Wafer temporary storage rack

Abstract

The embodiment of the utility model provides a wafer temporary storage rack, and relates to the technical field of silicon carbide wafer processing. The wafer temporary storage rack provided by the embodiment of the utility model comprises a main rack body, a storage grid assembly and a plurality of supporting strips. Wherein the storage lattice assembly is connected with the bottom of the main frame body, the storage lattice assembly is provided with a plurality of storage grooves, and the plurality of storage grooves are used for bearing the bottoms of wafers. And the plurality of supporting strips are connected with the main frame body, the plurality of supporting strips are in one-to-one correspondence with the plurality of storage grooves, each supporting strip is provided with a supporting end, and the supporting ends are used for forming point contact supporting on the side wall surfaces of the wafers under the condition that the bottoms of the wafers are loaded in the storage grooves. According to the wafer temporary storage rack, temporary storage of corroded wafers can be realized, and the wafers cannot be cracked.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide wafer processing, in particular to a wafer temporary storage rack. Background Art

[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications and shows good application prospects in aviation devices, new energy vehicles, rail transportation and household appliances.

[0003] Currently, etching furnaces are commonly used to etch silicon carbide wafers during processing. However, once the etching furnace has completed etching the wafers and they are removed from the furnace, there is the issue of how to store the wafers. For example, when the etching furnace is finished, tweezers are needed to remove the wafers. Since the temperature of the wafers will be above 300°C when they are removed from the furnace, if they are allowed to cool down on the hanging basket before being removed, the wafers will stick to the hanging basket due to the solidification of KOH, making it difficult to remove the wafers. Therefore, after etching the wafers in the etching furnace, the wafers are removed and temporarily stored at the side of the furnace, such as directly on the etching furnace table. However, due to the low temperature at the side of the furnace and the metal material, the temperature difference between the two is large, which can easily cause the wafers to crack. Utility Model Content

[0004] The utility model aims to provide a wafer temporary storage rack, which can realize the temporary storage of wafers after corrosion without the wafers being cracked.

[0005] The embodiment of the present utility model is achieved as follows:

[0006] In a first aspect, an embodiment of the present invention provides a wafer temporary storage rack, comprising a main frame, a storage grid assembly, and a plurality of support bars;

[0007] The storage grid assembly is connected to the bottom of the main frame, and the storage grid assembly has a plurality of storage slots, and the plurality of storage slots are used to support the bottom of the wafer;

[0008] The plurality of support bars are connected to the main frame, and the plurality of support bars correspond one-to-one to the plurality of storage slots. Each of the support bars is provided with a support end, and the support end is used to form point contact support on the side wall surface of the wafer when the bottom of the wafer is supported on the storage slot.

[0009] Furthermore, in an optional embodiment, the top end of each of the support bars is connected to the main frame, and the bottom end of each of the support bars is bent to form the support end.

[0010] Furthermore, in an optional embodiment, the support end is connected to the support bar to form an L-shaped structure.

[0011] Furthermore, in an optional embodiment, the end of the support end away from the support bar is hemispherical.

[0012] Furthermore, in an optional embodiment, the storage compartment assembly includes two side panels and a plurality of limit plates arranged in parallel;

[0013] Both ends of the two side panels are respectively connected to the main frame;

[0014] The plurality of limiting plates are arranged in parallel, and both ends of the plurality of limiting plates are respectively connected to the two side plates. The plurality of limiting plates and the two side plates together form a plurality of storage slots arranged in sequence.

[0015] Furthermore, in an optional embodiment, the main frame includes a bottom frame, two support frames and a top frame;

[0016] The two support frames are arranged opposite to each other, the top ends of the two support frames are respectively connected to the two ends of the top frame, and the bottom ends of the two support frames are respectively connected to the two ends of the bottom frame;

[0017] The top end of each support bar is connected to the top frame;

[0018] The storage compartment assembly is connected to the base frame.

[0019] Furthermore, in an optional embodiment, the base frame is a rectangular frame structure, the storage compartment assembly is located in the base frame, and two ends of the storage compartment assembly are respectively connected to two opposite ends of the base frame.

[0020] Further, in an optional embodiment, each of the support frames includes two support rods;

[0021] The top ends of the two support rods are connected to the top frame, and the bottom ends of the two support rods are connected to the bottom frame. The two support rods and the bottom frame form a triangular support structure.

