Water ring vacuum pump system
By designing the connection method between the inlet and outlet pipes in the water ring vacuum pump system, the circulation and external replenishment of cooling water is achieved, and the problem of excessive water tank occupation is solved, and the miniaturization and efficient operation of the water ring vacuum pump system is achieved.
Patent Information
- Application Number
- CN202422645598.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-10-31
AI Technical Summary
The water tank occupies too much area to meet the chip factory's demand for miniaturization of equipment.
A water ring vacuum pump system is designed to circulate the cooling water between the water ring vacuum pump and the water tank through the connection method of the inlet pump pipe and the outlet pipe, and water is replenished from the outside through the inlet pipe, reducing the volume of the water tank and miniaturizing it.
On the basis of saving water, the volume of the water tank is reduced, thereby reducing the overall system footprint, achieving the purpose of miniaturization, and ensuring the normal operation of the system through temperature sensors and liquid level monitoring components.
Smart Images

Figure CN223241615U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of water ring vacuum pumps, in particular to a water ring vacuum pump system. Background Art
[0002] Chip factories have relatively high requirements for the size of equipment because the cost of site decoration (clean room) is very high. Therefore, the size of the equipment needs to be as small as possible to reduce the floor space occupied and reduce the cost of factory construction.
[0003] Water ring vacuum pumps require a constant supply of water, both as a working medium and as circulating water for cooling. The current approach involves using an oversized water tank to accommodate both the water medium and the cooling function. However, this oversized tank takes up a significant amount of space, making it impractical in chip factories. Therefore, technological innovation is needed. Utility Model Content
[0004] The purpose of the utility model is to provide a water ring vacuum pump system, which reduces the floor space and achieves the purpose of miniaturization.
[0005] To achieve this purpose, the present invention adopts the following technical solutions:
[0006] A water ring vacuum pump system, comprising a water ring vacuum pump, wherein the water ring vacuum pump is provided with a cooling water inlet and a cooling water outlet; the water ring vacuum pump system further comprises:
[0007] a water tank, the water tank being provided with a first connection port, a second connection port, and an overflow port, wherein the height of the overflow port is higher than the heights of the first connection port and the second connection port;
[0008] a pump inlet pipe, one end of which is connected to the cooling water inlet of the water ring vacuum pump, and the other end of which is connected to the first connecting port of the water tank;
[0009] a pump outlet pipe, one end of which is connected to the cooling water outlet of the water ring vacuum pump, and the other end of which is connected to the second connecting port of the water tank;
[0010] A water inlet pipe is connected to the pump inlet pipe.
[0011] In some embodiments, a height of the first connection port is higher than a height of the second connection port.
[0012] In some embodiments, a temperature sensor is further provided in the water tank, and the temperature sensor is provided between the first connection port and the second connection port.
[0013] In some embodiments, the water tank is further provided with a liquid level monitoring component to monitor the height of the liquid level in the water tank.
[0014] In some embodiments, the water inlet pipe is provided with a first switch valve, a normally open solenoid valve and a flow meter.
[0015] In some embodiments, a second switch valve and a first pressure gauge are provided on the pump inlet pipe.
[0016] In some embodiments, the water ring vacuum pump system also includes an air inlet pipe, which is connected to the air inlet of the water ring vacuum pump. A one-way valve, a third switch valve and a second pressure gauge are provided on the air inlet pipe. The one-way valve is configured to allow gas to flow into the water ring vacuum pump in one direction.
[0017] In some embodiments, the water ring vacuum pump system further includes an air outlet pipe connected to an air outlet of the water ring vacuum pump, and a speed control valve is provided on the air outlet pipe.
[0018] In some embodiments, the water ring vacuum pump system also includes a first drain pipe and a second drain pipe, a waste liquid port is provided at the bottom of the water tank, the first drain pipe is connected to the waste liquid port, the second drain pipe is connected to the drain port of the water ring vacuum pump, and a fourth switch valve is provided on both the first drain pipe and the second drain pipe.
