Special gas supply system

Abstract

The utility model provides a special gas supply system which comprises a special gas pipeline, a gas supply pipeline and a gas supply pipeline, the first special gas branch is connected to the special gas pipeline, and the first special gas branch is used for being connected with the reaction cavity; the first special gas flowmeter is arranged on the first special gas branch; the first special gas branch valve is arranged on the first special gas branch; a purging pipeline; the back pressure branch is connected to the purging pipeline and connected to the first special gas branch, and a first connecting point is arranged between the back pressure branch and the first special gas branch; the back pressure branch valve is arranged on the back pressure branch; the first special gas flowmeter, the first special gas branch valve and the first connecting point are arranged at intervals in the gas conveying direction of the first special gas branch. Under the condition that inert gas needs to be output to the reaction cavity, the inert gas can be provided for the reaction cavity through the back pressure branch, the inert gas does not pass through the first special gas flow meter, impurities contained in the inert gas are prevented from polluting and damaging the first special gas flow meter, and the safety and the working stability of the special gas supply system are improved.

Description

Technical Field

[0001] The present application relates to the technical field of special gas equipment, and in particular to a special gas supply system. Background Art

[0002] Specialty gases, or SIGs for short, are currently widely used in industries such as semiconductors, microelectronics, liquid crystal panels, and solar cells. In photovoltaic semiconductor production lines, thin film deposition, doping, and passivation processes all require SIGs as raw materials to produce their products.

[0003] In related technologies, the special gas supply system includes a gas supply pipeline and a gas purge pipeline. The gas supply pipeline is used to output special gas to the reaction chamber, and the gas purge pipeline is used to output inert gas. However, the safety and working stability of the current special gas supply system need to be improved. Utility Model Content

[0004] In view of the above, it is necessary to provide a special gas supply system that can improve safety and working stability.

[0005] A special gas supply system includes: a special gas pipeline; a first special gas branch connected to the special gas pipeline, the first special gas branch being used to connect to a reaction chamber; a first special gas flowmeter arranged on the first special gas branch; a first special gas branch valve arranged on the first special gas branch; a purge pipeline; a back-pressure branch connected to the purge pipeline and to the first special gas branch, with a first connection point between the back-pressure branch and the first special gas branch; and a back-pressure branch valve arranged on the back-pressure branch; wherein the first special gas flowmeter, the first special gas branch valve, and the first connection point are arranged at intervals along the gas delivery direction of the first special gas branch.

[0006] In some embodiments, the special gas supply system also includes: a first purge branch, the special gas pipeline and the first special gas branch are both connected to the first end of the first purge branch, the purge pipeline and the back pressure branch are both connected to the second end of the first purge branch; a first purge branch valve is arranged on the first purge branch.

[0007] In some embodiments, the specialty gas supply system further includes: a one-way valve, disposed on the first purge branch, the one-way valve being used to block the flow of gas from the first end to the second end of the first purge branch.

[0008] In some embodiments, the special gas supply system also includes: a first connecting pipeline, a purge pipeline connected to one end of the first connecting pipeline, a back pressure branch and a first purge branch both connected to the other end of the first connecting pipeline; and a flow regulating valve arranged in the first connecting pipeline.

[0009] In some embodiments, the special gas supply system also includes: a second purge branch, connected to the purge pipeline and connected to the first special gas branch, and there is a second connection point between the second purge branch and the first special gas branch; wherein, the first special gas flowmeter, the first special gas branch valve, and the second connection point are arranged at intervals along the gas delivery direction of the first special gas branch.

[0010] In some embodiments, the special gas supply system further includes: a second special gas branch valve, arranged on the first special gas branch; wherein the first special gas flowmeter, the first special gas branch valve, the second connection point, and the second special gas branch valve are arranged at intervals along the gas delivery direction of the first special gas branch.

[0011] In some embodiments, the specialty gas supply system further includes: a second purge branch valve, disposed on the second purge branch.

[0012] In some embodiments, the special gas supply system also includes: a second connecting pipeline, a purge pipeline connected to one end of the second connecting pipeline, and a second purge branch connected to the other end of the second connecting pipeline; and a purge flowmeter arranged in the second connecting pipeline.

[0013] In some embodiments, the special gas supply system further includes: a second special gas branch, connected to the special gas pipeline, the second special gas branch is used to connect to the reaction chamber; a second special gas flowmeter, arranged on the second special gas branch; and a second special gas branch valve, arranged on the second special gas branch.

[0014] In some embodiments, the special gas supply system also includes: a third purge branch, corresponding to the purge pipeline setting, connected between the purge pipeline and the corresponding second special gas branch, and there is a third connection point between the third purge branch and the second special gas branch; wherein, the second special gas flowmeter, the second special gas branch valve, and the third connection point are arranged at intervals along the gas delivery direction of the second special gas branch.

