Clamp suitable for masks of different sizes

Abstract

The utility model discloses a fixture suitable for masks with different sizes, which comprises a first track, a second track used for moving along the extension direction of the first track is connected onto the first track, a clamping block used for moving along the extension direction of the second track is arranged on the second track, and a clamping part used for supporting and clamping the end corner of a mask is arranged on the clamping block. The number of the second rails is two, the two second rails are arranged in parallel, each second rail is provided with two clamping blocks, and the four clamping parts form four end corners of a rectangle. The second track is provided with a first locking structure used for locking the position of the second track on the first track, and the clamping block is provided with a second locking structure used for locking the position of the clamping block on the second track. According to the utility model, the masks with different sizes can be clamped, and meanwhile, the shielding to the masks can be reduced as much as possible when the masks are clamped.

Description

Technical Field

[0001] The utility model relates to the technical field of mask cleaning equipment, in particular to a clamp suitable for masks of different sizes. Background Art

[0002] A mask, also known as a photomask, photomask, or photolithography mask, is a pattern master used in the photolithography process in microelectronics manufacturing. It forms a mask pattern on a transparent substrate through an opaque light-blocking film, and the pattern is transferred to the product substrate through exposure.

[0003] During the manufacturing and use process, the mask needs to be cleaned regularly to remove surface contaminants and residues to ensure the accuracy and quality of the photolithography process.

[0004] Common mask plates have fixed sizes and can only be fixedly clamped to corresponding sizes. Each cleaning fixture can only clean one type of mask plate. Cleaning fixtures of different sizes need to be manufactured for different sizes of mask plates, which makes cleaning inconvenient. Utility Model Content

[0005] The purpose of the utility model is to provide a clamp suitable for masks of different sizes, which can clamp masks of different sizes and at the same time can minimize the obstruction of the mask when clamping the mask.

[0006] In order to solve the above technical problems, the present invention adopts the following solutions:

[0007] A fixture suitable for masks of different sizes includes a first track, a second track connected to the first track for movement along the direction in which the first track extends, a clamping block provided on the second track for movement along the direction in which the second track extends, and a clamping portion provided on the clamping block for supporting and clamping the corners of the mask. The fixture has two second tracks, which are arranged parallel to each other, each track having two clamping blocks, and the four clamping portions forming the four corners of a rectangle. The fixture functions to adjust the length and width of the rectangle formed by the four clamping portions by moving the second track along the direction in which the first track extends and the clamping block along the direction in which the second track extends, through the arrangement of the first track, the second track, and the clamping blocks.

[0008] Furthermore, the second rail is provided with a first locking structure for locking the second rail on the first rail, and the clamping block is provided with a second locking structure for locking the clamping block on the second rail. The first and second locking structures prevent the four clamping blocks from loosening when clamping the mask.

[0009] Furthermore, the first rail is in the shape of a hollow cylinder. A sliding slit extending in the direction of extension of the first rail is provided in the middle of the wall of the first rail facing the second rail. The height of the sliding slit is less than that of the second rail. The upper and lower surfaces of the second rail end are provided with embedding grooves for the first rail to embed in the upper and lower portions of the wall where the sliding slit is located. Sealing heads are provided at the front and rear ends of the first rail to prevent the second rail from moving out of the front and rear ends of the first rail during use. The sliding slit and embedding grooves secure the second rail to the first rail and enable the second rail to move in the direction of extension of the first rail, preventing the second rail from moving relative to the first rail in the direction of extension of the second rail.

[0010] Furthermore, the height of the sliding gap is equal to the distance between two opposing recesses on the second rail, and the width of the recess is equal to the thickness of the wall of the first rail facing the second rail. This prevents the second rail from wobbling when connected to the first rail, by designing the sliding gap width and the distance between two recesses on opposite sides of the second rail at the same location.

[0011] Furthermore, the second track is provided with a roller at the end thereof for being arranged in the first track, and the maximum distance between the roller and the embedding groove is equal to the distance between the front and rear inner walls of the first track in the direction facing the second track. The roller facilitates the movement of the second track in the first track.

