Omnibearing probe spray-washing device

Abstract

The utility model discloses an omni-directional probe spray-washing device in the field of semiconductors, which comprises a spray-washing box body, the front side of the spray-washing box body is rotatably connected with a visual window capable of being opened or closed through a plurality of hinges, a turntable seat is arranged in the spray-washing box body, the turntable seat is rotatably connected with an electric turntable, the electric turntable is horizontally arranged, and the electric turntable is connected with a probe. A vertical electric reciprocating push rod is arranged on the bottom wall in the spray washing box body, the rotating disc seat is arranged at the working end of the electric reciprocating push rod, and a left atomization spray head and a rear atomization spray head are arranged at the positions, corresponding to the left side and the rear side of the electric rotating disc, in the spray washing box body respectively. According to the utility model, the probe can be sprayed and washed in all directions, and foreign matters needing to be removed can be better cleaned.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductors, and in particular relates to an omnidirectional probe spray cleaning device. Background Art

[0002] The MEMS probe is an advanced testing tool based on microelectromechanical systems (MEMS) technology. As a test element, MEMS probes are typically cleaned with chemicals in traditional manufacturing processes. Due to their tiny size, multiple probes are typically connected in parallel for ease of cleaning. Currently, this is primarily done manually with a brush after adding chemicals. Manual cleaning is often time-consuming and results vary. Another method involves ultrasonic vibration cleaning, employing multiple cycles, extended periods, and high frequencies. However, this significantly impacts probe straightness and cannot completely remove residue from the probe's sides and aperture, impacting subsequent processing quality.

[0003] In response to the above problems, the utility model classifies and summarizes the probe cleaning methods, conducts multiple tests, and applies physical spray cleaning technology to the field of MEMS probe cleaning, thereby effectively removing residues in narrow parts of the probe, greatly improving product yield and process stability. Utility Model Content

[0004] The purpose of the utility model is to provide an all-round probe spray cleaning device to solve the problems in the above-mentioned background technology, to achieve all-round spray cleaning of the probe, and to better clean the foreign matter that needs to be removed.

[0005] The purpose of the present utility model is achieved as follows: a full-scale probe spraying device, characterized in that it includes a spray box body, the front side of the spray box body is connected to a visual window that can be opened or closed through a plurality of hinges, a turntable seat is provided in the spray box body, and an electric turntable is rotatably connected to the turntable seat, the electric turntable is arranged horizontally, and a vertical electric reciprocating push rod is provided on the bottom wall of the spray box body, the turntable seat is arranged at the working end of the electric reciprocating push rod, and a left atomizing nozzle and a rear atomizing nozzle are respectively provided on the left and rear sides of the spray box body corresponding to the electric turntable.

[0006] As a further improvement of the present invention, the viewing window is arranged at an angle, the viewing window is rectangular, an anti-fogging film is provided on the viewing window, a plurality of hinges spaced along the length direction are provided on the upper part of the spray box body, the rotating end of the hinge is connected to the viewing window, and a lock is provided on the left edge, lower edge and right edge of the spray box body corresponding to the viewing window.

[0007] As a further improvement of the present invention, the spray box body is made of PVDF material.

[0008] As a further improvement of the present invention, the outer side of the spray box body is provided with an electric reciprocating rod speed regulator and an electric turntable speed regulator corresponding to the electric reciprocating push rod and the electric turntable, and a plurality of fixed slots are provided on the electric turntable.

[0009] As a further improvement of the present invention, a drainage hole is provided at the lower portion of the right side of the spray box body, and an exhaust hole is provided at the upper portion of the rear side of the spray box body.

[0010] As a further improvement to the present invention, the left atomizing nozzle is connected to the left air inlet and left liquid inlet on the left side of the spray tank body via two pipes, and the rear atomizing nozzle is connected to the rear air inlet and rear liquid inlet on the rear side of the spray tank body via two pipes. The left and rear atomizing nozzles are reinforced by reinforcement rods within the tank body, allowing them to be suspended in the air.

