Water tank type electronic goods shelf for storing polished and blanked sheet baskets

Abstract

The utility model provides a water tank type electronic shelf for storing polished and blanked wafer baskets, and belongs to the technical field of semiconductor silicon wafer manufacturing. Comprising a frame body, water tanks, a water circulation system and a control system, the upper portion of the frame body is provided with a plurality of independent water tanks, no-load water levels and overflow water levels are preset in the water tanks, and the water tanks are provided with a plurality of clamping bases used for containing piece baskets; the water circulation system is communicated with the water tank and used for injecting liquid into the water tank or discharging the liquid out of the water tank; the control system is electrically connected with the water circulation system, comprises a photoelectric sensor and an optical fiber sensor and is used for enabling the liquid level in the water tank to be at a no-load water level or an overflow water level. The utility model has the beneficial effects that a plurality of sheet baskets can be stored, and the occupied space is small; each water tank can operate independently, so that the storage requirements of the silicon wafers under different conditions can be met; full-automatic control over the height of the liquid level in the water tank is achieved, linkage is rapid, and control is accurate.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor silicon wafer manufacturing, in particular to a water tank type electronic shelf for storing polishing sheet baskets. Background Art

[0002] In the production process of silicon wafers, the silicon wafers need to be cleaned and polished. However, in some production processes, the silicon wafers need to be stored for a period of time before polishing. Since the silicon wafers are scrapped due to long-term exposure to the air, it is very necessary to develop an electronic shelf that is convenient for storing the polishing wafer basket and continuously overflowing. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides a water tank type electronic shelf for storing polishing sheet baskets, which can meet the storage needs of silicon wafers in different situations, has a high degree of automation, rapid linkage and precise control.

[0004] The technical solution adopted by the utility model is: a water tank type electronic shelf for storing polishing sheet baskets, comprising:

[0005] The frame has a plurality of independent water tanks on its upper part, wherein the water tanks have preset no-load water level and overflow water level, and are provided with a plurality of seats for placing tablet baskets;

[0006] a water circulation system, connected to the water tank, for injecting liquid into the water tank or discharging the liquid;

[0007] The control system is electrically connected to the water circulation system and is used to make the liquid level in the water tank be at the no-load water level or the overflow water level.

[0008] Furthermore, the water tank includes an outward expansion portion, the outward expansion portion includes an outward expansion platform, and the outward expansion platform corresponds to the no-load water level.

[0009] Furthermore, the water tank is also provided with an overflow portion protruding to the outside thereof, the overflow portion includes an overflow platform, the overflow platform is provided with an overflow port, and the overflow port is connected to the water circulation system.

[0010] Furthermore, the overflow platform is located above the outward expansion platform.

[0011] Furthermore, the control system includes a photoelectric sensor and a fiber optic sensor; the photoelectric sensor includes a transmitter and a receiver for detecting the liquid level; the fiber optic sensor is used to identify whether the film basket is placed on the card seat.

[0012] Furthermore, the water circulation system includes a water inlet pipe connected to the top of the water tank, a drain pipe connected to the bottom of the water tank and an overflow pipe connected to the overflow port, and the water inlet pipe and the drain pipe are both provided with electromagnetic valves electrically connected to the control system.

[0013] Furthermore, the water circulation system also includes a water inlet main pipe and a drainage main pipe, the water inlet pipe is connected to the water inlet main pipe respectively; the drainage pipe and the overflow pipe are connected to the drainage main pipe respectively, and the water inlet main pipe and the drainage main pipe are respectively provided with manual valves.

[0014] Furthermore, the control system further includes a scanner, which is arranged on the side wall of the water tank and is used to read the label on the film basket.

[0015] Furthermore, the water tank is made of a transparent material, and the photoelectric sensor, the optical fiber sensor and the scanner are all installed outside the water tank.

[0016] Furthermore, the frame is also provided with wheels and handrails.

[0017] The advantages and positive effects of the utility model are:

[0018] (1) The water tank type electronic shelf for storing wafer baskets for polishing materials proposed in this application can be provided with multiple water tanks and multiple card holders as needed, and can store multiple wafer baskets. It has a compact structure and occupies a small space. Each water tank can operate independently and can meet the storage needs of silicon wafers in different situations.

[0019] (2) By setting up photoelectric sensors, fiber optic sensors and water circulation systems to cooperate with each other, fully automated control of the liquid level in the water tank is achieved, which can quickly inject and discharge liquids with rapid linkage and precise control. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of a specific embodiment of the utility model;

[0021] Figure 2 This is a structural diagram of another perspective of a specific embodiment of the present invention;

[0022] Figure 3 It is a top view of a specific embodiment of the utility model.

