Device for recycling waste gas of auxiliary chamber in argon recycling process

Abstract

The utility model discloses a device for recycling waste gas in an auxiliary chamber in an argon recycling process, which belongs to the technical field of purification and recycling of inert gas and comprises a support. The upper end of the support is provided with an auxiliary chamber recycling and gas supplementing assembly used for recycling argon tail gas and conveying low-pressure supplementary gas, the upper end of the support is provided with a main chamber recycling and pressurizing assembly used for recycling and conveying the argon tail gas, and the main chamber recycling and pressurizing assembly is connected with the output end of a main chamber of the single crystal furnace body; the auxiliary chamber recycling and air supplying assembly comprises an air exhausting and filtering assembly and a conveying and air supplying assembly. Through the mode, the production cost can be reduced, compressed air purified by an air purification skid does not need to be used as make-up gas any more, adverse effects caused by factors such as gas supply are avoided, the tolerance degree of a system to instant excessive oxygen content is increased, and the argon recovery amount of a hydrogen-free argon recovery process is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of purification and recovery of inert gas, in particular to a device for recovering waste gas from a secondary chamber in an argon recovery process. Background Art

[0002] In the hydrogen-free argon recovery process, the primary feed gas is argon exhaust from the single crystal furnace's main chamber, extracted by a vacuum pump. Without the introduction of hydrogen as an intermediate reaction gas, the CO+O2 in the feed gas is catalytically consumed to consume the O2 in the feed gas. Existing hydrogen-free argon recovery technology incorporates a make-up air system before the gasholder. The air flow control valve in this make-up air system is interlocked with the oxygen analyzer in the main process, allowing for a small amount of air to be added in the event of insufficient O2 levels. To prevent leakage in the hydrogen-free argon recovery system itself, the waste gas collected by the auxiliary pump can be incorporated into the system.

[0003] Among many existing technologies, Chinese patent application CN202519029U discloses an argon recovery and purification device for single crystal silicon production, which includes: a coarse oil filter for coarse oil filtering of argon collected from a single crystal furnace; an argon compressor and a water cooler are connected in sequence after the coarse oil filter, and a high-precision oil removal system for removing oil mist and solid particles in the argon is connected thereto; a primary catalytic reactor connected to the high-precision oil removal system through a heater and a regenerator in sequence, and a secondary catalytic reactor connected to the primary catalytic reactor through the regenerator; a group of room temperature adsorption units consisting of at least two adsorbers are connected to the secondary catalytic reactor.

[0004] However, this patented technology controls the oxygen content in the device by adding a mixed gas with a certain oxygen concentration, which increases the process consumption. It also requires the use of clean argon gas to reduce the oxygen concentration in the system to the required level through pressurization and depressurization operations, which is easily affected by the adverse effects of gas supply.

[0005] Based on this, the utility model designs a device for recovering and using the waste gas from the auxiliary chamber in the argon recovery process to solve the above problems. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the prior art, the utility model provides a device for recovering waste gas from a secondary chamber in an argon recovery process.

[0007] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0008] A device for recovering waste gas from a sub-chamber in an argon recovery process comprises a bracket, a single crystal furnace body is fixedly mounted on the right upper end of the bracket, a sub-chamber recovery and gas supply assembly for recovering and treating argon tail gas and transmitting low-pressure supplementary gas is mounted on the upper end of the bracket, a main chamber recovery and pressurization assembly for recovering, treating and transmitting argon tail gas is mounted on the upper end of the bracket, the main chamber recovery and pressurization assembly is connected to the output end of the main chamber of the single crystal furnace body; the sub-chamber recovery and gas supply assembly comprises an exhaust filter assembly and a transmission and gas supply assembly; the exhaust filter assembly is mounted on the upper end of the bracket, the transmission and gas supply assembly is mounted on the upper end of the bracket, the exhaust filter assembly is connected to the transmission and gas supply assembly, the exhaust filter assembly is connected to the output end of the sub-chamber of the single crystal furnace body, and the transmission and gas supply assembly is connected to the main chamber recovery and pressurization assembly;

[0009] Furthermore, the exhaust filtration assembly includes an auxiliary pump, a self-cleaning filter, a three-way valve, an activated carbon adsorption box, a fan and a three-way valve; the auxiliary pump is fixedly installed at the upper end of the bracket, the input end of the auxiliary pump is fixedly connected to the output end of the auxiliary chamber of the single crystal furnace body, the output end of the auxiliary pump is fixedly connected to the input end of the self-cleaning filter, the self-cleaning filter is fixedly installed at the upper end of the bracket, the three-way valve is fixedly installed on the input pipeline of the self-cleaning filter, the front end output port of the three-way valve is fixedly connected to the activated carbon adsorption box, the activated carbon adsorption box is fixedly installed at the upper end of the bracket, the output end of the self-cleaning filter is fixedly connected to the input end of the fan, the fan is fixedly installed at the upper end of the bracket, the fan is connected to the transmission and air supply assembly, and the three-way valve is fixedly installed on the output pipeline of the fan.

