Clamping device for material rack of PVD vacuum coating machine

Abstract

The utility model discloses a clamping device for a material rack of a PVD (Physical Vapor Deposition) vacuum coating machine, which comprises a coating machine main body and a bottom plate arranged in the coating machine main body, the annular positioning plate is connected to the upper surface of the bottom plate; the material rack main body is connected in the corresponding annular positioning plate above the bottom plate in a sliding manner; symmetrically arranged motors are arranged at the positions, corresponding to the bottom plate, in the coating machine body, the output ends of the motors are connected with rotating shafts, symmetrically arranged first gears are connected to the outer sides of the rotating shafts, and first racks are meshed with the positions, close to the bottom plate, of the outer sides of the first gears; according to the film plating machine, the springs are extruded to contract and store restoring force, the restoring force acts on the bottom plate and can tightly press the bottom plate, so that the bottom plate is clamped and fixed in the film plating machine main body, the bottom plate can be prevented from moving up and down, the stability of the bottom plate is improved, during specific use, clamping and fixing of the bottom plate and jacking of the material frame main body can be carried out synchronously, and the working efficiency is improved. Operation synchronism is improved, operation steps are reduced, and efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating fixtures, and in particular relates to a clamping device for a material rack of a PVD vacuum coating machine. Background Art

[0002] A PVD vacuum coater, or physical vapor deposition (PVD), is an advanced device that utilizes physical vapor deposition (PVD) technology to deposit thin films in an extremely high vacuum environment. Through evaporation or sputtering, it converts solid materials into gaseous atoms, molecules, or ions, which are then deposited on the substrate surface, forming a thin film with specialized properties. This equipment is widely used in a variety of fields, including electronics, healthcare, automotive, and aerospace, to enhance material hardness, corrosion resistance, and decorative effects.

[0003] The material rack of the PVD vacuum coating machine is a key component in the PVD vacuum coating machine. It is used to support and fix the material to be coated during the coating process. In order to ensure that the material rack maintains a precise position and posture in the vacuum chamber and prevent movement or tilting due to vibration, airflow or other external factors, which will cause the coating process to be unable to proceed smoothly and the stability of the coating quality cannot be guaranteed, the material rack needs to be clamped and fixed during coating.

[0004] In the current existing technology, when the coating work is carried out, in order to make the material fully and evenly heated, the material rack is rotated. The way to make the material rack rotate is through the cooperation of magnetic fluid. In order to make the material rack rotate, it is necessary to lift the material rack close to the magnetic fluid to achieve the purpose of rotation. A lifting mechanism needs to be set up to lift the material rack. The mechanism for clamping and fixing the material rack and the lifting mechanism are two independent mechanisms. During actual use, the two mechanisms need to be operated separately to clamp, fix and lift the material rack. The operation steps are numerous and cumbersome, which reduces efficiency. Utility Model Content

[0005] In order to solve the technical problem that when clamping, fixing and lifting a material rack, the operation steps are numerous and complicated, thereby reducing efficiency, the utility model provides a clamping device for a material rack of a PVD vacuum coating machine.

[0006] The purpose of the utility model can be achieved through the following technical solutions:

[0007] A clamping device for a material rack of a PVD vacuum coating machine, comprising a coating machine body,

[0008] A bottom plate is arranged in the coating machine body;

[0009] An annular positioning plate connected to the upper surface of the base plate;

[0010] The material rack body is slidably connected to the corresponding annular positioning plate above the bottom plate;

[0011] A symmetrically arranged motor is provided at a position corresponding to the bottom plate inside the coating machine body, the output end of the motor is connected to a rotating shaft, the outer side of the rotating shaft is connected to a symmetrically arranged first gear, the outer side of the first gear near the bottom plate is meshed with a first rack, the first rack is perpendicular to the horizontal plane, the middle part of the side of the first rack near the bottom plate is connected to a connecting plate, a pressure plate is provided below the connecting plate, the pressure plate is located above the bottom plate, and a spring is connected between the connecting plate and the pressure plate;

[0012] A second gear is connected between the outer side of the rotating shaft and the corresponding first gear, a second rack is meshed below the second gear, the second rack is parallel to the horizontal plane, and a lifting plate is connected to one end of the second rack close to the bottom plate.

[0013] Preferably, the first rack is T-shaped, and the second rack is T-shaped.