[0022] Furthermore, in an optional embodiment, the main frame further includes a connecting rod, and each of the support frames further includes a vertical rod;

[0023] The top end of the vertical pole is connected to the connection point of the top ends of the two support poles, and the bottom end of the vertical pole is vertically connected to the base frame;

[0024] Both ends of the connecting rod are respectively connected to the two vertical poles, and the plurality of support bars are all connected to the connecting rod.

[0025] Further, in an optional embodiment, the support bar includes a first support bar and a second support bar;

[0026] One end of the first support bar is connected to the main frame, and the other end is nested with the second support bar;

[0027] The second support bar is retractable relative to the first support bar, and the support end is formed at an end of the second support bar away from the first support bar.

[0028] The beneficial effects of the wafer temporary storage rack provided by the embodiment of the utility model include:

[0029] When the wafer temporary storage rack provided by the embodiment of the present invention is used, the wafer is placed upright in the storage slot. The storage slot can support the bottom of the wafer and the side wall of the wafer is pressed against the support end, so that the support end forms a point contact support for the side wall of the wafer. In this way, the wafer temporary storage rack can realize the temporary storage of wafers, avoid contact with the machine during temporary storage, and will not produce cracks due to excessive temperature difference. It can also greatly reduce the contact area between the wafer temporary storage rack and the wafer, further preventing the wafer from cracking due to large temperature difference. In addition, multiple support bars correspond one to one with multiple storage slots, and each storage slot and the corresponding support bar can jointly support a wafer. Therefore, the wafer temporary storage rack can store multiple wafers at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0031] Figure 1 A schematic structural diagram of a wafer temporary storage rack provided by an embodiment of the present utility model;

[0032] Figure 2 A schematic diagram of the wafer temporary storage rack provided by an embodiment of the present invention when wafers are temporarily stored in a storage tank;

[0033] Figure 3 Schematic diagram of the structure of the support bars of the wafer temporary storage rack provided in some other optional embodiments of the present invention.

[0034] icon:

[0035] 10-wafer temporary storage rack; 20-wafer;

[0036] 100-main frame; 110-base frame; 111-frame bar; 120-support frame; 121-support rod; 122-vertical pole; 130-top frame; 140-connecting rod;

[0037] 200-storage grid assembly; 210-storage slot; 220-side panel; 230-limiting plate;

[0038] 300 - support bar; 310 - support end; 321 - first support bar; 322 - second support bar. DETAILED DESCRIPTION

[0039] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0040] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0041] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0042] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0043] In addition, the terms "horizontal" and "vertical" do not mean that the components must be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", not that the structure must be completely horizontal, but can be slightly tilted.

[0044] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0045] See also Figure 1 and Figure 2 The embodiment of the utility model provides a wafer temporary storage rack 10, which can realize the temporary storage of wafers 20 after corrosion, and the wafers 20 will not crack. The wafer temporary storage rack 10 includes a main frame 100, a storage grid assembly 200 and a plurality of support bars 300. Among them, the storage grid assembly 200 is connected to the bottom of the main frame 100, and the storage grid assembly 200 has a plurality of storage slots 210, and the plurality of storage slots 210 are all used to support the bottom of the wafer 20. The plurality of support bars 300 are all connected to the main frame 100, and the plurality of support bars 300 correspond one-to-one to the plurality of storage slots 210. Each support bar 300 is provided with a support end 310, and the support end 310 is used to form a point contact support for the side wall surface of the wafer 20 when the bottom of the wafer 20 is supported on the storage slot 210.

[0046] When the wafer temporary storage rack 10 is in use, the wafer 20 is placed upright in the storage slot 210. The storage slot 210 supports the bottom of the wafer 20 and places the sidewall of the wafer 20 against the support end 310, so that the support end 310 forms a point-contact support on the sidewall of the wafer 20. When the support end 310 provides support, the support point of the support end 310 can be selected at the center area of the wafer 20, or slightly above the center. This can effectively support the wafer 20 and prevent it from shifting or cracking.