[0010] Furthermore, the transmission and air supply assembly includes a gas cabinet 1, a transmission pipe and a fan 3; the gas cabinet 1 is fixedly installed on the upper end of the bracket, the input end of the gas cabinet 1 is fixedly connected to the output end of the fan 1, the output end of the gas cabinet 1 is fixedly connected to the input end of the fan 3, the fan 3 is fixedly installed on the upper end of the bracket, the front port of the transmission pipe is fixedly connected to the output end of the gas cabinet 1, and the rear port of the transmission pipe is connected to the main chamber recovery boosting assembly.

[0011] Furthermore, a one-way valve is fixedly installed on the transmission pipe.

[0012] Furthermore, the main chamber recovery and boosting assembly includes an air pump, a second self-cleaning filter, a third three-way valve, a second activated carbon adsorption box, a fourth fan, a fourth three-way valve, a second gas tank and a compressor; the air pump is fixedly installed at the upper end of the bracket, and the output end of the air pump is fixedly connected to the input end of the second self-cleaning filter, the second self-cleaning filter is fixedly installed at the upper end of the bracket, and the input pipeline of the second self-cleaning filter is fixedly installed with a third three-way valve, and the front end output port of the third three-way valve is fixedly connected to the second activated carbon adsorption box, the second activated carbon adsorption box is fixedly installed at the upper end of the bracket, the output end of the second self-cleaning filter is fixedly connected to the input end of the fourth fan, the fourth fan is fixedly installed at the upper end of the bracket, and the output pipeline of the fourth fan is fixedly installed with a third three-way valve, the input end of the second gas tank is fixedly connected to the output end of the fourth fan, the second gas tank is fixedly installed at the upper end of the bracket, the output end of the second gas tank is fixedly connected to the input end of the compressor, the input end of the compressor is fixedly connected to the transmission pipe, and the compressor is fixedly installed at the upper end of the bracket.

[0013] Furthermore, a first-stage consumable carbon molecular sieve is provided inside the self-cleaning filter 1 and the self-cleaning filter 2.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. When the present invention is used, when it is necessary to recover the argon tail gas, the exhaust filter component extracts the argon tail gas collected in the auxiliary chamber of the single crystal furnace body, filters it, and then transmits it through the air supply component. One path is used to supplement oxygen for the raw gas, without adding a supplementary air device, and the other path is injected into the CO purification unit of the argon recovery system for regeneration and replacement of the original air supply. After the catalyst is reduced and deoxygenated, the regenerated gas flows back to the inlet of the argon recovery system; the main chamber recovery and boosting component extracts the argon tail gas collected in the main chamber of the single crystal furnace body, filters the argon tail gas, and sends it to the purification skid for argon tail gas purification; the exhaust filter component cleans the filter component through reverse airflow, thereby improving the utilization rate;

[0015] 2. When the present invention is used, when it is necessary to treat the argon exhaust gas, the auxiliary pump extracts the argon exhaust gas collected in the auxiliary chamber of the single crystal furnace, and the auxiliary pump drives the argon exhaust gas into the self-cleaning filter 1. The three-way valve 1 is in a straight-line passage state, and the self-cleaning filter 1 is filtered to absorb the impurities, solids and gases in the argon exhaust gas. The fan 1 continues to absorb the gas, and the three-way valve 2 is in a straight-line passage state, and the fan 1 drives the gas into the transmission and air supply component; when it is necessary to clean the filter screen in the self-cleaning filter 1, the knobs of the three-way valve 1 and the three-way valve 2 are turned to make the two ends of the self-cleaning filter 1 flow to the activated carbon adsorption box 1 and the outside air, and the fan 1 is driven in the reverse direction to absorb air from the three-way valve 2 and transmit it to the self-cleaning filter 1, and the filter screen is cleaned by airflow. The generated solid and gas mixture passes through the three-way valve 2 and enters the activated carbon adsorption box 1 for subsequent cleaning treatment, and the treated gas is discharged out of the box;