[0014] Preferably, a symmetrically arranged U-shaped limit plate is connected to the position corresponding to the first rack in the coating machine body, the first rack is slidably connected between the limit plates, and the end of the bottom plate close to the limit plate is connected to the limit block, and the limit block is slidably connected between the limit plates.

[0015] Preferably, a second T-shaped slide rail is connected to the position of the inner wall of the coating machine body corresponding to the second rack, and the second rack is slidably connected to the second T-shaped slide rail.

[0016] Preferably, the annular positioning plate is provided with symmetrically arranged movable grooves at positions corresponding to the lifting plate.

[0017] Preferably, an inclined surface is provided below the bottom plate, and an angle of 30° is formed between the inclined surface and the horizontal plane, and a chamfer of 30° is provided below the bottom plate.

[0018] Preferably, a plurality of evenly arranged balls are rollingly connected above the lifting plate.

[0019] Preferably, a positioning rod is connected below the connecting plate, the lower end of the positioning rod passes through the pressure plate, and a positioning groove is provided on the bottom plate corresponding to the position of the positioning rod, and the positioning rod is plugged into the positioning groove.

[0020] Beneficial effects of the utility model:

[0021] When the material rack body needs to be lifted up and the bottom plate needs to be fixed, the two motors are started at the same time. The motor drives the second gear to rotate in cooperation with the rotating shaft. The rotation of the second gear drives the second rack and the lifting plate to approach the bottom plate. After the lifting plate contacts the bottom plate and continues to move, the lifting plate will lift the bottom plate, so that the material rack body is close to the magnetic fluid, so that the magnetic fluid can drive the material rack body to rotate, so that the material can be evenly heated.

[0022] When the cam is in contact with the gear train, the first gear is pressed downwards to release the gear train, and the cam is pressed downwards to release the gear train, so that the cam can be fixed in the center of the gear train, thereby preventing the cam from moving up and down and thus improving the stability of the cam. When the cam is in contact with the gear train, the first gear is pressed downwards to release the gear train, thereby preventing the cam from moving up and down and thus improving the stability of the cam. When the cam is in contact with the gear train, the first gear is pressed downwards to release the gear train, thereby preventing the cam from moving up and down and thus improving the stability of the cam.

[0023] When coating, the requirements for the rotation speed of the material rack body are different depending on the material. When the material rack body is lifted, the closer the material rack body is to the magnetic fluid, the faster the material rack body rotates. The height of the material rack body is determined by the moving distance of the lifting plate. The closer the lifting plate is to the material rack body, the higher the material rack body is lifted, and the rotation speed of the material rack body will also become relatively faster. However, when the rotation speed of the material rack body becomes faster, the stability of the base plate will be reduced. When the second gear drives the lifting plate close to the material rack body, the first gear will synchronously drive the connecting plate to descend. Therefore, the closer the lifting plate is to the material rack body, the more the connecting plate descends. The more the connecting plate descends, the more extrusion force the spring receives, and the greater the restoring force acting on the base plate. This can improve the stability of the base plate and solve the problem of reducing the stability of the base plate after the rotation speed of the material rack body becomes faster. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 This is a three-dimensional diagram of a clamping device for a material rack of a PVD vacuum coating machine according to the present invention;

[0026] Figure 2 This is a top view of a clamping device for a material rack of a PVD vacuum coating machine according to the present invention;

[0027] Figure 3 This is a three-dimensional diagram of the first gear in the clamping device of the material rack of a PVD vacuum coating machine according to the present invention;

[0028] Figure 4 This is a three-dimensional diagram of the bottom plate of a clamping device of a material rack of a PVD vacuum coating machine according to the present invention;

[0029] Figure 5 This is a three-dimensional diagram of the main body of a material rack in a clamping device of a PVD vacuum coating machine material rack according to the present invention.

[0030] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0031] 1. Coating machine body; 2. Motor; 3. Spring; 4. Second gear; 5. Ball;

[0032] 11. Bottom plate; 110. T-shaped slide bar; 111. First T-shaped slide rail; 12. Annular positioning plate; 13. Material rack body; 14. Baffle;

[0033] 201, mounting plate; 21, rotating shaft; 22, first gear; 23, first rack; 24, limit plate; 25, connecting plate; 26, positioning rod; 27, positioning groove;

[0034] 31. Pressing plate; 32. Limiting block;

[0035] 41. Second rack; 42. Second T-shaped slide rail; 43. Lifting plate; 44. Movable groove; 45. Inclined surface. DETAILED DESCRIPTION

[0036] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0037] See also Figure 1 - Figure 5 As shown, a clamping device for a material rack of a PVD vacuum coating machine includes a coating machine body 1 , in which a bottom plate 11 is provided for supporting a material rack body 13 .

