Production device of ultra-pure electronic grade isopropanol

Abstract

The utility model provides a device for producing ultra-pure electronic-grade isopropanol, which is characterized in that an industrial-grade isopropanol raw material tank is connected with a first-stage dehydrating tower, and the first-stage dehydrating tower is connected with a first-stage buffer tank and then is connected with a heavy component removal tower; the top of the heavy component removal tower is connected with the light component removal tower; the bottom of the light component removal tower is connected with the secondary buffer tank; the secondary buffer tank is connected with the resin tower, the resin tower is connected with the filter, the filter is connected with the secondary dehydrating tower, and the secondary dehydrating tower is connected with the product tank. According to the device disclosed by the utility model, light components and heavy components are removed through light component removal and heavy component removal, qualified components are extracted after on-line component detection and then enter the mixed loading resin tower for ion exchange, zwitterions and cations are further removed, and finally, G5-grade electronic-grade isopropanol is obtained after particles are filtered and removed through the microporous folded filter element and secondary dehydration is carried out.

Description

Technical Field

[0001] The utility model relates to the field of wet electronic chemicals, and in particular focuses on a method for producing ultra-high-purity electronic-grade isopropyl alcohol that is efficient, stable and cost-effective. Background Art

[0002] Isopropyl alcohol (IPA) is an organic compound and an isomer of n-propyl alcohol. Also known as dimethyl carbinol and 2-propanol, it is also known in the industry as IPA. It is an important chemical product and raw material, primarily used in pharmaceuticals, cosmetics, plastics, fragrances, coatings, and other industries. Electronic-grade isopropyl alcohol is a general-purpose solvent-based electronic chemical. As a cleaning solvent, it is primarily used to remove surface moisture after wet-process cleaning in the wafer and chip industry, TFT-LCD industry, photovoltaic industry, and LED industry. Its cleanliness and impurity content have a significant impact on the electrical performance, yield, and reliability of integrated circuits. Therefore, controlling the moisture content, metallic impurities, and particle size of electronic-grade isopropyl alcohol is crucial.

[0003] Existing technology primarily controls particle size through three key measures: First, environmental control ensures a suitable ultra-clean environment to meet the production requirements of reagents of varying levels; second, process optimization, employing a continuous, closed production system to minimize contact between reagents and the outside world, while also employing ultra-clean polishing equipment and filtering materials through precision filters; and finally, ensuring that finished products are packaged in a clean environment, with packaging containers pre-cleaned. These measures, through strengthened management and hardware investment, can effectively control particle size.

[0004] However, simple management and hardware investment often fail to meet the requirements for controlling metal ions and other anions in electronic-grade isopropyl alcohol. A completely new production process optimization is necessary. Currently, metal ion removal primarily relies on ion exchange and distillation. While ion exchange effectively removes metal impurities, the exchange of active groups in the ion exchange resin with metal ions produces moisture, increasing the moisture content in the solvent and thus affecting product quality. Distillation, on the other hand, is energy-intensive and requires specialized equipment materials, which can easily introduce new impurities.

[0005] Currently, metal removal is primarily achieved through ion exchange and distillation. Ion exchange removes metal impurities by exchanging active groups on ion exchange resins with metal anions and cations in organic solvents. The active groups in ion exchange resins are primarily hydrogen ions and hydroxide ions. These two ions combine to form water, which increases the solvent's moisture content. The more metal ions in the solvent, the more water generated after ion exchange. This water remains on the chip surface, making it difficult to evaporate and causing corrosion. Distillation not only consumes a lot of energy but also places special demands on the material of the distillation equipment. Standard stainless steel can lead to increased levels of iron and chromium, while ordinary glass can increase levels of sodium and silicon. Each of these methods has its own advantages and disadvantages. Summary of the Invention

[0006] In light of the shortcomings of existing technologies, this utility model aims to provide a method for producing ultra-high-purity electronic-grade isopropyl alcohol with low production costs, a simple and easily controllable process, and stable product quality. This method uses industrial-grade isopropyl alcohol as the raw material and, through breakthroughs in key technologies for controlling moisture, metal ion, particle size, and organic impurity content, reduces the metal ion concentration of the electronic-grade isopropyl alcohol to below 10 ppt while also effectively reducing particle size and moisture content.