[0019] In some embodiments, the water ring vacuum pump system is further provided with a liquid receiving pan, the water ring vacuum pump and the water tank are arranged above the liquid receiving pan, the overflow port is connected to an overflow pipe, and a leakage sensor is provided in the liquid receiving pan.
[0020] Beneficial effects of the utility model:
[0021] The water inlet pipe is connected to the above-mentioned pump inlet pipe, so that the cooling water first passes through the water ring vacuum pump, and then enters the water tank through the cooling water outlet of the water ring vacuum pump through the pump outlet pipe. Then the water in the water tank can also enter the water ring vacuum pump through the pump inlet pipe for circulating cooling. In this process, the cooling water is circulated through the water ring vacuum pump and the water tank on the one hand, and is transported from the outside through the water inlet pipe on the other hand. On the basis of saving water, the volume of the water tank is reduced as much as possible, thereby reducing the occupied area of the overall system and achieving the purpose of miniaturization. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 It is a schematic diagram of the water ring vacuum pump system of the present utility model.
[0023] In the picture:
[0024] 1. Water ring vacuum pump; 2. Water tank; 3. Pump inlet pipe; 4. Pump outlet pipe; 5. Water inlet pipe; 6. Temperature sensor; 7. Liquid level monitoring device; 8. First on-off valve; 9. Normally open solenoid valve; 10. Flow meter; 11. Second on-off valve; 12. First pressure gauge; 13. Air inlet pipe; 14. One-way valve; 15. Third on-off valve; 16. Second pressure gauge; 17. Air outlet pipe; 18. Speed control valve; 19. First drain pipe; 20. Second drain pipe; 21. Fourth on-off valve; 22. Liquid collecting tray; 23. Overflow pipe; 24. Liquid leakage sensor. DETAILED DESCRIPTION
[0025] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.
[0026] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0027] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
[0028] In the description of this embodiment, the terms "upper," "lower," "left," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.
[0029] like Figure 1 As shown, the utility model provides a water ring vacuum pump system, which includes a water ring vacuum pump 1, a water tank 2, a pump inlet pipe 3, a pump outlet pipe 4 and a water inlet pipe 5. The water ring vacuum pump 1 is provided with a cooling water inlet and a cooling water outlet; the water tank 2 is provided with a first connecting port, a second connecting port and an overflow port, and the height of the overflow port is higher than the height of the first connecting port and the second connecting port; one end of the pump inlet pipe 3 is connected to the cooling water inlet of the water ring vacuum pump 1, and the other end of the pump inlet pipe 3 is connected to the first connecting port of the water tank 2; one end of the pump outlet pipe 4 is connected to the cooling water outlet of the water ring vacuum pump 1, and the other end of the pump outlet pipe 4 is connected to the second connecting port of the water tank 2; the water inlet pipe 5 is connected to the pump inlet pipe 3.
[0030] The water inlet pipe 5 is connected to the above-mentioned pump inlet pipe 3, so that the cooling water first passes through the water ring vacuum pump 1, and then enters the water tank 2 from the cooling water outlet of the water ring vacuum pump 1 through the pump outlet pipe 4. Subsequently, the water in the water tank 2 can also enter the water ring vacuum pump 1 through the pump inlet pipe 3 for circulating cooling. In this process, the cooling water is circulated through the water ring vacuum pump 1 and the water tank 2 on the one hand, and is transported from the outside through the water inlet pipe 5 on the other hand. On the basis of saving water, the volume of the water tank 2 is reduced as much as possible, thereby reducing the occupied area of the overall system and achieving the purpose of miniaturization.
[0031] In some embodiments, the height of the first connection port on the water tank 2 is higher than that of the second connection port, so that water can enter from the top of the water tank 2 and exit from the bottom of the water tank 2 to enter the water ring vacuum pump 1, thereby maximizing the utilization of the space in the water tank 2. The overflow port is higher than both ports, so that overflow will only occur when the circulating water in the water tank 2 reaches its maximum.