[0016] 3. When the present invention is used, when it is necessary to process the filtered argon tail gas, the blower 1 transmits the argon tail gas into the gas cabinet 1 for collection, a part of which is used as low-pressure supplementary gas for the main process of the main chamber through the transmission pipe, and a part is driven by the blower 3 to enter the CO regeneration unit, so as to realize the supplementation of a small amount of air when the O2 content in the main process of the main chamber is insufficient, thereby improving the operation efficiency of the entire device. Under the condition of avoiding leakage of the hydrogen-free argon recovery system itself, the waste gas collected by the auxiliary pump can be incorporated into the system, which has the ability to process more waste argon gas containing O2; the use of a one-way valve can reduce the impact of gas reflux to the gas cabinet 1 during the transmission of the argon tail gas to the recovery and pressurization component of the main chamber, thereby improving the utilization effect of the supplementary O2;

[0017] 4. When the utility model is used, when it is necessary to recover and process the argon exhaust gas, the air pump absorbs the argon exhaust gas collected in the main chamber of the single crystal furnace, transmits it to the self-cleaning filter 2 for filtration and treatment, transmits it to the gas cabinet 2 for collection and storage through the fan 4, and is pressurized by the compressor and sent to the purification skid for argon exhaust gas purification; when it is necessary to clean the filter screen in the self-cleaning filter 2, turn the knobs of the three-way valve 3 and the three-way valve 4 to allow the two ends of the self-cleaning filter 2 to flow to the activated carbon adsorption box 2 and the outside air, and the fan 4 absorbs air from the four sides of the three-way valve to generate airflow to clean the filter screen of the self-cleaning filter 2, and the generated sediment and gas are mixed and enter the activated carbon adsorption box 2 for subsequent cleaning treatment; adding a first-level consumable carbon molecular sieve, using the principle of C+O2=CO2 / CO, improves the O2 processing capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be derived from these drawings without inventive effort.

[0019] Figure 1 The utility model is a three-dimensional device for recovering waste gas from the auxiliary chamber in the argon recovery process. Figure 1 ;

[0020] Figure 2 This is a front view of a device for recovering waste gas from a secondary chamber in an argon recovery process of the present invention;

[0021] Figure 3 This is a right side view of a device for recovering waste gas from a secondary chamber in an argon recovery process according to the present invention;

[0022] Figure 4 The utility model is a three-dimensional device for recovering waste gas from the auxiliary chamber in the argon recovery process. Figure 2 ;

[0023] Figure 5 The utility model is a three-dimensional device for recovering waste gas from the auxiliary chamber in the argon recovery process. Figure 3 .

[0024] The numbers in the figure represent:

[0025] 1. Bracket; 2. Auxiliary chamber recovery and air supply assembly; 21. Air extraction and filtration assembly; 211. Auxiliary pump; 212. Self-cleaning filter 1; 213. Three-way valve 1; 214. Activated carbon adsorption box 1; 215. Fan 1; 216. Three-way valve 2; 22. Transmission and air supply assembly; 221. Gas cabinet 1; 222. Transmission pipe; 223. Fan 3; 3. Main chamber recovery and boosting assembly; 31. Air pump; 32. Self-cleaning filter 2; 33. Three-way valve 3; 34. Activated carbon adsorption box 2; 35. Fan 4; 36. Three-way valve 4; 37. Gas cabinet 2; 38. Compressor. DETAILED DESCRIPTION

[0026] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0027] The terms “left,” “right,” “front,” “back,” “up,” and “down” mentioned in the following description are oriented in the viewing direction of the front view.

[0028] Example 1: In some embodiments, please refer to the accompanying drawings of the specification. Figure 1-Figure 5 , a device for recovering waste gas from a secondary chamber in an argon recovery process, comprising a bracket 1, a single crystal furnace body being fixedly mounted on the upper right end of the bracket 1, a secondary chamber recovery and gas supply assembly 2 for recovering and processing argon tail gas and transmitting low-pressure supplementary gas being mounted on the upper end of the bracket 1, a main chamber recovery and pressurizing assembly 3 for recovering, processing and transmitting argon tail gas being mounted on the upper end of the bracket 1, the main chamber recovery and pressurizing assembly 3 being connected to the output end of the main chamber of the single crystal furnace body; the secondary chamber recovery and gas supply assembly 2 comprises an exhaust filter assembly 21 and a transmission and gas supply assembly 22;

[0029] The exhaust filter assembly 21 is installed at the upper end of the bracket 1, and the transmission and gas supply assembly 22 is installed at the upper end of the bracket 1. The exhaust filter assembly 21 and the transmission and gas supply assembly 22 are connected. The exhaust filter assembly 21 is connected to the output end of the auxiliary chamber of the single crystal furnace body, and the transmission and gas supply assembly 22 is connected to the main chamber recovery booster assembly 3.

