Ultrapure water nitrogen sealing device

Abstract

The utility model provides an ultrapure water nitrogen sealing device. The ultrapure water nitrogen sealing device comprises a nitrogen supply unit, a nitrogen sealing barrel provided with an external supply pipeline and an overflow pipeline, wherein the nitrogen supply unit is communicated with a gas inlet of the nitrogen sealing barrel; the water inlet of the nitrogen sealing barrel is used for being communicated with an ultrapure water preparation unit, a proportioning valve is further arranged on a pipeline for communicating the ultrapure water preparation unit with the water inlet of the nitrogen sealing barrel and the ultrapure water preparation unit, and the proportioning valve is further communicated with an auxiliary container; a liquid level meter is arranged on the nitrogen sealing barrel, and a PID (Proportion Integration Differentiation) controller is electrically connected with the liquid level meter and the proportioning valve respectively, so that the valve opening values of the proportioning valve flowing to the water inlet and the auxiliary container can be adjusted in an interlocking manner; the overflow pipeline is communicated with the overflow port of the nitrogen sealing barrel, the overflow pipeline comprises a U-shaped pipeline structure which is not higher than the overflow port of the nitrogen sealing barrel, and the U-shaped pipeline structure can be filled with liquid to form water seal. According to the ultrapure water nitrogen sealing device provided by the utility model, the liquid level in the nitrogen sealing barrel can be kept constant, and nitrogen is effectively saved.

Description

Technical Field

[0001] The utility model belongs to the technical field of ultrapure water treatment, in particular to an ultrapure water nitrogen sealing device. Background Art

[0002] Ultrapure water, also known as UP water, has a resistivity of up to 18MΩ*cm (25°C). It is widely used in the production process of the electronic semiconductor industry, such as chip cleaning. In order to ensure the quality of ultrapure water, it needs to be stored in a nitrogen-sealed device to avoid contact with air. Figure 1 As shown, the nitrogen sealing device in the prior art consists of a nitrogen sealing barrel 1 provided with an external supply pipeline (not shown in the figure), an ultrapure water preparation unit connected to the top of the nitrogen sealing barrel 1, a nitrogen supply unit, a breathing valve 11 and a liquid level gauge 5. Obviously, the pressure regulation and liquid level change in the nitrogen sealing barrel 1 are not linked, so that the liquid level therein is easily wasted due to the consumption and replenishment of ultrapure water; the liquid level change is not linked to the water inlet into the barrel, and the water inlet flow rate is manually adjusted, which causes the liquid level in the barrel to easily exceed the upper limit, and the nitrogen sealing barrel 1 may explode due to excessive water replenishment. Utility Model Content

[0003] In view of the above problems existing in the prior art, the main purpose of the present invention is to provide an ultrapure water nitrogen sealing device, which can maintain a constant liquid level in its nitrogen sealing barrel and effectively save nitrogen.

[0004] The purpose of the utility model is achieved through the following technical solutions:

[0005] The utility model provides an ultrapure water nitrogen sealing device, which includes a nitrogen supply unit, a nitrogen sealing barrel provided with an external supply pipeline, and an overflow pipeline; wherein,

[0006] The nitrogen supply unit is connected to the air inlet of the nitrogen sealing barrel;

[0007] The water inlet of the nitrogen-sealed barrel is used to communicate with the ultrapure water preparation unit. A proportional regulating valve is further provided on the pipeline connecting the ultrapure water preparation unit and the water inlet of the nitrogen-sealed barrel. The proportional regulating valve is also connected to a secondary container.

[0008] A liquid level gauge is provided on the nitrogen sealing barrel, and a PID controller is electrically connected to the liquid level gauge and the proportional control valve, respectively, so as to interlock and adjust the valve opening value of the proportional control valve to the water inlet and the auxiliary container;

[0009] The overflow pipeline is connected to the overflow port of the nitrogen sealing barrel. The overflow pipeline includes a U-shaped pipeline structure that is no higher than the overflow port of the nitrogen sealing barrel. The U-shaped pipeline structure can be filled with liquid to form a water seal.

[0010] As a further description of the above technical solution, the proportional control valve is a three-way valve, which is respectively connected to the ultrapure water preparation unit, the nitrogen-sealed water barrel and the auxiliary container.