[0007] In order to achieve the above-mentioned purpose, the present invention adopts the following process devices and corresponding production process methods:

[0008] A production device for ultra-high-purity electronic-grade isopropyl alcohol, comprising an industrial-grade isopropyl alcohol raw material tank, a primary dehydration tower A, a primary dehydration tower B, a primary buffer tank, a heavy-phase removal tower, a light-phase removal tower, a gas chromatograph, a secondary buffer tank, a resin tower A, a resin tower B, a filter A, a filter B, a secondary dehydration tower A, a secondary dehydration tower B, and a finished product tank;

[0009] The industrial-grade isopropyl alcohol raw material tank is connected to the first-stage dehydration tower, which is then connected to the first-stage buffer tank and then to the dehydration tower;

[0010] The top of the heavy removal tower is connected to the light removal tower;

[0011] The bottom of the light-removal tower is connected to the secondary buffer tank; the secondary buffer tank is connected to the resin tower, the resin tower is connected to the filter, the filter is connected to the secondary dehydration tower, and the secondary dehydration tower is connected to the product tank.

[0012] The first-stage dehydration tower is divided into first-stage dehydration tower A and first-stage dehydration tower B, one of which is in standby mode and the other in use. One of the towers uses high-temperature nitrogen to dehydrate and restore performance while the other tower is in operation.

[0013] The bottom of the light-removal tower is connected to a gas chromatograph, and the gas chromatograph is connected to a primary buffer tank and a secondary buffer tank respectively.

[0014] The resin tower is divided into resin tower A and resin tower B, one for backup and the other for use; the materials with anions and cations removed from the resin tower continue to enter the filter.

[0015] The filter is divided into filter A and filter B, one for backup and the other for use.

[0016] The secondary dehydration tower is divided into secondary dehydration tower A and secondary dehydration tower B, one for backup and the other for use.

[0017] A production process for ultra-high-purity electronic-grade isopropyl alcohol comprises the following steps:

[0018] (1) Dehydration of mixed packing: Industrial grade isopropyl alcohol is passed through the mixed packing adsorption tower at a certain flow rate. The packing can remove most of the water in the raw materials;

[0019] (2) Two-stage distillation: the dehydrated isopropyl alcohol enters the de-heavy tower (the first distillation tower for the first distillation) and the de-light tower (the second distillation tower for the second distillation) in sequence for cyclic distillation, removing volatile components and heavy components such as metal salts by separating light and heavy components;

[0020] (3) Online purity detection: Use a specific detection method to analyze the purity of the distilled material. When the purity reaches 99.99% or above, proceed to the next impurity removal process. Otherwise, return it to the buffer tank before the tower and adjust the tower parameters (including but not limited to reflux ratio, feed position, etc.) until the purity of the material after secondary distillation reaches 99.99% or above;

[0021] (4) Resin filtration: The distilled isopropyl alcohol is sent to the resin adsorption tower to further remove anions and cations in the isopropyl alcohol through ion exchange;

[0022] (5) Circulation filtration: The isopropyl alcohol after resin filtration is circulated and filtered to remove nano-sized particles in the isopropyl alcohol.

[0023] (6) Secondary dehydration of mixed filler: Since water will be generated in the process of removing anions and cations, it is necessary to perform secondary dehydration and dehydrate it with mixed resin again. The amount of dehydration this time is less than that of the first dehydration and the process is faster, and finally G5 grade electronic grade isopropyl alcohol is obtained.

[0024] In the step (1), the purity of the industrial isopropyl alcohol raw material is 99.9%-99.95%, the water content is ≤0.1%, the acetone content is ≤0.01%, and the sulfide content is ≤1ppm; the adsorption dehydration process adopts a mixed adsorbent for adsorption dehydration, and one adsorption tower is used and the other is reserved, and one adsorption tower is used for adsorption while the other is regenerated, adsorbing water molecules in the isopropyl alcohol at room temperature and desorbing them at high temperature to achieve regeneration.