[0047] Therefore, the wafer temporary storage rack 10 can not only temporarily store the wafers 20, preventing the wafers 20 from being placed directly on the machine during temporary storage, preventing the wafers 20 from contacting the machine and preventing the wafers 20 from breaking due to excessive temperature differences caused by contact with the machine; it can also greatly reduce the contact area between the wafer temporary storage rack 10 and the wafers 20, further preventing the wafers 20 from breaking due to large temperature differences. In addition, the multiple support bars 300 correspond one-to-one with the multiple storage slots 210. Each storage slot 210 and the corresponding support bar 300 can jointly support a wafer 20. Therefore, the wafer temporary storage rack 10 can store multiple wafers 20 at the same time.

[0048] It should be noted that when placing the wafer 20, placing the wafer 20 upright does not mean that it must be completely perpendicular to the storage slot 210. The wafer 20 can be tilted toward the support bar 300 so that the side wall of the wafer 20 rests against the support end 310 to form a point contact support.

[0049] In order to facilitate a detailed description of the structure of the wafer temporary storage rack 10 , the structure of the main rack body 100 in this embodiment is first introduced below.

[0050] The main frame 100 includes a base frame 110, two support frames 120, and a top frame 130. The two support frames 120 are positioned opposite each other, with their top ends connected to the ends of the top frame 130, and their bottom ends connected to the ends of the base frame 110. The top end of each support bar 300 is connected to the top frame 130. The storage compartment assembly 200 is connected to the base frame 110.

[0051] It should be noted that the base frame 110, the two support frames 120, and the top frame 130 collectively define a space for storing the wafers 20, which not only supports the wafers 20 but also provides a certain degree of protection for the wafers 20. The top end of each support bar 300 is connected to the top frame 130, while the end away from the support bar 300 extends freely toward the base frame 110, so that the support end 310 is located in the middle area of the internal space of the main frame 100 to support the side wall surface of the wafer 20.

[0052] By arranging the base frame 110, two support frames 120, and the top frame 130, the base frame 110 effectively supports the entire main frame 100. The two support frames 120 are respectively located at the left and right ends, effectively supporting the top frame 130 and the support bars 300. The top frame 130 is connected to the top of the support bars 300, providing a support for the support bars 300. The entire support structure is stable and can effectively support the wafer 20.

[0053] In this embodiment, the base frame 110 is a rectangular frame structure. The storage compartment assembly 200 is located within the base frame 110, with the two ends of the storage compartment assembly 200 connected to the two opposite ends of the base frame 110. As an example, the base frame 110 can be formed by four frame bars 111 connected end to end to form a rectangular frame structure. The two ends of the storage compartment assembly 200 are respectively connected to two opposite frame bars 111.

[0054] By configuring the base frame 110 as a rectangular frame structure and connecting both ends of the storage compartment assembly 200 to the base frame 110 , the structure of the base frame 110 is more stable and can provide a certain degree of protection for the storage compartment assembly 200 .

[0055] Each support frame 120 includes two support rods 121. The top ends of the two support rods 121 are connected to the top frame 130, and the bottom ends of the two support rods 121 are connected to the bottom frame 110. The two support rods 121 and the bottom frame 110 respectively form a triangular support structure.

[0056] It should be understood that the two support rods 121 of the same support frame 120 can be considered to be in an inverted V shape, and the bottom ends of the two support rods 121 are connected to the two ends of the same frame bar 111, so that the two support rods 121 and the frame bar 111 together form a triangle. In this way, the two support rods 121 and the base frame 110 form a triangular support structure, which makes the overall structure more stable.

[0057] The main frame 100 also includes a connecting rod 140, and each support frame 120 also includes a vertical rod 122. The top of the vertical rod 122 is connected to the connection between the tops of the two support rods 121, and the bottom of the vertical rod 122 is perpendicularly connected to the base frame 110. The ends of the connecting rod 140 are respectively connected to the two vertical rods 122, and the multiple support bars 300 are all connected to the connecting rod 140.

[0058] By setting up the connecting rod 140 and the vertical rod 122, the two vertical rods 122 can further support the top frame 130 and the support rod 121, and the connecting rod 140 is connected to the two vertical rods 122, and multiple support bars 300 are connected to the connecting rod 140, so that the connecting rod 140 can strengthen the support bar 300. Since the support bar 300 extends freely to the bottom end away from the end of the top frame 130 and is relatively long, the connecting rod 140 can make the support bar 300 more stable and less likely to shift, thereby ensuring the support effect of the support bar 300 on the wafer 20.

