Crucible upper and single crystal furnace

Abstract

The utility model discloses a crucible upper and a single crystal furnace, the crucible upper comprises a crucible upper body, the crucible upper body comprises an inner layer component and an outer layer component; wherein the inner-layer component comprises a first end and a second end in the axial direction of the inner-layer component, the first end of the inner-layer component is arranged in the outer-layer component, and the inner wall of the inner-layer component is enclosed to form an accommodating space with a first opening at the second end; the second end of the inner layer component is exposed out of the outer layer component. The top end of the crucible upper body is of a single-layer structure, and the bottom end of the crucible upper body is of a double-layer structure, so that on one hand, the heat conductivity of the crucible upper is better; on the other hand, the weight of the crucible upper can be reduced, and the cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal pulling, in particular to a crucible rim and a single crystal furnace. Background Art

[0002] With economic development, photovoltaic power generation, as a form of green energy, is gaining increasing attention and development. As a fundamental material for photovoltaic power generation, single-crystal silicon wafers enjoy a broad market. Currently, when preparing single-crystal silicon wafers, a crucible is required to support the quartz crucible containing the silicon material for crystal pulling. Therefore, the crucible has become an essential component in the production of single-crystal silicon wafers.

[0003] Currently, the crucible rim is relatively thick, resulting in increased weight, high cost, and poor thermal conductivity. Furthermore, in existing crystal pulling heat fields, the main heater bakes the bottom of the rim, causing high temperatures and severe corrosion in the quartz crucible. This, in turn, introduces a high level of oxygen into the melt during crystal growth, impacting crystal quality. Utility Model Content

[0004] In view of the above problems, embodiments of the present utility model are proposed to provide a crucible rim and a single crystal furnace that can overcome the above problems or partially solve the above problems.

[0005] In order to solve the above problems, the embodiment of the present utility model discloses a crucible rim, comprising: a crucible rim body, wherein the crucible rim body comprises an inner layer component and an outer layer component; wherein,

[0006] The inner layer component includes a first end and a second end along its axial direction, the first end of the inner layer component is arranged in the outer layer component, and the inner wall of the inner layer component is enclosed to form a first opening accommodating space at the second end;

[0007] The second end of the inner layer component is exposed from the outer layer component.

[0008] Optionally, along the axial direction of the inner layer component, the orthographic projection of the outer layer component falls within the orthographic projection of the inner layer component; or,

[0009] Along the axial direction of the inner layer component, the orthographic projection of the inner layer component falls within the orthographic projection of the outer layer component.

[0010] The crucible side further comprises a protective plate, which is arranged on a side of the outer layer component away from the inner layer component; and a gap is provided between the protective plate and the outer layer component.

[0011] Optionally, there is a gap between the inner layer component and the outer layer component.

[0012] Optionally, a gap d between the inner layer component and the outer layer component is 2 mm ≤ d ≤ 10 mm.

[0013] Optionally, along the axial direction of the inner layer component, a height H of the inner layer component exposed from the outer layer component is 200-300 mm.

[0014] Optionally, the crucible rim body further includes a heat-insulating layer, and the heat-insulating layer is arranged between the inner layer component and the outer layer component.

[0015] Optionally, the crucible side further comprises a crucible support, and the crucible support is arranged at the first end of the inner layer component;

[0016] The crucible holder is detachably connected to the inner layer component; wherein the first end of the inner layer component has a second opening, the second opening is communicated with the accommodating space, and at least a portion of the crucible holder is embedded in the second opening;

[0017] Alternatively, the crucible holder and the inner layer component are integrally formed.

[0018] Optionally, the crucible holder is detachably connected to the outer component; wherein the outer component is provided with a through hole opposite to the second opening, and at least a portion of the crucible holder is embedded in the through hole;

[0019] Alternatively, the crucible holder and the outer layer component are integrally formed.

[0020] In a second aspect, the utility model discloses a single crystal furnace, comprising a main heater, a quartz crucible and the above-mentioned crucible side, wherein the crucible side is used to support the quartz crucible;

[0021] The quartz crucible is installed in the accommodating space of the inner layer component of the crucible side.

[0022] Optionally, along the axial direction of the inner component, the height of the inner component exposed from the outer component is a first preset height, the height of the heating area of the main heater is a second preset height X, and the second preset height X is greater than or equal to the first preset height.

[0023] Optionally, the height of the annular heating zone of the main heater is a second preset height X; during crystal growth seeding or shouldering, the crucible position of the quartz crucible is Y; the height of the inner layer component exposed from the outer layer component is H, H=XY;

[0024] Among them, 160≤X≤230mm, 80mm≤Y≤150mm.

