Conveying system for formic acid furnace and formic acid furnace

Abstract

The utility model relates to the technical field of formic acid furnaces, in particular to a conveying system for a formic acid furnace and the formic acid furnace. The conveying system for the formic acid furnace is used for conveying tools and comprises a driving mechanism, a middle shaft and two conveying rails arranged at intervals. A plurality of transmission rollers which are distributed at intervals in the conveying direction are rotationally mounted on the inner side of each conveying rail, and the transmission rollers are used for making rolling contact with the bottom face of a tool; a transmission gear is coaxially fixed on each transmission roller, and any two adjacent transmission gears on each conveying track are directly meshed; or any two adjacent transmission gears on each conveying track are meshed through an intermediate gear rotationally mounted on the conveying track; the transmission gear and the intermediate gear are collectively called gears; the two end parts of the intermediate shaft are respectively connected with the gears on the conveying rails; and the driving mechanism is connected with one of the gears. According to the utility model, the synchronism of the transmission rollers can be ensured, and the tooling can be prevented from inclining and deviating in the conveying process.

Description

Technical Field

[0001] The utility model relates to the technical field of formic acid furnaces, in particular to a transmission system for a formic acid furnace and the formic acid furnace. Background Art

[0002] The formic acid furnace can be used to meet the packaging and welding needs of the semiconductor industry. It has multiple independent process chambers inside, and each process chamber is equipped with a transmission system for transporting tooling.

[0003] Existing conveyor systems mostly use roller conveyors, where the length of the rollers is longer than the width of the tooling. A drive mechanism is connected to one of the rollers, and adjacent rollers are connected by a chain. This type of conveyor system can experience chain loosening after long-term use, leading to variations in the conveying speeds of the individual rollers. This can cause the tooling to vibrate during transport, affecting the positioning accuracy of the product within the tooling. Furthermore, the tooling is relatively wide, and prolonged exposure to heat can inevitably lead to uneven bottoms. This can cause the tooling bottom to poorly align with the rollers, causing the tooling to tilt and potentially shift during transport. Summary of the Invention

[0004] The technical problem to be solved by the utility model is: in order to solve the deficiencies in the prior art, a transmission system for a formic acid furnace is provided, which can ensure the synchronization of various transmission rollers and prevent the tooling from tilting or deflecting during the transportation process.

[0005] The technical solution adopted by the utility model to solve the technical problem is: a transmission system for a formic acid furnace, used for conveying tooling, comprising a driving mechanism, an intermediate shaft and two conveying rails arranged at intervals;

[0006] A plurality of transmission rollers spaced apart along the conveying direction are rotatably mounted on the inner side of each conveying track, and the transmission rollers are used for rolling contact with the bottom surface of the tooling;

[0007] Each transmission roller is coaxially fixed with a transmission gear, and any two adjacent transmission gears on each conveying track are directly meshed; or any two adjacent transmission gears on each conveying track are meshed by rotating an intermediate gear mounted on the conveying track; the transmission gears and the intermediate gears are collectively referred to as gears;

[0008] One end of the intermediate shaft is connected to a gear on one conveying track, and the other end is connected to a gear on another conveying track;

[0009] The driving mechanism is connected to a gear on one of the conveying pipes to drive the rotation.

[0010] In order to better prevent the tooling from shifting during transportation, a plurality of positioning rollers spaced apart along the transportation direction are rotatably mounted on the top of each conveying track, and the positioning rollers are used to roll in contact with the sides of the tooling.

[0011] Furthermore, each conveying track is equipped with at least one pressing plate, at least a portion of which is blocked above the tooling supported by the transmission roller to limit the upward lifting stroke of the tooling.

[0012] In order to further separate the gear and the transmission roller as much as possible, the gear is located outside the conveying track where it is located.

[0013] In order to further better isolate the gears and the transmission rollers, each conveying track is also equipped with a shielding cover, which shields the top of the gears.

[0014] In order to better transfer tooling between adjacent transmission systems, a transition roller is rotatably installed at the starting and / or terminal ends of each conveyor roller, and the transition roller is used to roll in contact with the bottom surface of the tooling, and the highest end of the transition roller is at the same height as the highest end of the transmission roller.

[0015] A specific structure of a driving mechanism is further provided, wherein the driving mechanism includes a motor and a reducer, wherein the output shaft of the motor is connected to the input shaft of the reducer, and the output shaft of the reducer is connected to a gear on one of the conveying tracks.

[0016] The utility model also relates to a formic acid furnace, comprising a transmission system for the formic acid furnace.

[0017] The beneficial effects of the utility model are:

[0018] 1. Each transmission roller on the same conveyor track is driven to rotate by transmission gears, which are directly or indirectly meshed with each other, ensuring that the transmission rollers on the same conveyor track rotate synchronously. A gear on one conveyor track and a gear on another conveyor track are driven by an intermediate shaft, ensuring that the transmission rollers on both conveyor tracks rotate synchronously. Therefore, each transmission roller in the transmission system of the utility model rotates synchronously, allowing for smooth conveyance of tooling and preventing tooling from shifting during conveyance.