[0023] In the picture:

[0024] 10. Frame 11. Wheels 12. Handrails

[0025] 20, water tank 21, expansion part 211, expansion platform

[0026] 22. Overflow portion 221, overflow platform 222, overflow port

[0027] 30. Photoelectric sensor 31. Transmitter 32. Receiver

[0028] 40. Water circulation system 41. Water inlet pipe 42. Drain pipe

[0029] 43. Overflow pipe 44. Water inlet main pipe 45. Drainage main pipe

[0030] 46, manual valve 50, scanner 60, card holder

[0031] 70, film basket 80, fiber optic sensor DETAILED DESCRIPTION

[0032] The embodiments of the present invention are described below with reference to the accompanying drawings.

[0033] like Figure 1 、 Figure 2 and Figure 3 As shown, the utility model proposes a water tank type electronic shelf for storing polishing blanking sheet baskets, which is used for temporarily storing sheet baskets 70 to be polished and blanked, including a frame 10, a water tank 20, a water circulation system 40 and a control system, wherein a plurality of independent water tanks 20 are provided on the upper part of the frame 10, and the water tanks 20 are preset with an empty water level and an overflow water level, and are provided with a plurality of holders 60 for placing the sheet baskets 70; the water circulation system 40 is connected to the water tank 20, and is used to inject liquid into or discharge liquid from the water tank 20; the control system is electrically connected to the water circulation system 40, and is used to make the liquid level in the water tank 20 at the empty water level or the overflow water level.

[0034] Specifically, the above-mentioned water tank 20 is a rectangular trough structure, and several holders 60 are arranged along its length direction. The shape of the holder 60 is adapted to the bottom of the film basket 70, so that the film basket 70 can be firmly fixed on the holder 60; the control system can automatically identify whether a film basket 70 is placed on the holder 60. When no film basket 70 is placed on all the holders 60 in the same water tank 20, the control system controls the water circulation system 40 to operate so that the liquid level in the film basket 70 is at the no-load water level. When the control system identifies that a film basket 70 is placed on a certain holder 60 in a certain water tank 20, the control system controls the water circulation system 40 to operate so that the liquid level in the film basket 70 rises to the overflow water level, and then controls the liquid in the water tank 20 to be injected and discharged at a set speed, so that the silicon wafers in the film basket 70 are always in a flowing liquid immersion state.

[0035] Preferably, the size and shape of the water tank 20 are designed in accordance with the specifications of the film basket 70 and the usage requirements. The preset no-load water level in the water tank 20 can ensure that when multiple film baskets 70 are placed in the water tank 20 at the same time, that is, when the water tank 20 is in a fully loaded state, the liquid level in the water tank 20 will still not be higher than the overflow water level. The control system controls the water circulation system 40 to inject liquid into the water tank 20. After the liquid level reaches the overflow water level, the water circulation system 40 injects liquid into the water tank 20 at a set flow rate. The flow rate is the same as the overflow rate of the liquid in the water tank 20, so that the liquid in the water tank 20 can be maintained at the overflow water level.

[0036] Through the above technical solution, the water tank type electronic shelf can store multiple wafer baskets 70 at the same time, and each water tank 20 operates independently. The liquid level in the water tank 20 can be automatically controlled according to the placement of the wafer basket 70 in the water tank 20, and the set overflow speed can be maintained. It has a high degree of automation and is easy to use, meeting the storage needs of the silicon wafers in the wafer basket 70.

[0037] The height of the above-mentioned water tank 20 is higher than the height of the film basket 70 placed on the base 60. In order to facilitate the placement and removal of the film basket 70, the side wall of the water tank 20 expands outward at a certain height to form an outward expansion part 21, so that the space at the corresponding height of the water tank 20 is expanded outward to facilitate the operator to manually place the film basket 70 or cooperate with the movement of the robot; preferably, the outward expansion part 21 includes an outward expansion platform 211, and the outward expansion platform 211 corresponds to the no-load water level, so that the operator can observe whether the control system and the water circulation system 40 are operating normally at any time.

[0038] The above-mentioned water tank 20 is also provided with an overflow portion 22, which protrudes toward the outside of the water tank 20 and includes an overflow platform 221. The overflow platform 221 is arranged in a horizontal direction. The height of the overflow platform 221 corresponds to the preset overflow water level. An overflow port 222 is provided thereon. The overflow port 222 is connected to the water circulation system 40, so that when the liquid level in the water tank 20 reaches the overflow platform 221, the liquid is automatically discharged through the overflow port 222. At this time, the control system only needs to control the injection speed of the liquid into the water circulation system 40 to be the same as the overflow speed, so that the liquid level can be maintained at the overflow water level to meet the storage needs of the silicon wafers.