[0038] The lower surface of the base plate 11 is connected to a symmetrically arranged T-shaped slide bar 110, and the position corresponding to the T-shaped slide bar 110 in the coating machine body 1 is connected to a symmetrically arranged first T-shaped slide rail 111. The T-shaped slide bar 110 is slidably connected in the first T-shaped slide rail 111. The T-shaped slide bar 110 cooperates with the first T-shaped slide rail 111 to limit the movement direction of the base plate 11, so that the base plate 11 can only move horizontally in the coating machine body 1 and cannot rotate, thereby facilitating the delivery of the base plate 11 into the coating machine body 1, and it is also more convenient when the base plate 11 is fixed later.

[0039] An arc-shaped baffle 14 is connected to the position inside the coating machine corresponding to the bottom plate 11, and the baffle 14 is in contact with the outer side of the bottom plate 11. A magnet is provided inside the baffle 14 at a position corresponding to the bottom plate 11. After the bottom plate 11 enters the specified position inside the coating machine body 1, the baffle 14 will block the bottom plate 11, so that the bottom plate 11 cannot continue to enter. The magnet is used to adsorb the bottom plate 11 so that the bottom plate 11 will not continue to slide after entering the coating machine body 1, thereby facilitating the subsequent fixation of the bottom plate 11.

[0040] An annular positioning plate 12 is connected to the upper surface of the bottom plate 11 to limit the position of the material rack body 13 and prevent the material rack body 13 from shifting.

[0041] A material rack body 13 is slidably connected in a corresponding annular positioning plate 12 above the bottom plate 11 .

[0042] A symmetrically arranged motor 2 is provided inside the coating machine body 1 at a position corresponding to the bottom plate 11 , and an output end of the motor 2 is connected to a rotating shaft 21 , and the motor 2 is used to drive the rotating shaft 21 to rotate.

[0043] A mounting plate 201 is connected to the position of the motor 2 on the inner wall of the coating machine body 1 , and the motor 2 is mounted on the mounting plate 201 . The mounting plate 201 is used to support and fix the motor 2 .

[0044] A symmetrically arranged first gear 22 is connected to the outside of the rotating shaft 21. A first rack 23 is engaged with the outside of the first gear 22 near the bottom plate 11. The first rack 23 is perpendicular to the horizontal plane. By rotating the first gear 22, the first rack 23 can be raised or lowered.

[0045] The first rack 23 is T-shaped. This arrangement facilitates positioning of the first rack 23 .

[0046] A symmetrically arranged U-shaped limiting plate 24 is connected to the position corresponding to the first rack 23 in the coating machine body 1. The first rack 23 is slidably connected between the limiting plates 24. The limiting plates 24 are used to limit the position of the first rack 23 so that the first rack 23 can only move up and down to prevent the first rack 23 from shifting.

[0047] A connecting plate 25 is connected to the middle of one side of the first rack 23 close to the bottom plate 11 . A pressing plate 31 is provided below the connecting plate 25 and is located above the bottom plate 11 . The pressing plate 31 is used to press the bottom plate 11 to improve the stability of the bottom plate 11 .

[0048] One end of the bottom plate 11 close to the limit plate 24 is connected to the limit block 32, and the limit block 32 is slidably connected between the limit plates 24. The limit block 32 is used to limit the position of the pressure plate 31 so that the pressure plate 31 can only rise or fall, preventing the pressure plate 31 from shifting.

[0049] A spring 3 is connected between the connecting plate 25 and the pressing plate 31 for resetting the pressing plate 31 .

[0050] A positioning rod 26 is connected to the bottom of the connecting plate 25. The lower end of the positioning rod 26 passes through the pressure plate 31. A positioning groove 27 is opened on the bottom plate 11 corresponding to the position of the positioning rod 26. The positioning rod 26 is plugged into the positioning groove 27. By lowering the positioning rod 26 and inserting it into the positioning groove 27, the bottom plate 11 can be positioned to enhance the stability of the bottom plate 11.