[0025] The present invention has the following advantages:

[0026] In an embodiment of the present invention, the crucible ridge body includes an outer layer component and an inner layer component disposed within the outer layer component, and the second end of the inner layer component is exposed outside the outer layer component, so that the inner layer component is higher than the outer layer component. In this way, the top of the crucible ridge body is a single-layer structure, and the bottom is a double-layer or multi-layer structure. On the one hand, the main heater can radiate heat to the quartz crucible through the top of the crucible ridge body, so that the thermal conductivity of the crucible ridge is better; on the other hand, the partial configuration of the crucible ridge as a single-layer structure can also reduce the weight of the crucible ridge and reduce costs. In addition, the bottom end of the crucible ridge is a double-layer or multi-layer structure. During crystal growth, it can prevent heat from the bottom of the hot field from being reflected to the inner layer component of the crucible ridge, thereby reducing the temperature of the bottom of the crucible ridge, and further reducing the temperature of the bottom of the quartz crucible inside the crucible ridge, reducing corrosion of the quartz crucible, and thus reducing the oxygen content in the melt. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a cross-sectional view of a crucible side of the present invention;

[0028] Figure 2 It is a cross-sectional view of an outer layer component of the utility model;

[0029] Figure 3 This is a schematic diagram of the assembly structure of a crucible side of the utility model;

[0030] Figure 4 It is a cross-sectional view of an inner layer component of the present utility model;

[0031] Figure 5 This is a cross-sectional view of a crucible support of the present invention;

[0032] Figure 6 It is a cross-sectional view of another crucible side of the present invention.

[0033] Description of reference numerals:

[0034] 1. Crucible side body; 11. Inner component; 111. Accommodation space; 112. First opening; 113. Second opening; 114. First surface; 12. Outer component; 13. Insulation layer; 2. Crucible support; 21. Second surface; 22. Crucible support body; 23. Protrusion. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0036] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly refer to one or more of these features. In the description of this utility model, unless otherwise specified, "plurality" means two or more. Furthermore, "and / or" in the specification and claims refers to at least one of the connected items, and the character " / " generally indicates an "or" relationship between the connected items.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0038] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0039] One of the core concepts of the embodiment of the present invention is to disclose a crucible side, such as Figures 1 to 6 As shown, the crucible side includes: a crucible side body 1, the crucible side body 1 includes an inner layer component 11 and an outer layer component 12; wherein, the inner layer component 11 includes a first end and a second end along its axial direction, the first end of the inner layer component 11 is arranged in the outer layer component 12, and the inner wall of the inner layer component 11 is enclosed to form an accommodating space 111 with a first opening 112 at the second end; the second end of the inner layer component 11 is exposed to the outer layer component 12.

[0040] In some embodiments, the crucible rim body 1 includes an outer layer component 12 and an inner layer component 11 disposed within the outer layer component 12, with the second end of the inner layer component 11 exposed outside the outer layer component 12, such that the inner layer component 11 is higher than the outer layer component 12. Thus, the top of the crucible rim body 1 is a single-layer structure, and the bottom is a double-layer structure. On the one hand, the main heater can radiate heat to the quartz crucible through the top of the crucible rim body 1, thereby improving the thermal conductivity of the crucible rim. On the other hand, the partial configuration of the crucible rim as a single-layer structure can also reduce the weight of the crucible rim and reduce costs. Furthermore, in other embodiments, by disposing the outer layer component 12 at the bottom of the crucible rim, during crystal growth, heat from the bottom of the heat field can be blocked from being reflected to the inner layer component 11 of the crucible rim, thereby lowering the temperature of the bottom of the crucible rim, thereby lowering the temperature of the bottom of the quartz crucible within the crucible rim, reducing corrosion of the quartz crucible, and thus reducing the oxygen content in the melt.

[0041] The crucible side in the embodiment of the present invention can be applied to industries that require high-temperature heating, such as polysilicon production and ingot casting, electrospark machining, metal continuous casting, and precious metal smelting. In the embodiment of the present invention, only the application of the crucible side in pulling crystal rods in a hot field is used as an example for explanation, and other situations can refer to the settings.

[0042] Specifically, the crucible side can be used in a hot field as a carrier to support a quartz crucible filled with silicon material, so as to facilitate drawing a silicon rod.