[0015] Through the special gas supply system provided by the present application, when it is necessary to output inert gas to the reaction chamber, the first special gas branch valve can be closed and the back-pressure branch valve can be opened. The inert gas can then enter the reaction chamber after passing through the purge line, the back-pressure branch, and the first special gas branch in sequence. At this time, the inert gas in the back-pressure branch can only flow into the reaction chamber after entering the first special gas branch from the first connection point, blocking the flow of inert gas to the first special gas flowmeter. In this way, the special gas supply system can provide inert gas to the reaction chamber through the back-pressure branch, and the inert gas can bypass the first special gas flowmeter, preventing impurities contained in the inert gas from contaminating and damaging the first special gas flowmeter, thereby improving the safety and operational stability of the special gas supply system. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of the special gas supply system provided in an embodiment of the present application.

[0017] Description of main component symbols

[0018] 100, special gas pipeline; 11, first special gas main valve; 12, second special gas main valve; 13, special gas monitor; 14, special gas pressure regulating valve; 15, special gas pressure gauge; 16, third special gas main valve; 17, fourth special gas main valve;

[0019] 200, first special gas branch; 21, first special gas flowmeter; 22, first special gas branch valve; 23, first connection point; 24, second special gas branch valve; 25, second connection point;

[0020] 300, purge pipeline; 31, first purge main valve; 32, purge pressure regulating valve; 33, purge pressure gauge; 34, first purge main valve;

[0021] 400, back pressure branch; 41, back pressure branch valve;

[0022] 500, second specialty gas branch; 51, second specialty gas flowmeter; 52, third specialty gas branch valve; 53, fourth specialty gas branch valve; 54, third connection point;

[0023] 600, first connecting pipeline; 61, flow regulating valve;

[0024] 700, first purge branch; 71, first purge branch valve; 72, one-way valve;

[0025] 800, second purge branch; 81, second purge branch valve;

[0026] 900, third purge branch; 91, third purge branch valve;

[0027] 110. Second connecting pipeline; 111. Purge flow meter. DETAILED DESCRIPTION

[0028] In the description of the embodiments of the present application, when an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a centrally arranged element at the same time. When an element is considered to be "set on" another element, it may be directly set on the other element or there may be a centrally arranged element at the same time. In the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection, or it may be indirectly connected through an intermediate medium, or it may be internal communication between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0029] References to "embodiments" herein mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0030] Currently, specialty gas supply systems consist of a gas supply line and a gas purge line. The gas supply line is used to deliver specialty gas to the reaction chamber for process production within the reaction chamber. The gas supply line is typically equipped with a flow meter to monitor the flow rate of the specialty gas delivered by the gas supply line. The gas purge line delivers inert gas, which can be used to clean the interior of the line, purge the reaction chamber, and, in conjunction with negative pressure mechanisms such as suction cups, break the vacuum and return the reaction chamber to atmospheric pressure.

[0031] The functionality of specialty gas supply systems in related technologies is relatively simple, typically simply adding an inert gas purge function to the main gas port, with the gas supply line and gas purge line directly connected. However, the purity of the inert gas may be insufficient. During the inert gas output from the gas purge line, impurities contained in the inert gas may contaminate and damage the flowmeter, affecting the safety and operational stability of the specialty gas supply system.

[0032] To this end, an embodiment of the present application provides a special gas supply system with technical effects of better safety and working stability.

[0033] Figure 1 This is a schematic diagram of the structure of the special gas supply system provided in an embodiment of the present application.

[0034] like Figure 1 As shown, the specialty gas supply system includes a specialty gas pipeline 100, a first specialty gas branch 200, a first specialty gas flowmeter 21, a first specialty gas branch valve 22, a purge pipeline 300, a back-pressure branch 400, and a back-pressure branch valve 41. The specialty gas pipeline 100 has an input end and an output end. The input end of the specialty gas pipeline 100 is used to connect to a specialty gas supply device so that the specialty gas supply device can input specialty gas into the specialty gas pipeline 100. The output end of the specialty gas pipeline 100 is used to connect to other pipelines.

[0035] The first specialty gas branch 200 is connected to the output end of the specialty gas pipeline 100 and is used to connect to the reaction chamber. The first specialty gas branch 200 can deliver gas to the reaction chamber along a specified gas delivery direction. The gas delivered by the first specialty gas branch 200 can be either a specialty gas or an inert gas (hereinafter referred to as inert gas).

[0036] The first specialty gas flowmeter 21 is provided in the first specialty gas branch 200 , and is used to monitor the flow of the gas in the first specialty gas branch 200 .