[0012] Furthermore, the first locking structure includes a locking bolt, an insert slot having a threaded hole for threaded engagement with the locking bolt, and a bolt slot corresponding to the threaded hole. The width of the bolt slot is greater than the diameter of the threaded hole and less than the width of the insert slot. The bolt slot is located within the wall of the first rail facing the second rail, and its width is less than the avoided width. The width of the bolt slot is less than the minimum width of the locking bolt's nut. The arrangement of the locking bolt, threaded hole, and bolt slot allows the locking bolt's nut and threads to lock the second rail to the first rail.

[0013] Furthermore, the clamping block includes a sleeve portion for sleeved outside the second track, and the clamping portion is arranged on the top surface of the sleeve portion. Its function is to fix the clamping block on the second track through the arrangement of the sleeve portion.

[0014] Furthermore, the width of the sleeve portion is greater than the width of the second track, and the second locking structure includes a rotating shaft provided on any one side wall of the sleeve portion, a locking column being provided on the rotating shaft, the locking column being provided parallel to the rotating shaft and eccentrically relative to the rotating shaft. When the side wall of the sleeve portion without the rotating shaft is in close contact with the second track, the distance between the rotating shaft and the second track is less than or equal to the maximum distance between the rotating shaft and the busbars on the locking column. A push plate is connected to the side of the locking column closest to the rotating shaft to facilitate pushing the locking column to rotate around the rotating shaft. Its function is to increase the friction between the sleeve portion and the second track by rotating the locking column through the design of the rotating shaft, the locking column, and their corresponding dimensions, so that the clamping block can be locked on the second track.

[0015] Furthermore, the clamping portion is cylindrical with an L-shaped cross section, and two adjacent sidewalls of the clamping portion, extending toward the inner corner, have protrusions whose longitudinal cross-sectional area gradually decreases as they move away from the clamping portion. The protrusions reduce the contact area between the clamping portion and the side of the reticle, thereby facilitating comprehensive cleaning of the reticle's side.

[0016] Furthermore, the top surface of the sleeve portion is provided with four support blocks arranged in a square array. The cross-sectional area of the support blocks gradually decreases as they move away from the sleeve portion. A blind hole is provided between each pair of adjacent support blocks. Two support posts are vertically positioned on the bottom surface of the clamping portion, designed to be inserted into the two adjacent blind holes. With the support posts inserted into the blind holes, the clamping portion rests on three of the support blocks, leaving the remaining support block exposed for placement of the reticle. The arrangement of the support blocks reduces the contact area between the clamping portion and the bottom surface of the reticle, thereby facilitating comprehensive cleaning of the bottom surface of the reticle. The blind holes and support posts also secure the clamping portion.

[0017] The utility model has the beneficial effects:

[0018] 1. By setting the first track, the second track and the clamping block, the length and width of the rectangle formed by the four clamping parts can be adjusted by moving the second track along the extension direction of the first track and the clamping block along the extension direction of the second track;

[0019] 2. By setting the sliding gap and the embedding groove, the second rail can be fixed on the first rail and the second rail can be moved along the extension direction of the first rail, preventing the second rail from moving relative to the first rail in the extension direction of the second rail;

[0020] 3. The provision of the bumps can reduce the contact area between the clamping portion and the side of the mask, thereby facilitating comprehensive cleaning of the side of the mask;

[0021] 4. By setting the support block, the contact area between the clamping part and the bottom surface of the mask can be reduced, thereby facilitating comprehensive cleaning of the bottom surface of the mask; by setting the blind hole and the support column, the clamping part can be fixed. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Schematic diagram of the three-dimensional structure of Example 1;

[0023] Figure 2 Schematic diagram of the three-dimensional structure of the first track in Example 1;

[0024] Figure 3 Schematic diagram of the three-dimensional structure of the second track in Example 1;

[0025] Figure 4 This is a schematic diagram of the three-dimensional exploded structure of the clamping block in Example 1.