[0025] The types of mixed fillers in step (1) are 3A molecular sieve, polyacrylic acid cross-linked resin, and acrylonitrile-vinyl acetate copolymer saponified resin (this resin is self-processed: acrylonitrile-vinyl acetate copolymer is heated to 50°C and stirred in 40% sodium hydroxide solution for 24 hours for saponification). The filling method is that the upper layer filler is acrylonitrile-vinyl acetate copolymer saponified resin, the middle layer filler is polyacrylic acid cross-linked resin, and the lower layer filler is 3A molecular sieve.

[0026] In some embodiments, the volume ratio of the upper, middle, and lower packings is 1:2-4:3-6, and the diameter ratio of the upper, middle, and lower packing beds is 1:1-2:2-4;

[0027] In some preferred embodiments, the volume ratio of the upper, middle and lower fillers is 1:2:3, and the diameter ratio of the upper, middle and lower filler beds is 1:1:2.

[0028] Using the above conditions, the material is passed through the water-absorbing material from bottom to top to dehydrate the industrial-grade isopropyl alcohol. Moisture detection shows that the moisture content of the isopropyl alcohol can be controlled below 20ppm after dehydration. This dehydration is to prevent moisture from corroding subsequent pipelines and interfering with the adsorption process.

[0029] During the distillation process of the deweighting tower in step (2), the feed pressure is 3.0-5.0 bar, the feed is at room temperature, the reflux ratio is 13-20, the tower top pressure is 0.05-0.085 MPa, and the tower top extraction ratio is 0.8-1.5;

[0030] During the distillation process of the light-removal tower, the feed pressure is 2.0-5.0 bar, the feed temperature is 80-85°C, the reflux ratio is 8-15, the tower top pressure is 1.8-3.5 bar, and the tower bottom extraction ratio is 0.7-1.2.

[0031] In step (2), the light component removal process adopts low-pressure steam heating. After removing the light components in the material, the impurity content of acetone and ether is ≤10ppm; the evaporator, tower, reflux tank and the parts in contact with the material are all made of BA and EP grade stainless steel, and the operating temperature is 85±5℃.

[0032] In step (2), the deweighting process adopts low-pressure steam heating. After removing the heavy components in the material, the content of esters, high boiling points and anionic impurities is ≤1ppm. The evaporator, tower, reflux tank and the parts in contact with the material as well as the pipeline are all made of EP grade stainless steel, and the operating temperature is 85~100℃.

[0033] In some preferred schemes, the feed pressure of the first-stage distillation tower in step (2) is 3.5 bar, the feed is at room temperature, the feed gas-liquid state is liquid phase, the feed position is the 14th tower plate, the theoretical number of plates of the distillation tower is 56, the packing type is theta ring packing, the reflux ratio is 13, the tower top pressure is 0.05-0.085 MPa, the tower top extraction ratio is 0.8, and the first-stage distillation equipment, pipelines and instruments that contact the material are all made of BA grade stainless steel mechanically polished, and the stainless steel material is mechanically or electrolytically polished with a roughness of ≤0.6 μm. The feed pressure for the second-stage distillation tower is 2.5 bar, the feed temperature is 80-85°C, the feed gas-liquid state is liquid, the feed position is the 35th tray, the distillation tower has 50 theoretical plates, the packing type is theta ring, the reflux ratio is 8, the tower top pressure is 1.8 bar, and the tower bottom extraction ratio is 0.81. The second-stage distillation equipment, piping, and instrumentation in contact with the material are all made of EP-grade stainless steel with an electrolytic polishing process, and the stainless steel material is electrolytically polished to a roughness of ≤0.2μm. After the secondary distillation, the isopropyl alcohol content reaches 99.99%, with the anion concentration controlled below 10ppb and the single cation concentration below 30ppt.