[0032] It should be noted that since most of the cooling water relies on the self-circulation between the water ring vacuum pump 1 and the water tank 2, after the circulating cooling water reaches a higher temperature, the water inlet pipe 5 can be increased to make the water in the water tank 2 flow out from the overflow port to reduce the temperature of the circulating water. In order to monitor the temperature of the water in the water tank 2, such as Figure 1As shown, in some embodiments, a temperature sensor 6 is provided in the water tank 2, and the temperature sensor 6 is provided between the first connection port and the second connection port. Thus, after the cooling water enters from the first connection port, it will first pass through the temperature sensor 6 and then enter the second connection port, thereby enabling timely monitoring of the water temperature in the water tank 2. In some embodiments, a first switch valve 8, a normally open solenoid valve 9, and a flow meter 10 are provided on the water inlet pipe 5. On the one hand, the flow meter 10 can accurately measure the flow rate, thereby achieving precise water supply control; on the other hand, the normally open solenoid valve 9 is provided, and combined with the first switch valve 8, ensures that the water inlet pipe 5 is unobstructed during normal power-on use. In the event of an emergency power outage, the normally open solenoid valve 9 can block the water inlet pipe 5 to prevent further water inflow. It should be noted that the first switch valve 8 is also normally open and can only be controlled by the first switch valve 8 when it is closed for system maintenance or when the normally open solenoid valve 9 is unable to operate. The first switch valve 8 can be a manual valve.
[0033] In some embodiments, a second on-off valve 11 and a first pressure gauge 12 are provided on the pump inlet pipe 3. The first pressure gauge 12 can test the water pressure entering the water ring vacuum pump 1, and the second on-off valve 11 can control the on-off of the pump inlet pipe 3 when necessary. For example, the second on-off valve 11 is a manual valve.
[0034] like Figure 1 As shown, in some embodiments, the water tank 2 is further provided with a liquid level monitoring member 7 to monitor the liquid level in the water tank 2, thereby maintaining the water level in the water tank 2 at a desired level and preventing the water level from being too low. The form of the liquid level monitoring member 7 is not specifically limited and can be either external or internal.
[0035] like Figure 1 As shown, in some embodiments, the water ring vacuum pump system further includes an air inlet pipe 13, which is connected to the air inlet of the water ring vacuum pump 1, so that air is injected into the water ring vacuum pump 1 through the air inlet pipe 13, and a third switch valve 15, a one-way valve 14 and a second pressure gauge 16 are provided on the air inlet pipe 13, wherein the third switch valve 15 can control the on-off of the air inlet pipe 13, and the one-way valve 14 can allow the gas to flow into the water ring vacuum pump 1 in one direction to avoid reverse circulation of the gas; a second pressure gauge 16 is provided on the air inlet pipe 13, so that the vacuum degree can be tested to ensure the normal operation of the water ring vacuum pump 1.
[0036] like Figure 1 As shown, in some embodiments, the water ring vacuum pump system further includes an air outlet pipe 17, which is connected to the air outlet of the water ring vacuum pump 1, and a speed control valve 18 is provided on the air outlet pipe 17, so that the vacuum degree is adjusted by the speed control valve 18, and the cavitation phenomenon is controlled by adjusting the vacuum degree (causing low pressure to be generated locally in the fluid, air to be sucked in and form bubbles and cavities).
[0037] In some embodiments, the water ring vacuum pump system further includes a first drain pipe 19 and a second drain pipe 20. A waste liquid port is provided at the bottom of the water tank 2. The first drain pipe 19 is connected to the waste liquid port. A fourth switch valve 21 is provided on the first drain pipe 19. When the water in the water tank 2 needs to be replaced, the fourth switch valve 21 can be opened to quickly drain the water in the water tank 2 from the first drain pipe 19. For example, the fourth switch valve 21 is a manual valve. The second drain pipe 20 is connected to the drain port of the water ring vacuum pump 1, and the fourth switch valve 21 is also provided on the second drain pipe 20 to drain the water in the water ring vacuum pump 1 when the water ring vacuum pump 1 is not used for a long time.
