Shielding plate for film coating

Abstract

The shielding plate comprises a base, a shielding sheet, a pressing strip and a bolt, a hollow window is formed in the top face of the base, a sliding groove is formed in the top face of the base, the sliding groove is formed in the side edge of the base, the sliding groove is parallel to the extending direction of the hollow window, the bottom face of the shielding sheet is connected with a rolling wheel, and the rolling wheel rolls in the sliding groove. The hollow window is arranged on the base, the sliding groove is formed in the hollow window, so that the shielding piece moves in the hollow window, the bolt is connected to the side face of the long edge of the sliding groove, the pressing strip is connected with the base through the bolt, and the pressing strip abuts against the side face of the rolling wheel so as to lock rolling of the rolling wheel. The shielding piece plays a role in blocking the target material so as to prevent a part which does not need to be coated from being coated, the workpiece is placed in the hollow window, and the shielding piece moves so as to adjust the position of the shielding piece in the hollow window, so that the position of the surface which does not need to be coated in the workpiece is adjusted, the pressing strip locks the roller, the roller rolls in the sliding groove, and the smoothness of driving the shielding piece is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering coating, in particular to a shielding plate for coating. Background Art

[0002] In sputtering coating, glow discharge is used to sputter the target material, and then it is deposited on the surface of the base film to form a coating. In the process implementation, it is usually necessary to adjust the uniformity of the deposition to ensure that the uniformity of the coating meets the requirements. The production process usually requires the use of auxiliary workpieces to adjust the uniformity of the coating, and the coating shielding plate is used as an auxiliary workpiece to adjust the uniformity of the coating. The coating shielding plate includes a base and a shielding plate. The base is provided with a hollow window. The workpiece to be coated is placed in the hollow window. When the surface to be coated in the workpiece is processed and coated, the shielding plate shields the part that does not need to be coated to achieve the accuracy of the coating in the workpiece and reduce the risk of the part that does not need to be coated being mistakenly coated, thereby adjusting the uniformity of the coating on the surface to be coated of the workpiece. The existing shielding plate is usually fixedly connected to the base, and the shielding plate cannot be moved as needed. The user can only change the part that does not need to be coated by moving the workpiece. This method reduces the flexibility of the workpiece coating. Therefore, in response to the above problem, the utility model provides a coating shielding plate. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a shielding plate for film coating.

[0004] To achieve the above-mentioned purpose, the utility model discloses a shielding plate for coating, including a base, a shielding sheet, a pressure strip, and a bolt. The top surface of the base is provided with a hollow window, and the top surface of the base is also provided with a sliding groove. The sliding groove is provided on the side of the base, and the sliding groove is parallel to the extension direction of the hollow window. The bottom surface of the shielding sheet is connected to a roller, and the roller rolls in the sliding groove to move the shielding sheet in the hollow window. The bolt is connected to the long side of the sliding groove, and the pressure strip is connected to the base through the bolt. The pressure strip abuts against the side of the roller to lock the rolling of the roller.

[0005] A further solution is that it also includes a nut, the pressure strip is provided with a through hole, the bolt is passed through the through hole, the nut is threadedly connected to the bolt, the pressure strip is located between the long side of the sliding groove and the nut, and the friction force of the pressure strip on the roller is adjusted by adjusting the nut to lock the rolling of the roller.

[0006] A further solution is that a rubber sheet is fixedly connected to the circular side surface of the roller, the rubber sheet rotates synchronously with the roller, the rubber sheet abuts against the long side surface of the sliding groove and / or the rubber sheet abuts against the long side surface of the pressure strip.

[0007] A further solution is that a limiting groove is opened on the long side of the sliding groove, the extension direction of the limiting groove is parallel to the extension direction of the sliding groove, the side protrusion of the roller is provided with a limiting part, the vertical width of the limiting groove is equal to the vertical width of the limiting part, and the limiting part is slidably connected to the limiting groove.

[0008] A further solution is that a disassembly opening is provided on the inner top surface of the limiting groove, and the disassembly opening passes through the inner top surface of the limiting groove to the top surface of the base, and the width of the disassembly opening is greater than the width of the limiting portion.

[0009] A further solution is that the shielding piece is provided with a plurality of groups of the rollers, and the plurality of groups of the rollers are arranged in sequence along the extension direction of the sliding groove.

[0010] A further solution is that a first clearance groove is also provided on the top surface of the base, the depth of the first clearance groove is less than the depth of the hollow window, the length of the first clearance groove is less than the length of the hollow window, the first clearance groove passes through the long side of the hollow window to the long side of the sliding groove, and the disassembly port passes through the inner top surface of the limit groove to the bottom surface of the first clearance groove.

