Evaporation device convenient to change materials and capable of rapidly heating

Abstract

The utility model provides an evaporation device convenient to change materials and capable of rapidly heating, and relates to the technical field of semiconductors. The evaporation device convenient to change materials and capable of rapidly heating comprises a box body, an evaporation piece and a heating piece, wherein the evaporation piece is arranged in the box body; the base material is placed in the closed interior of the box body, the interior of the evaporation piece is used for containing the coating material, and the evaporation piece is heated through the heating piece, so that the coating material in the evaporation piece is heated and evaporated to be evenly deposited on the base material; the spiral heating piece is wound outside the evaporation piece, so that the heating piece is more uniformly distributed relative to the evaporation piece, the evaporation piece and the coating material in the evaporation piece are uniformly heated, and the coating quality is effectively improved; the uniform plate is arranged on the evaporation piece, so that the purpose of preventing a coating material from splashing is achieved, a base film is prevented from being damaged, and the product yield and the production efficiency are improved; and an opening is formed in the box body, so that an operator can conveniently add a base material and a coating material, and rapid material changing is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an evaporation device which is convenient for material replacement and fast heating. Background Art

[0002] In the fabrication of perovskite cells, vacuum evaporation technology is widely used to prepare the perovskite absorber layer. This technique allows perovskite materials to be deposited as nanoscale thin films on conductive substrates, thereby producing highly efficient perovskite solar cells. However, existing evaporation devices, which facilitate material changes and rapid heating, suffer from unstable heating effects, resulting in poor repeatability in the evaporation process and poor product quality stability. Furthermore, high-power vacuum evaporation processes are prone to spattering, which can damage the base film, thus affecting product yield and production efficiency. Utility Model Content

[0003] The purpose of the utility model is to provide an evaporation device that is convenient for material replacement and fast in heating, which can improve the uniformity of the temperature of the evaporation source so as to enable the evaporation process to proceed smoothly.

[0004] The embodiment of the present utility model is achieved as follows:

[0005] In a first aspect, the utility model provides an evaporation device that is convenient for material replacement and fast heating, comprising:

[0006] A box body, wherein the box body is provided with a cavity and an opening;

[0007] An evaporation element, the evaporation element is arranged in the cavity of the box body, and the evaporation element is used to accommodate the coating material;

[0008] a heating element, the heating element being disposed in the cavity of the housing, the heating element being a pipe structure, the heating element extending spirally in a vertical direction along the outer wall of the evaporator so as to be spirally wound around the outer wall of the evaporator, the heating element being used to heat the coating material contained in the evaporator;

[0009] a door body, the door body being arranged at the opening and being used for opening or closing the opening;

[0010] A uniform plate is provided on the evaporation element and is used to prevent the coating material from splashing.

[0011] In the above embodiment, the substrate is placed in the closed interior of the box, the interior of the evaporator is used to accommodate the coating material, and the evaporator is heated by the heating element, so that the coating material in the evaporator is evaporated by the heat and evenly deposited on the substrate; and the heating element is arranged in a spiral shape around the outside of the evaporator, so that the heating element can be distributed more evenly relative to the evaporator, so that the evaporator and the coating material located in the evaporator are evenly heated, thereby effectively improving the coating quality; and by arranging a uniform plate on the evaporator, the purpose of preventing the coating material from splashing is achieved, thereby avoiding damage to the base film, thereby improving product yield and production efficiency; and by arranging an opening in the box, it is convenient for operators to add substrates and coating materials, thereby achieving rapid material replacement.

[0012] In an optional embodiment, the evaporation element includes a container and an evaporation plate, the internal chamber of the container is used to accommodate the coating material, the evaporation plate is arranged on the top of the container, and the heating element is spirally arranged outside the container along the height direction of the container.

[0013] In an optional embodiment, the uniform plate is disposed between the container and the evaporation plate, and the uniform plate is used to prevent the coating material from splashing.

[0014] In an optional embodiment, the evaporation plate is provided with a plurality of through holes, and the through holes are communicated with the internal chamber of the container.