[0037] The first specialty gas branch valve 22 is disposed on the first specialty gas branch 200 and is used to control the on / off state of the first specialty gas branch 200. Exemplarily, the first specialty gas branch valve 22 is a pneumatic on / off control valve, and its on / off state can be switched by the system. When the first specialty gas branch valve 22 is open, gas is allowed to flow from one end of the first specialty gas branch 200 to the other. When the first specialty gas branch valve 22 is closed, gas is blocked from flowing from one end of the first specialty gas branch 200 to the other.

[0038] The purge line 300 has an input and an output. The input of the purge line 300 is connected to an inert gas supply device, which allows the inert gas supply device to input inert gas, such as nitrogen, into the purge line 300. The output of the purge line 300 is connected to the back-pressure branch 400. The inert gas provided by the purge line 300 can enter the first specialty gas branch 200 from the back-pressure branch 400 and then enter the reaction chamber from the first specialty gas branch 200.

[0039] A back-pressure branch valve 41 is provided on the back-pressure branch 400 and is used to control the on / off state of the back-pressure branch 400. Exemplarily, the back-pressure branch valve 41 is a pneumatic on / off control valve, and the first specialty gas branch valve 22 can be switched on / off by the system. When the back-pressure branch valve 41 is open, gas is allowed to flow from one end of the back-pressure branch 400 to the other, thereby allowing gas flow between the back-pressure branch 400 and the first specialty gas branch 200. When the back-pressure branch valve 41 is closed, gas is blocked from flowing from one end of the back-pressure branch 400 to the other, thereby blocking gas flow between the back-pressure branch 400 and the first specialty gas branch 200.

[0040] A first connection point 23 is provided between the back pressure branch 400 and the first specialty gas branch 200. The first specialty gas flowmeter 21, the first specialty gas branch valve 22, and the first connection point 23 are arranged at intervals along the gas delivery direction of the first specialty gas branch 200.

[0041] It can be understood that when it is necessary to output special gas to the reaction chamber, the first special gas branch valve 22 can be opened and the back pressure branch valve 41 can be closed. The special gas can enter the reaction chamber after passing through the special gas pipeline 100 and the first special gas branch 200 in sequence. At this time, the special gas in the first special gas branch 200 will pass through the first special gas flowmeter 21, the first special body valve, and the first connection point 23 in sequence. The first special gas flowmeter 21 can detect the flow of the special gas in the first special gas branch 200.

[0042] When it is necessary to output inert gas to the reaction chamber, the first special gas branch valve 22 can be closed and the back-pressure branch valve 41 can be opened. The inert gas can enter the reaction chamber after passing through the purge pipeline 300, the back-pressure branch 400, and the first special gas branch 200 in sequence. At this time, the inert gas in the back-pressure branch 400 can only flow toward the reaction chamber after entering the first special gas branch 200 from the first connection point 23, thereby blocking the flow of inert gas to the first special gas flowmeter 21.

[0043] In this way, the special gas supply system can provide inert gas through the back pressure branch 400, and the inert gas can not pass through the first special gas flowmeter 21, preventing impurities contained in the inert gas from contaminating and damaging the first special gas flowmeter 21, thereby improving the safety and working stability of the special gas supply system.

[0044] In some embodiments, the specialty gas supply system further includes a second specialty gas branch valve 24, which is disposed on the first specialty gas branch line 200. The first specialty gas branch valve 22 and the second specialty gas branch valve 24 are spaced apart along the gas delivery direction of the first specialty gas branch line 200. Exemplarily, the second specialty gas branch valve 24 is a pneumatic on / off control valve, and its on / off state can be switched by the system. It is understood that the first specialty gas branch valve 22 and the second specialty gas branch valve 24 can cooperate to control the on / off state of the first specialty gas branch line 200.

[0045] In some embodiments, the specialty gas supply system further includes a first specialty gas main valve 11, which is disposed on the specialty gas pipeline 100. Exemplarily, the first specialty gas main valve 11 is a manual on / off valve. The first specialty gas main valve 11 is used to control the on / off of the specialty gas pipeline 100. When the first specialty gas main valve 11 is open, the specialty gas pipeline 100 is allowed to discharge specialty gas. When the first specialty gas main valve 11 is closed, the specialty gas pipeline 100 is prevented from discharging specialty gas.

[0046] In some embodiments, the specialty gas supply system further includes a second specialty gas main valve 12 and a specialty gas monitor 13. The second specialty gas main valve 12 is disposed on the specialty gas pipeline 100. The specialty gas monitor 13 is disposed on the second specialty gas main valve 12. The second specialty gas main valve 12 is used to control the on / off state of the specialty gas pipeline 100. The second specialty gas main valve 12 is a pneumatic on / off control valve, and its on / off state can be switched by the system. The specialty gas monitor 13 is used to detect whether there is a specialty gas leak. The second specialty gas main valve 12 and the specialty gas monitor 13 are associated with each other.