[0011] The spray box body of this utility model is mainly made of PVDF, which has high acid and alkali resistance and is used to prevent corrosion from the sprayed detergent; the visual window is convenient for observing the spraying status, and the visual window is affixed with an anti-fogging film to prevent the misting after spraying from causing blurred vision; the hinge is convenient for opening and closing the visual window; the lock is used to lock the visual window when the visual window is closed to prevent the odor of the odorous detergent from escaping along the edge gap; the left air inlet is the inlet end of the compressed air pipeline, and the pipeline is connected to the left atomizing nozzle; the left liquid inlet is the inlet end of the pure water, and is connected to the left atomizing nozzle; the rear air inlet is the inlet end of the compressed air pipeline, and the pipeline is connected to the rear atomizing nozzle; the rear liquid inlet is: The detergent liquid inlet end is connected to the atomizing nozzle; the required spray product is fastened with a specific fastening bracket and placed in the fixed slot: fixed on the electric turntable to support the fastening bracket; electric turntable: after the speed is set by the electric turntable speed regulator, it can rotate 360°, thereby driving the product to be sprayed to move in a uniform circular motion; electric reciprocating rod: after the speed is set by the electric reciprocating rod speed regulator, it can move back and forth at a uniform speed up and down. The electric turntable is connected to the electric reciprocating rod through a connecting piece. When the electric reciprocating rod moves back and forth up and down, the electric turntable will also move back and forth up and down. The combination of the two can achieve all-round spraying of the product to be sprayed during the spraying process, without dead angles, and with good uniformity.

[0012] Compared with the existing technology, the beneficial effect of the present invention is that: the present invention uses purified compressed air to flow at high speed in the atomizing nozzle to form a negative pressure to produce an induced effect, and the lotion and pure water are sucked into the atomizing nozzle through the hose, and then the compressed air flow is sprayed from the nozzle at high speed onto the required spray probe material. Combined with the rotation of the electric turntable and the electric reciprocating rod, all-round spraying is achieved, and the foreign matter that needs to be removed is better cleaned. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model.

[0014] Figure 2 It is a front view structural schematic diagram of the present utility model.

[0015] Figure 3 It is a side structural schematic diagram of the utility model.

[0016] Figure 4 It is a schematic diagram of the top structure of the utility model.

[0017] Among them, 1. Spray box body; 2. Visual window; 3. Hinge; 4. Lock; 5. Left air inlet; 6. Left liquid inlet; 7. Rear air inlet; 8. Rear liquid inlet; 9. Exhaust hole; 10. Drain hole; 11. Left atomizing nozzle; 12. Rear atomizing nozzle; 13. Electric reciprocating push rod; 14. Electric reciprocating rod speed regulator; 15. Electric turntable; 16. Electric turntable speed regulator; 17. Fixed slot; 18. Turntable seat. DETAILED DESCRIPTION

[0018] like Figure 1-4 As shown, a full-range probe spraying device includes a spray box body 1, which is made of PVDF; the front side of the spray box body 1 is connected to a viewing window 2 that can be opened or closed by rotating through a plurality of hinges 3, the viewing window 2 is tilted, the viewing window 2 is rectangular, and an anti-fogging film is provided on the viewing window 2. The upper part of the spray box body 1 is provided with a plurality of hinges 3 spaced along the length direction, the rotating end of the hinge 3 is connected to the viewing window 2, and the left edge of the spray box body 1 corresponding to the viewing window 2 , the lower edge and the right edge are each provided with a lock 4; a turntable seat 18 is provided in the spray box body 1, and the turntable seat 18 is rotatably connected to the electric turntable 15, the electric turntable 15 is arranged horizontally, and a vertical electric reciprocating push rod 13 is arranged on the bottom wall inside the spray box body 1, and the turntable seat 18 is arranged at the working end of the electric reciprocating push rod 13. The left atomizing nozzle 11 and the rear atomizing nozzle 12 are respectively provided on the left and rear sides of the spray box body 1 corresponding to the electric turntable 15.

[0019] The outer side of the spray box body 1 is provided with an electric reciprocating rod speed regulator 14 and an electric turntable speed regulator 16 corresponding to the electric reciprocating push rod 13 and the electric turntable 15 respectively, and a plurality of fixed slots 17 are opened on the electric turntable.