[0011] As a further description of the above technical solution, the nitrogen supply unit includes a nitrogen source, and the pipeline connecting the nitrogen source and the air inlet of the nitrogen sealing barrel is also provided with a nitrogen sealing valve.

[0012] As a further description of the above technical solution, a breathing valve is also provided on the top of the nitrogen-sealed barrel.

[0013] As a further description of the above technical solution, the U-shaped pipeline structure is made of transparent material.

[0014] As a further description of the above technical solution, the U-shaped pipeline structure is made of PVC.

[0015] As a further description of the above technical solution, the U-shaped pipeline structure is provided with a water supply valve and a drain valve;

[0016] The drain valve is arranged at the bottom of the U-shaped pipeline structure.

[0017] By means of the above technical solutions, the outstanding effects of the present invention are:

[0018] 1. In the ultrapure water nitrogen sealing device provided by the present invention, the nitrogen supply unit is connected to the air inlet of the nitrogen sealing barrel to transport nitrogen into the nitrogen sealing barrel, and the water inlet of the nitrogen sealing barrel is connected to the ultrapure water preparation unit to receive and store the ultrapure water prepared by the ultrapure water preparation unit; the liquid level gauge provided on the nitrogen sealing barrel is used to monitor and return the liquid level in the nitrogen sealing barrel, and the pipeline connecting the ultrapure water preparation unit and the water inlet of the nitrogen sealing barrel is also provided with a proportional control valve, which is connected to a secondary container. At the same time, a PID controller is electrically connected to the liquid level gauge and the proportional control valve, respectively, so that the valve opening value of the proportional control valve to the water inlet and the secondary container can be interlocked and adjusted in real time, so that the liquid level fluctuation in the nitrogen sealing barrel is kept within 0.3%, thereby greatly saving the nitrogen usage due to frequent changes in the liquid level;

[0019] 2. In the ultrapure water nitrogen sealing device provided by the present invention, the nitrogen sealing barrel is provided with an overflow port connected to the overflow pipe, so that when the PID controller fails, the excess water in the nitrogen sealing barrel can be overflowed and discharged, thereby continuing to maintain a constant liquid level in the nitrogen sealing barrel; the overflow pipe includes a U-shaped pipe structure that is no higher than the overflow port of the nitrogen sealing barrel. The U-shaped pipe structure can be filled with a certain amount of liquid (such as tap water) to form a water seal, thereby ensuring a constant liquid level in the nitrogen sealing barrel while preventing outside air from entering the nitrogen sealing barrel through the overflow pipe and affecting the water quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of an ultrapure water nitrogen sealing device in the prior art;

[0021] Figure 2 Schematic diagram of the structure of the ultrapure water nitrogen sealing device in the embodiment of the present utility model.

[0022] Description of Figure Numbers:

[0023] 1. Nitrogen sealing barrel; 2. Overflow pipe; 3. Proportional control valve; 4. Auxiliary container; 5. Liquid level gauge; 6. PID controller; 7. U-shaped piping structure; 8. Water seal; 9. Nitrogen source; 10. Nitrogen sealing valve; 11. Breathing valve; 12. Water supply valve; 13. Drain valve. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] In the description of the present invention, it should be noted that the terms "upper", "middle", "lower", "inside", "outside", "front", "back", "left", "right", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. The following describes the implementation of the present invention based on its overall structure.

[0026] See also Figure 2 The utility model discloses an ultrapure water nitrogen sealing device, which includes a nitrogen supply unit, a nitrogen sealing barrel 1 provided with an external supply pipeline, and an overflow pipeline 2; wherein,

[0027] The nitrogen supply unit is connected to the air inlet of the nitrogen sealing barrel 1;

[0028] The water inlet of the nitrogen-sealed barrel 1 is used to communicate with the ultrapure water preparation unit. A proportional regulating valve 3 is further provided on the pipeline connecting the ultrapure water preparation unit and the water inlet of the nitrogen-sealed barrel 1. The proportional regulating valve 3 is also connected to a secondary container 4.