[0034] In step (3), the purity analysis adopts the chromatography detection method, and its detection conditions are as follows: chromatographic column: SH-Rtx-624, column temperature program: 40-150℃, 5-10℃ / min, split injection, and the organic content of the distilled isopropanol is detected. When its organic purity reaches 99.99% or more, the next step is continued.

[0035] In step (4), the removal of anions and cations is carried out by exchange removal using mixed resins, the types of mixed resins are LX318 and ER80, and the filling method is that the upper layer filler is LX318 and the lower layer filler is ER80;

[0036] When the working pressure of the resin tower is 2-5 bar and the working temperature is 25-30℃, the removal of anions and cations is achieved through the resin cation exchange.

[0037] In some preferred schemes, in step (4), different resins are used for exchange removal of anions and cations. Experiments have shown that the types of mixed resins are LX318 and ER80, and the filling method is that the upper layer filler is LX318 and the lower layer filler is ER80. The volume ratio of the upper and lower fillers is 1:3. When the working pressure of the resin tower is 2 bar and the working temperature is 25°C, after the resin cation-cation exchange, the anion concentration in the isopropanol is controlled below 50 ppb and the single cation concentration is controlled below 30 ppt; however, the water content exceeds 20 ppm, and the dehydration process needs to be carried out again.

[0038] Step (4) resin adsorption is filled with ER80 and LX318 resins. The ion exchange resin itself contains a large number of low-valent ions. When working, the resin has a strong affinity for the high-valent ions in the material, and will release the low-valent ions inside and adsorb the high-valent ions in the material. The ions inside the cation exchange resin are usually H + Low-valent ions such as OH - After adsorption, the anion concentration in isopropyl alcohol is less than 30ppb, and the cation concentration is less than 10ppt, but the moisture content of the material will increase after ion exchange.

[0039] The isopropanol after resin filtration in step (5) is then circulated and filtered, using microporous folded filter elements with pore sizes of 120-100 nm, 50-40 nm, and 10-5 nm for series filtration.

[0040] In some preferred embodiments, the circulating filtration in step (5) includes three-stage microporous folded filter elements of 100 nm, 50 nm, and 10 nm in series, and each stage of the filter is equipped with a pressure differential gauge for the filter at that stage. When the pressure differential reaches a certain value, the filter element is replaced to ensure the filtration efficiency and product quality. The concentration of isopropyl alcohol after filtration is less than 50 particles / ml for particles larger than 0.2 microns, less than 100 particles / ml for particles larger than 0.1 microns, and less than 200 particles / ml for particles larger than 0.05 microns.

[0041] The mixed filler in step (6) is polyacrylic acid cross-linked resin and acrylonitrile-vinyl acetate copolymer saponified resin, and the filling method is that the upper layer filler is polyacrylic acid cross-linked resin and the lower layer filler is acrylonitrile-vinyl acetate copolymer saponified resin.

[0042] The volume ratio of the upper and lower packings is 1:2, and the diameter ratio of the upper and lower packing beds is 1:1. In some preferred embodiments, the secondary dehydration performed in step (6) is mainly for the water introduced during the ion exchange process. Therefore, the water introduced during the process is relatively small. Therefore, the mixed packing used is simpler than the primary dehydration. After the dehydration of the mixed packing, the water content of the isopropyl alcohol after dehydration can also be controlled below 20 ppm. This is because the load of this treatment is small and the water removal capacity requirement is not high.

[0043] In summary, the present invention, through a series of optimization measures, effectively controls the moisture, metal ion, particle size, and organic impurity content in electronic-grade isopropyl alcohol, thereby improving product quality and stability. Furthermore, the method offers low production costs and a simple, easily controllable process, providing an efficient and reliable method for preparing electronic-grade isopropyl alcohol for the integrated circuit industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1This is a diagram of the production unit for ultra-high-purity electronic-grade isopropyl alcohol. The diagram includes: 1. Industrial-grade isopropyl alcohol feed tank; 2. Primary dehydration tower; 3. Primary dehydration tower B; 4. Primary buffer tank; 5. Light-to-weight removal tower; 6. Heavy-to-weight removal tower; 7. Gas chromatography-mass spectrometer; 8. Secondary buffer tank; 9. Resin tower A; 10. Resin tower B; 11. Filter A; 12. Filter B; 13. Secondary dehydration tower; 14. Secondary dehydration tower B; 15. Finished product tank. DETAILED DESCRIPTION

[0045] The present invention will be further described below with reference to the following embodiments.

