Arc starting power supply circuit of ion implanter

Abstract

The utility model relates to the technical field of control circuits, and discloses an arcing power supply circuit of an ion implanter, which comprises an input circuit, an output circuit, a control circuit and a display circuit. The input circuit comprises a master control IC chip and three groups of transformer coils for supplying power to the master control IC chip, the three groups of transformer coils comprise a group of primary coils and two groups of secondary coils, one group of secondary coils is + 20V and supplies power to the master control IC chip, the other group of secondary coils generates three direct-current power supplies, the output voltages of the direct-current power supplies are + 15V,-15V and + 5V respectively, and the output voltages of the direct-current power supplies are + 15V,-15V and + 5V respectively. According to the arcing power supply circuit of the ion implanter, the control circuit and the cooling fan are powered respectively, and functions required by an arcing power supply in the ion implanter are realized by using a relatively simple circuit; the output voltage and the output current are stable and controllable, and can respectively work in a constant current state and a constant voltage state; output can be controlled remotely and can also be controlled locally.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to an arc starting power supply circuit for an ion implanter. Background Art

[0002] Traditional AD-DC power supplies usually adopt a linear power supply working mode. First, a power frequency transformer is used to convert high-voltage AC into low-voltage AC, and then low-voltage, high-current DC is output through diode rectification, filtering and other circuits. The output power change is adjusted by adjusting the load size of the adjustment tube. This causes the adjustment tube working in a linear state to generate a lot of heat, resulting in a large amount of power loss and very low efficiency. In addition, the huge power frequency transformer also makes the power supply unit very bulky.

[0003] Switching power supplies can overcome the shortcomings of linear power supplies, such as low efficiency, large size, and heavy weight. By increasing the frequency, switching power supplies significantly reduce the size of transformers and capacitors. Furthermore, the PWM waves generated by integrated PWM switching chips can be adjusted by controlling the PWM frequency or duty cycle, thereby improving efficiency and reducing power supply heat generation. Switching power supplies also have a wide input voltage range, ensuring stable output even when the input voltage fluctuates. AC input voltages vary across different countries and regions. For example, the AC input voltage in the United States is 120V, in Europe it's 220-240V, in Japan it's 100V and 200V, and in my country it's 220V. Furthermore, the voltage fluctuates by approximately 10%. The wide input voltage range of switching power supplies also makes them suitable for a wide range of applications.

[0004] Existing products include Matsusada Precision's RE150-7 series, which can basically meet the requirements. However, they have complex internal power supply structures and poor reliability. The entire machine uses 14 PCB boards, which greatly increases the difficulty of assembly and debugging. The original machine also has certain design flaws. The DB socket of the control interface does not have anti-static or other protective measures. If the control port encounters static electricity or high-voltage pulses during insertion and removal, it is very easy to damage the mode selection circuit. Utility Model Content

[0005] The purpose of the present utility model is to provide an arc starting power supply circuit for an ion implanter to solve the problems raised in the above background technology.

[0006] To achieve the above objectives, the present invention provides the following technical solutions: an arc starting power supply circuit for an ion implanter, the power supply circuit comprising an input circuit, an output circuit, a control circuit, and a display circuit; the input circuit comprising a main control IC chip and three sets of transformer coils for powering the main control IC chip; the three sets of transformer coils comprising a primary coil and two secondary coils; one set of secondary coils is +20V and powers the main control IC chip; the other set of secondary coils generates three DC power supplies, the output voltages of the DC power supplies being +15V, -15V, and +5V, respectively, for powering the control circuit and a cooling fan;

[0007] The output circuit includes a circuit conversion circuit, a rectification and filtering anti-reverse circuit and a current and voltage feedback circuit.

[0008] Optionally, the circuit conversion circuit includes four groups of MOS tubes.

[0009] Optionally, the rectifier, filter and anti-reverse circuit includes an inductor L8, one end of the inductor L8 is electrically connected to the positive electrode of the capacitor CD1, the negative electrode of the capacitor CD1 is electrically connected to the second end of the inductor L8, and the capacitor CD1 is connected in parallel with the capacitor CD6, the resistor R11 and the resistor R12.

[0010] Optionally, the current-voltage feedback circuit includes an operational amplifier OPA, wherein terminal 2 of the operational amplifier OPA is electrically connected to one end of the resistor R29, the other end of the resistor R29 is electrically connected to terminal 6 of the operational amplifier OPA, and terminal 4 of the operational amplifier OPA is electrically connected to the -15V terminal.

[0011] Optionally, the control circuit includes three groups of CD4051B analog multiplexers, and the three groups of CD4051B analog multiplexers respectively select the set voltage signal, current signal and overvoltage protection signal, and pins 9, 10 and 11 of the CD4051B analog multiplexers are selection pins.