[0039] Preferably, the overflow platform 221 is disposed above at least one outward expansion platform 211 , so that the operator can always observe whether the control system and the water circulation system 40 are operating normally.

[0040] The above-mentioned control system includes a photoelectric sensor 30, a fiber optic sensor 80 and a controller, and the photoelectric sensor 30 and the fiber optic sensor 80 are electrically connected to the controller respectively; the photoelectric sensor 30 is used to detect the liquid level in the water tank 20, and the fiber optic sensor 80 is used to identify whether a film basket 70 is placed on the card seat 60. The two respectively send corresponding signals to the controller so that the controller controls the operation of the water circulation system 40.

[0041] Specifically, the photoelectric sensors 30 are arranged in pairs, one pair is used to detect the overflow water level, and the other pair is used to detect the empty water level; each pair of photoelectric sensors 30 includes a transmitter 31 and a receiver 32 arranged on two opposite side walls of the water tank 20, the transmitting end of the transmitter 31 emits light into the water tank 20 at a set angle; the receiver 32 can receive the light reflected by the liquid surface; in the initial state, there is no liquid in the water tank 20, and the control system controls the water circulation system 40 to inject liquid into the water tank until the receiver 32 corresponding to the empty water level receives light, indicating that the liquid level in the water tank 20 is high. The degree is at the no-load water level; when the sheet basket 70 is placed in the water tank 20, the control system controls the water circulation system 40 to inject liquid into the water tank 20, and the liquid level gradually rises until the receiver 32 corresponding to the overflow water level receives light, indicating that the liquid level in the water tank 20 is at the overflow water level, that is, the position of the overflow platform 221. At this time, the liquid is discharged through the overflow port 222, and then the photoelectric sensor 30 transmits a signal to the controller. The controller controls the water circulation system 40 to inject the liquid into the water tank 20 at a set flow rate, so that the liquid in the water tank 20 can be maintained at the overflow water level.

[0042] In a specific embodiment, the range of light received by the receiver 32 covers a set range above the expansion platform 211 and below the overflow platform 221 .

[0043] The above-mentioned optical fiber sensors 80 are relatively arranged on the two opposite side walls of the water tank 20, and are respectively arranged corresponding to the number of the holders 60. When the film basket 70 is placed on the holder 60, the signal emitted by the optical fiber sensor 80 is blocked by the film basket 70, and the optical fiber sensor 80 sends a signal to the controller. The controller controls the water circulation system 40 to inject liquid into the water tank 20, and cooperates with the photoelectric sensor 30 to make the liquid level in the water tank 20 reach the overflow water level; when the film baskets 70 on all the holders 60 in the same water tank 20 are removed, the optical fiber sensor 80 sends a signal to the controller, and the controller controls the water circulation system 40 to discharge the liquid in the water tank 20, and cooperates with the photoelectric sensor 30 to make the liquid level in the water tank 20 reach the empty water level.

[0044] The above-mentioned water circulation system 40 includes an inlet pipe 41 connected to the top of the water tank 20, a drain pipe 42 connected to the bottom of the water tank 20 and an overflow pipe 43 connected to the overflow port. The inlet pipe 41 and the drain pipe 42 are both provided with an electromagnetic valve electrically connected to the control system, and the electromagnetic valve can open, close or adjust the water flow rate in response to the control system.

[0045] Preferably, there is a gap between adjacent water tanks 20, and the water inlet pipe 41 passes through the gap from bottom to top and is connected to the top of the water tank 20. The drain pipe 42 and the overflow pipe 43 are both arranged vertically and extend to the bottom of the water tank 20 to save space and make the overall structural layout more compact.

[0046] The water circulation system 40 also includes a water inlet main pipe 44 and a drainage main pipe 45. The water inlet pipe 41 is connected to the water inlet main pipe 44; the drainage pipe 42 and the overflow pipe 43 are connected to the drainage main pipe 45 respectively. The water inlet main pipe 44 and the drainage main pipe 45 are respectively provided with manual valves 47. Preferably, the water inlet main pipe 44 and the drainage main pipe 45 are both arranged on the inner side of the frame 10 below the water tank 20 so that the two are not easily affected by the outside world.

[0047] Furthermore, the control system also includes a scanner 50, which is arranged on the side wall of the water tank 20 and is used to read the label on the film basket 70 to identify the status of the film basket 70. When the status of the film basket 70 is abnormal, an alarm can be issued in time.