[0030] When the present invention is used, when it is necessary to recover the argon tail gas, the exhaust filter component 21 extracts the argon tail gas collected in the auxiliary chamber of the single crystal furnace body, filters it, and then transmits it through the air supply component 22. One path is used to oxygenate the raw gas without adding an air supply device, and the other path is injected into the CO purification unit of the argon recovery system for regeneration and replacement of the original air supply. After deoxygenation through catalyst reduction, the regenerated gas flows back to the inlet of the argon recovery system; the main chamber recovery and boosting component 3 extracts the argon tail gas collected in the main chamber of the single crystal furnace body, filters the argon tail gas, and then sends it to the purification skid for argon tail gas purification; the exhaust filter component 21 cleans the filter component through reverse airflow, thereby improving the utilization rate.

[0031] The exhaust filter assembly 21 includes an auxiliary pump 211, a self-cleaning filter 212, a three-way valve 213, an activated carbon adsorption box 214, a fan 215 and a three-way valve 216; the auxiliary pump 211 is fixedly installed on the upper end of the bracket 1, the input end of the auxiliary pump 211 is fixedly connected to the output end of the auxiliary chamber of the single crystal furnace body, the output end of the auxiliary pump 211 is fixedly connected to the input end of the self-cleaning filter 212, the self-cleaning filter 212 is fixedly installed on the upper end of the bracket 1, and the self-cleaning filter A three-way valve 213 is fixedly installed on the input pipeline of 1-212, and the front output port of the three-way valve 213 is fixedly connected to the activated carbon adsorption box 214. The activated carbon adsorption box 214 is fixedly installed on the upper end of the bracket 1. The output end of the self-cleaning filter 212 is fixedly connected to the input end of the fan 215. The fan 215 is fixedly installed on the upper end of the bracket 1. The fan 215 is connected to the transmission and air supply component 22. A three-way valve 216 is fixedly installed on the output pipeline of the fan 215.

[0032] When the utility model is used, when it is necessary to process the argon tail gas, the auxiliary pump 211 extracts the argon tail gas collected in the auxiliary chamber of the single crystal furnace, and the auxiliary pump 211 drives the argon tail gas to enter the self-cleaning filter 1 212. The three-way valve 1 213 is in a straight-line passage state. The self-cleaning filter 1 212 filters and absorbs the impurity solids and gases in the argon tail gas. The fan 1 215 continues to absorb the gas. The three-way valve 216 is in a straight-line passage state. The fan 1 215 drives the gas to enter the transmission and air supply component 22. When it is necessary to clean the self-cleaning filter The filter screen in the filter 212 is turned by rotating the knobs of the three-way valve 213 and the three-way valve 216, so that the air at both ends of the self-cleaning filter 212 flows to the activated carbon adsorption box 214 and the outside air. The fan 215 is driven in the reverse direction to absorb air from the three-way valve 216 and transmit it to the self-cleaning filter 212. The air flow is used to clean the filter screen, and the generated solid and gas mixture passes through the three-way valve 216 into the activated carbon adsorption box 214 for subsequent cleaning treatment, and the treated gas is discharged out of the box.

[0033] The transmission and air supply component 22 includes a gas cabinet 221, a transmission pipe 222 and a fan 3 223; the gas cabinet 1 221 is fixedly installed on the upper end of the bracket 1, the input end of the gas cabinet 1 221 is fixedly connected to the output end of the fan 1 215, the output end of the gas cabinet 1 221 is fixedly connected to the input end of the fan 3 223, the fan 3 223 is fixedly installed on the upper end of the bracket 1, the front port of the transmission pipe 222 is fixedly connected to the output end of the gas cabinet 1 221, and the rear port of the transmission pipe 222 is connected to the main chamber recovery boosting component 3.