[0047] When the second special gas main valve 12 is open, the special gas pipeline 100 is allowed to output special gas. When the second special gas main valve 12 is closed, the special gas pipeline 100 stops outputting special gas. Furthermore, during actual operation, if the special gas monitor 13 detects a special gas leak, the system can automatically close the second special gas main valve 12.

[0048] In some embodiments, the specialty gas supply system further includes a specialty gas pressure regulating valve 14, which is disposed in the specialty gas pipeline 100. The specialty gas pressure regulating valve 14 is used to regulate the pressure inside the specialty gas pipeline 100 and stabilize the pressure to ensure that the specialty gas in the specialty gas pipeline 100 can be normally transported.

[0049] In some embodiments, the specialty gas supply system further includes a specialty gas pressure gauge 15, which is disposed in the specialty gas pipeline 100. The specialty gas pressure gauge 15 is used to detect the air pressure inside the specialty gas pipeline 100 to achieve air pressure control of the specialty gas in the specialty gas pipeline 100.

[0050] In some embodiments, the specialty gas supply system further includes a third specialty gas main valve 16, which is disposed on the specialty gas pipeline 100. The first specialty gas main valve 11, the second specialty gas main valve 12, the specialty gas pressure regulating valve 14, the specialty gas pressure gauge 15, and the third specialty gas main valve 16 are spaced apart along the gas delivery direction of the specialty gas pipeline 100. Exemplarily, the third specialty gas main valve 16 is a manual on / off valve. The third specialty gas main valve 16 is used to control the on / off flow of the specialty gas pipeline 100. When the third specialty gas main valve 16 is open, the specialty gas pipeline 100 is allowed to output specialty gas. When the third specialty gas main valve 16 is closed, the specialty gas pipeline 100 is prevented from outputting specialty gas.

[0051] It can be understood that the first special gas main valve 11 and the third special gas main valve 16 form a dual protection function of manual switch on the special gas pipeline 100, and by closing the first special gas main valve 11 and the third special gas main valve 16, the middle space of the special gas pipeline 100 can be separated from the two ends, which is convenient for the staff to inspect and repair various control components on the special gas pipeline 100, such as the special gas monitor 13, the special gas pressure gauge 15, etc.

[0052] In some embodiments, the specialty gas supply system further includes a fourth specialty gas main valve 17, which is disposed in the specialty gas pipeline 100 and located at the output end of the specialty gas pipeline 100. Exemplarily, the fourth specialty gas main valve 17 is a pneumatic on / off control valve, and the fourth specialty gas main valve 17 can be switched between on and off states under system control. When the fourth specialty gas main valve 17 is open, gas in the specialty gas pipeline 100 is allowed to enter other pipelines, such as the first specialty gas branch 200. When the fourth specialty gas main valve 17 is closed, gas in the specialty gas pipeline 100 is prevented from entering other pipelines, such as the first specialty gas branch 200.

[0053] In some embodiments, the specialty gas supply system further includes a second specialty gas branch 500, a second specialty gas flowmeter 51, a third specialty gas branch valve 52, and a fourth specialty gas branch valve 53. The second specialty gas branch 500 is connected to the specialty gas pipeline 100 and is configured to connect to the reaction chamber. The specialty gas provided by the specialty gas pipeline 100 can be input into the reaction chamber via the second specialty gas branch 500. Exemplarily, the first specialty gas branch 200 and the second specialty gas branch 500 are connected in parallel to the output end of the specialty gas pipeline 100, allowing the specialty gas in the specialty gas pipeline 100 to flow to the first specialty gas branch 200 and the second specialty gas branch 500, respectively.

[0054] The second specialty gas branch 500 can deliver gas to the reaction chamber. The gas delivered by the second specialty gas branch 500 can be either a specialty gas or an inert gas. When the second specialty gas branch 500 delivers specialty gas, it delivers the specialty gas to the reaction chamber along a designated specialty gas delivery direction.

[0055] The second specialty gas flowmeter 51 is provided in the second specialty gas branch 500 , and is used to monitor the flow of the gas in the second specialty gas branch 500 .

[0056] The third specialty gas branch valve 52 is located on the second specialty gas branch 500 and is used to control the on / off state of the second specialty gas branch 500. Exemplarily, the third specialty gas branch valve 52 is a pneumatic on / off control valve, and its on / off state can be switched by the system. When the third specialty gas branch valve 52 is open, gas is allowed to flow from one end of the second specialty gas branch 500 to the other. When the third specialty gas branch valve 52 is closed, gas is blocked from flowing from one end of the second specialty gas branch 500 to the other.