[0029] The nitrogen sealing barrel 1 is provided with a liquid level gauge 5, and a PID controller 6 is electrically connected to the liquid level gauge 5 and the proportional control valve 3, respectively, so as to interlock and adjust the valve opening value of the proportional control valve 3 to the water inlet and the auxiliary container 4;

[0030] The overflow pipeline 2 is connected to the overflow port of the nitrogen sealing barrel 1 . The overflow pipeline 2 includes a U-shaped pipeline structure 7 that is no higher than the overflow port of the nitrogen sealing barrel 1 . The U-shaped pipeline structure 7 can be filled with liquid to form a water seal 8 .

[0031] In the above-mentioned setting mode, the nitrogen supply unit is connected with the air inlet of the nitrogen sealing barrel 1 to transport nitrogen into the nitrogen sealing barrel 1, and the water inlet of the nitrogen sealing barrel 1 is connected with the ultrapure water preparation unit to receive and store the ultrapure water prepared by the ultrapure water preparation unit; the liquid level gauge 5 provided on the nitrogen sealing barrel 1 is used to monitor and feedback the liquid level in the nitrogen sealing barrel 1, and the ultrapure water preparation unit is further provided with a proportional regulating valve 3 on the pipeline connecting the water inlet of the nitrogen sealing barrel 1 and the ultrapure water preparation unit, and the proportional regulating valve 3 is connected with a secondary container 4, and at the same time The PID controller 6 is electrically connected to the liquid level gauge 5 and the proportional control valve 3, respectively, so that it can interlock and adjust the valve opening value of the proportional control valve 3 to the water inlet and the auxiliary container 4 in real time, so that the liquid level fluctuation in the nitrogen sealing barrel 1 is maintained within 0.3%, thereby greatly saving the nitrogen usage due to frequent changes in the liquid level. The nitrogen sealing barrel 1 is provided with an overflow port connected to the overflow pipe 2, so that when the PID controller 6 fails, the excess water in the nitrogen sealing barrel 1 can be overflowed and discharged, thereby continuing to maintain a constant liquid level in the nitrogen sealing barrel 1. The overflow pipe 2 includes a U-shaped pipe structure 7 that is no higher than the overflow port of the nitrogen sealing barrel 1. The U-shaped pipe structure 7 can be filled with a certain amount of liquid (e.g., tap water) to form a water seal 8, thereby preventing outside air from entering the nitrogen sealing barrel 1 through the overflow pipe 2 and affecting the water quality.

[0032] Specifically, in this embodiment, it should be understood that since the nitrogen sealing barrel 1 is provided with a water outlet (not shown in the figure) to transport the ultrapure water stored therein to the outside, the liquid level of the nitrogen sealing barrel 1 will actually change with the consumption and replenishment of the ultrapure water therein. The liquid level meter 5 is now provided to transmit the real-time changing liquid level signal back to the PID controller 6 for comparison with the preset liquid level value. When the actual liquid level value transmitted back is less than the preset liquid level value, the PID controller 6 calculates the difference and outputs a signal to the proportional control valve 3. The proportional control valve 3 increases the valve opening value of the flow to the nitrogen sealing barrel 1 and decreases the valve opening value of the flow to the auxiliary container 4, thereby increasing the unit volume of ultrapure water flowing into the nitrogen sealing barrel 1. In other words, when the actual liquid level value transmitted back is greater than the preset liquid level value, the proportional control valve 3 will decrease the valve opening value of the flow to the nitrogen sealing barrel 1 and increase the valve opening value of the flow to the auxiliary container 4, thereby reducing the unit volume of ultrapure water flowing into the nitrogen sealing barrel 1. Since the signal feedback of the liquid level meter 5 and the signal output of the PID controller 6 are both performed in real time, the liquid level fluctuation in the nitrogen sealing barrel 1 can be kept within 0.3%, thereby greatly saving the nitrogen usage due to frequent changes in the liquid level.

[0033] Specifically, in this embodiment, the proportional regulating valve 3 is a three-way valve, which is connected to the ultrapure water preparation unit, the nitrogen-sealed water barrel and the auxiliary container 4 respectively.