[0038] like Figure 1 As shown, in some embodiments, the water ring vacuum pump system also includes a liquid receiving pan 22, the water ring vacuum pump 1 and the water tank 2 are arranged above the liquid receiving pan 22, and a leakage sensor 24 is provided in the liquid receiving pan 22, so that if the water ring vacuum pump 1 and the water tank 2 leak, it will be sensed by the leakage sensor 24, and the leakage sensor 24 can be connected to the control system or the alarm system to remind the operator. In addition, the overflow port of the water tank 2 is connected to an overflow pipe 23, and the port of the overflow pipe 23 can extend out of the liquid receiving pan 22 or be connected to an external water collection part to prevent the overflow water of the water tank 2 from directly entering the liquid receiving pan 22 through the overflow port, causing the leakage sensor 24 to misjudge. In order to facilitate the discharge of the leaked liquid in the liquid receiving pan 22, the liquid receiving pan 22 is also provided with a discharge port for discharge.
[0039] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.
Claims
1. A water ring vacuum pump system, comprising a water ring vacuum pump (1), wherein the water ring vacuum pump (1) is provided with a cooling water inlet and a cooling water outlet; characterized in that: The water ring vacuum pump system also includes: A water tank (2), the water tank (2) being provided with a first connection port, a second connection port, and an overflow port, wherein the height of the overflow port is higher than the heights of the first connection port and the second connection port; a pump inlet pipe (3), one end of the pump inlet pipe (3) being connected to the cooling water inlet of the water ring vacuum pump (1), and the other end of the pump inlet pipe (3) being connected to the first connection port of the water tank (2); a pump outlet pipe (4), one end of the pump outlet pipe (4) being connected to the cooling water outlet of the water ring vacuum pump (1), and the other end of the pump outlet pipe (4) being connected to the second connection port of the water tank (2); A water inlet pipe (5), the water inlet pipe (5) is connected to the pump inlet pipe (3).
2. The water ring vacuum pump system according to claim 1, characterized in that: The height of the first connecting port is higher than that of the second connecting port.
3. The water ring vacuum pump system according to claim 1, characterized in that: A temperature sensor (6) is also provided in the water tank (2), and the temperature sensor (6) is provided between the first connection port and the second connection port.
4. The water ring vacuum pump system according to claim 1, characterized in that: The water tank (2) is also provided with a liquid level monitoring component (7) to monitor the height of the liquid level in the water tank (2).
5. The water ring vacuum pump system according to claim 1, characterized in that: The water inlet pipe (5) is provided with a first switch valve (8), a normally open electromagnetic valve (9) and a flow meter (10).
6. The water ring vacuum pump system according to claim 1, characterized in that: The pump inlet pipe (3) is provided with a second switch valve (11) and a first pressure gauge (12).
7. The water ring vacuum pump system according to claim 1, characterized in that: The water ring vacuum pump system further comprises an air inlet pipe (13), the air inlet pipe (13) being connected to the air inlet of the water ring vacuum pump (1), the air inlet pipe (13) being provided with a one-way valve (14), a third switch valve (15) and a second pressure gauge (16), the one-way valve (14) being configured to allow gas to flow into the water ring vacuum pump (1) in one direction.
8. The water ring vacuum pump system according to claim 1, characterized in that: The water ring vacuum pump system further comprises an air outlet pipe (17), wherein the air outlet pipe (17) is connected to the air outlet of the water ring vacuum pump (1), and a speed control valve (18) is provided on the air outlet pipe (17).
9. The water ring vacuum pump system according to claim 1, characterized in that: The water ring vacuum pump system further comprises a first drain pipe (19) and a second drain pipe (20); a waste liquid port is provided at the bottom of the water tank (2); the first drain pipe (19) is connected to the waste liquid port; the second drain pipe (20) is connected to the drain port of the water ring vacuum pump (1); and a fourth switch valve (21) is provided on both the first drain pipe (19) and the second drain pipe (20).
10. The water ring vacuum pump system according to claim 1, characterized in that: A liquid receiving pan (22) is also provided, the water ring vacuum pump (1) and the water tank (2) are arranged above the liquid receiving pan (22), the overflow port is connected to an overflow pipe (23), and a liquid leakage sensor (24) is provided in the liquid receiving pan (22).