[0057] The fourth specialty gas branch valve 53 is disposed on the second specialty gas branch 500. The third and fourth specialty gas branch valves 52 and 53 are spaced apart along the gas output direction of the second specialty gas branch 500. Exemplarily, the fourth specialty gas branch valve 53 is a pneumatic on / off control valve, and its on / off state can be switched by the system. It is understood that the third and fourth specialty gas branch valves 52 and 53 can cooperate to control the on / off state of the second specialty gas branch 500.

[0058] In some embodiments, the number of second specialty gas branches 500 is greater than or equal to two, and multiple second specialty gas branches 500 are connected to the output end of the specialty gas pipeline 100. Each of the multiple second specialty gas branches 500 can deliver gas to the reaction chamber. Correspondingly, each second specialty gas branch 500 is equipped with a second specialty gas flowmeter 51, a third specialty gas branch valve 52, and a fourth specialty gas branch valve 53. For example, the number of second specialty gas branches 500 is two, and the first specialty gas branch 200 and the two second specialty gas branches 500 are connected in parallel to the output end of the specialty gas pipeline 100. In other embodiments, the number of second specialty gas branches 500 can be configured according to actual needs.

[0059] In some embodiments, the specialty gas supply system further includes a first purge main valve 31 , which is disposed on the purge pipeline 300 . Exemplarily, the first purge main valve 31 is a manual on / off valve. The first purge main valve 31 is used to control the on / off state of the purge pipeline 300 . When the first purge main valve 31 is open, the purge pipeline 300 is allowed to output inert gas. When the first purge main valve 31 is closed, the purge pipeline 300 is prevented from outputting inert gas.

[0060] In some embodiments, the specialty gas supply system further includes a purge pressure regulating valve 32, which is disposed in the purge line 300. The purge pressure regulating valve 32 is used to regulate the air pressure inside the purge line 300 and stabilize the pressure to ensure that the inert gas in the purge line 300 can be normally transported.

[0061] In some embodiments, the specialty gas supply system further includes a purge pressure gauge 33 , which is disposed in the purge pipeline 300 . The purge pressure gauge 33 is used to detect the air pressure inside the purge pipeline 300 to achieve pressure control of the inert gas in the purge pipeline 300 .

[0062] In some embodiments, the specialty gas supply system further includes a first purge main valve 34, which is disposed in the purge pipeline 300. The first purge main valve 31, the purge pressure regulating valve 32, the purge pressure gauge 33, and the first purge main valve 34 are spaced apart along the delivery direction of the purge pipeline 300. Exemplarily, the first purge main valve 34 is a manual on / off valve. The first purge main valve 34 is used to control the on / off of the purge pipeline 300. When the first purge main valve 34 is open, the purge pipeline 300 is allowed to output inert gas. When the first purge main valve 34 is closed, the purge pipeline 300 is stopped from outputting inert gas.

[0063] It can be understood that the first purge main valve 31 and the first purge main valve 34 form a dual protection function of manual switch on the purge pipeline 300, and by closing the first purge main valve 31 and the first purge main valve 34, the middle space of the purge pipeline 300 can be separated from the two ends, making it convenient for staff to inspect and repair various control components on the purge pipeline 300, such as the purge pressure regulating valve 32, the purge pressure gauge 33, etc.

[0064] In some embodiments, the specialty gas supply system further includes a first connecting line 600 and a flow regulating valve 61. The purge line 300 is connected to one end of the first connecting line 600, and the back-pressure branch 400 is connected to the other end of the first connecting line 600. The back-pressure branch 400 is connected to the purge line 300 via the first connecting line 600. The inert gas provided by the purge line 300 can enter the back-pressure branch 400 through the first connecting line 600 and be output to the reaction chamber.

[0065] The flow regulating valve 61 is provided in the first connecting pipeline 600 and is used to regulate the flow of the gas in the first connecting pipeline 600, thereby regulating the purge intensity of the inert gas. For example, the flow regulating valve 61 may be a needle valve.

[0066] In some embodiments, the special gas supply system also includes a first purge branch 700 and a first purge branch valve 71, wherein the first purge branch 700 has a first end and a second end, the special gas pipeline 100 and the first special gas branch 200 are both connected to the first end of the first purge branch 700, and the purge pipeline 300 and the back pressure branch 400 are both connected to the second end of the first purge branch 700.

[0067] Illustratively, the first end of the first purge branch 700 is connected to the output end of the specialty gas pipeline 100 , so that the first purge branch 700 , the first specialty gas branch 200 and the second specialty gas branch 500 are connected in parallel to the output end of the specialty gas pipeline 100 .

[0068] In some cases, such as when the special gas supply system does not output special gas within a certain period of time and the residual special gas amount in the first special gas flowmeter may be small, the special gas supply system can also backflush the first special gas branch 200 through the back pressure branch 400 and the first purge branch 700.