[0026] Figure numerals: 1. first rail; 2. second rail; 3. clamping block; 4. clamping portion; 5. sliding gap; 6. embedding groove; 7. roller; 8. locking bolt; 9. threaded hole; 10. bolt through groove; 11. sleeve portion; 12. rotating shaft; 13. locking column; 14. protrusion; 15. support block; 16. blind hole; 17. support column. DETAILED DESCRIPTION

[0027] The present invention will be further described in detail below in conjunction with the embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0028] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0029] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "opened," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0030] Example 1

[0031] A fixture suitable for masks of different sizes, such as Figure 1 As shown, it includes a first track 1, connected to a second track 2 for movement along the extension direction of the first track 1, and provided with a clamping block 3 for movement along the extension direction of the second track 2. The clamping block 3 is provided with a clamping portion 4 for supporting and clamping the end corners of the mask. There are two second tracks 2, and the two second tracks 2 are arranged parallel to each other. Each second track 2 is provided with two clamping blocks 3, and the four clamping portions 4 form the four end corners of a rectangle. Its function is to adjust the length and width of the rectangle formed by the four clamping portions 4 by moving the second track 2 along the extension direction of the first track 1 and the clamping block 3 along the extension direction of the second track 2 through the arrangement of the first track 1, the second track 2, and the clamping blocks 3.

[0032] Specifically, the second rail 2 is provided with a first locking structure for locking the second rail 2 on the first rail 1, and the clamping block 3 is provided with a second locking structure for locking the clamping block 3 on the second rail 2. The first and second locking structures prevent the four clamping blocks 3 from loosening when clamping the mask.

[0033] Specifically, such as Figure 2 As shown, the first rail 1 is hollow cylindrical. A sliding slit 5 extending in the direction of extension of the first rail 1 is provided in the middle of the wall of the first rail 1 facing the second rail 2. The height of the sliding slit 5 is less than that of the second rail 2. Insertion grooves 6 are provided on the upper and lower surfaces of the ends of the second rail 2 for the first rail 1 to be inserted into the upper and lower portions of the wall where the sliding slit 5 is located. Plugs are provided at the front and rear ends of the first rail 1 to prevent the second rail 2 from moving out of the front and rear ends of the first rail 1 during use. The sliding slit 5 and inserting groove 6 secure the second rail 2 to the first rail 1 and enable it to move in the direction of extension of the first rail 1, preventing the second rail 2 from moving relative to the first rail 1 in the direction of extension of the second rail 2.

[0034] Specifically, such as Figure 2 As shown, the height of the sliding gap 5 is equal to the distance between two opposing insertion grooves 6 on the second rail 2, and the width of the insertion groove 6 is equal to the thickness of the wall of the first rail 1 facing the second rail 2. The design of the width of the sliding gap 5 and the distance between the two insertion grooves 6 located on opposite sides of the second rail 2 at the same position prevents the second rail 2 from shaking when connected to the first rail 1.

[0035] Specifically, such as Figure 3As shown, a roller 7 is provided at the end of the second track 2 for being arranged in the first track 1. The maximum distance between the roller 7 and the embedding groove 6 is equal to the distance between the front and rear inner walls of the first track 1 in the direction facing the second track 2. The roller 7 facilitates the movement of the second track 2 in the first track 1.

[0036] Specifically, such as Figure 1 As shown, the first locking structure includes a locking bolt 8, a threaded hole 9 provided in the embedding slot 6 for threaded connection with the locking bolt 8, and a bolt slot 10 provided in the first rail 1 corresponding to the position of the threaded hole 9. The width of the bolt slot 10 is greater than the diameter of the threaded hole 9 and less than the width of the embedding slot 6. The bolt slot 10 is located in the wall of the first rail 1 facing the second rail 2, and the width of the bolt slot 10 is less than the avoided width. The width of the bolt slot 10 is less than the minimum width of the nut of the locking bolt 8. The bolt slot 10 is provided on the top surface of the first rail 1, and a drainage groove is provided on the bottom surface of the bolt slot 10. The function of the arrangement of the locking bolt 8, threaded hole 9, and bolt slot 10 is to lock the second rail 2 to the first rail 1 through the nut and thread of the locking bolt 8.