[0020] The left atomizing nozzle 11 is connected to the left air inlet 5 and left liquid inlet 6 on the left side of the spray tank body 1 via two pipes. The rear atomizing nozzle 12 is connected to the rear air inlet 7 and rear liquid inlet 8 on the rear side of the spray tank body 1 via two pipes. The left and rear atomizing nozzles 12 are reinforced within the body by reinforcement rods, allowing them to be suspended in the air. A drainage hole 10 is provided at the lower right side of the spray tank body 1, and an exhaust hole 9 is provided at the upper rear side of the spray tank body 1.

[0021] The operation steps of the utility model are as follows:

[0022] 1. Install the probe material on a specific hanger and check whether the hanger is clamping the probe material;

[0023] 2. Place the fastened probe material in the fixed slot 17 above the electric turntable, keep it vertical, and check the circuit and the power supply of the electric reciprocating rod;

[0024] 3. Turn on the switches separately and adjust the electric turntable speed regulator 16 to 20-30 r / min and the electric reciprocating rod speed regulator 14 to 10-15 mm / s. After the speed is set by the speed regulator, the electric turntable can rotate 360 ​​degrees at a constant speed, thereby driving the probe material to move in a uniform circular motion; after the speed is set by the speed regulator, the electric reciprocating rod can move up and down at a uniform speed.

[0025] 4. The electric turntable is connected to the electric reciprocating rod through a connector. When the electric reciprocating rod moves up and down, the electric turntable will also move up and down together. The combination of the two can achieve full coverage of the probe material to be cleaned during the spraying process, without dead angles, and with good uniformity;

[0026] 5. Adjust the pressure of the external air inlet valve to 0.3Mpa-0.5Mpa. After adjustment, place the suction hose into the detergent and pure water required for spraying.

[0027] After repeated tests, this spray cleaning device is effective in removing residual foreign matter in the narrow gaps, sides and corners of the probe, providing a guarantee for the quality of subsequent processing, and the overall yield rate is increased by about 15%. It can effectively improve the edge hanging and bad bumps of the probe, and the hanging ratio is reduced from 15% to less than 5%, and the bad bumps are stably controlled within 2%.

[0028] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solutions disclosed in the present invention, technicians in this field can make some substitutions and deformations of some technical features therein according to the disclosed technical content without creative labor, and these substitutions and deformations are all within the protection scope of the present invention.

Claims

1. A full range probe spray cleaning device, characterized in that: It includes a spray box body, the front side of the spray box body is connected to a viewing window that can be opened or closed through a number of hinges, a turntable seat is provided in the spray box body, and an electric turntable is rotatably connected to the turntable seat. The electric turntable is arranged horizontally, and a vertical electric reciprocating push rod is arranged on the bottom wall inside the spray box body, and the turntable seat is arranged at the working end of the electric reciprocating push rod. A left atomizing nozzle and a rear atomizing nozzle are respectively provided on the left and rear sides of the spray box body corresponding to the electric turntable.

2. The omnidirectional probe spray cleaning device according to claim 1, characterized in that: The viewing window is arranged at an angle, is rectangular, and is provided with an anti-fogging film. A plurality of hinges spaced apart along the length direction are provided on the upper part of the spray box body, and the rotating ends of the hinges are connected to the viewing window. A lock is provided on the left edge, lower edge and right edge of the spray box body corresponding to the viewing window.

3. An all-round probe spray cleaning device according to claim 1 or 2, characterized in that: The spray box body is made of PVDF material.

4. An omnidirectional probe spray cleaning device according to claim 1 or 2, characterized in that: The outer sides of the spray box body are respectively provided with an electric reciprocating rod speed regulator and an electric turntable speed regulator corresponding to the electric reciprocating push rod and the electric turntable, and a plurality of fixed card slots are opened on the electric turntable.

5. An omnidirectional probe spray cleaning device according to claim 1 or 2, characterized in that: A drainage hole is provided at the lower portion of the right side of the spray box body, and an exhaust hole is provided at the upper portion of the rear side of the spray box body.

6. An all-round probe spray cleaning device according to claim 1 or 2, characterized in that: The left atomizing nozzle is connected to the left air inlet and the left liquid inlet on the left side of the spray box body through two pipes, and the rear atomizing nozzle is connected to the rear air inlet and the rear liquid inlet on the rear side of the spray box body through two pipes.

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