[0034] When the present invention is used, when it is necessary to process the filtered argon exhaust gas, the fan 215 transmits the argon exhaust gas into the gas cabinet 221 for collection, a part of it is used as the low-pressure make-up gas for the main process of the main chamber through the transmission pipe 222, and a part of it is driven by the fan 3 223 to enter the CO regeneration unit, so as to realize the supplement of a small amount of air when the O2 content in the main process of the main chamber is insufficient, thereby improving the operating efficiency of the entire device. While avoiding leakage of the hydrogen-free argon recovery system itself, the waste gas collected by the auxiliary pump 211 can be incorporated into the system, and the system has the ability to process more O2-containing waste argon gas.

[0035] A one-way valve is fixedly installed on the transmission pipe 222 .

[0036] When the present invention is used, a one-way valve is used to reduce the impact of gas backflow to the gas cabinet 221 during the transmission of argon tail gas to the main chamber recovery booster component 3, thereby improving the utilization effect of supplementing O2.

[0037] The main chamber recovery booster assembly 3 includes an air pump 31, a self-cleaning filter 2 32, a three-way valve 33, an activated carbon adsorption box 2 34, a fan 4 35, a three-way valve 4 36, a gas cabinet 2 37 and a compressor 38; the air pump 31 is fixedly installed on the upper end of the bracket 1, and the output end of the air pump 31 is fixedly connected to the input end of the self-cleaning filter 2 32, the self-cleaning filter 2 32 is fixedly installed on the upper end of the bracket 1, and the input pipeline of the self-cleaning filter 2 32 is fixedly installed with a three-way valve 33, and the front end output port of the three-way valve 33 is fixedly connected to the activated carbon adsorption box 2 34, and the activated carbon adsorption box 2 The carbon adsorption box 2 34 is fixedly installed on the upper end of the bracket 1, the output end of the self-cleaning filter 2 32 is fixedly connected to the input end of the fan 4 35, the fan 4 35 is fixedly installed on the upper end of the bracket 1, and a three-way valve 4 36 is fixedly installed on the output pipeline of the fan 4 35. The input end of the gas cabinet 2 37 is fixedly connected to the output end of the fan 4 35, the gas cabinet 2 37 is fixedly installed on the upper end of the bracket 1, the output end of the gas cabinet 2 37 is fixedly connected to the input end of the compressor 38, the input end of the compressor 38 is fixedly connected to the transmission pipe 222, and the compressor 38 is fixedly installed on the upper end of the bracket 1.

[0038] When the present invention is used, when it is necessary to recover and process the argon exhaust gas, the air pump 31 absorbs the argon exhaust gas collected in the main chamber of the single crystal furnace, transmits it to the self-cleaning filter 2 32 for filtration and treatment, transmits it to the gas cabinet 2 37 for collection and storage through the fan 4 35, and is pressurized by the compressor 38 and sent to the purification skid for argon exhaust gas purification; when it is necessary to clean the filter screen in the self-cleaning filter 2 32, turn the knobs of the three-way valve 33 and the three-way valve 4 36 to allow the two ends of the self-cleaning filter 2 32 to circulate to the activated carbon adsorption box 2 34 and the outside air, and the fan 4 35 absorbs air from the three-way valve 4 36 to generate airflow to clean the filter screen of the self-cleaning filter 2 32, and the generated sediment and gas are mixed and enter the activated carbon adsorption box 2 34 for subsequent cleaning treatment.

[0039] The self-cleaning filter 1 212 and the self-cleaning filter 2 32 are provided with a first-stage consumable carbon molecular sieve inside.

[0040] When the utility model is used, a first-stage consumable carbon molecular sieve is added, and the principle of C+O2=CO2 / CO is utilized to improve the processing capacity of O2.

[0041] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A device for recovering waste gas from a secondary chamber in an argon recovery process, comprising a support (1), characterized in that: The single crystal furnace body is fixedly mounted on the upper right end of the support (1); a secondary chamber recovery and gas supply assembly (2) for recovering and processing argon tail gas and transmitting low-pressure supplementary gas is mounted on the upper end of the support (1); a main chamber recovery and pressurization assembly (3) for recovering, processing and transmitting argon tail gas is mounted on the upper end of the support (1); the main chamber recovery and pressurization assembly (3) is connected to the output end of the main chamber of the single crystal furnace body; The auxiliary chamber recovery and air supply component (2) includes an air extraction and filtering component (21) and a transmission and air supply component (22); The exhaust filter assembly (21) is installed at the upper end of the bracket (1), and the transmission and air supply assembly (22) is installed at the upper end of the bracket (1). The exhaust filter assembly (21) and the transmission and air supply assembly (22) are connected. The exhaust filter assembly (21) is connected to the output end of the auxiliary chamber of the single crystal furnace body, and the transmission and air supply assembly (22) is connected to the main chamber recovery and boosting assembly (3).