[0012] Optionally, the display circuit includes a display control chip TC7107CKW, which converts an analog signal into a digital signal and displays the analog value through a 3-digit digital tube.

[0013] Compared with the prior art, the present invention provides an arc starting power supply circuit for an ion implanter, which has the following beneficial effects:

[0014] The arc starting power supply circuit of the ion implanter uses a relatively simple circuit to realize the functions required by the arc starting power supply in the ion implanter; the output voltage and output current are stable and controllable, and can work in constant current state and constant voltage state respectively; the output can be controlled remotely or locally. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a partial schematic diagram of the input circuit of the utility model;

[0016] Figure 2 This is a partial schematic diagram of the input circuit of the utility model;

[0017] Figure 3 This is a schematic diagram of the power conversion circuit of the utility model;

[0018] Figure 4 This is a schematic diagram of the rectifier, filter and anti-reverse circuit of the utility model;

[0019] Figure 5 This is a schematic diagram of the voltage and current feedback circuit of the utility model;

[0020] Figure 6 This is a schematic diagram of the control circuit portion of the utility model;

[0021] Figure 7 This is a schematic diagram of the control circuit portion of the utility model;

[0022] Figure 8 This is a schematic diagram of the control circuit portion of the utility model;

[0023] Figure 9 This is a schematic diagram of the control circuit portion of the utility model;

[0024] Figure 10 This is a schematic diagram of the display circuit of the utility model. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] like Figures 1-10 As shown, the utility model provides a technical solution: an arc starting power supply circuit of an ion implanter, the power supply circuit includes an input circuit, an output circuit, a control circuit and a display circuit.

[0027] The input circuit includes a main control IC chip and three sets of transformer coils that power the main control IC chip. The three sets of transformer coils include a primary coil and two secondary coils. One set of secondary coils is +20V and powers the main control IC chip. The other set of secondary coils generates three DC power supplies. The output voltages of the DC power supplies are +15V, -15V, and +5V, respectively, which power the control circuit and the cooling fan.

[0028] AC power is fed through the AC input socket to the EMC circuit, which includes an input fuse, X capacitors, Y capacitors, and a common-mode inductor. A series power resistor then pre-charges the subsequent rectifier and filter circuits. A relay is connected in parallel across the power resistor. Once pre-charging is complete, the relay conducts, short-circuiting the power resistor and enabling normal circuit operation. The rectified and filtered power is then fed to the subsequent full-bridge circuit. A wire is also connected between the filter capacitors to enable switchable operation between 230VAC and 115AC.

[0029] The output circuit includes a circuit conversion circuit, a rectifier, filter, and anti-reverse circuit, and a current and voltage feedback circuit. The circuit conversion circuit includes four MOS transistors. The rectifier, filter, and anti-reverse circuit includes an inductor L8, with terminal 1 electrically connected to the positive terminal of capacitor CD1, and the negative terminal of capacitor CD1 electrically connected to terminal 2 of inductor L8. Capacitor CD1 is connected in parallel with capacitor CD6, resistor R11, and resistor R12. The current and voltage feedback circuit includes an operational amplifier OPA, with terminal 2 electrically connected to one terminal of resistor R29, the other terminal of resistor R29 electrically connected to terminal 6 of the operational amplifier OPA, and terminal 4 of the operational amplifier OPA electrically connected to the -15V terminal.

[0030] The current and voltage feedback circuit output circuit is connected in series with a 5mΩ sampling resistor before reaching the output. The output current signal is monitored by monitoring the voltage across the sampling resistor. Because the voltage across the sampling resistor is very small, an amplifier circuit is required to amplify the tiny voltage signal for further processing. This design uses an OPA177GP differential amplifier circuit to amplify the voltage signal across the sampling resistor by a factor of 20. Potentiometer VR1 adjusts the amplifier's bias to compensate for temperature fluctuations. The output current feedback signal is divided by two resistors and fed to the subsequent control and display circuits. The two feedback signals can be independently adjusted by two potentiometers, facilitating subsequent current parameter correction. Voltage sampling: Voltage sampling directly collects the voltage signal across the output and divides it by two resistors to provide the appropriate voltage value to the subsequent control and display circuits. A separate potentiometer is also included to facilitate subsequent voltage-related parameter correction.

[0031] The control circuit includes three CD4051B analog multiplexers, which select the set voltage signal, current signal, and overvoltage protection signal respectively. Pins 9, 10, and 11 of the CD4051B analog multiplexers are selection pins. The high and low levels of these three pins generate eight combinations, selecting different channel switch operating modes, allowing the local set voltage signal or the remote set voltage signal to pass through the CD4051B.