[0011] A further solution is that a second clearance groove is provided on the top surface of the pressure strip, and the second clearance groove runs through the two long side surfaces of the pressure strip, and the two side surfaces of the second clearance groove are arranged in the same plane as the two side surfaces of the first clearance groove, and the depth of the second clearance groove is set equal to the depth of the first clearance groove, and the length of the second clearance groove is set equal to the length of the first clearance groove.

[0012] A further solution is that the first clearance groove is arranged close to the short side of the base, and the second clearance groove is arranged close to the short side of the base.

[0013] Compared with the prior art, the present invention has the following beneficial effects: a workpiece to be coated is placed in the hollow window, the target material is sputtered toward the surface of the workpiece to be coated, and the shielding sheet serves to block the target material and prevent the portion that does not need to be coated from being coated. After the workpiece is placed in the hollow window, the shielding sheet is driven to move to adjust the position of the shielding sheet in the hollow window, thereby adjusting the position of the portion of the workpiece that does not need to be coated. The shielding sheet is driven to move, and the roller rolls in the sliding groove, thereby increasing the smoothness of driving the shielding sheet.

[0014] Since the pressure strip is connected to the base by bolts, the pressure strip can be adjusted by the bolt connection to squeeze the roller, that is, the pressure strip squeezes the round side of the roller to increase the driving force required for the roller to rotate, thereby locking the rotation of the roller and achieving locking of the movement of the shielding piece;

[0015] The rubber sheet rotates with the rotation of the roller, and the rubber sheet abuts against the long side of the sliding groove. The rubber sheet also abuts against the long side of the pressure strip. The surface friction coefficient of the rubber sheet is large, so that the long side of the pressure strip exerts pressure on the round side of the roller, which can increase the friction force on the roller and increase the driving force required to drive the roller, thereby increasing the stability of the locked roller during rolling.

[0016] The shielding piece is connected to the sliding groove through a roller sliding, and the limiting part also slides in the limiting groove. The sliding connection between the limiting groove and the limiting part limits the vertical displacement of the shielding piece, making it difficult for the shielding piece to separate from the base in the vertical direction, thereby increasing the stability of the connection between the shielding piece and the base. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram from the first perspective of the present invention;

[0018] Figure 2 for Figure 1 A magnified schematic diagram of area A in the middle;

[0019] Figure 3 for Figure 1 A magnified schematic diagram of area B in the middle;

[0020] Figure 4 This is a schematic diagram of the second viewing angle of the present invention;

[0021] Figure 5 for Figure 4 Enlarged schematic diagram of the middle C area;

[0022] Figure 6 This is a schematic diagram of the third viewing angle of the present invention;

[0023] Figure 7 for Figure 4 Enlarged schematic diagram of region D in the middle;

[0024] Figure 8 It is a schematic diagram of some parts of the present invention in a detached state;

[0025] Figure 9 for Figure 8 Enlarged schematic diagram of the middle E area;

[0026] Figure 10 for Figure 8 Enlarged schematic diagram of the middle F area;

[0027] Figure 11 for Figure 8 Schematic diagram of the magnified G region in the middle.

[0028] Markings: 11. Base; 12. Shielding piece; 13. Roller; 14. Hollow window; 15. Sliding groove; 16. Pressure strip; 17. Bolt; 18. Nut; 19. Through hole; 20. Rubber sheet; 21. Limiting groove; 22. Disassembly opening; 23. First clearance groove; 24. Second clearance groove; 25. Limiting part. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the present invention clearer, the "X direction", "Y direction" and "Z direction" used in the description of the present invention are all Figure 1 The coordinate directions shown in the figure are for a clearer description of the present invention and cannot be understood as a limitation of the present invention. Figures 1-11 The utility model is further described in detail with reference to the accompanying drawings.

[0030] To solve this problem, the existing shielding sheet is usually fixedly connected to the base, and the shielding sheet cannot move with the position of the part of the workpiece that does not need to be coated, resulting in the shielding sheet having to block the part of the workpiece that does not need to be coated by moving the workpiece. This method reduces the coating flexibility of the workpiece. Therefore, the utility model provides a shielding plate with which the shielding sheet can slide relatively.