[0019] 2. The transmission roller on one conveyor track supports one side of the tooling, and the transmission roller on the other conveyor track supports the other side of the tooling. The transmission system in the utility model only supports the two sides of the tooling. Compared with the full support in the width direction of the tooling, it can effectively prevent the tooling from tilting on the transmission system due to deformation in the middle of the bottom.

[0020] 3. Compared with the transmission method through conveyor belts or chains, the transmission method of the utility model does not have the problem of loose conveyor belts or chains, and has high transmission accuracy, ensuring that the entire transmission system can work stably for a long time.

[0021] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0023] Figure 1 This is a schematic structural diagram of a transmission system for a formic acid furnace according to the present invention;

[0024] Figure 2 for Figure 1 A top view of

[0025] Figure 3 This is a structural diagram of a conveying tooling for a conveying system of a formic acid furnace according to the present invention;

[0026] In the figure, 1. driving mechanism; 11. motor; 12. reducer; 2. intermediate shaft; 3. conveying track; 4. transmission roller; 5. transmission gear; 6. intermediate gear; 7. positioning roller; 8. transition roller; 9. pressure plate; 10. shielding cover; 100. tooling. DETAILED DESCRIPTION

[0027] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams that illustrate the basic structure of the present invention only in a schematic manner. Therefore, they only show components relevant to the present invention, and directions and references (e.g., up, down, left, right, etc.) may be used solely to facilitate the description of features in the drawings. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0028] Example 1

[0029] like Figure 1 、 Figure 2 and Figure 3 As shown, a transmission system for a formic acid furnace is used to transport a tool 100, comprising a drive mechanism 1, an intermediate shaft 2 and two spaced apart transport rails 3;

[0030] A plurality of transmission rollers 4 are rotatably mounted on the inner side of each conveying track 3 and are spaced apart along the conveying direction. The transmission rollers 4 are used for rolling contact with the bottom surface of the tooling 100.

[0031] Each transmission roller 4 is coaxially fixed with a transmission gear 5. Any two adjacent transmission gears 5 on each conveying track 3 are directly meshed; or any two adjacent transmission gears 5 on each conveying track 3 are meshed by rotating an intermediate gear 6 mounted on the conveying track 3. The transmission gears 5 and the intermediate gears 6 are collectively referred to as gears.

[0032] One end of the intermediate shaft 2 is connected to a gear on one conveying track 3, and the other end is connected to a gear on another conveying track 3;

[0033] The driving mechanism 1 is connected to a gear on one of the conveying pipes to drive the rotation.

[0034] The conveying track 3, the transmission roller 4 and the gears are all located in the formic acid furnace.

[0035] Specifically, each drive roller 4 on the same conveyor track 3 is driven to rotate by a transmission gear 5, and each transmission gear 5 on the same conveyor track 3 is directly or indirectly meshed, ensuring that each drive roller 4 on the same conveyor track 3 rotates synchronously. A gear on one conveyor track 3 and a gear on another conveyor track 3 are driven via an intermediate shaft 2, ensuring that the drive rollers 4 on both conveyor tracks 3 rotate synchronously. Therefore, each drive roller 4 in the transmission system of this embodiment rotates synchronously, thereby ensuring smooth transportation of the tooling 100 and preventing the tooling 100 from shifting during transportation. The drive roller 4 on one conveyor track 3 supports one side of the tooling 100, while the drive roller 4 on the other conveyor track 3 supports the other side of the tooling 100. The transmission system of this embodiment only supports two sides of the tooling. Compared to full support across the width of the tooling 100, this effectively prevents the tooling 100 from tilting on the transmission system due to deformation in the middle of the bottom. In addition, compared with the transmission method through a conveyor belt or chain, the transmission method in this embodiment does not have the problem of loose conveyor belts or chains, and has high transmission accuracy, ensuring that the entire transmission system can work stably for a long time.

[0036] In this embodiment, if Figure 1 and Figure 3 As shown, the gear is located outside the conveying track 3. In this way, the gear and the transmission roller 4 can be isolated as much as possible to prevent foreign matter such as dust on the gear from contaminating the tooling 100 and the products on the tooling 100 being conveyed by the transmission roller 4.

[0037] In this embodiment, if Figure 1 、 Figure 2 and Figure 3As shown, transition rollers 8 are rotatably mounted at the beginning and / or end of each conveyor roller conveyor. These transition rollers 8 are configured to engage the bottom surface of the tooling 100 in rolling contact, with the highest end of the transition rollers 8 being at the same height as the highest end of the transmission rollers 4. As a result, the transition rollers 8 provide both transition and support when the tooling 100 enters and exits the conveyor system, facilitating smooth transfer of the tooling 100 between adjacent conveyor systems.