[0043] Specifically, the crucible side may include a crucible side body 1, and the crucible side body 1 may include an inner layer component 11 and an outer layer component 12; the inner layer component 11 includes a first end and a second end along its axial direction, and the first end of the inner layer component 11 is embedded in the outer layer component 12, and the inner wall of the inner layer component 11 is enclosed to form an accommodating space 111 with a first opening 112 at the second end, and the accommodating space 111 is used to accommodate a quartz crucible, and the first opening 112 is used to install the quartz crucible, that is, the quartz crucible can be loaded into the accommodating space 111 from the first opening 112.

[0044] Specifically, the second end of the inner layer component 11 is exposed to the outer layer component 12. Figure 1 and Figure 6 As shown, the top of the crucible rib body 1 comprises only the inner layer component 11, i.e., the top of the crucible rib body 1 is a single-layer structure. The bottom of the crucible rib body 1 comprises the inner layer component 11 and the outer layer component 12, i.e., the bottom of the crucible rib body 1 is at least a double-layer structure. Specifically, the crucible rib body 1 can be a body of revolution, i.e., both the inner layer component 11 and the outer layer component 12 can be bodies of revolution. The inner wall of the inner layer component 11 can be adapted to the shape of the quartz crucible, and the outer wall of the inner layer component 11 can be adapted to the shape of the outer layer component 12. The axis of the inner layer component 11, the axis of the crucible, and the axis of the outer layer component 12 coincide.

[0045] Specifically, the material of the crucible body 1 can be carbon-carbon material, that is, the materials of the inner layer component 11 and the outer layer component 12 can both be carbon-carbon. When multi-layer components are used, the preparation density of each component of the crucible body 1 can be increased, and the corrosion of the crucible body 1 during use can be reduced.

[0046] It should be noted that the thermal field includes a main heater and a bottom heater. The main heater can be arranged around the portion of the inner component 11 exposed to the outer component 12; the bottom heater can be arranged at the bottom of the outer component 12. As a melting process, when heating and melting the silicon material in the quartz crucible, the main heater and the crucible body 1 do not move relative to each other, and the annular heating zone of the main heater is arranged relative to the second end of the inner component 11. In the embodiment of the present invention, the temperature output of the main heater is stable, the height of the outer component 12 is relatively low, and the second end of the inner component 11 can transfer the heat radiated by the main heater to the quartz crucible. Because the density of liquid silicon is greater than that of solid silicon, after the silicon material melts, the silicon liquid will sink to the bottom of the quartz crucible, and the solid silicon will float on the top. The effective heat transfer can accelerate the melting of the silicon material. The outer component 12 can block the heat transfer and loss at the bottom, thereby effectively maintaining the temperature of the silicon liquid at the bottom.

[0047] Specifically, in the embodiment of the present invention, the top of the crucible side body 1 includes only the inner layer component 11, which has strong thermal conductivity; the bottom end of the crucible side body 1 includes the inner layer component 11 and the outer layer component 12 which are stacked, so that the overall thickness of the bottom end of the crucible side body 1 is thicker and the thermal insulation is stronger, which can effectively prevent crystallization from occurring at the bottom of the quartz crucible, thereby causing silicon leakage.

[0048] In some optional embodiments, the technical principle of reducing the oxygen content of the crystal by the crucible body at different stages of crystal growth is as follows:

[0049] During the initial melting process, the silicon material in the quartz crucible is a bulk material and is not in full contact with the inner wall of the quartz crucible. There are gaps between the silicon material and the quartz crucible, which can cause dry burning in localized areas of the quartz crucible, such as the gaps, resulting in relatively high instantaneous temperatures. In this embodiment of the utility model, the cooperation of the outer layer component 12 and the inner layer component 11 can improve the overall thermal insulation performance of the bottom of the crucible during melting.

[0050] When melting the material, the bottom heater first increases the overall temperature of the bottom of the crucible, and then transfers heat to the quartz crucible through the inner layer component 11 to increase the temperature of the bottom of the quartz crucible, which can reduce the instantaneous temperature of the local area of the quartz crucible, thereby reducing the corrosion of the bottom of the quartz crucible and further reducing the oxygen in the quartz crucible from entering the melt.

[0051] When the diameter is constant, the bottom heater is turned off or its power is reduced. Because the bottom of the crucible rim has better thermal insulation properties and less heat loss from the bottom, the power provided by the main heater can be reduced, thereby reducing power consumption during this period. Furthermore, when the diameter is constant, the outer component 12 blocks the main heater from baking the bottom of the inner component 11, thereby reducing baking at the R-arc of the quartz crucible, reducing corrosion at the bottom of the quartz crucible, and thus reducing the ingress of oxygen from the quartz crucible into the melt.

[0052] On the basis of the above embodiments or in some optional embodiments of the present invention, such as Figure 6 As shown, along the axial direction of the inner layer component 11 , the orthographic projection of the outer layer component 12 falls within the orthographic projection of the inner layer component 11 .