[0046] The analytical instruments for isopropyl alcohol in the embodiment include ICP-MS for measuring metal ions, ICS6000 for measuring anions, gas chromatograph for measuring organic content, liquid phase particle counter for measuring particle size, and moisture meter for measuring water.

[0047] Example 1

[0048] like Figure 1 The purification device for electronic-grade isopropyl alcohol shown in the figure includes an industrial-grade isopropyl alcohol raw material tank 1, a primary dehydration tower A2, a primary dehydration tower B3, a primary buffer tank 4, a heavy removal tower 5, a light removal tower 6, a gas chromatograph 7, a secondary buffer tank 8, a resin tower A9, a resin tower B 10, a filter A 11, a filter B 12, a secondary dehydration tower A 13, a secondary dehydration tower B 14, and a finished product tank 15; wherein there are two pipes below the raw material tank 1, one is for the tank truck to store the incoming material into the raw material tank 1, and the other is for the raw material tank 1 to connect to the primary dehydration tower. The primary dehydration tower is divided into the primary dehydration tower A2 and the primary dehydration tower B. 3, one set is in standby mode, and one set is in operation while the other set uses high-temperature nitrogen for dehydration and performance recovery. After the material comes out of the primary dehydration tower, it enters the buffer tank and is then pumped into the dehydration tower 5 to remove the heavy components. The top component of the dehydration tower 5 enters the light components removal tower 6 to remove the light components. The bottom component passes the gas chromatography test and enters the secondary buffer tank 8. Otherwise, it is returned to the primary buffer tank 4 for re-refining. The material in the secondary buffer tank 8 continues to enter the resin tower to remove anions and cations. The resin tower is divided into resin tower A 9 and resin tower B 10, and the two are in standby mode. The material from the resin tower that has removed anions and cations continues to enter the filter, which is divided into filter A 11 and filter B 12, and the two are in standby mode. The material from the fine filter that has removed particles continues to enter the secondary dehydration tower 13 for secondary dehydration. The secondary dehydration tower 13 is divided into secondary dehydration tower A 13 and secondary dehydration tower B 14, and the two are in standby mode. The qualified electronic-grade isopropyl alcohol finally enters the product tank 15.

[0049] The primary dehydration tower A2 and the primary dehydration tower B3 are designed to remove a large amount of water in advance to prevent the water from corroding subsequent equipment and preventing the water from affecting distillation and metal removal. The primary dehydration tower adopts a three-layer packing design to remove water in different stages and improve dehydration efficiency.

[0050] The gas chromatograph is used to detect whether the light and heavy components in the isopropyl alcohol after distillation have been completely removed (that is, whether the organic purity of the isopropyl alcohol has reached 99.99%). If the purity is qualified, it will be sent to the next purification process, which is responsible for re-distillation and impurity removal, and optimization of the distillation process parameters.

[0051] The resin tower adopts a one-in-one-standby design. When one is in use, the other one removes ions to restore its performance.

[0052] The filter adopts a one-in-one-standby design. When one filter is in use, the other filter removes particles to restore its performance.

[0053] The secondary dehydration tower is used to remove moisture brought out from the resin tower. Because its water content is low, the dehydration load is relatively small. This secondary dehydration tower adopts a two-layer filler design to remove moisture in different stages and improve dehydration efficiency.