2. The device for recovering waste gas from the auxiliary chamber in the argon recovery process according to claim 1, characterized in that: The air extraction filter assembly (21) comprises an auxiliary pump (211), a self-cleaning filter (212), a three-way valve (213), an activated carbon adsorption box (214), a fan (215), and a three-way valve (216). The auxiliary pump (211) is fixedly mounted on the upper end of the bracket (1), the input end of the auxiliary pump (211) is fixedly connected to the output end of the auxiliary chamber of the single crystal furnace body, the output end of the auxiliary pump (211) is fixedly connected to the input end of the self-cleaning filter (212), the self-cleaning filter (212) is fixedly mounted on the upper end of the bracket (1), and a three-way valve (213) is fixedly mounted on the input pipeline of the self-cleaning filter (212). The front end of the three-way valve (213) is fixedly mounted on the input pipeline of the self-cleaning filter (212). The output port is fixedly connected to the activated carbon adsorption box (214), which is fixedly installed on the upper end of the bracket (1). The output end of the self-cleaning filter (212) is fixedly connected to the input end of the fan (215), which is fixedly installed on the upper end of the bracket (1). The fan (215) is connected to the transmission and air supply component (22), and a three-way valve (216) is fixedly installed on the output pipeline of the fan (215).

3. The device for recovering waste gas from the auxiliary chamber in the argon recovery process according to claim 2, characterized in that: The transmission and air supply assembly (22) includes a gas cabinet (221), a transmission pipe (222) and a fan (223); The gas cabinet 1 (221) is fixedly installed on the upper end of the bracket (1), the input end of the gas cabinet 1 (221) is fixedly connected to the output end of the fan 1 (215), the output end of the gas cabinet 1 (221) is fixedly connected to the input end of the fan 3 (223), the fan 3 (223) is fixedly installed on the upper end of the bracket (1), and the front end of the transmission pipe (222) is fixedly connected to the output end of the gas cabinet 1 (221).

4. The device for recovering waste gas from a secondary chamber in an argon recovery process according to claim 3, characterized in that: The rear port of the transmission pipe (222) is connected to the main chamber recovery and pressurization component (3).

5. The device for recovering waste gas from the auxiliary chamber in the argon recovery process according to claim 4, characterized in that: A one-way valve is fixedly installed on the transmission pipe (222).

6. The device for recovering waste gas from a secondary chamber in an argon recovery process according to claim 5, characterized in that: The main chamber recovery and pressurization assembly (3) includes an air pump (31), a second self-cleaning filter (32), a third three-way valve (33), a second activated carbon adsorption box (34), a fourth fan (35), a fourth three-way valve (36), a second gas cabinet (37) and a compressor (38); The air pump (31) is fixedly mounted on the upper end of the bracket (1), the output end of the air pump (31) is fixedly connected to the input end of the second self-cleaning filter (32), the second self-cleaning filter (32) is fixedly mounted on the upper end of the bracket (1), a three-way valve (33) is fixedly mounted on the input pipeline of the second self-cleaning filter (32), the front output port of the three-way valve (33) is fixedly connected to the second activated carbon adsorption box (34), the second activated carbon adsorption box (34) is fixedly mounted on the upper end of the bracket (1), the second self-cleaning filter (32 ... The output end of the fan (32) is fixedly connected to the input end of the fan (35), the fan (35) is fixedly mounted on the upper end of the bracket (1), a three-way valve (36) is fixedly mounted on the output pipeline of the fan (35), the input end of the gas cabinet (37) is fixedly connected to the output end of the fan (35), the gas cabinet (37) is fixedly mounted on the upper end of the bracket (1), the output end of the gas cabinet (37) is fixedly connected to the input end of the compressor (38), and the input end of the compressor (38) is fixedly connected to the transmission pipe (222).

7. The device for recovering waste gas from a secondary chamber in an argon recovery process according to claim 6, characterized in that: The self-cleaning filter 1 (212) and the self-cleaning filter 2 (32) are provided with a first-stage consumable carbon molecular sieve inside.

8. The device for recovering waste gas from a secondary chamber in an argon recovery process according to claim 7, characterized in that: The compressor (38) is fixedly mounted on the upper end of the bracket (1).

Images