the second guide rails.

[0008] Furthermore, the rotating group is mainly composed of a support plate, a slewing bearing and a top plate. The support plate is arranged on the upper surface of the slider, the upper surface of the support plate is provided with a slewing bearing, and the upper surface of the slewing bearing is provided with a top plate.

[0009] Furthermore, the driving group is mainly composed of a driving motor, a rotating shaft, a first bevel gear, a second bevel gear and a screw rod. The driving motor is arranged on one side of the base. The power output end of the driving motor is provided with a rotating shaft. Two first bevel gears are provided on the outside of the rotating shaft. The first bevel gear is meshed with the second bevel gear. One end of the second bevel gear is connected to the screw rod through a rotating rod, and the outside of the screw rod is connected to the scissors lifting group.

[0010] Furthermore, a slope is provided at one end of the lifting base plate, two grooves are provided on the upper surface of the lifting base plate, a supporting plate is provided in the grooves, and one end of the supporting plate is connected to the scissors lifting group.

[0011] Compared with the existing technology: This application uses the setting of a tray and moving wheels to facilitate workers to push silicon rods onto the lifting base, thereby improving the safety factor of loading. The setting of the lifting platform, lifting base and scissor lifting group can lift the tray to a suitable height, and the setting of the rotation group can adjust the rotation angle of the silicon rod, thereby improving the orientation efficiency of the silicon rod and improving the safety factor. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is the first structural diagram of this application;

[0013] Figure 2 This is a second structural diagram of the present application;

[0014] Figure 3 This is a third structural diagram of the present application;

[0015] Figure 4 is a cross-sectional view of the drive group;

[0016] Figure 5 This is a side view of the application.

[0017] In the figure: 1 base, 2 stand, 4 lifting screw assembly, 5 X-ray orientation head, 6 hydraulic cylinder, 7 pull block, 8 first guide rail, 9 lifting platform, 10 ramp, 11 lifting bottom plate, 12 second guide rail, 13 tray, 14 moving wheel, 15 support plate, 16 scissor lifting group, 17 drive motor, 18 drive group, 19 support plate, 20 rotating shaft, 21 first bevel gear, 22 second bevel gear, 23 screw, 24 handle, 25 slewing bearing, 26 top plate. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application (for the convenience of description and understanding, the following is Figure 2All other embodiments obtained by persons of ordinary skill in the art without creative work shall fall within the scope of protection of this application.

[0019] See also Figure 1-5 The present application provides a technical solution for a silicon rod orienting instrument: a silicon rod orienting instrument, comprising a base 1, a stand 2 and a lifting screw group 4, the upper surface of the base 1 is provided with a stand 2, the interior of the stand 2 is provided with a lifting screw group 4, the movable end of the lifting screw group 4 is provided with an X-ray orientation head 5, and also includes a scissors lifting group 16, a driving group 18 and a lifting platform 9, two scissors lifting groups 16 are provided on one side of the base 1, a driving group 18 that provides power to the scissors lifting group 16 is provided on the front side of the base 1, a lifting platform 9 is provided on the upper surface of the scissors lifting group 16, one end of the lifting platform 9 is connected to the lifting bottom plate 11 through a connecting rod, two second guide rails 12 are provided on the lifting bottom plate 11, the second guide rails 12 are slidably connected to the rotating group through a slider, a tray 13 is provided above the rotating group, a silicon rod is provided on the upper surface of the tray 13, and a moving wheel 14 is provided on the lower surface of the tray 13.

[0020] The arrangement of the tray 13 and the moving wheels 14 facilitates workers in pushing the silicon rods onto the lifting base plate 11, thereby improving the safety factor of loading. The arrangement of the lifting platform 9, the lifting base plate 11 and the scissor lifting group 16 enables the tray 13 to be lifted to a suitable height. The arrangement of the rotating group enables the rotation angle of the silicon rods to be adjusted, thereby improving the orientation efficiency of the silicon rods and improving the safety factor.

[0021] Furthermore, it includes a hydraulic cylinder 6, a pull block 7 and a handle 24. The hydraulic cylinder 6 is arranged on the stand 2. The telescopic end of the hydraulic cylinder 6 is provided with a pull block 7. The handle 24 is provided below the pull block 7. The handle 24 is installed on the rotating group.

[0022] A groove is provided on the lower surface of the pulling block 7, and the lifting platform 9, the lifting base plate 11, the rotating group and the handle 24 are driven upward by the scissor lifting group 16, so that the handle 24 is stuck in the groove of the pulling block 7, so that the hydraulic cylinder 6 drives the rotating group, the tray 13, the silicon rod and the slider to move along the first guide rail 8 and the second guide rail 12.

[0023] Furthermore, two first guide rails 8 are provided on the upper surface of the base 1 , and the first guide rails 8 correspond to the second guide rails 12 , so that the slider drives the rotating group, the tray 13 and the silicon rods to move between the first guide rails 8 and the second guide rails 12 .

[0024] Furthermore, the rotating group is mainly composed of a support plate 15 , a slewing bearing 25 and a top plate 26 . The support plate 15 is arranged on the upper surface of the slider, the slewing bearing 25 is arranged on the upper surface of the support plate 15 , and the top plate 26 is arranged on the upper surface of the slewing bearing 25 .

[0025] The slewing bearing 25 can support the top plate 26 and the tray 13 and assist the top plate 26 and the tray 13 in rotating. The lower surface of the support plate 15 is connected to the slider by bolts, and both sides of the support plate 15 are arc-shaped.