[0054] Example 2

[0055] The purification device in Example 1 was used to purify technical grade isopropyl alcohol:

[0056] After analysis and testing, the impurity contents of the industrial-grade isopropyl alcohol to be purified are:

[0057] The electronic isopropyl alcohol specifications are: organic purity ≥ 99.99%, moisture ≤ 50 ppb, chloride ion ≤ 0.05 ppm, particle size: 0.2 μm: ≤ 50 pcs / mL, 0.1 μm: ≤ 100 pcs / mL, 0.05 μm: ≤ 200 pcs / mL.

[0058] The purification process comprises the following steps:

[0059] (1) Dehydration of mixed packing: industrial grade isopropyl alcohol is passed through a mixed packing adsorption tower at a certain flow rate. The packing can remove most of the water in the raw material. The types of mixed packing are 3A molecular sieve, polyacrylic acid cross-linked resin, and acrylonitrile-vinyl acetate copolymer saponified resin. The packing method is that the upper packing is acrylonitrile-vinyl acetate copolymer saponified resin, the middle packing is polyacrylic acid cross-linked resin, and the lower packing is 3A molecular sieve. The volume ratio of the upper, middle and lower packing is 1:2:3, and the diameter ratio of the upper, middle and lower packing beds is 1:1:2. Under the above conditions, the material is passed through the water-absorbing material from bottom to top to dehydrate the industrial grade isopropyl alcohol. The moisture content of the isopropyl alcohol after dehydration can be controlled below 20ppm through moisture detection. This dehydration is to prevent moisture from corroding the subsequent pipelines and interfering with the adsorption process.

[0060] (2) Two-stage distillation: the dehydrated isopropanol enters the light-removal tower and the heavy-removal tower in turn for cyclic distillation, and the volatile components and heavy components such as metal salts are removed by separating the light and heavy components; the feed pressure of the first-stage distillation tower is 3.5 bar, the feed is at room temperature, the feed gas-liquid state is liquid phase, the feed position is the 14th tower plate, the theoretical number of plates of the distillation tower is 56, the packing type is theta ring packing, the reflux ratio is 13, the tower top pressure is 2.5 bar, the tower top extraction ratio is 0.8, the first-stage distillation equipment, pipelines and instruments that come into contact with the material are all made of stainless steel or fluorine-lined materials, and the BA grade stainless steel material is mechanically polished with a roughness of ≤0.6um. The feed pressure for the second-stage distillation tower is 2.5 bar, the feed temperature is 80-85°C, the feed gas-liquid state is liquid, the feed position is the 35th tray, the distillation tower has 50 theoretical plates, the packing type is theta ring, the reflux ratio is 8, the tower top pressure is 1.8 bar, and the tower bottom extraction ratio is 0.81. The second-stage distillation equipment, piping, and instrumentation in contact with the material are all made of stainless steel or fluorine-lined materials. The stainless steel material is BA-grade electrolytically polished to a roughness of ≤0.2μm. After secondary distillation, the isopropyl alcohol content reaches 99.99%, with the anion concentration controlled below 10ppb and the single cation concentration below 30ppt.

[0061] (3) Online purity detection: Use a specific detection method (chromatographic column: SH-Rtx-624, column temperature program: 40-150℃, 10℃ / min, split injection) to analyze the purity of the material after distillation. Only when the purity reaches 99.99% or above will the next step of impurity removal be continued. Otherwise, it will be returned to the buffer tank before the tower, and the tower parameters will be adjusted until the purity of the material after secondary distillation reaches 99.99% or above. Use gas chromatography to detect the organic content of isopropanol after distillation. When its organic purity reaches 99.99% or above, proceed to the next step.

[0062] (4) Resin filtration: The distilled isopropyl alcohol is sent to the resin adsorption tower to further remove the anions and cations in the isopropyl alcohol by ion exchange. Different resins are used for exchange and separation of anions and cations. Experiments show that the types of mixed resins are LX318 and ER80, and the filling method is that the upper layer filler is LX318 and the lower layer filler is ER80. The volume ratio of the upper and lower fillers is 1:3. When the working pressure of the resin tower is 2 bar and the working temperature is 25°C, after the resin cation exchange, the anion concentration in the isopropyl alcohol is controlled below 50ppb, and the single cation concentration is controlled below 30ppt; however, the water content exceeds 20ppm, and the dehydration process needs to be carried out again.