[0015] In an optional embodiment, the evaporating element further includes a fixing element, which is arranged along the height direction of the container and connected to the heating element, and is used to fix the heating element.

[0016] In an optional embodiment, there are multiple evaporating elements, and the multiple evaporating elements are arranged along the length direction of the box body. The heating element is spirally arranged outside the multiple containers.

[0017] In an optional embodiment, the evaporation device with convenient material replacement and rapid heating further includes a temperature sensor, which is arranged on the box.

[0018] In an optional embodiment, the evaporation device with convenient material replacement and rapid heating further includes a heat-insulating layer, which is provided on multiple inner walls of the box.

[0019] In an optional embodiment, the box body is further provided with an opening, and the evaporation device with convenient material replacement and rapid heating also includes a door body and a sealing ring, the door body is provided at the opening for opening or closing the opening, and the sealing ring is provided at the opening.

[0020] In an optional embodiment, the evaporation device with convenient material change and rapid heating also includes a power supply and a water cooler, the power supply is connected to the heating element and is used to energize the heating element to generate an eddy current effect, and the water cooler is connected to the box.

[0021] The beneficial effects of the evaporation device with convenient material change and rapid heating provided by the embodiment of the present invention include: by placing the substrate in the closed interior of the box, the interior of the evaporator is used to accommodate the coating material, and the evaporator is heated by the heating element, so that the coating material in the evaporator is evaporated by heat and evenly deposited on the substrate; and by winding the heating element in a spiral shape around the outside of the evaporator, the heating element can be distributed more evenly relative to the evaporator, so that the evaporator and the coating material located in the evaporator are evenly heated, thereby effectively improving the coating quality; and by arranging a uniform plate on the evaporator, the purpose of preventing the coating material from splashing is achieved, thereby avoiding damage to the base film, thereby improving product yield and production efficiency; and by arranging an opening in the box, it is convenient for operators to add substrates and coating materials, thereby achieving rapid material change. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 A schematic diagram of the structure of an evaporation device with convenient material replacement and rapid heating provided by an embodiment of the present utility model from a first perspective;

[0024] Figure 2 A schematic structural diagram from a second perspective of an evaporation device with convenient material replacement and rapid heating provided by an embodiment of the present utility model;

[0025] Figure 3 A schematic diagram of a portion of the structure of an evaporation device that facilitates material replacement and rapid heating according to an embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the evaporation component structure provided by an embodiment of the utility model.

[0027] Icons: 10-Evaporation device with convenient material change and rapid heating; 100-Box; 110-Opening; 120-Vacuum pipe accessories; 130-Carrier plate; 200-Evaporation part; 210-Container; 220-Evaporation plate; 221-Through hole; 230-Uniform plate; 240-Fixer; 300-Heating part; 400-Temperature sensor; 500-Insulation layer; 600-Door; 700-Sealing ring. DETAILED DESCRIPTION

[0028] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0029] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0030] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0032] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0033] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0034] As a cornerstone of high-end manufacturing, the vacuum coating industry is poised for rapid growth with the rise of industries such as semiconductors, new energy, new materials, and aerospace. Vacuum coating involves vaporizing or ionizing the target material surface using various physical or chemical methods under high vacuum conditions, then depositing it onto the substrate to form a thin film. Vacuum coating technologies are categorized into physical vapor deposition (PVD) and chemical vapor deposition (CVD). PVD methods are primarily divided into vacuum evaporation, vacuum sputtering, and vacuum ion plating.

[0035] In the fabrication of perovskite solar cells, vacuum evaporation technology is widely used to prepare the perovskite absorber layer. Through vacuum evaporation, perovskite materials can be deposited as nanoscale thin films on a conductive substrate, thereby producing highly efficient perovskite solar cells.

[0036] However, existing evaporation devices that are convenient for material replacement and rapid heating are limited by the temperature control of the evaporation source, and the heating effect is usually unstable, which makes the evaporation process repeatable and leads to poor stability of product quality.