[0053] In some optional embodiments, the outer layer component 12 can be only arranged at the bottom of the inner layer component 11, which can increase the thermal insulation performance of the bottom of the crucible side and reduce the reaction between the bottom of the crucible side and the quartz crucible; moreover, the outer layer component 12 is not larger than the radial dimension of the upper end of the crucible side, which is conducive to ensuring a safe distance between the crucible side and the main heater.

[0054] Specifically, the outer layer component 12 may be an arc-shaped structure and adapted to the bottom structure of the inner layer component 11. Figure 6 As shown, along the axial direction of the inner layer component 11, the height of the outer layer component 12 is lower than the R arc of the inner layer component 11, the horizontal radius of the outer layer component 12 is smaller than the horizontal radius of the crucible side, and the outer layer component 12 is arranged directly below the inner layer component 11.

[0055] Alternatively, as Figure 6 As shown, a gap d is provided between the inner layer component 11 and the outer layer component 12, allowing the inner layer component 11 and the outer layer component 12 to form a double heat-reflecting layer. This reduces the amount of heat radiated from the main heater to the inner layer of the crucible bottom during crystal growth. Furthermore, the outer layer component 12 can also reduce the amount of heat reflected from the bottom heat field insulation component. Specifically, the bottom heat field insulation component can be a bottom pressure plate, insulation felt, or the like.

[0056] Specifically, considering that the outer layer component 12 itself needs to have a certain thickness, for example, 5-7 mm, etc., in order to ensure a safe distance between the outer layer component 12 and the main heater or the bottom heater, and combined with the consideration of heat reflection, such as Figure 6 As shown, the gap d between the inner layer component 11 and the outer layer component 12 can be greater than or equal to 2 mm and less than or equal to 10 mm. The safety distance can be 18-30 mm.

[0057] Furthermore, if Figure 6 As shown, a heat-insulating layer 13 may be added in the gap between the inner layer component 11 and the outer layer component 12 to further improve the heat-insulating performance of the bottom of the crucible.

[0058] On the basis of the above embodiments or in other optional embodiments of the present invention, as Figure 1 and Figure 3 As shown, along the axial direction of the inner layer component 11 , the orthographic projection of the inner layer component 11 can fall within the orthographic projection of the outer layer component 12 .

[0059] Optionally, along the axial direction of the inner layer component 11, the height of the inner layer component 11 exposed from the outer layer component 12 is 200-300 mm, so that the height of the second end of the inner layer component 11 matches the height of the annular heating zone of the main heater to ensure the thermal conductivity of the crucible side; in addition, the outer layer component 12 can provide support for the inner layer component 11, which is beneficial to reducing the thickness of the inner layer component 11, so that the main heater can radiate more heat through the second end of the inner layer component 11, thereby improving the melting efficiency.

[0060] Specifically, along the axial direction of the inner layer component 11, the height of the inner layer component 11 exposed from the outer layer component 12 can be adjusted based on the height of the heating zone of the main heater. Controlling the height of the inner layer component 11 exposed from the outer layer component 12 within 200-300 mm can improve the versatility of the crucible rim body 1.

[0061] Specifically, the crucible rim body 1 can include an inner layer component 11 and an outer layer component 12, i.e., the crucible rim body 1 can comprise at least a two-layer structure. The crucible rim body 1 can be a split structure, and both the inner layer component 11 and the outer layer component 12 can be reused or replaced separately, which helps reduce the cost of using the crucible rim. For example, if the inner layer component 11 is corroded and damaged, the inner layer component 11 can be replaced separately, and the outer layer component 12 can be reused, thus avoiding the entire crucible rim body 1 from being scrapped and reducing scrapping costs.

[0062] Specifically, in this embodiment, the outer layer component 12 also serves to support the inner layer component 11. When the inner layer component 11 or the outer layer component 12 is made of a carbon-carbon composite material, the inner layer component 11, as a single-layer structure, can be made thinner, thereby increasing the density of the inner layer component 11 and reducing corrosion. The density of the outer layer component 12 can be appropriately reduced, which helps reduce the overall cost of the crucible side.

[0063] Specifically, in a hot field environment, to avoid ignition of the heater, the safe distance from the crucible to the main heater is greater than or equal to 22 mm, and the force requirement of the inner layer component 11 can be designed so that the thickness of the inner layer component 11 is greater than the thickness of the outer layer component 12.