[0063] (5) Circulation filtration: The isopropyl alcohol after resin filtration enters the intermediate tank or the finished product tank for circulation filtration to remove nano-sized particles in the isopropyl alcohol. The isopropyl alcohol after resin filtration in step (5) is then circulated and filtered. The filtration uses a microporous folded filter element with a pore size of 100nm, 50nm, and 10nm. The concentration of the filtered isopropyl alcohol is greater than 6 particles / ml of 0.2 micron particles, 45 particles / ml of 0.1 micron particles, and 61 particles / ml of 0.05 micron particles.

[0064] (6) Secondary dehydration of mixed packing: Since water will be generated during the removal of anions and cations, it is necessary to perform secondary dehydration. The types of mixed packing are polyacrylic acid cross-linked resin and acrylonitrile-vinyl acetate copolymer saponified resin. The packing method is that the upper packing is polyacrylic acid cross-linked resin and the lower packing is acrylonitrile-vinyl acetate copolymer saponified resin. The volume ratio of the upper and lower packing is 1:2, and the diameter ratio of the upper and lower packing beds is 1:1. Under the above conditions, industrial-grade isopropyl alcohol is dehydrated. The moisture content of the isopropyl alcohol after dehydration can also be controlled below 20ppm after moisture detection. This is because the load of this treatment is small and the water removal capacity requirement is not high. The dehydration amount is less than the first dehydration and the process is fast, and finally G5 grade electronic-grade isopropyl alcohol is obtained.

Claims

1. A production device for ultra-high purity electronic grade isopropyl alcohol, characterized in that: It includes an industrial-grade isopropyl alcohol raw material tank (1), a primary dehydration tower A (2), a primary dehydration tower B (3), a primary buffer tank (4), a heavy removal tower (5), a light removal tower (6), a gas chromatograph (7), a secondary buffer tank (8), a resin tower A (9), a resin tower B (10), a filter A (11), a filter B (12), a secondary dehydration tower A (13), a secondary dehydration tower B (14), and a finished product tank (15); The industrial-grade isopropyl alcohol raw material tank (1) is connected to the first-stage dehydration tower, which is then connected to the first-stage buffer tank (4) and then to the deweight removal tower (5); The top of the heavy removal tower (5) is connected to the light removal tower (6); The bottom of the light-removal tower (6) is connected to the secondary buffer tank (8); the secondary buffer tank (8) is connected to the resin tower, the resin tower is connected to the filter, the filter is connected to the secondary dehydration tower, and the secondary dehydration tower is connected to the finished product tank (15).

2. The production device of ultra-high purity electronic grade isopropyl alcohol according to claim 1, characterized in that The first-stage dehydration tower is divided into a first-stage dehydration tower A (2) and a first-stage dehydration tower B (3), one of which is in standby mode and the other in use. During operation, one of the towers uses high-temperature nitrogen to dehydrate and restore performance.

3. The production device of ultra-high purity electronic grade isopropyl alcohol according to claim 1, characterized in that The bottom of the light-removal tower (6) is connected to a gas chromatograph (7), and the gas chromatograph (7) is connected to a primary buffer tank (4) and a secondary buffer tank (8) respectively.

4. The production device of ultra-high purity electronic grade isopropyl alcohol according to claim 1, characterized in that The resin tower is divided into resin tower A (9) and resin tower B (10), one for backup and the other for use; the material from which anions and cations are removed by the resin tower continues to enter the filter.

5. The production device of ultra-high purity electronic grade isopropyl alcohol according to claim 1, characterized in that The filter is divided into filter A (11) and filter B (12), one for backup and the other for use.

6. The production device of ultra-high purity electronic grade isopropyl alcohol according to claim 1, characterized in that The secondary dehydration tower is divided into a secondary dehydration tower A (13) and a secondary dehydration tower B (14), one for backup and the other for use.

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