[0037] To solve the above problems, please refer to Figures 1 to 4 ,in, Figure 1 and Figure 2 The schematic diagrams of the structure of the evaporation device 10 are all convenient for material replacement and rapid heating, and the top wall is hidden. The utility model provides an evaporation device 10 that is convenient for material replacement and rapid heating, which includes a box body 100, an evaporation element 200 and a heating element 300.

[0038] The evaporator 200 is disposed in the housing 100 and is used to accommodate the coating material. The heating element 300 is disposed in the housing 100 and is spirally wound around the evaporator 200 and is used to heat the coating material accommodated in the evaporator 200.

[0039] In this embodiment, the substrate is placed in the closed interior of the housing 100, the interior of the evaporator 200 is used to accommodate the coating material, and the evaporator 200 is heated by the heating element 300, so that the coating material in the evaporator 200 is evaporated by the heat and evenly deposited on the substrate; and by winding the heating element 300 in a spiral shape around the outside of the evaporator 200, the heating element 300 can be distributed more evenly relative to the evaporator 200, so that the evaporator 200 and the coating material located in the evaporator 200 are evenly heated, thereby effectively improving the coating quality.

[0040] It can be understood that the heating element 300 is a pipe structure, and the heating element 300 extends spirally in the vertical direction along the outer wall of the evaporator 200, so as to be spirally wound around the outer wall of the evaporator 200. In other words, the heating element 300 surrounds the outside of the evaporator 200 and is wound around multiple times, and the spacing between any two adjacent circles of the heating element 300 is equal; it is also worth mentioning that the heating element 300 and the outer wall of the evaporator 200 are spaced apart, that is, the heating element 300 and the evaporator 200 are not in direct contact.

[0041] It should also be noted that the box body 100 is further provided with a vacuum pipe fitting 120 , so as to perform a vacuum operation on the interior of the box body 100 through the vacuum pipe fitting 120 to provide a vacuum environment for the coating of the substrate.

[0042] Furthermore, the evaporation element 200 includes a container 210 and an evaporation plate 220. The internal chamber of the container 210 is used to accommodate the coating material. The evaporation plate 220 is arranged on the top of the container 210. The heating element 300 is spirally arranged outside the container 210 along the height direction of the container 210.

[0043] In this embodiment, the coating material is placed in the internal chamber of the container 210, and the heating element 300 is spirally arranged around the outer wall of the container 210 along the height direction of the container 210, so that the heating element 300 is evenly distributed outside the container 210. This can uniformly heat the coating material in the container 210. After passing through the evaporation plate 220, the coating material is evenly deposited on the substrate, thereby stably completing the coating process.

[0044] Optionally, the container 210 is made of graphite material, which is suitable for melting high-purity metals or alloys and has good heat resistance and chemical stability; the size of the evaporation plate 220 is 340mm*102mm*5mm, and the evaporation plate 220 is made of 316 stainless steel.

[0045] Of course, in other embodiments of the present invention, the container 210 can also be made of ceramic materials, such as zirconium oxide (ZrO) or other types of ceramic materials, which are suitable for chemical reactions or melting materials within a specific temperature range; in addition, a silicon carbide (SiC) crucible can be used, which is suitable for melting high-melting-point metals or semiconductor materials, which have high strength and good heat resistance; or a glass or quartz crucible can be used, which is suitable for low-temperature melting or applications requiring high transparency, and can resist corrosion from certain acids.

[0046] It is understandable that in other embodiments of the present invention, the container 210 may be made of other materials and is not limited to the above materials, and no specific limitation is made here.

[0047] Furthermore, since splashing may damage the base film during high-power vacuum evaporation, affecting product yield and production efficiency, a uniform plate 230 is disposed between the container 210 and the evaporation plate 220 to prevent the coating material from splashing.

[0048] In this embodiment, since the evaporation plate 220 is disposed at the top opening 110 of the container 210, the uniform plate 230 is located between the top of the container 210 and the bottom wall of the evaporation plate 220, thereby effectively avoiding splashing during the evaporation process, thereby improving the coating quality.