[0064] In the embodiment of the present utility model, Figure 1 and Figure 2As shown, the inner component 11 and the outer component 12 can be spliced, and the thickness of the inner component 11 and the outer component 12 can be thinned to reduce the overall weight. On the one hand, it is convenient for personnel to disassemble and assemble. On the other hand, the inner component 11 or the outer component 12 can be reused, that is, only the damaged single-layer structure needs to be replaced, thereby reducing the overall scrapping cost and the use cost of the crucible side.

[0065] Specifically, the thickness of the inner layer component 11 is relatively thin, and the density of the inner layer component 11 can be increased, thereby reducing the corrosion of the inner wall of the crucible.

[0066] On the basis of the above embodiments or in some optional embodiments of the present invention, such as Figure 1 As shown, the crucible rim body 1 further includes a heat-insulating layer 13 , which is disposed between the inner layer component 11 and the outer layer component 12 .

[0067] In the embodiment of the present invention, the insulation layer 13 is arranged between the inner layer component 11 and the outer layer component 12. The insulation layer 13 can play a role in thermal insulation. In this way, the thermal insulation performance of the crucible body 1 can be improved, and crystallization at the bottom of the quartz crucible can be avoided, thereby preventing silicon leakage.

[0068] Specifically, the thermal insulation layer 13 may be a felt filled between the inner layer component 11 and the outer layer component 12. After a silicon leakage accident occurs, the felt may absorb part of the silicon liquid, thereby reducing the loss of the silicon liquid.

[0069] Specifically, the inner layer component 11, the insulation layer 13 and the outer layer component 12 can be spliced together so that the crucible side body 1 is a split structure. The inner layer component 11, the insulation layer 13 and the outer layer component 12 can be reused or replaced separately, which is beneficial to reducing the use cost of the crucible side.

[0070] Specifically, the insulation layer 13 is disposed between the inner component 11 and the outer component 12. The insulation layer 13 is lower in the axial direction of the inner component 11 than in the inner component 11, thereby preventing interference with heat transfer from the primary heater. Furthermore, along the axial direction of the inner component 11, the insulation layer 13's height near the second end can be less than or equal to the height of the outer component 12 near the second end. This allows the outer component 12 to protect the insulation layer 13, thereby increasing its service life.

[0071] Specifically, in an embodiment of the present invention, the crucible side body 1 may include a three-layer structure, and the thickness of each single-layer structure is relatively thin, so that the weight of each single-layer structure is small. On the one hand, it is convenient for personnel to disassemble and assemble the crucible side. On the other hand, only the damaged single-layer structure needs to be replaced separately, and the undamaged single-layer structure can be reused.

[0072] Specifically, the thermal insulation layer 13 may be a body of revolution structure, the inner wall of the thermal insulation layer 13 is adapted to the shape of the inner layer component 11 , and the outer wall of the thermal insulation layer 13 is adapted to the shape of the outer layer component 12 .

[0073] Specifically, the thickness of the insulation layer 13 can be 8-10 mm. The thickness of the insulation layer 13 can be adjusted in combination with the thickness design of the inner layer component 11 and the outer layer component 12, for example, 8 mm, 9.6 mm, 10 mm, 11 mm, or 12 mm, to effectively ensure the thermal insulation effect of the insulation layer 13. In this way, the temperature of the bottom of the quartz crucible can be maintained. After maintaining the temperature of the bottom of the quartz crucible, the bottom heater can be turned off to reduce the overall power consumption during the crystal pulling process.

[0074] Specifically, the thermal insulation layer 13 can be wrapped around the first end of the inner layer component 11, so that the thermal insulation performance of the bottom end of the crucible body 1 is better. When the crystal grows, it is convenient to ensure that the temperature of the bottom of the quartz crucible is constant, and the wire breakage caused by the rapid loss of the bottom temperature can be avoided; at the same time, in the early stage of melting and during melting, the local temperature of the quartz crucible can be reduced from rising too fast, which leads to serious corrosion of the quartz crucible, and the reaction between the quartz crucible and molten silicon is reduced, thereby reducing the generation of oxygen and improving the quality of the crystal rod.

[0075] Specifically, along the axial direction of the inner layer component 11, the heights of the outer layer component 12 and the insulation layer 13 are consistent, that is, the second end of the inner layer component 11 is exposed to the insulation layer 13. In this way, the insulation layer 13 can play a role in heat preservation and can avoid the second end of the inner layer component 11, so as to avoid affecting the inner layer component 11 in transferring the heat radiation of the main heater to the quartz crucible.