[0038] In this embodiment, if Figure 1 、 Figure 2 and Figure 3 As shown, the driving mechanism 1 includes a motor 11 and a reducer 12 , the output shaft of the motor 11 is connected to the input shaft of the reducer 12 , and the output shaft of the reducer 12 is connected to a gear on one of the conveying tracks 3 .

[0039] Example 2

[0040] Based on the first embodiment, Figure 1 、 Figure 2 and Figure 3 As shown, a plurality of positioning rollers 7 spaced apart along the conveying direction are rotatably mounted on the top end of each conveying track 3 , and the positioning rollers 7 are used for rolling contact with the side surfaces of the tooling 100 .

[0041] Specifically, the positioning rollers 7 are used to position the side surfaces of the tooling 100 , thereby preventing the tooling 100 from being offset during transportation.

[0042] Example 3

[0043] On the basis of Example 1 or Example 2, Figure 1 、 Figure 2 and Figure 3 As shown, each conveying track 3 is installed with at least one pressing plate 9 , and at least a portion of the pressing plate 9 is blocked above the tooling 100 supported by the driving roller 4 to limit the upward lifting stroke of the tooling 100 .

[0044] Specifically, the tooling 100 is restricted by the pressing plate 9 , thereby preventing the tooling 100 from being lifted too high during the transportation process.

[0045] Example 4

[0046] On the basis of Example 1, Example 2 or Example 3, Figure 1 、 Figure 2 and Figure 3 As shown, each conveying track 3 is also equipped with a shielding cover 10, which shields the top of the gear and also shields the upper end of the outer side of the gear.

[0047] Specifically, by shielding the gears with the shielding cover 10 , the gears and the tooling 100 can be further and better isolated, further preventing foreign matter such as dust on the gears from contaminating the tooling 100 and the products on the tooling 100 being transported by the transmission roller 4 .

[0048] Example 5

[0049] A formic acid furnace includes the transmission system for the formic acid furnace according to any one of Embodiments 1 to 4.

[0050] Based on the above-mentioned ideal embodiment of the present invention, and in accordance with the above description, relevant personnel can make various changes and modifications without departing from the technical scope of the present invention. The technical scope of the present invention is not limited to the content of the specification, but must be determined according to the scope of the claims.

Claims

1. A conveying system for a formic acid furnace, for conveying tooling (100), characterized in that: It comprises a driving mechanism (1), an intermediate shaft (2), and two conveying tracks (3) arranged at intervals; A plurality of transmission rollers (4) are rotatably mounted on the inner side of each conveying track (3) and are spaced apart along the conveying direction. The transmission rollers (4) are used for rolling contact with the bottom surface of the tooling (100); Each transmission roller (4) is coaxially fixed with a transmission gear (5), and any two adjacent transmission gears (5) on each conveying track (3) are directly meshed; or any two adjacent transmission gears (5) on each conveying track (3) are meshed by rotating an intermediate gear (6) mounted on the conveying track (3); the transmission gears (5) and the intermediate gears (6) are collectively referred to as gears; One end of the intermediate shaft (2) is connected to a gear on a conveying track (3), and the other end is connected to a gear on another conveying track (3); The driving mechanism (1) is connected to a gear on one of the delivery pipes to drive the rotation.

2. The transmission system for a formic acid furnace according to claim 1, characterized in that: A plurality of positioning rollers (7) spaced apart along the conveying direction are rotatably mounted on the top end of each conveying track (3); the positioning rollers (7) are used for rolling contact with the side surfaces of the tooling (100).

3. The transmission system for a formic acid furnace according to claim 1, characterized in that: Each conveying track (3) is equipped with at least one pressing plate (9), at least a portion of which is located above the tooling (100) supported by the transmission roller (4) to limit the upward travel of the tooling (100).

4. The transmission system for a formic acid furnace according to claim 1, characterized in that: The gear is located outside the conveying track (3) where it is located.

5. The transmission system for a formic acid furnace according to claim 4, characterized in that: Each conveying track (3) is also equipped with a shielding cover (10), and the shielding cover (10) shields the upper part of the gear.

6. The transmission system for a formic acid furnace according to claim 1, characterized in that: A transition roller (8) is rotatably mounted at the starting end and / or the terminal end of each conveying roller, the transition roller (8) being used for rolling contact with the bottom surface of the tooling (100), and the highest end of the transition roller (8) is at the same height as the highest end of the transmission roller (4).

7. The transmission system for a formic acid furnace according to claim 1, characterized in that: The driving mechanism (1) comprises a motor (11) and a reducer (12), wherein the output shaft of the motor (11) is connected to the input shaft of the reducer (12), and the output shaft of the reducer (12) is connected to a gear on one of the conveying tracks (3).

8. A formic acid furnace, characterized in that: The invention comprises a transmission system for a formic acid furnace according to any one of claims 1 to 7.

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