[0031] Reference Figure 1-3 As shown, a shielding plate for coating includes a base 11 and a shielding sheet 12. The base 11 serves as a basic support. The top surface of the base 11 is provided with a hollow window 14, which is recessed downward from the top surface of the base 11, that is, the hollow window 14 is groove-shaped. The workpiece to be coated is placed in the hollow window 14 with the surface to be coated facing outward. When the target material is sputtered toward the surface to be coated of the workpiece, the shielding sheet 12 serves to block the target material and prevent the part that does not need to be coated from being coated. The target material is sputtered toward the hollow window 14 so that the surface to be coated of the workpiece is coated. The top surface of the base 11 is also provided with a sliding groove 15, which is recessed downward from the top surface of the base 11. The sliding groove 15 is arranged on both sides of the base 11 On the side, the sliding groove 15 is located on one side of the hollow window 14, and the extension direction of the sliding groove 15 is parallel to the extension direction of the hollow window 14, that is, the sliding groove 15 and the hollow window 14 both extend along the X direction, and the bottom surface of the shielding piece 12 is connected with a roller 13, and the roller 13 rolls along the X direction in the sliding groove 15 to make the shielding piece 12 move back and forth along the X direction in the hollow window 14. When in use, after placing the workpiece into the hollow window 14, the shielding piece 12 is driven to move to adjust the position of the shielding piece 12 in the hollow window 14, thereby adjusting the position of the part of the workpiece that does not need to be coated, and the shielding piece 12 is driven to move, and the roller 13 rolls in the sliding groove 15 to increase the smoothness when driving the shielding piece 12.

[0032] The present invention also includes a pressure strip 16, which is installed on the inner side of the sliding groove 15. The pressure strip 16 is bolted to the long side of the base 11, and the roller 13 rolls between the long side of the sliding groove 15 and the long side of the pressure strip 16. Since the pressure strip 16 and the base 11 are bolted, the pressure strip 16 can be adjusted by the bolt connection to squeeze the roller 13, that is, the pressure strip 16 squeezes the round side of the roller 13, and the roller 13 is abutted between the long side of the pressure strip 16 and the long side of the sliding groove 15 to increase the driving force required for the roller 13 to rotate, thereby locking the rotation of the roller 13 and achieving the locking of the movement of the shielding piece 12.

[0033] The "long side surface" of the present invention refers to the side surface of the base 11 and the pressure strip 16 with a longer length, and the "short side surface" refers to the side surface of the base 11 and the pressure strip 16 with a shorter length. The maximum length of the "long side surface" is greater than the maximum length of the "short side surface". The long side direction extends along the X direction, and the short side direction extends along the Y direction. The "long side surface" and the "short side surface" are both formed by the rectangular shape of the base 11 of this embodiment, but the shape of the base 11 includes but is not limited to a rectangular parallelepiped, and can also be a cube, cylinder, etc., which will not be repeated here.

[0034] This embodiment also includes a bolt 17 and a nut 18, which are threadedly connected to the bolt 17 and the nut 18, and a first screw hole is provided on the long side of the sliding groove 15, and the bolt 17 is connected to the first screw hole, and a through hole 19 is provided on the pressure strip 16. The bolt 17 is passed through the through hole 19, and the pressure strip 16 is sleeved on the bolt 17 through the through hole 19 and is located between the long side of the sliding groove 15 and the nut 18, and the roller 13 is located between the long side of the sliding groove 15 and the long side of the pressure strip 16. By changing the pressure of the nut 18 on the pressure strip 16, that is, by changing the tightness between the bolt 17 and the nut 18, the long side of the pressure strip 16 applies pressure to the circular side of the roller 13, and at the same time, the pressure value applied by the long side of the pressure strip 16 on the circular side of the roller 13 is adjusted, thereby increasing the friction force on the roller 13 and increasing the driving force required to drive the roller 13, thereby locking the rolling of the roller 13 and realizing the locking of the position of the shielding piece 12.

[0035] The two circular side surfaces of the roller 13 are fixedly connected with rubber sheets 20. The rubber sheets 20 are used to increase the friction between the circular side surface of the roller 13 and the long side surface of the pressure strip 16, or to increase the friction between the circular side surface of the roller 13 and the long side surface of the sliding groove 15. The rubber sheet 20 rotates with the rotation of the roller 13, and the rubber sheet 20 abuts against the long side surface of the sliding groove 15. The rubber sheet 20 abuts against the long side surface of the pressure strip 16. Since the surface friction coefficient of the rubber sheet 20 is large, when the long side surface of the pressure strip 16 applies pressure to the circular side surface of the roller 13, the friction force on the roller 13 can be increased, and the driving force required to drive the roller 13 is increased, thereby increasing the stability of the locked roller 13 during rolling.