[0076] Optionally, the insulation layer 13 includes at least one of a solid felt member, a soft felt member, or an aerogel member, or may be other high-temperature-resistant, plastic, and thermally insulating materials, thereby increasing the structural diversity of the insulation layer 13. In one specific embodiment, the insulation layer 13 is made of carbon-carbon or graphite, which not only withstands high temperatures but also provides thermal insulation. Furthermore, in the event of silicon leakage, the insulation material, upon contact with the silicon liquid, can reduce the introduction of other impurities into the silicon liquid.

[0077] Specifically, the insulation layer 13 may be a single-layer structure, a double-layer structure, or a triple-layer structure, etc. The insulation layer 13 may be one of solid felt, soft felt, and aerogel, or a combination of two or three of these.

[0078] Specifically, the insulation layer 13 can be a soft felt piece. After the insulation layer 13 is prepared from the soft felt, it can be coated to make the surface of the insulation layer 13 smooth, thereby improving the fit between the insulation layer 13 and the inner layer component 11, as well as the fit between the insulation layer 13 and the outer layer component 12; of course, in some embodiments, the soft felt may not be coated.

[0079] Specifically, the thermal insulation layer 13 may be a solid felt piece, so that the thermal insulation layer 13 is not easily powdered, and the solid felt does not need to be coated, and can also slow down heat conduction and reduce heat loss.

[0080] Based on the above embodiments or in other optional embodiments of the present invention, Figure 1 and Figure 6 As shown, the crucible side also includes a crucible holder 2, which is arranged at the first end of the inner layer component 11; the crucible holder 2 is detachably connected to the inner layer component 11; wherein, the first end of the inner layer component 11 has a second opening 113, the second opening 113 is connected to the accommodating space 111, and at least a portion of the crucible holder 2 is embedded in the second opening 113.

[0081] In the embodiment of the present invention, the crucible holder 2 and the inner component 11 are detachable, so as to apply force to the quartz crucible through the second opening 113 and remove the quartz crucible from the crucible side; the crucible holder 2 is connected to the inner component 11, so as to support the quartz crucible.

[0082] Specifically, the crucible holder 2 may include a crucible holder body 22 and a protrusion 23 connected to the crucible holder body 22 . The protrusion 23 may pass through the second opening 113 . The shape and size of the protrusion 23 are adapted to the second opening 113 .

[0083] Optionally, the crucible holder 2 and the inner layer component 11 are integrally formed, which can improve the structural strength of the crucible rim body 1 and the assembly accuracy of the crucible rim.

[0084] Optionally, the crucible support 2 and the outer layer component 12 are integrally formed, which can improve the structural strength of the crucible rim body 1 and the assembly accuracy of the crucible rim.

[0085] Optionally, the crucible holder 2 is detachably connected to the outer component 12 ; wherein the outer component 12 is provided with a through hole opposite to the second opening 113 ; at least a portion of the crucible holder 2 is embedded in the through hole.

[0086] In the embodiment of the present invention, when the crucible holder 2 and the outer component 12 are disassembled, since the second opening 113 is opposite to the through hole, a tool can be used to apply force to the quartz crucible through the through hole and the second opening 113 to remove the quartz crucible.

[0087] Specifically, the crucible support 2 may include a crucible support body 22 and a protrusion 23 connected to the crucible support body 22 . The protrusion 23 may be passed through the through hole. The shape and size of the protrusion 23 are adapted to the through hole.

[0088] Specifically, the through hole and the second opening 113 may have the same shape and size.

[0089] Alternatively, as Figure 4 and Figure 5 As shown, the surface of the inner layer component 11 facing the accommodating space 111 is the first surface 114 , and the surface of the crucible holder 2 facing the accommodating space 111 is the second surface 21 ; the first surface 114 and the second surface 21 have a smooth transition.

[0090] In the embodiment of the present invention, the first surface 114 and the second surface 21 are smoothly transitioned to facilitate adaptation to the shape of the quartz crucible, thereby improving the support effect on the quartz crucible.

[0091] Specifically, the first surface 114 can be adapted to the circumference of the quartz crucible, and the second surface 21 can be adapted to the bottom of the quartz crucible. The contour formed by the first surface 114 and the second surface 21 can be consistent with the outer surface contour of the quartz crucible.

[0092] Based on at least one of the above embodiments or in some optional embodiments of the present invention, the crucible side further includes a protective plate, which is arranged on a side of the outer component 12 away from the inner component 11; a gap is formed between the protective plate and the outer component 12.

[0093] In the embodiment of the present invention, a protective plate is added to the bottom of the outer component 12 to further improve the thermal insulation performance of the bottom of the crucible.

[0094] Specifically, a heat-insulating layer 13 may be provided between the protective plate and the outer component 12 to further improve the heat-insulating performance of the bottom of the crucible.