[0037] Specifically, such as Figure 4 As shown, the clamping block 3 includes a sleeve portion 11 for sleeved outside the second rail 2, and the clamping portion 4 is provided on the top surface of the sleeve portion 11. Its function is to fix the clamping block 3 on the second rail 2 through the setting of the sleeve portion 11.

[0038] Specifically, such as Figure 4 As shown, the width of the sleeve portion 11 is greater than the width of the second rail 2. The second locking structure includes a rotating shaft 12 disposed on any side wall of the sleeve portion 11. A locking post 13 is sleeved on the rotating shaft 12. The locking post 13 is arranged parallel to the rotating shaft 12 and eccentrically relative to the rotating shaft 12. When the side wall of the sleeve portion 11 without the rotating shaft 12 is in close contact with the second rail 2, the distance between the rotating shaft 12 and the second rail 2 is less than or equal to the maximum distance between the rotating shaft 12 and the busbars on the locking post 13. A push plate is connected to the side of the locking post 13 closest to the rotating shaft 12 to facilitate pushing the locking post 13 to rotate about the rotating shaft 12. The design of the rotating shaft 12, the locking post 13, and their corresponding dimensions allows the friction between the sleeve portion 11 and the second rail 2 to be increased by rotating the locking post 13, thereby locking the clamping block 3 to the second rail 2.

[0039] Specifically, such as Figure 4As shown, the clamping portion 4 is cylindrical with an L-shaped cross section. Extending from two adjacent sidewalls of the clamping portion 4 toward the inner corner are bumps 14, whose longitudinal cross-sectional area gradually decreases as they move away from the clamping portion 4. The bumps 14 are semi-cylindrical in shape. Their purpose is to reduce the contact area between the clamping portion 4 and the side of the reticle, thereby facilitating comprehensive cleaning of the reticle's side surfaces.

[0040] Specifically, such as Figure 4 As shown, the top surface of the sleeve portion 11 is provided with four support blocks 15 arranged in a square array. The cross-sectional area of the support blocks 15 gradually decreases as they move away from the sleeve portion 11. A blind hole 16 is provided between each two adjacent support blocks 15. Two support posts 17 are vertically provided on the bottom surface of the clamping portion 4, which are designed to be embedded in the two adjacent blind holes 16. When the support posts 17 are inserted into the blind holes 16, the clamping portion 4 is placed on three of the support blocks 15, leaving the remaining support block 15 exposed for placing the mask. The blind holes 16 are connected to drainage holes extending to the side of the sleeve portion 11. The support blocks 15 are hemispherical in shape. Their function is to reduce the contact area between the clamping portion 4 and the bottom surface of the mask, thereby facilitating comprehensive cleaning of the bottom surface of the mask. The blind holes 16 and support posts 17 also secure the clamping portion 4.

[0041] The working principle of this embodiment is described as follows: Before the mask is clamped, the sleeve portion 11 is inserted from the end of the second rail 2 onto the second rail 2. Each second rail 2 is fitted with two sleeve portions 11. The two second rails 2 are sequentially installed into the first rail 1, with the insertion groove 6 aligned with the wall surface where the sliding gap 5 is located, and the second rails 2 are pushed into the first rail 1. After the two second rails 2 are installed, plugs are installed at both ends of the first rail 1. When the two second rails 2 are moved to the corresponding positions, the locking bolts 8 are threaded through the bolt slots 10 into the threaded holes 9 and tightened, thereby securing the second rails 2. When the sleeve portion 11 is moved to the corresponding position, the locking column 13 is rotated to secure the sleeve portion 11 to the second rail 2. Then, the four clamping portions 4 are installed on the four sleeve portions 11, respectively, with the support columns 17 inserted into the corresponding blind holes 16, so that the angles on the four clamping portions 4 form the four vertices of a rectangle.