[0051] A second gear 4 is connected between the outer side of the rotating shaft 21 and the corresponding first gear 22 , and a second rack 41 is engaged below the second gear 4 . The second rack 41 is parallel to the horizontal plane, and the second rack 41 can be moved horizontally by rotating the second gear 4 .

[0052] The second rack 41 is T-shaped, and this arrangement facilitates position limiting of the second rack 41 .

[0053] A second T-shaped slide rail 42 is connected to the position of the second rack 41 on the inner wall of the coating machine body 1. The second rack 41 is slidably connected to the second T-shaped slide rail 42. The second T-shaped slide rail 42 is used to limit the position of the second rack 41 so that the second rack 41 can only move horizontally to prevent the second rack 41 from shifting.

[0054] One end of the second rack 41 close to the bottom plate 11 is connected to a lifting plate 43 for lifting the bottom plate 11 so that the material rack body 13 is close to the magnetic fluid, so that the magnetic fluid can drive the material rack body 13 to rotate.

[0055] The lifting plate 43 forms an angle of 30° with the horizontal plane. With this arrangement, after the lifting plate 43 approaches the bottom plate 11 , the bottom plate 11 can be gradually lifted up.

[0056] The annular positioning plate 12 is provided with symmetrically arranged movable grooves 44 at positions corresponding to the lifting plate 43 , which are used to lift the lifting plate 43 closer to the bottom plate 11 .

[0057] An inclined surface 45 is provided under the bottom plate 11, and an angle of 30° is formed between the inclined surface 45 and the horizontal plane. By providing a chamfer under the bottom plate 11, after the lifting plate 43 contacts the bottom plate 11, the lifting plate 43 can lift the bottom plate 11 more conveniently with the cooperation of the chamfer.

[0058] There are multiple evenly arranged balls 5 rollingly connected above the lifting plate 43. By setting the balls 5, when the lifting plate 43 contacts the bottom plate 11 to lift the bottom plate 11, the friction between the bottom plate 11 and the lifting plate 43 can be reduced, so that the bottom plate 11 can be lifted more quickly and smoothly. At the same time, when the magnetic fluid drives the material rack body 13 to rotate, it will also be smoother.

[0059] Working principle:

[0060] When the material rack body 13 needs to be lifted and the bottom plate 11 needs to be fixed, the two motors 2 are started at the same time. The motor 2 drives the second gear 4 to rotate in cooperation with the rotating shaft 21. The rotation of the second gear 4 drives the second rack 41 and the lifting plate 43 to approach the bottom plate 11. After the lifting plate 43 contacts the bottom plate 11 and continues to move, the lifting plate 43 will lift the bottom plate 11, so that the material rack body 13 is close to the magnetic fluid, so that the magnetic fluid can drive the material rack body 13 to rotate, so that the material can be evenly heated.

[0061] The motor 2, in cooperation with the rotating shaft 21, will synchronously drive the first gear 22 to rotate, and the rotation of the first gear 22 will drive the first rack 23 to descend, and the descent of the first rack 23 will drive the connecting plate 25, the spring 3, the positioning rod 26 and the pressure plate 31 to descend. After the positioning rod 26 descends, it will be inserted into the positioning groove 27, thereby preliminarily fixing the bottom plate 11 to prevent the bottom plate 11 from shifting or rotating. After the pressure plate 31 descends, it will contact and fit with the upper surface of the bottom plate 11. After the pressure plate 31 descends to a position that fits with the upper surface of the bottom plate 11, the spring 3 will no longer continue to descend. The spring 3 is squeezed and contracts, and the restoring force acts on the bottom plate 11, which can press the bottom plate 11 tightly, thereby clamping the bottom plate 11 in the coating machine body 1, preventing the bottom plate 11 from moving up and down, and improving the stability of the bottom plate 11. During specific use, the bottom plate 11 can be clamped and fixed and the material rack body 13 can be lifted up simultaneously, which improves the synchronization of the operation, reduces the operating steps, and improves efficiency.