[0069] Specifically, when backflushing through the first purge branch 700, the inert gas can pass through the purge line 300, the first connecting line 600, the first purge branch 700, and the first special gas branch 200 in sequence. At this time, the inert gas in the first purge branch 700 will pass through the first special gas flowmeter 21 in the first special gas branch 200. In this way, the entire section of the first special gas branch 200 can be fully purged through the first purge branch 700 to improve the cleanliness. In some embodiments, a first purge branch valve 71 is provided in the first purge branch 700. The first purge branch valve 71 is used to control the on and off of the first purge branch 700. Exemplarily, the first purge branch valve 71 is a pneumatic switch control valve, and the first purge branch valve 71 can be controlled by the system to switch the switch state. When the first purge branch valve 71 is opened, gas is allowed to flow between the first end and the second end of the first purge branch 700 ; when the first purge branch valve 71 is closed, gas is blocked from flowing between the first end and the second end of the first purge branch 700 .

[0070] If backflushing through the first purge branch 700 is required, the first purge branch valve 71 and the first specialty gas branch valve 22 can be opened. The inert gas can then flow sequentially through the purge line 300, the first connecting line 600, the first purge branch 700, and the first specialty gas branch 200. At this point, the inert gas in the first purge branch 700 will pass through the first specialty gas flowmeter 21 in the first specialty gas branch 200. This allows the entire first specialty gas branch 200 to be fully purged through the first purge branch 700, improving cleanliness.

[0071] In this embodiment, the second specialty gas branch 500 and the first specialty gas branch 200 are both connected to the first end of the first purge branch 700. This allows the first purge branch 700 to backflush the second specialty gas branch 500. In this case, the first purge branch valve 71 and the third specialty gas branch valve 52 can be opened, allowing inert gas to flow sequentially through the purge line 300, the first connecting line 600, the first purge branch 700, and the second specialty gas branch 500. At this point, the inert gas in the first purge branch 700 passes through the second specialty gas flowmeter 51 in the second specialty gas branch 500. This allows the entire second specialty gas branch 500 to be fully purged through the first purge branch 700, improving cleanliness.

[0072] It can be understood that the special gas supply system in this embodiment provides a variety of purge methods. By switching the on and off states of the back-pressure branch 400 and the first purge branch 700, the inert gas can be selectively passed through or not through the corresponding special gas flow meter. In actual application scenarios, users can use the corresponding purge method to provide inert gas according to actual needs.

[0073] For example, if the special gas supply system frequently outputs special gas and the amount of residual special gas in the first special gas flowmeter 21 is likely to be large, inert gas can be supplied via the back-pressure branch 400, and backflushing through the first purge branch 700 can be temporarily suspended. For another example, if the special gas supply system has not output special gas for a certain period of time and the amount of residual special gas in the first special gas flowmeter 21 is likely to be small, backflushing can be performed via the first purge branch 700. This application is not limited to this.

[0074] In some embodiments, the specialty gas supply system further includes a one-way valve 72 , which is disposed on the first purge branch 700 . The one-way valve 72 is used to block the gas from flowing from the first end to the second end of the first purge branch 700 .

[0075] It can be understood that when backflushing is performed through the first purge branch 700 , the one-way valve 72 allows the inert gas to enter the specialty gas pipeline 100 , the first specialty gas branch 200 and the second specialty gas branch 500 from the second end of the first purge branch 700 .

[0076] When it is necessary to output special gas to the reaction chamber, the one-way valve 72 blocks the special gas in the special gas pipeline 100 from entering the first connecting pipeline 600, the purge pipeline 300 or the back pressure branch 400 through the first purge branch 700, so as to ensure that the special gas is transported to the first special gas branch 200 and the second special gas branch 500, thereby preventing the backflow of special gas.

[0077] In some embodiments, the specialty gas supply system further includes a second purge branch 800, wherein the second purge branch 800 is connected to the purge pipeline 300, and the second purge branch 800 is connected to the first specialty gas branch 200, with a second connection point 25 between the second purge branch 800 and the first specialty gas branch 200. The first specialty gas flowmeter 21, the first specialty gas branch valve 22, and the second connection point 25 are spaced apart along the gas delivery direction of the first specialty gas branch 200.

[0078] In this embodiment, the specialty gas supply system can not only provide inert gas to the first specialty gas branch 200 via the back-pressure branch 400, but also purge the first specialty gas branch 200 with inert gas via the second purge branch 800. When it is necessary to purge the first specialty gas branch 200 with inert gas via the second purge branch 800, the first specialty gas branch valve 22 can be closed, and the inert gas can flow sequentially through the purge line 300, the second purge branch 800, and the first specialty gas branch 200 before entering the reaction chamber. At this time, the inert gas in the second purge branch 800 enters the first specialty gas branch 200 through the second connection point 25 and can only flow into the reaction chamber, blocking the flow of inert gas to the first specialty gas flowmeter 21.