[0042] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Based on the technical essence of the present invention and within the spirit and principles of the present invention, any simple modification, equivalent replacement and improvement of the above embodiment shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A fixture suitable for masks of different sizes, characterized by: The invention comprises a first track (1), the first track (1) being connected to a second track (2) for moving along the extension direction of the first track (1), the second track (2) being provided with a clamping block (3) for moving along the extension direction of the second track (2), the clamping block (3) being provided with a clamping portion (4) for supporting and clamping the end corners of the mask, the second track (2) being provided with two, and the two second tracks (2) being arranged parallel to each other, each second track (2) being provided with two clamping blocks (3), and the four clamping portions (4) forming the four end corners of a rectangle.

2. The fixture suitable for masks of different sizes according to claim 1, characterized in that: The second track (2) is provided with a first locking structure for locking the position of the second track (2) on the first track (1), and the clamping block (3) is provided with a second locking structure for locking the position of the clamping block (3) on the second track (2).

3. The fixture suitable for masks of different sizes according to claim 2, characterized in that: The first track (1) is in the shape of a hollow cylinder. A sliding slot (5) extending in the extension direction of the first track (1) is provided on the middle of the wall of the first track (1) facing the second track (2). The height of the sliding slot (5) is smaller than the height of the second track (2). The upper and lower surfaces of the end of the second track (2) are provided with embedding grooves (6) for allowing the first track (1) to be embedded in the upper and lower wall surfaces of the wall where the sliding slot (5) is located.

4. The fixture suitable for masks of different sizes according to claim 3, characterized in that: The height of the sliding gap (5) is equal to the distance between two embedding grooves (6) arranged opposite to each other on the second track (2), and the width of the embedding groove (6) is equal to the thickness of the wall of the first track (1) facing the second track (2).

5. The fixture suitable for masks of different sizes according to claim 3, characterized in that: The end of the second track (2) is provided with a roller (7) for being arranged in the first track (1), and the maximum distance between the roller (7) and the embedding groove (6) is equal to the distance between the front and rear inner walls of the first track (1) in the direction toward the second track (2).

6. The fixture suitable for masks of different sizes according to claim 3, characterized in that: The first locking structure comprises a locking bolt (8), a threaded hole (9) for threaded connection with the locking bolt (8) is provided on the embedded groove (6), a bolt through groove (10) corresponding to the position of the threaded hole (9) is provided on the first rail (1), and the width of the bolt through groove (10) is greater than the diameter of the threaded hole (9) and smaller than the width of the embedded groove (6).

7. The fixture suitable for masks of different sizes according to claim 1, characterized in that: The clamping block (3) comprises a sleeve portion (11) for sleeved outside the second track (2), and the clamping portion (4) is arranged on the top surface of the sleeve portion (11).

8. The fixture suitable for masks of different sizes according to claim 7, characterized in that: The width of the sleeve portion (11) is greater than the width of the second track (2); the second locking structure comprises a rotating shaft (12) provided on any one side wall of the sleeve portion (11); a locking column (13) is sleeved on the rotating shaft (12); the locking column (13) is arranged parallel to the rotating shaft (12) and the locking column (13) is eccentrically arranged with respect to the rotating shaft (12); when the side wall of the sleeve portion (11) on which the rotating shaft (12) is not provided is in close contact with the second track (2), the distance between the rotating shaft (12) and the second track (2) is less than or equal to the maximum distance between the rotating shaft (12) and the busbars on the locking column (13).

9. The fixture suitable for masks of different sizes according to claim 1, characterized in that: The clamping portion (4) is in the shape of a column with an L-shaped cross section, and two adjacent side walls of the clamping portion (4) extend toward the inner corner to form a protrusion (14) whose longitudinal cross-sectional area gradually decreases in a direction away from the clamping portion (4).

10. The fixture suitable for masks of different sizes according to claim 7, characterized in that: Four support blocks (15) are arranged in a square array on the top surface of the sleeve portion (11), and the cross-sectional area of the support blocks (15) gradually decreases in a direction away from the sleeve portion (11). A blind hole (16) is provided between every two adjacent support blocks (15). Two support columns (17) for embedding into two adjacent blind holes (16) are vertically provided on the bottom surface of the clamping portion (4).

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