[0059] In an optional embodiment, the top frame 130 is a long rod-shaped structure, with its two ends connected to the connection points of the two support rods 121, thereby making the overall structure of the main frame 100 more stable. The top frame 130 also provides a carrier for the support bar 300, making the support bar 300 firmly connected.

[0060] The structure of the support bar 300 in this embodiment is described in detail below.

[0061] The top end of each support bar 300 is connected to the main frame 100 , and the bottom end of each support bar 300 is bent to form a support end 310 .

[0062] It should be noted that in this embodiment, each support bar 300 has the same structure, and the top end of each support bar 300 is fixedly connected to the top frame 130. Multiple support bars 300 are sequentially spaced and distributed along the extension direction of the top frame 130, and the multiple support bars 300 are located in the same plane. Optionally, the plane in which the multiple support bars 300 are located can be perpendicular to the bottom frame 110, that is, vertically arranged, or it can be non-perpendicular to the bottom frame 110, and slightly inclined relative to the vertical plane.

[0063] The support end 310 is connected to the support bar 300 to form an L-shaped structure.

[0064] It should be understood that the support end 310 is connected to the end of the support bar 300 away from the top frame 130, and the support end 310 is bent relative to the support bar 300, so that the support end 310 and the support bar 300 form an L-shaped structure, so that the support end 310 can better support the wafer 20. Optionally, the support ends 310 of multiple support bars 300 extend in the same direction, so that when the support ends 310 support the wafers 20, the multiple wafers 20 are separated by the support bars 300 and are not affected by each other.

[0065] The end of the support end 310 away from the support bar 300 is hemispherical.

[0066] By setting the end of the support end 310 away from the support bar 300 to be hemispherical, the support end 310 can better form point contact support with the wafer 20, which is beneficial to reducing the contact area with the wafer 20 and making the wafer 20 less likely to crack.

[0067] The structure of the storage compartment assembly 200 in this embodiment is described in detail below.

[0068] The storage compartment assembly 200 includes two parallel side panels 220 and a plurality of retaining plates 230. The two side panels 220 are connected to the main frame 100 at both ends. The plurality of retaining plates 230 are arranged in parallel, with their ends connected to the two side panels 220. Together, the plurality of retaining plates 230 and the two side panels 220 form a plurality of storage slots 210 arranged in a sequence.

[0069] It should be noted that, in this embodiment, the two side panels 220 are arranged in parallel, and the two ends of the two side panels 220 are respectively connected to the two frame bars 111 opposite to the base frame 110. A plurality of limit plates 230 are arranged in parallel, and are all vertically connected to the two side panels 220. A storage slot 210 is formed between two adjacent limit plates 230 and the two side panels 220. In addition, the limit plates 230 located at both ends may form a storage slot 210 together with the two side panels 220 and the frame bars 111. When the wafer 20 is placed in the storage slot 210, the bottom edge of the wafer 20 may be respectively supported on the two side panels 220. The limit plates 230 can limit the bottom of the wafer 20.

[0070] In other optional embodiments, the storage grid assembly 200 may also include a base plate (not shown), two side plates 220 and multiple limit plates 230 are all connected to the upper surface of the base plate. When the wafer 20 is placed in the storage slot 210, the base plate can be used to support the bottom of the wafer 20.

[0071] Furthermore, in this embodiment, the main frame 100, including the bottom frame 110, two support frames 120, top frame 130, support rods 121, connecting rods 140, support bars 300, support ends 310, and storage compartment assembly 200, is made of nickel. This allows for high-temperature resistance while providing excellent support, making it less likely for wafers 20 to crack.

[0072] See also Figure 3 In other optional embodiments of the present invention, based on the wafer temporary storage rack 10 provided in the above embodiment, the support bar 300 can adopt a telescopic structure. As an example, the support bar 300 includes a first support bar 321 and a second support bar 322. One end of the first support bar 321 is connected to the main frame 100, and the other end is nested with the second support bar 322. The second support bar 322 can be telescopic relative to the first support bar 321, and the support end 310 is formed at the end of the second support bar 322 away from the first support bar 321.