[0062] It is worth noting here that, when coating, the requirements for the rotation speed of the material rack body 13 are different depending on the material. When the material rack body 13 is lifted, the closer the material rack body 13 is to the magnetic fluid, the faster the material rack body 13 rotates. The height to which the material rack body 13 is lifted is determined by the moving distance of the lifting plate 43. The closer the lifting plate 43 is to the material rack body 13, the higher the material rack body 13 is lifted, and thus the rotation speed of the material rack body 13 will also be relatively faster. However, the rotation of the material rack body 13 When the speed becomes faster, the stability of the bottom plate 11 will be reduced. When the second gear 4 drives the lifting plate 43 to approach the material rack body 13, the first gear 22 will synchronously drive the connecting plate 25 to descend. Therefore, the closer the lifting plate 43 is to the material rack body 13, the more the connecting plate 25 descends. The more the connecting plate 25 descends, the more the extrusion force exerted on the spring 3, and the greater the restoring force acting on the bottom plate 11, thereby improving the stability of the bottom plate 11 and solving the problem of reducing the stability of the bottom plate 11 when the rotation speed of the material rack body 13 becomes faster.

[0063] Throughout the specification, references to terms such as "one embodiment," "example," or "specific example" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0064] The above content is merely an example and explanation of the structure of the present utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined by the claims, they should fall within the scope of protection of the present utility model.

Claims

1. A clamping device for a material rack of a PVD vacuum coating machine, comprising a coating machine body (1), A bottom plate (11) is arranged in the coating machine body (1); An annular positioning plate (12) connected to the upper surface of the base plate (11); The material rack body (13) is slidably connected to the corresponding annular positioning plate (12) above the bottom plate (11); Its characteristics are: A symmetrically arranged motor (2) is provided inside the coating machine body (1) at a position corresponding to the bottom plate (11); the output end of the motor (2) is connected to a rotating shaft (21); the outer side of the rotating shaft (21) is connected to a symmetrically arranged first gear (22); the outer side of the first gear (22) is meshed with a first rack (23) near the bottom plate (11); the first rack (23) is perpendicular to the horizontal plane; a connecting plate (25) is connected to the middle of one side of the first rack (23) near the bottom plate (11); a pressure plate (31) is provided below the connecting plate (25); the pressure plate (31) is located above the bottom plate (11); a spring (3) is connected between the connecting plate (25) and the pressure plate (31); A second gear (4) is connected between the outer side of the rotating shaft (21) and the corresponding first gear (22), a second rack (41) is meshed below the second gear (4), the second rack (41) is parallel to the horizontal plane, and a lifting plate (43) is connected to one end of the second rack (41) close to the bottom plate (11).

2. The clamping device for a material rack of a PVD vacuum coating machine according to claim 1, characterized in that: The first rack (23) is T-shaped, and the second rack (41) is T-shaped.

3. The clamping device for a material rack of a PVD vacuum coating machine according to claim 2, characterized in that: A symmetrically arranged U-shaped limiting plate (24) is connected to the position corresponding to the first rack (23) in the coating machine body (1); the first rack (23) is slidably connected between the limiting plates (24); one end of the bottom plate (11) close to the limiting plate (24) is connected to a limiting block (32); and the limiting block (32) is slidably connected between the limiting plates (24).

4. The clamping device for a material rack of a PVD vacuum coating machine according to claim 3, characterized in that: A second T-shaped slide rail (42) is connected to a position of the inner wall of the coating machine body (1) corresponding to the second rack (41), and the second rack (41) is slidably connected to the second T-shaped slide rail (42).

5. The clamping device for a material rack of a PVD vacuum coating machine according to claim 4, characterized in that: The annular positioning plate (12) is provided with symmetrically arranged movable grooves (44) at positions corresponding to the lifting plate (43).

6. The clamping device for a material rack of a PVD vacuum coating machine according to claim 5, characterized in that: The jacking plate (43) forms an angle of 30° with the horizontal plane, and an inclined surface (45) is provided below the bottom plate (11), and the inclined surface (45) forms an angle of 30° with the horizontal plane.

7. The clamping device for a material rack of a PVD vacuum coating machine according to claim 6, characterized in that: A plurality of evenly arranged balls (5) are rollingly connected above the lifting plate (43).

8. The clamping device for a material rack of a PVD vacuum coating machine according to claim 7, characterized in that: A positioning rod (26) is connected below the connecting plate (25), the lower end of the positioning rod (26) passes through the pressing plate (31), and a positioning groove (27) is provided on the bottom plate (11) at a position corresponding to the positioning rod (26), and the positioning rod (26) and the positioning groove (27) are plugged and matched.

Images