[0049] Furthermore, the evaporation plate 220 is provided with a plurality of through holes 221 , and the through holes 221 are communicated with the inner chamber of the container 210 .

[0050] In this embodiment, by forming a plurality of through holes 221 in the evaporation plate 220 and distributing the through holes 221 at equal intervals along the length of the evaporation plate 220 , the coating material can be quickly, evenly, and extensively coated on the substrate, thereby achieving an efficient and high-quality coating process.

[0051] Of course, in other embodiments of the present invention, the plurality of through holes 221 may also be distributed in a matrix, or in a staggered arrangement of multiple columns, which is not specifically limited here.

[0052] Furthermore, the evaporating element 200 further includes a fixing element 240 . The fixing element 240 is disposed along the height direction of the container 210 and connected to the heating element 300 . The fixing element 240 is used to fix the heating element 300 .

[0053] In this embodiment, the fixing member 240 is connected to the spiral heating member 300 to fix the heating member 300 .

[0054] Furthermore, the cavity volume of existing vacuum evaporation equipment is usually small, which leads to the small size of the substrate processed by the vacuum evaporation equipment. In order to solve this problem, the number of evaporation parts 200 provided by the utility model is multiple, and multiple evaporation parts 200 are arranged along the length direction of the box body 100 to be suitable for evaporation of large substrates. Therefore, the evaporation device 10 provided by the utility model is convenient for material replacement and fast heating, and can perform large-area vacuum evaporation processes.

[0055] In detail, the size of the box 100 is 1620mm*400mm*350mm, and the material is AISI304.

[0056] The heating element 300 is spirally disposed outside the plurality of containers 210 to ensure that the plurality of containers 210 can be uniformly heated at the same time.

[0057] Furthermore, the evaporation device 10 with convenient material replacement and rapid heating further includes a temperature sensor 400 , which is disposed in the housing 100 .

[0058] In this embodiment, the temperature inside the box 100 is detected in real time by the temperature sensor 400 to optimize the temperature control of the heating element 300, thereby controlling the temperature inside the box 100 to within ±1°C of the preset coating process temperature, thereby improving the coating quality.

[0059] Optionally, the temperature sensor 400 is an infrared thermometer.

[0060] Furthermore, the evaporation device 10 , which is convenient for material replacement and rapid heating, further includes a heat-insulating layer 500 , which is disposed on multiple inner walls of the box body 100 .

[0061] In this embodiment, there are multiple insulation layers 500 , which are respectively arranged on multiple inner walls of the box body 100 , so that the insulation layer 500 can achieve the function of heat preservation inside the box body 100 .

[0062] It should be noted that a carrier plate 130 is usually provided in the box body 100. The carrier plate 130 is arranged on the inner wall of the box body 100, and the insulation layer 500 on this side is located between the bottom wall of the box body 100 and the carrier plate 130. The evaporation component is installed on the carrier plate 130.

[0063] Furthermore, the box body 100 is also provided with an opening 110. The evaporation device 10 for convenient material replacement and rapid heating also includes a door body 600 and a sealing ring 700. The door body 600 is provided at the opening 110 for opening or closing the opening 110. The sealing ring 700 is provided at the opening 110.

[0064] In this embodiment, an opening 110 is provided in the box body 100 to facilitate operators to remove the substrate and coating material; and a sealing ring 700 is provided between the door body 600 and the opening 110 to improve the sealing performance of the box body 100 when the door body 600 closes the opening 110.

[0065] Optionally, the sealing ring 700 may be a fluororubber ring.

[0066] Furthermore, the evaporation device 10, which is convenient for material replacement and rapid heating, also includes a power supply (not shown) and a water cooler (not shown). The power supply is connected to the heating element 300 and is used to energize the heating element 300 to generate an eddy current effect. The water cooler is connected to the box body 100.