[0079] In some cases, the specialty gas supply system can also backflush the first specialty gas branch 200 via the second purge branch 800. In this case, the first specialty gas branch valve 22 can be opened, and the inert gas in the second purge branch 800 can enter the first specialty gas branch 200 through the second connection point 25 and flow toward the first specialty gas flowmeter 21, achieving a backflush cleaning effect. It is worth noting that the above-mentioned backflush cleaning method for the first specialty gas branch 200 can be adopted according to user needs. For example, it can be applied when the specialty gas supply system has not output specialty gas for a certain period of time and the residual specialty gas in the first specialty gas flowmeter 21 may be small. This application does not limit this.

[0080] In this embodiment, the first specialty gas flowmeter 21, the first specialty gas branch valve 22, the second connection point 25, and the second specialty gas branch valve 24 are arranged at intervals along the gas delivery direction of the first specialty gas branch 200. It will be appreciated that the second specialty gas branch valve 24 can control the on / off state of gas output from the first specialty gas branch 200 to the reaction chamber. When the second specialty gas branch valve 24 is open, the first specialty gas branch 200 is allowed to output specialty gas or inert gas to the reaction chamber. When the second specialty gas branch valve 24 is open, the first specialty gas branch 200 is allowed to output specialty gas or inert gas to the reaction chamber.

[0081] In some embodiments, the specialty gas supply system further includes a second purge branch valve 81 , which is disposed on the second purge branch 800 .

[0082] The second purge branch valve 81 is used to control the on / off state of the second purge branch 800. Exemplarily, the second purge branch valve 81 is a pneumatic on / off control valve, and its on / off state can be switched by the system control. When the second purge branch valve 81 is open, gas is allowed to flow from one end of the second purge branch 800 to the other, thereby allowing the second purge branch 800 to output inert gas to the first specialty gas branch 200. When the second purge branch valve 81 is closed, gas is blocked from flowing from one end of the second purge branch 800 to the other, thereby stopping the second purge branch 800 from outputting inert gas to the first specialty gas branch 200.

[0083] In some embodiments, the specialty gas supply system further includes a second connecting line 110 and a purge flowmeter 111, wherein the purge line 300 is connected to one end of the second connecting line 110, and the second purge branch 800 is connected to the other end of the second connecting line 110. The second purge branch 800 is connected to the purge line 300 via the second connecting line 110, and the inert gas provided by the purge line 300 can enter the second purge branch 800 through the second connecting line 110 and then be output to the reaction chamber. Exemplarily, the first connecting line 600 and the second connecting line 110 are connected in parallel to the output end of the purge line 300.

[0084] The purge flowmeter 111 is provided in the second connecting pipeline 110 and is used to monitor the flow of gas in the second connecting pipeline 110 , and further monitor the flow of the inert gas output from the second purge branch 800 , so as to facilitate the control of the inert gas purge volume.

[0085] In some embodiments, the specialty gas supply system further includes a third purge branch 900, which is provided corresponding to the purge line 300 and connected between the purge line 300 and the corresponding second specialty gas branch 500. A third connection point 54 is defined between the third purge branch 900 and the second specialty gas branch 500. A second specialty gas flowmeter 51, a second specialty gas branch valve 24, the third connection point 54, and a fourth specialty gas branch valve 53 are spaced apart along the gas delivery direction of the second specialty gas branch 500.

[0086] Illustratively, the number of the third purge branches 900 is 2, and the second purge branch 800 and the two third purge branches 900 are connected to the second connecting pipe 110 in parallel. In other embodiments, the number of the third purge branches 900 can be configured according to actual needs.

[0087] In this embodiment, the specialty gas supply system can perform an inert gas purge on the second specialty gas branch 500 via the third purge branch 900. When inert gas purge is required on the second specialty gas branch 500 via the third purge branch 900, the second specialty gas branch valve 24 can be closed, and the inert gas can sequentially pass through the purge line 300, the third purge branch 900, and the second specialty gas branch 500 before entering the reaction chamber. At this point, the inert gas in the third purge branch 900 enters the second specialty gas branch 500 from the third connection point 54 and can only flow into the reaction chamber, blocking the flow of inert gas to the second specialty gas flowmeter 51.

[0088] In some embodiments, the specialty gas supply system further includes a third purge branch valve 91 , which is disposed on the third purge branch 900 .