[0036] The limit groove 21 is provided on the long side surface of the sliding groove 15, and the limit groove 21 is recessed from the long side surface of the sliding groove 15. The extension direction of the limit groove 21 is parallel to the extension direction of the sliding groove 15, that is, both are in the X direction. The circular side surface of the roller 13 is convex with a limit portion 25, and the axis of the limit portion 25 is coaxially arranged with the axis of the roller 13. The limit portion 25 is slidably connected to the limit groove 21, and the vertical width of the limit groove 21 is equal to the vertical width of the limit portion 25. The vertical direction is the Z direction. When the shielding piece 12 is slidably connected to the sliding groove 15 by the roller 13, the limit portion 25 also slides in the limit groove 21. The sliding connection between the limit groove 21 and the limit portion 25 limits the vertical displacement of the shielding piece 12, making it difficult for the shielding piece 12 to separate from the base 11 in the vertical direction, thereby increasing the stability of the connection between the shielding piece 12 and the base 11.

[0037] Reference Figure 3-11 As shown, the shielding sheets 12 are arranged in multiple groups, and the multiple groups of shielding sheets 12 are connected to the base 11 through the above-mentioned connection direction. The shielding area of each group of shielding sheets 12 for the target material is different. When the user needs to sort the shielding sheets 12 of different areas, the shielding sheets 12 need to be removed from the base 11. During the removal process, the limiting portion 25 must be removed from the limiting groove 21. In order to increase the convenience of removing the limiting portion 25 from the limiting groove 21, the inner top surface of the limiting groove 21 of the utility model is provided with a disassembly port 22, and the disassembly port 22 is self-limiting. The inner top surface of the groove 21 passes through the top surface of the base 11, the disassembly opening 22 is U-shaped, the limiting portion 25 is round and concentric with the roller 13, and the width of the disassembly opening 22 is greater than the diameter of the limiting portion 25. When the shielding piece 12 needs to be removed from the base 11, the shielding piece 12 is driven to make the roller 13 slide in the sliding groove 15 along the X direction toward the disassembly opening 22, so that the limiting portion 25 is disengaged from the disassembly opening 22 and the limiting groove 21, thereby realizing the disassembly of the shielding piece 12 from the base 11.

[0038] In order to make the shielding piece 12 slide more stably in the base 11, the shielding piece 12 is provided with multiple sets of rollers 13, and the multiple sets of rollers 13 are arranged in sequence along the extension direction of the sliding groove 15, that is, the X direction. By setting multiple sets of rollers 13, the rolling stability of the shielding piece 12 is improved.

[0039] Since the rollers 13 of the shielding piece 12 are provided in multiple groups, the defect caused is that when the shielding piece 12 is disassembled and separated from the base 11, if the limiting portion 25 of the first group of rollers 13 of the shielding piece 12 disengages from the disassembly opening 22 first, since the limiting portion 25 of the second group of rollers 13 has not disengaged from the disassembly opening 22, the shielding piece 12 is in a tilted state at this time. In order to disengage the shielding piece 12 from the base 11, the shielding piece 12 must be driven forward continuously so that the limiting portion 25 of the second group of rollers 13 comes out of the disassembly opening 22. However, if the height of the side wall of the short side of the base 11 is too high during the process of driving the shielding piece 12 forward, the side wall of the short side of the base 11 will interfere with the shielding piece 12, and the second group of rollers 13 cannot continue to approach the disassembly. The first paving groove 23 is used to move the rollers 13 so that they can move relative to the first paving groove 23. The first paving groove 23 is used to move the rollers 13 relative to the first paving groove 23. The first paving groove 23 is used to move the rollers 13 relative to the first paving groove 23.

[0040] In order to reduce the risk of target material being accidentally sputtered onto the surface of the workpiece that does not need to be coated, the side edge of the shielding piece 12 close to the sliding groove 15 extends to the top surface of the pressure strip 16, thereby causing the same defect as mentioned above, that is, the top surface of the pressure strip 16 cannot give way, causing the shielding piece 12 to interfere with the side wall of the short side of the base 11. In order to solve the above problem, a second giving way groove 24 is provided on the top surface of the pressure strip 16. The second giving way groove 24 runs from one long side of the pressure strip 16 to the other long side of the pressure strip 16. The two sides of the second giving way groove 24 are The side surfaces are coplanar with the two side surfaces of the first clearance groove 23. The depth of the second clearance groove 24 is equal to the depth of the first clearance groove 23. The length of the second clearance groove 24 is equal to the length of the first clearance groove 23. The second clearance groove 24 increases the inclination angle of the shielding piece 12 to make way for the side wall where the short side of the base 11 is located, so that the rear group of rollers 13 can continue to drive forward to approach the disassembly opening 22, and the limiting portion 25 of the rear group of rollers 13 can be disengaged from the disassembly opening 22. In this way, the shielding piece 12 can be disengaged from the base.