[0032] The control circuit is built around TI's PWM pulse width modulation chip - UC3524ADWTR. This chip is highly integrated and contains a 5V reference source. The maximum output current can reach 20mA. The UC3524 chip integrates an error amplifier. The error amplifier's non-inverting input is pin 2, the inverting input is pin 1, and the output is pin 9. The output signal obtained by the feedback comparison part enters the UC3524ADWTR through the non-inverting input pin 2. Pin 10 is the control shutdown terminal SD (Shutdown). By using an external circuit to control the conduction and cutoff of the transistor inside the chip, the output pulse can be controlled to work and shut down, thereby realizing various protection functions of the power supply. At the same time, the chip also contains current limiting circuits, triggers, comparators, output transistors and other parts. The phase-shifted full-bridge pulse width modulation signal controlled by the input signal is output through the CA and CB pins and given to the optocoupler of the aforementioned MOS drive circuit.

[0033] The power-off protection and remote on / off circuits are primarily built around the BU4051BCFV chip. The BU4051BCFV is an eight-channel analog multiplexer switch capable of selecting mixed analog and digital signals. A digital signal from its control terminals turns on the corresponding switch for each channel. The remote control on / off signal, applied to one of the BU4051BCFV's control terminals, remotely controls the power supply output. Overtemperature and power-off protection signals are processed by a 358 amplifier and then applied to the control terminal of another BU4051BCFV. The BU4051BCFV's output control signal is then fed through an optocoupler to the SD terminal (pin 10) of the UC3524ADWTR, causing the master control UC3524ADWTR to shut down its output, protecting the power supply.

[0034] The display circuit includes a display control chip TC7107CKW, which converts analog signals into digital signals and displays the analog values through a 3-digit digital tube.

[0035] Directly converting analog signals into digital signals and displaying them via a 3-digit digital tube makes it very convenient and flexible to build ammeters and voltmeters. This design also uses the TC74HC4052A as a multiplexer. A pushbutton switch allows for selection between displaying the real-time output voltage and current or the set voltage and current. The analog voltage and current signals are divided by resistors and applied to the INHI and INLO terminals of the TC7107CKW. Adjusting the potentiometer can calibrate the displayed values of the ammeter and voltmeter. This circuit also includes an LED power supply + delayed start circuit and a circuit for generating negative electricity.

[0036] The above generally describes the present invention in detail. However, it is obvious to those skilled in the art that modifications or improvements may be made to the present invention. Therefore, modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. An arc starting power supply circuit for an ion implanter, characterized in that: The power supply circuit includes an input circuit, an output circuit, a control circuit, and a display circuit. The input circuit includes a main control IC chip and three sets of transformer coils for powering the main control IC chip. The three sets of transformer coils include a primary coil and two secondary coils. One set of secondary coils is +20V and powers the main control IC chip. The other set of secondary coils generates three DC power supplies. The output voltages of the DC power supplies are +15V, -15V, and +5V, respectively, which power the control circuit and the cooling fan. The output circuit includes a circuit conversion circuit, a rectification and filtering anti-reverse circuit and a current and voltage feedback circuit.

2. The arc starting power supply circuit of an ion implanter according to claim 1, characterized in that: The circuit conversion circuit includes four groups of MOS tubes.

3. The arc starting power supply circuit of an ion implanter according to claim 1, characterized in that: The rectifier, filter and anti-reverse circuit includes an inductor L8, one end of the inductor L8 is electrically connected to the positive electrode of the capacitor CD1, the negative electrode of the capacitor CD1 is electrically connected to the second end of the inductor L8, and the capacitor CD1 is connected in parallel with the capacitor CD6, the resistor R11 and the resistor R12.

4. The arc starting power supply circuit of an ion implanter according to claim 1, characterized in that: The current and voltage feedback circuit includes an operational amplifier OPA, wherein terminal 2 of the operational amplifier OPA is electrically connected to one end of the resistor R29, the other end of the resistor R29 is electrically connected to terminal 6 of the operational amplifier OPA, and terminal 4 of the operational amplifier OPA is electrically connected to the -15V terminal.

5. The arc starting power supply circuit of an ion implanter according to claim 1, characterized in that: The control circuit includes three groups of CD4051B analog multiplexers, which respectively select the set voltage signal, current signal and overvoltage protection signal. Pins 9, 10 and 11 of the CD4051B analog multiplexers are selection pins.

6. The arc starting power supply circuit of an ion implanter according to claim 1, characterized in that: The display circuit includes a display control chip TC7107CKW, which converts analog signals into digital signals and displays analog quantities through a 3-digit digital tube.

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