[0089] The third purge branch valve 91 is used to control the on / off state of the third purge branch 900. Exemplarily, the third purge branch valve 91 is a pneumatic on / off control valve, and its on / off state can be switched by the system. When the third purge branch valve 91 is open, gas is allowed to flow from one end of the third purge branch 900 to the other, thereby allowing the third purge branch 900 to deliver inert gas to the second specialty gas branch 500. When the third purge branch valve 91 is closed, gas is blocked from flowing from one end of the third purge branch 900 to the other, thereby stopping the third purge branch 900 from delivering inert gas to the second specialty gas branch 500.

[0090] It can be understood that in this embodiment, the second purge branch 800 and the third purge branch 900 are connected in parallel to the second connecting pipeline 110 , so that the purge flowmeter 111 can also simultaneously monitor the flow of the inert gas output from the third purge branch 900 .

[0091] It is worth noting that, since the purge flowmeter 111 itself has a certain resistance to gas flow, the flow rate of the gas output by the first connecting pipeline 600 is generally greater than the flow rate of the gas output by the second connecting pipeline 110. In actual applications, users can set different purge modes according to the gas flow rates of different pipelines. For example, when a large amount of inert gas is required, the first connecting pipeline 600 can be used, and the back pressure branch 400 or the first purge branch 700 can be used to provide inert gas. For another example, when a small amount of inert gas is required, the second connecting pipeline 110 can be used, and the second purge branch 800 or the third purge branch 900 can be used for inert gas purging. The specific configuration can be made according to the actual application, and this application does not limit this.

[0092] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application and are not intended to limit the present application. Although the present application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. A special gas supply system, characterized in that: include: Special gas pipeline; A first specialty gas branch, connected to the specialty gas pipeline, the first specialty gas branch is used to connect to the reaction chamber; A first special gas flow meter is provided on the first special gas branch; A first specialty gas branch valve is provided on the first specialty gas branch; Purge pipeline; a back-pressure branch connected to the purge pipeline and to the first specialty gas branch, with a first connection point being defined between the back-pressure branch and the first specialty gas branch; A back pressure branch valve is arranged on the back pressure branch; wherein the first special gas flowmeter, the first special gas branch valve, and the first connection point are arranged at intervals along the gas delivery direction of the first special gas branch.

2. The special gas supply system according to claim 1, characterized in that: The special gas supply system also includes: a first purge branch, wherein the specialty gas pipeline and the first specialty gas branch are both connected to a first end of the first purge branch, and the purge pipeline and the back-pressure branch are both connected to a second end of the first purge branch; The first purge branch valve is arranged on the first purge branch.

3. The special gas supply system according to claim 2, characterized in that: The special gas supply system also includes: A one-way valve is provided on the first purge branch, and is used to block the gas from flowing from the first end to the second end of the first purge branch.

4. The special gas supply system according to claim 3, characterized in that: The special gas supply system also includes: a first connecting pipeline, the purge pipeline being connected to one end of the first connecting pipeline, and the back-pressure branch and the first purge branch being connected to the other end of the first connecting pipeline; A flow regulating valve is provided in the first connecting pipeline.

5. The special gas supply system according to claim 1, characterized in that: The special gas supply system also includes: a second purge branch connected to the purge pipeline and to the first specialty gas branch, wherein a second connection point is defined between the second purge branch and the first specialty gas branch; The first special gas flowmeter, the first special gas branch valve, and the second connection point are arranged at intervals along the gas delivery direction of the first special gas branch.

6. The special gas supply system according to claim 5, characterized in that: The special gas supply system also includes: A second specialty gas branch valve is provided on the first specialty gas branch; The first special gas flowmeter, the first special gas branch valve, the second connection point, and the second special gas branch valve are arranged at intervals along the gas delivery direction of the first special gas branch.

7. The special gas supply system according to claim 5, characterized in that: The special gas supply system also includes: The second purge branch valve is arranged on the second purge branch.

8. The special gas supply system according to claim 5, characterized in that: The special gas supply system also includes: a second connecting pipeline, the purge pipeline being connected to one end of the second connecting pipeline, and the second purge branch being connected to the other end of the second connecting pipeline; The purge flowmeter is arranged in the second connecting pipeline.

9. The special gas supply system according to claim 5, characterized in that: The special gas supply system also includes: A second specialty gas branch, connected to the specialty gas pipeline, and the second specialty gas branch is used to connect to the reaction chamber; A second special gas flow meter is provided on the second special gas branch; The second specialty gas branch valve is arranged on the second specialty gas branch.

10. The special gas supply system according to claim 9, characterized in that: The special gas supply system also includes: a third purge branch, arranged corresponding to the purge pipeline, connected between the purge pipeline and the corresponding second specialty gas branch, and having a third connection point between the third purge branch and the second specialty gas branch; The second specialty gas flowmeter, the second specialty gas branch valve, and the third connection point are arranged at intervals along the gas delivery direction of the second specialty gas branch.

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