[0095] Specifically, the material of the protective plate can be carbon-carbon material, and the protective plate can be an arc-shaped structure. The protective plate and the crucible support 2 are integrated or separated, and the protective plate can be installed on the crucible support 2 or the bottom of the crucible side. The protective plate is adapted to the shape of the bottom of the crucible side and is an arc-shaped structure.

[0096] Optionally, along the axial direction of the inner component 11, the orthographic projection of the protective plate can fall within the orthographic projection of the inner component 11, so that the protective plate does not occupy the radial dimension of the pot side, which is conducive to ensuring a safe distance between the pot side and the main heater.

[0097] The crucible side described in the embodiment of the present invention has at least the following advantages:

[0098] In an embodiment of the present invention, the crucible rib body includes an outer layer component and an inner layer component embedded within the outer layer component, and the second end of the inner layer component is exposed from the outer layer component, so that the inner layer component is higher than the outer layer component. In this way, the top of the crucible rib body is a single-layer structure, and the bottom is a double-layer structure. On the one hand, the main heater can radiate heat to the quartz crucible through the top of the crucible rib body, making the crucible rib have better thermal conductivity; on the other hand, the partial configuration of the crucible rib as a single-layer structure can also reduce the weight of the crucible rib and reduce costs. In addition, the bottom of the crucible rib is a double-layer or multi-layer structure. During crystal growth, it can prevent heat from the bottom of the hot field from being reflected to the inner layer component of the crucible rib, thereby reducing the temperature of the bottom of the crucible rib, and further reducing the temperature of the bottom of the quartz crucible inside the crucible rib, reducing corrosion of the quartz crucible, and thus reducing the oxygen content in the melt.

[0099] Secondly, an embodiment of the present invention further discloses a single crystal furnace, comprising a main heater, a quartz crucible and a crucible side in any of the above embodiments; the crucible side is used to support the quartz crucible; the quartz crucible is installed in the accommodating space 111 of the inner layer component 11 of the crucible side.

[0100] Specifically, in the melting stage, the main heater is opposite to the portion of the inner layer component 11 of the crucible side exposed to its outer layer component 12, so that the main heater can radiate heat to the quartz crucible through the inner layer component 11 opposite to it, so that the crucible side can utilize the single-layer structure to conduct heat and has strong thermal conductivity.

[0101] In this embodiment of the present invention, the main heater outputs a stable temperature, and the outer component 12 is relatively low. During the melting stage, the second end of the inner component 11 can transfer heat from the heating zone of the main heater to the quartz crucible. Because the density of liquid silicon is greater than that of solid silicon, after the silicon material melts, the silicon liquid sinks to the bottom of the quartz crucible, while the solid silicon floats on top. This effective heat transfer can accelerate the melting of the silicon material. The thermal insulation layer 13 and the outer component 12 can prevent heat loss from the bottom, thereby effectively maintaining the temperature of the silicon liquid at the bottom.

[0102] Specifically, the single crystal furnace further includes a furnace body, and the main heater and the crucible rib are both arranged in the furnace body.

[0103] Optionally, along the axial direction of the inner component 11, the height of the inner component 11 exposed from the outer component 12 is a first preset height, the height of the annular heating area of the main heater is a second preset height X, and the second preset height X is greater than or equal to the first preset height.

[0104] In this embodiment of the present invention, the second predetermined height X is greater than or equal to the first predetermined height, effectively ensuring that the inner layer component 11 can conduct heat radiation to the quartz crucible to melt the silicon material therein. In practical applications, when the second predetermined height is greater than or equal to the first predetermined height, the crucible rim body 1 exhibits improved thermal conductivity and heat preservation.

[0105] Optionally, the main heater includes an annular heating zone, the height of the annular heating zone is a second preset height X; during crystal growth seeding or shouldering, the lower limit of the crucible position of the quartz crucible is Y; the height H=XY of the inner layer component 11 exposed from the outer layer component 12; wherein, 160≤X≤230mm, 80mm≤Y≤150mm.

[0106] Specifically, if Figure 1 As shown, along the axial direction of the inner component 11, the inner component 11 is higher than the outer component 12. To ensure the efficiency of melting and the stability of crystal pulling, the height H of the inner component 11 above the outer component 12 can be X-Y mm, where X is the height of the annular heating zone of the main heater and Y is the lower limit of the guiding crucible position. In this embodiment, the position where the upper edge of the main heater is flush with the top surface of the crucible side is defined as the quartz crucible "0" position. When the top surface of the crucible side is above the main heater, the crucible position is greater than 0; the guiding crucible position is the crucible position when guiding the crystal or placing the shoulder. Among them, the range of X can be 160-320 mm, the range of Y can be 80-150 mm, and the height H of the inner component 11 exposed from the outer component 12 is XY.