[0067] Optionally, the power supply can be a high-frequency heating power supply, and the heating element 300 is made of metal. The high-frequency heating power supply can convert industrial frequency alternating current into alternating current with a frequency of generally 15 to 200 kHz or even higher, thereby utilizing the eddy current effect to generate an induced rotating current in the metal object that is proportional to the magnetic field strength, and convert it into heat energy with the help of the resistance in the metal object, thereby achieving the purpose of rapid heating.

[0068] The water cooler is connected to the interior of the box 100, so that cooling water with constant temperature, constant flow and constant pressure can be provided. That is, it works according to the vapor compression refrigeration principle, and uses the natural properties of liquid refrigerant absorbing heat when vaporizing and releasing heat when steam condenses to perform cooling, so as to reduce the temperature in time when needed.

[0069] It should be noted that the power supply and the water cooler can be integrated into an all-in-one device.

[0070] In summary, the present invention provides an evaporation device 10 that is convenient for material replacement and rapid heating. The substrate is placed in the closed interior of the box 100, the interior of the evaporator 200 is used to accommodate the coating material, and the evaporator 200 is heated by the heating element 300, so that the coating material in the evaporator 200 is heated and evaporated to be evenly deposited on the substrate; and by winding the spiral heating element 300 around the outside of the evaporator 200, the heating element 300 can be distributed more evenly relative to the evaporator 200, so that the evaporator 200 and the coating material located in the evaporator 200 are evenly heated, thereby effectively improving the coating quality.

[0071] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An evaporation device with convenient material replacement and rapid heating, characterized in that: include: A box body, wherein the box body is provided with a cavity and an opening; an evaporation element, the evaporation element being disposed in the cavity of the box body and being used to accommodate a coating material; a heating element, the heating element being disposed in the cavity of the housing, the heating element being a pipe structure, the heating element extending spirally in a vertical direction along the outer wall of the evaporator so as to be spirally wound around the outer wall of the evaporator, the heating element being used to heat the coating material contained in the evaporator; a door body, the door body being arranged at the opening and being used for opening or closing the opening; A uniform plate is provided on the evaporation element and is used to prevent the coating material from splashing.

2. The evaporation device with convenient material replacement and rapid heating according to claim 1, characterized in that: The evaporation element includes a container and an evaporation plate. The internal chamber of the container is used to accommodate the coating material. The evaporation plate is arranged on the top of the container. The heating element is spirally arranged outside the container along the height direction of the container.

3. The evaporation device with convenient material replacement and rapid heating according to claim 2, characterized in that: The uniform plate is arranged between the container and the evaporation plate, and is used to prevent the coating material from splashing.

4. The evaporation device with convenient material replacement and rapid heating according to claim 2, characterized in that: The evaporation plate is provided with a plurality of through holes, and the through holes are communicated with the inner chamber of the container.

5. The evaporation device with convenient material replacement and rapid heating according to claim 2, characterized in that: The evaporating element further includes a fixing element, which is arranged along the height direction of the container and connected to the heating element, and is used to fix the heating element.

6. The evaporation device with convenient material replacement and rapid heating according to claim 2, characterized in that: There are multiple evaporating elements, which are arranged along the length direction of the box body, and the heating element is spirally arranged outside the multiple containers.

7. The evaporation device with convenient material replacement and rapid heating according to claim 1, characterized in that: The evaporation device with convenient material replacement and rapid heating also includes a temperature sensor, which is arranged on the box.

8. The evaporation device with convenient material replacement and rapid heating according to claim 1, characterized in that: The evaporation device with convenient material replacement and rapid heating also includes a heat-insulating layer, which is arranged on multiple inner walls of the box.

9. The evaporation device with convenient material replacement and rapid heating according to claim 1, characterized in that: The evaporation device with convenient material replacement and rapid heating further comprises a sealing ring, which is arranged at the opening.

10. The evaporation device with convenient material replacement and rapid heating according to claim 1, characterized in that: The evaporation device with convenient material replacement and rapid heating also includes a power supply and a water cooler. The power supply is connected to the heating element and is used to energize the heating element to generate an eddy current effect. The water cooler is connected to the box.

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