[0041] The first clearance groove 23 is disposed close to the side wall where the short side of the base 11 is located, and the second clearance groove 24 is disposed close to the side wall where the short side of the base 11 is located.

[0042] Of course, the above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly. They cannot be used to limit the scope of protection of the utility model. Any modifications made according to the spirit of the main technical solution of the utility model should be included in the scope of protection of the utility model.

Claims

1. A shielding plate for coating, characterized in that: The invention comprises a base (11), a shielding piece (12), a pressure strip (16), and a bolt (17). The top surface of the base (11) is provided with a hollow window (14). The top surface of the base (11) is also provided with a sliding groove (15). The sliding groove (15) is provided on the side of the base (11), and the extension direction of the sliding groove (15) and the hollow window (14) are parallel. The bottom surface of the shielding piece (12) is connected with a roller (13). The roller (13) rolls in the sliding groove (15) so that the shielding piece (12) moves in the hollow window (14). The bolt (17) is connected to the long side of the sliding groove (15). The pressure strip (16) is connected to the base (11) through the bolt (17). The pressure strip (16) abuts against the side of the roller (13) to lock the rolling of the roller (13).

2. The shielding plate for film coating according to claim 1, characterized in that: The invention also includes a nut (18), the pressure strip (16) is provided with a through hole (19), the bolt (17) is passed through the through hole (19), the nut (18) is threadedly connected to the bolt (17), the pressure strip (16) is located between the long side of the sliding groove (15) and the nut (18), and the friction force of the pressure strip (16) on the roller (13) is adjusted by adjusting the nut (18) to lock the rolling of the roller (13).

3. The shielding plate for film coating according to claim 1, characterized in that: A rubber sheet (20) is fixedly connected to the circular side surface of the roller (13), and the rubber sheet (20) rotates synchronously with the roller (13). The rubber sheet (20) abuts against the long side surface of the sliding groove (15) and / or the rubber sheet (20) abuts against the long side surface of the pressure strip (16).

4. The shielding plate for film coating according to claim 1, characterized in that: A limiting groove (21) is provided on the long side of the sliding groove (15), and the extension direction of the limiting groove (21) is arranged parallel to the extension direction of the sliding groove (15). A limiting portion (25) is provided on the side protrusion of the roller (13), and the vertical width of the limiting groove (21) is set equal to the vertical width of the limiting portion (25). The limiting portion (25) is slidably connected to the limiting groove (21).

5. The shielding plate for film coating according to claim 4, characterized in that: The inner top surface of the limiting groove (21) is provided with a disassembly opening (22), the disassembly opening (22) passes through the inner top surface of the limiting groove (21) to the top surface of the base (11), and the width of the disassembly opening (22) is greater than the width of the limiting portion (25).

6. The shielding plate for film coating according to claim 5, characterized in that: The shielding piece (12) is provided with a plurality of groups of rollers (13), and the plurality of groups of rollers (13) are arranged in sequence along the extension direction of the sliding groove (15).

7. The shielding plate for film coating according to claim 6, characterized in that: The top surface of the base (11) is further provided with a first clearance groove (23), the depth of the first clearance groove (23) is less than the depth of the hollow window (14), the length of the first clearance groove (23) is less than the length of the hollow window (14), the first clearance groove (23) extends from the long side surface of the hollow window (14) to the long side surface of the sliding groove (15), and the disassembly opening (22) extends from the inner top surface of the limiting groove (21) to the bottom surface of the first clearance groove (23).

8. The shielding plate for film coating according to claim 7, characterized in that: A second paving groove (24) is provided on the top surface of the pressure strip (16), and the second paving groove (24) runs through the two long side surfaces of the pressure strip (16). The two side surfaces of the second paving groove (24) and the two side surfaces of the first paving groove (23) are respectively arranged in the same plane, the depth of the second paving groove (24) is set equal to the depth of the first paving groove (23), and the length of the second paving groove (24) is set equal to the length of the first paving groove (23).

9. The shielding plate for film coating according to claim 8, characterized in that: The first paving groove (23) is arranged close to the short side of the base (11), and the second paving groove (24) is arranged close to the short side of the base (11).

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