[0048] In a preferred embodiment, the water tank 20 is made of transparent material, and the photoelectric sensor 30, the optical fiber sensor 80 and the scanner 50 are installed on the outside of the water tank 20, which can ensure accurate detection while being easy to install and replace, thereby extending the service life of the three.

[0049] Furthermore, the frame 10 is also provided with wheels 11 and armrests 12 so that the water tank type electronic shelf can be moved according to usage requirements.

[0050] The technical solution of this application is further described below with reference to specific embodiments.

[0051] Example 1

[0052] A water tank type electronic shelf for storing polishing sheet baskets, such as Figure 1 、 Figure 2 and Figure 3 As shown, it includes a frame 10, a water tank 20, a water circulation system 40 and a control system.

[0053] The frame 10 is made of stainless steel and has a frame structure. The frame 10 is also provided with wheels 11 and handrails 12 so that the water tank type electronic shelf can be moved according to the use requirements.

[0054] Two independent water tanks 20 are provided on the upper part of the frame 10. The water tanks 20 are made of acrylic material. Two holders 60 are provided in each water tank 20, and each holder 60 can hold a film basket 70; the two ends of the water tank 20 in the length direction are respectively provided with an expansion part 21 protruding toward the outside of the water tank 20, so that the robot can place the film basket 70 on the holder 60; the expansion part 21 includes an expansion platform 211, and an overflow part 22 is provided above one of the expansion platforms 211. The overflow part 22 protrudes toward the outside of the water tank 20 relative to the expansion part 21, and is provided with an overflow platform 221. The overflow platform 221 is provided with two overflow ports 222; a drain outlet is provided at the bottom of the water tank 20, and a water inlet is provided at the top of the water tank 20.

[0055] Among them, the water circulation system 40 includes an inlet pipe 41, an outlet pipe, an overflow pipe, an inlet main pipe 44 and a drainage main pipe 45, wherein the inlet pipe 41 is respectively connected to the water inlet of the water tank 20, and the lower end of the inlet pipe 41 is connected to the inlet main pipe 44 arranged below the water tank 20; the outlet pipes are respectively connected to the water outlet of the water tank 20, and the overflow pipes are respectively connected to the overflow of the water tank 20; the lower ends of the outlet pipe and the overflow pipe 43 are both connected to the drainage main pipe 45; the inlet pipe 41 and the drainage pipe 42 are both provided with electromagnetic valves, which are electrically connected to the control system; the inlet main pipe 44 and the drainage main pipe 45 are both arranged on the inner side of the frame 10 below the water tank 20, so that they are not easily affected by the outside world.

[0056] The control system includes a controller, a photoelectric sensor 30, a fiber optic sensor 80, and a scanner 50. The controller is placed on the frame 10 below the water tank 20. The photoelectric sensor 30, fiber optic sensor 80, scanner 50, and solenoid valve are electrically connected to the controller. The receiver 32 of the photoelectric sensor 30 is located on the outside of the same side wall as the expansion portion 21 and the overflow portion 22, and can receive light within a set range. The transmitter 31 of the photoelectric sensor 30 is located on the outside of the side wall opposite to that side wall. The fiber optic sensor 80 is installed on the outside of the side wall below the expansion platform 211, embedded in that side wall. The scanner 50 is also embedded on the outside of the other two opposing side walls of the water tank 20.

[0057] The use process of the water tank type electronic shelf is as follows: in the initial state, the control system controls the water inlet pipe 41 to open and inject liquid into the water tank 20, so that the liquid level reaches the no-load water level; when the film basket 70 is placed on any card seat 60 of any water tank 20, the light emitted by the optical fiber sensor 80 is blocked by the film basket 70, and the optical fiber sensor 80 sends a signal to the controller, and the controller controls the water inlet pipe 41 to open and continue to inject liquid into the water tank 20. During this process, the liquid level gradually rises until the receiver 32 corresponding to the overflow water level receives the light. At this time, the photoelectric sensor 30 transmits the signal to the controller, and the controller controls the water inlet pipe 41 to set Liquid is injected into the water tank 20 at a certain flow rate so that the liquid in the water tank 20 can be maintained at the overflow water level; when a sheet basket 70 is put into the water tank 20 again, the corresponding optical fiber sensor 80 sends a signal to the controller. At this time, the liquid level in the water tank 20 exceeds the overflow water level, and the controller controls the drain pipe 42 to discharge the liquid in the water tank 20. When the receiver 32 of the photoelectric sensor 30 corresponding to the overflow water level receives light, it transmits a signal to the controller. The controller controls the drain pipe 42 to close and controls the water inlet pipe 41 to inject liquid into the water tank 20 at a set flow rate so that the liquid in the water tank 20 can be maintained at the overflow water level. On the contrary, when the film basket 70 is moved out of the water tank 20, the optical fiber sensor 80 sends a signal to the controller. At this time, the liquid level drops, and the controller controls the water inlet pipe 41 to inject liquid into the water tank 20. After the liquid in the water tank 20 reaches the overflow water level again, the photoelectric sensor 30 transmits a signal to the controller, and the controller controls the water inlet pipe 41 to inject liquid into the water tank 20 at a set flow rate so that the liquid in the water tank 20 can be maintained at the overflow water level; when all the film baskets 70 in the same water tank 20 are moved out, the optical fiber sensor 80 sends a signal to the controller, and the controller controls the drain pipe 42 to open. When the photoelectric sensor 30 recognizes that the liquid level reaches the no-load water level, it sends a signal to the controller, and the controller controls the drain pipe 42 to close for use again.