[0034] Specifically, in this embodiment, the nitrogen supply unit includes a nitrogen source 9, and the pipeline connecting the nitrogen source 9 and the air inlet of the nitrogen sealing barrel 1 is also provided with a nitrogen sealing valve 10. A pressure spring is provided in the nitrogen sealing valve 10 to maintain the constant nitrogen pressure in the nitrogen sealing barrel 1.

[0035] Specifically, in this embodiment, a breathing valve 11 is also provided on the top of the nitrogen sealing barrel 1, so that when the nitrogen sealing valve 10 fails, the nitrogen pressure in the nitrogen sealing barrel 1 can continue to be maintained: for example, when the pressure spring of the nitrogen sealing valve 10 cannot be closed and nitrogen continues to be transported into the nitrogen sealing barrel 1, and then the air pressure in the nitrogen sealing barrel 1 rises to a preset upper limit value, the air can be exhausted through the breathing valve 11, thereby preventing the nitrogen sealing barrel 1 from exploding due to excessive internal air pressure; and for example, when the pressure spring of the nitrogen sealing valve 10 cannot be opened and nitrogen cannot be transported into the nitrogen sealing barrel 1, and then the air pressure in the nitrogen sealing barrel 1 drops to a preset lower limit value, the air can be absorbed from the outside through the breathing valve 11, thereby preventing the nitrogen sealing barrel 1 from being sucked out.

[0036] Specifically, in this embodiment, the U-shaped pipe structure 7 is made of a transparent material, which is convenient for observing the liquid level inside and whether the filled liquid has deteriorated. The U-shaped pipe structure 7 is made of PVC, for example.

[0037] Specifically, in this embodiment, a water replenishment valve 12 and a drain valve 13 are provided on the U-shaped pipeline structure 7, so that the U-shaped pipeline structure 7 can be replenished with water and the water can be replaced; preferably, the drain valve 13 is provided at the bottom of the U-shaped pipeline structure 7 to facilitate the emptying of the liquid (such as tap water) in the U-shaped pipeline structure 7.

[0038] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any changes, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An ultrapure water nitrogen sealing device, characterized in that: It includes a nitrogen supply unit, a nitrogen sealing barrel with an external supply pipeline, and an overflow pipeline; wherein, The nitrogen supply unit is connected to the air inlet of the nitrogen sealing barrel; The water inlet of the nitrogen-sealed barrel is used to connect to the ultrapure water preparation unit. A proportional regulating valve is provided on the pipeline connecting the ultrapure water preparation unit and the water inlet of the nitrogen-sealed barrel. The proportional regulating valve is also connected to a secondary container. A liquid level gauge is provided on the nitrogen sealing barrel, and a PID controller is electrically connected to the liquid level gauge and the proportional control valve, respectively, so as to interlock and adjust the valve opening value of the proportional control valve to the water inlet and the auxiliary container; The overflow pipeline is connected to the overflow port of the nitrogen sealing barrel. The overflow pipeline includes a U-shaped pipeline structure that is no higher than the overflow port of the nitrogen sealing barrel. The U-shaped pipeline structure can be filled with liquid to form a water seal.

2. The ultrapure water nitrogen sealing device according to claim 1, characterized in that: The proportional regulating valve is a three-way valve, which is respectively connected to the ultrapure water preparation unit, the nitrogen-sealed water barrel and the auxiliary container.

3. The ultrapure water nitrogen sealing device according to claim 1, characterized in that: The nitrogen supply unit includes a nitrogen source, and a pipeline connecting the nitrogen source and the air inlet of the nitrogen sealing barrel is further provided with a nitrogen sealing valve.

4. The ultrapure water nitrogen sealing device according to claim 3, characterized in that: A breathing valve is also provided on the top of the nitrogen sealing barrel.

5. The ultrapure water nitrogen sealing device according to claim 1, characterized in that: The U-shaped pipeline structure is made of transparent material.

6. The ultrapure water nitrogen sealing device according to claim 1, characterized in that: The U-shaped pipeline structure is made of PVC.

7. The ultrapure water nitrogen sealing device according to claim 1, characterized in that: The U-shaped pipeline structure is provided with a water supply valve and a water discharge valve; The drain valve is arranged at the bottom of the U-shaped pipeline structure.

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