[0073] In this way, the second support bar 322 can be extended and retracted relative to the first support bar 321, and can be fixed by fasteners and other structures after being extended and retracted to a suitable position, thereby adjusting the position of the support end 310 in the height direction, and realizing the position adjustment of the support point of the support end 310 for the wafer 20, which can adapt to the storage of wafers 20 of different sizes and ensure the support effect.

[0074] In summary, the wafer temporary storage rack 10 provided in this embodiment can not only realize the temporary storage of the wafer 20, avoiding the wafer 20 being placed directly on the machine during temporary storage, avoiding the wafer 20 from contacting the machine, and not causing excessive temperature difference due to contact with the machine to cause cracking; it can also greatly reduce the contact area between the wafer temporary storage rack 10 and the wafer 20, further preventing the wafer 20 from cracking due to large temperature difference.

[0075] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A wafer temporary storage rack, characterized in that: It comprises a main frame (100), a storage compartment assembly (200) and a plurality of support bars (300); The storage grid assembly (200) is connected to the bottom of the main frame (100), and the storage grid assembly (200) has a plurality of storage slots (210), and the plurality of storage slots (210) are all used to support the bottom of the wafer (20); The plurality of support bars (300) are connected to the main frame (100), and the plurality of support bars (300) correspond one-to-one to the plurality of storage slots (210). Each of the support bars (300) is provided with a support end (310), and the support end (310) is used to form point contact support for the side wall surface of the wafer (20) when the bottom of the wafer (20) is supported on the storage slot (210).

2. The wafer temporary storage rack according to claim 1, characterized in that: The top end of each support bar (300) is connected to the main frame (100), and the bottom end of each support bar (300) is bent to form the support end (310).

3. The wafer temporary storage rack according to claim 2, characterized in that: The support end (310) is connected to the support bar (300) to form an L-shaped structure.

4. The wafer temporary storage rack according to claim 3, characterized in that: An end of the support end (310) away from the support bar (300) is hemispherical.

5. The wafer temporary storage rack according to claim 1, characterized in that: The storage compartment assembly (200) includes two side panels (220) arranged in parallel and a plurality of limiting panels (230); Both ends of the two side panels (220) are respectively connected to the main frame (100); The plurality of limiting plates (230) are arranged in parallel, and the two ends of the plurality of limiting plates (230) are respectively connected to the two side plates (220), and the plurality of limiting plates (230) and the two side plates (220) together enclose a plurality of storage slots (210) arranged in sequence.

6. The wafer temporary storage rack according to claim 1, characterized in that: The main frame (100) comprises a bottom frame (110), two support frames (120) and a top frame (130); The two support frames (120) are arranged opposite to each other, the top ends of the two support frames (120) are respectively connected to the two ends of the top frame (130), and the bottom ends of the two support frames (120) are respectively connected to the two ends of the bottom frame (110); The top end of each support bar (300) is connected to the top frame (130); The storage compartment assembly (200) is connected to the base frame (110).

7. The wafer temporary storage rack according to claim 6, characterized in that: The base frame (110) is a rectangular frame structure, the storage compartment assembly (200) is located in the base frame (110), and two ends of the storage compartment assembly (200) are respectively connected to two opposite ends of the base frame (110).

8. The wafer temporary storage rack according to claim 6, characterized in that: Each of the support frames (120) includes two support rods (121); The top ends of the two support rods (121) are connected to the top frame (130), and the bottom ends of the two support rods (121) are connected to the bottom frame (110). The two support rods (121) and the bottom frame (110) respectively form a triangular support structure.

9. The wafer temporary storage rack according to claim 8, characterized in that: The main frame (100) further includes a connecting rod (140), and each of the support frames (120) further includes a vertical rod (122); The top end of the vertical rod (122) is connected to the connection point of the top ends of the two support rods (121), and the bottom end of the vertical rod (122) is vertically connected to the base frame (110); Both ends of the connecting rod (140) are respectively connected to the two vertical rods (122), and the plurality of support bars (300) are all connected to the connecting rod (140).

10. The wafer temporary storage rack according to claim 1, characterized in that: The support bar (300) includes a first support bar (321) and a second support bar (322); One end of the first support bar (321) is connected to the main frame (100), and the other end is nested with the second support bar (322); The second support bar (322) is retractable relative to the first support bar (321), and the support end (310) is formed at an end of the second support bar (322) away from the first support bar (321).

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