[0058] The water tank type electronic shelf for storing wafer baskets for polishing blanks proposed in this application can be equipped with multiple water tanks and multiple card holders as needed, and can store multiple wafer baskets. It has a compact structure and occupies a small space. Each water tank can operate independently, which can meet the storage needs of silicon wafers in different situations.

[0059] By setting up photoelectric sensors, fiber optic sensors and water circulation systems to cooperate with each other, fully automated control of the liquid level in the water tank is achieved, which can quickly inject and discharge liquids with rapid linkage and precise control.

[0060] The above embodiments of the present invention are described in detail. However, the above contents are only preferred embodiments of the present invention and should not be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A water tank type electronic shelf for storing polishing sheet baskets, characterized in that: include: The frame has a plurality of independent water tanks on its upper part, wherein the water tanks have preset no-load water level and overflow water level, and are provided with a plurality of seats for placing tablet baskets; A water circulation system is connected to the water tank and is used to inject liquid into or discharge the liquid into the water tank; a control system is electrically connected to the water circulation system and is used to keep the liquid level in the water tank at the no-load water level or the overflow water level.

2. The water tank type electronic shelf for storing polishing sheet baskets according to claim 1, characterized in that: The water tank includes an outward expansion portion, the outward expansion portion includes an outward expansion platform, and the outward expansion platform corresponds to the no-load water level.

3. The water tank type electronic shelf for storing polishing sheet baskets according to claim 2, characterized in that: The water tank is further provided with an overflow portion protruding outward thereof, wherein the overflow portion comprises an overflow platform, and the overflow platform is provided with an overflow port, and the overflow port is communicated with the water circulation system.

4. The water tank type electronic shelf for storing polishing sheet baskets according to claim 3, characterized in that: The overflow platform is located above the outward expansion platform.

5. The water tank type electronic shelf for storing polishing sheet baskets according to any one of claims 3 or 4, characterized in that: The control system includes a photoelectric sensor and an optical fiber sensor; the photoelectric sensor includes a transmitter and a receiver for detecting the liquid level; the optical fiber sensor is used to identify whether the film basket is placed on the card seat.

6. The water tank type electronic shelf for storing polishing sheet baskets according to claim 5, characterized in that: The water circulation system includes a water inlet pipe connected to the top of the water tank, a drain pipe connected to the bottom of the water tank and an overflow pipe connected to the overflow port. The water inlet pipe and the drain pipe are both provided with electromagnetic valves electrically connected to the control system.

7. The water tank type electronic shelf for storing polishing sheet baskets according to claim 6, characterized in that: The water circulation system also includes a water inlet main pipe and a drainage main pipe. The water inlet pipe is connected to the water inlet main pipe respectively; the drainage pipe and the overflow pipe are connected to the drainage main pipe respectively. The water inlet main pipe and the drainage main pipe are respectively provided with manual valves.

8. The water tank type electronic shelf for storing polishing sheet baskets according to any one of claims 6 or 7, characterized in that: The control system further comprises a scanner, which is arranged on a side wall of the water tank and is used for reading a label on the film basket.

9. The water tank type electronic shelf for storing polishing sheet baskets according to claim 8, characterized in that: The water tank is made of transparent material, and the photoelectric sensor, the optical fiber sensor and the scanner are all installed outside the water tank.

10. The water tank type electronic shelf for storing polishing sheet baskets according to any one of claims 1-4, 6, and 9, characterized in that: The frame is also provided with wheels and handrails.

Images