[0026] Furthermore, the drive group 18 is mainly composed of a drive motor 17, a rotating shaft 20, a first bevel gear 21, a second bevel gear 22 and a screw rod 23. The drive motor 17 is arranged on one side of the base 1, and a rotating shaft 20 is provided at the power output end of the drive motor 17. Two first bevel gears 21 are provided on the outside of the rotating shaft 20. The first bevel gear 21 is meshed with the second bevel gear 22. One end of the second bevel gear 22 is connected to the screw rod 23 through a rotating rod, and the outside of the screw rod 23 is connected to the scissors lifting group 16.

[0027] Start the drive motor 17, and the rotating shaft 20 drives the two first bevel gears 21 to rotate, so that the second bevel gear 22 engaged with the first bevel gears 21 drives the screw rod 23 to rotate, so that the screw rod 23 provides power to the scissors lifting group 16 to perform the lifting operation.

[0028] Furthermore, a slope 10 is provided at one end of the lifting base plate 11 , and two grooves are provided on the upper surface of the lifting base plate 11 , in which a supporting plate 19 is provided, and one end of the supporting plate 19 is connected to the scissors lifting group 16 .

[0029] The rear end of the ramp 10 is flush with the support plate 19, making it convenient for workers to push the pallet 13 onto the pallet 19 so that the top plate 26 can lift the pallet 13, thereby lifting the silicon rod to a suitable height through the scissor lifting group 16, thereby facilitating the X-ray orientation head 5 to orient the silicon rod.

[0030] During use: stick the silicon rod on the tray 13, and push the tray 13 onto the tray 19 through the ramp 10, then start the drive motor 17, and the rotating shaft 20 drives the two first bevel gears 21 to rotate, so that the second bevel gear 22 engaged with the first bevel gear 21 drives the screw rod 23 to rotate, so that the screw rod 23 provides power to the scissor lifting group 16, and the scissor lifting group 16 drives the lifting platform 9, the lifting bottom plate 11, the rotating group and the handle 24 to move upward, so that the handle 24 is stuck in the groove of the pulling block 7, so that the hydraulic cylinder 6 drives the pulling block 7, the rotating group, the tray 13, the silicon rod and the slider from the second guide rail 12 to the first guide rail 8, and then adjusts the height of the X-ray orientation head 5 by the lifting screw rod group 4 to perform orientation operation on the silicon rod, and the setting of the slewing bearing 25 in the rotating group can assist the top plate 26 and the tray 13 to rotate, so as to complete the orientation operation.

[0031] After the orienting operation is completed, the hydraulic cylinder 6 drives the pulling block 7, the rotating group, the pallet 13, the silicon rod and the slider from the first guide rail 8 to the second guide rail 12, and then the driving group 18 drives the scissor lifting group 16, the rotating group and the pallet 13 to move downward for reset, so as to facilitate the workers to remove the pallet 13.

[0032] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A silicon rod orientation instrument, comprising a base (1), a stand (2) and a lifting screw assembly (4), wherein the upper surface of the base (1) is provided with the stand (2), the interior of the stand (2) is provided with the lifting screw assembly (4), and the movable end of the lifting screw assembly (4) is provided with an X-ray orientation head (5), characterized in that: The invention also includes a scissor lifting group (16), a driving group (18) and a lifting platform (9), wherein two scissor lifting groups (16) are provided on one side of the base (1), a driving group (18) for providing power to the scissor lifting groups (16) is provided on the front side of the base (1), a lifting platform (9) is provided on the upper surface of the scissor lifting group (16), one end of the lifting platform (9) is connected to the lifting base plate (11) through a connecting rod, two second guide rails (12) are provided on the lifting base plate (11), a rotating group is slidably connected to the second guide rail (12) through a slider, a tray (13) is provided above the rotating group, a silicon rod is provided on the upper surface of the tray (13), and a moving wheel (14) is provided on the lower surface of the tray (13).

2. The silicon rod orienting instrument according to claim 1, characterized in that: It also includes a hydraulic cylinder (6), a pull block (7) and a handle (24), wherein the hydraulic cylinder (6) is arranged on the stand (2), the pull block (7) is arranged at the telescopic end of the hydraulic cylinder (6), the handle (24) is arranged below the pull block (7), and the handle (24) is installed on the rotating group.

3. The silicon rod orienting instrument according to claim 1, characterized in that: Two first guide rails (8) are provided on the upper surface of the base (1), and the first guide rails (8) correspond to the second guide rails (12).

4. The silicon rod orienting instrument according to claim 1, wherein: The rotating group mainly consists of a support plate (15), a slewing bearing (25) and a top plate (26); the support plate (15) is arranged on the upper surface of the slider; the slewing bearing (25) is arranged on the upper surface of the support plate (15); and the top plate (26) is arranged on the upper surface of the slewing bearing (25).

5. The silicon rod orienting instrument according to claim 1, characterized in that: The driving group (18) mainly consists of a driving motor (17), a rotating shaft (20), a first bevel gear (21), a second bevel gear (22) and a screw rod (23). The driving motor (17) is arranged on one side of the base (1). The power output end of the driving motor (17) is provided with a rotating shaft (20). Two first bevel gears (21) are provided on the outside of the rotating shaft (20). The first bevel gears (21) are meshed with the second bevel gears (22). One end of the second bevel gear (22) is connected to the screw rod (23) through a rotating rod. The outside of the screw rod (23) is connected to the scissors lifting group (16).

6. The silicon rod orienting instrument according to claim 1, characterized in that: A slope (10) is provided at one end of the lifting base plate (11), and two grooves are provided on the upper surface of the lifting base plate (11). A supporting plate (19) is provided in the grooves, and one end of the supporting plate (19) is connected to the scissors lifting group (16).

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