[0107] The single crystal furnace described in the embodiment of the present utility model has at least the following advantages:

[0108] In an embodiment of the present invention, the crucible side body includes an outer layer component and an inner layer component embedded in the outer layer component, and the second end of the inner layer component is exposed from the outer layer component, so that the height of the inner layer component is higher than that of the outer layer component. In this way, the top end of the crucible side body is a single-layer structure, and the bottom end is at least a double-layer structure. On the one hand, the main heater can radiate heat to the quartz crucible through the top end of the crucible side body, so that the thermal conductivity of the crucible side is better; on the other hand, the partial setting of the crucible side as a single-layer structure can also reduce the weight of the crucible side and reduce costs.

[0109] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they are aware of the basic creative concepts. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0110] Finally, it should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or terminal device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or terminal device that includes the element.

[0111] The crucible side and single crystal furnace provided by the present invention are introduced in detail above. Specific examples are used herein to illustrate the principle and implementation method of the present invention. The description of the above embodiments is only used to help understand the method and core idea of the present invention. At the same time, for those skilled in the art, according to the idea of the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A crucible rim, characterized in that: include: A crucible rib body (1), comprising an inner layer component (11) and an outer layer component (12); wherein: The inner layer component (11) includes a first end and a second end along its axial direction, the first end of the inner layer component (11) is arranged in the outer layer component (12), and the inner wall of the inner layer component (11) encloses a receiving space (111) having a first opening (112) at the second end; The second end of the inner layer component (11) is exposed outside the outer layer component (12); Along the axial direction of the inner layer component (11), the orthographic projection of the outer layer component (12) falls within the orthographic projection of the inner layer component (11); or, Along the axial direction of the inner layer component (11), the orthographic projection of the inner layer component (11) falls within the orthographic projection of the outer layer component (12).

2. The crucible rim according to claim 1, wherein: The crucible side further comprises a protective plate, which is arranged on a side of the outer layer component (12) away from the inner layer component (11); There is a gap between the protective plate and the outer layer component (12).

3. The crucible rim according to claim 1 or 2, characterized in that: There is a gap between the inner layer component (11) and the outer layer component (12).

4. The crucible rim according to claim 3, wherein: The gap between the inner layer component (11) and the outer layer component (12) is d, 2mm≤d≤10mm.

5. The crucible rim according to claim 3, characterized in that: Along the axial direction of the inner layer component (11), the height H of the inner layer component (11) exposed from the outer layer component (12) is 200-300 mm.

6. The crucible rim according to claim 3, characterized in that: The crucible rim body (1) further comprises a heat-insulating layer (13), and the heat-insulating layer (13) is arranged between the inner layer component (11) and the outer layer component (12).

7. The crucible rim according to claim 1, wherein: The crucible side further comprises a crucible support (2), and the crucible support (2) is arranged at the first end of the inner layer component (11); The crucible holder (2) is detachably connected to the inner layer component (11); wherein the first end of the inner layer component (11) has a second opening (113), the second opening (113) is in communication with the accommodating space (111), and at least a portion of the crucible holder (2) is embedded in the second opening (113); Alternatively, the crucible support (2) and the inner layer component (11) are integrally formed.

8. The crucible rim according to claim 7, characterized in that: The crucible support (2) is detachably connected to the outer layer component (12); wherein the outer layer component (12) is provided with a through hole opposite to the crucible support (2), and at least a portion of the crucible support (2) is embedded in the through hole; Alternatively, the crucible support (2) and the outer layer component (12) are integrally formed.

9. A single crystal furnace, characterized in that: Comprising a main heater, a quartz crucible and the crucible side according to any one of claims 1 to 8, wherein the crucible side is used to support the quartz crucible; The quartz crucible is installed in the accommodating space (111) of the inner layer component (11) of the crucible side.

10. The single crystal furnace according to claim 9, characterized in that: Along the axial direction of the inner layer component (11), the height of the inner layer component (11) exposed from the outer layer component (12) is a first preset height, and the height of the annular heating zone of the main heater is a second preset height, and the second preset height is greater than or equal to the first preset height.

11. The single crystal furnace according to claim 9, characterized in that: The height of the annular heating zone of the main heater is a second preset height X; when the crystal is grown or shouldered, the lower limit of the crucible position of the quartz crucible is Y; the height of the inner layer component (11) exposed from the outer layer component (12) is H, H=XY; Among them, 160≤X≤230mm, 80mm≤Y≤150mm.

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