Auxiliary tool for concentricity machining of special-shaped target material

Abstract

The utility model belongs to the technical field of clamps, and discloses an auxiliary tool for concentricity machining of a special-shaped target material, and the special-shaped target material comprises a target material back plate, a target material target blank and a cooling piece, the auxiliary tool comprises a main body and a first fastening piece, the main body comprises a first carrying surface, a containing groove and the first fastening piece, the first carrying surface carries a target material and a target blank so as to carry a special-shaped target material, the containing groove is formed in the first carrying surface and used for containing a cooling piece, the inner contour of the containing groove is matched with the outer contour of the cooling piece, and a first connecting hole is formed in the groove bottom face of the containing groove; the cooling piece is provided with a first through hole capable of being communicated with the first connecting hole, and the first fastening piece penetrates through the first through hole to be fixedly connected with the first connecting hole, so that the auxiliary tool can well clamp the special-shaped target material, and then a lathe can be used for carrying out concentricity machining on the special-shaped target material when the special-shaped target material is manufactured or a target blank of the target material is replaced.

Description

Technical Field

[0001] The utility model relates to the technical field of concentricity processing tooling, in particular to an auxiliary tooling for concentricity processing of special-shaped target materials. Background Art

[0002] During the wafer processing process, physical vapor deposition (PVD) technology is required to coat the wafer surface. Therefore, PVD equipment is an important equipment in wafer processing. PVD equipment mainly uses ions or atoms to bombard the target material, sputtering atoms or molecules onto the wafer to form a film layer. However, the bombardment of the target material by ions or atoms can easily cause continuous wear or corrosion of the target material, making the target material unable to meet the needs. Therefore, the entire target material needs to be replaced regularly, which is costly. In addition, when ions or atoms bombard the target material, a large amount of heat is easily generated, causing the target material temperature to rise. When the target material temperature is too high, it is easy to affect the coating quality.

[0003] In related technologies, such as Figures 1 to 2 As shown, in order to solve the above problems, a new target material is provided, which includes a target backing plate 101, a target blank 102 and a cooling member 103. The target blank 102 is fixed to the first surface 1011 of the target backing plate 101, and the cooling member 103 is fixed to the second surface 1012 of the target backing plate 101, and the second surface 1012 is arranged opposite to the first surface 1011. The cooling member 103 can be connected to an external liquid cooling system to achieve cooling of the target backing plate 101 and the target blank 102, thereby preventing the target blank 102 from affecting the coating quality due to excessive temperature. In addition, when the target blank 102 is worn and consumed during the ion or atom bombardment process, it is only necessary to fix another target blank 102 of the required size to the target backing plate 101, without replacing the entire target material or reconnecting the cooling member 103 and the target backing plate 101, thereby shortening working time and improving efficiency.

[0004] Due to the provision of the cooling element 103, the target material as a whole is shaped differently than the usual disc shape. This makes it impossible for existing processing tools to directly clamp the target material for roundness processing. Instead, the circular target backing plate 101 and the circular target blank 102 are concentrically welded. However, the concentricity tolerance level of the target backing plate 101 and the target blank 102 formed by concentric welding still cannot meet the required level. In addition, when the target blank 102 is worn and needs to be replaced, the new target blank 102 needs to be welded to the target backing plate 101. However, due to the limitations of electric welding accuracy, it is difficult to ensure the concentricity of the two disc-like components during the concentric welding process.

[0005] Therefore, there is an urgent need for an auxiliary tooling for concentricity processing of special-shaped targets to solve the above problems. Utility Model Content

[0006] The purpose of the utility model is to provide an auxiliary tooling for concentricity processing of special-shaped target materials, which is used for fixing the special-shaped target materials so as to facilitate concentricity processing of the special-shaped target materials.

[0007] To achieve this purpose, the present invention adopts the following technical solutions:

[0008] An auxiliary tooling for concentricity processing of a special-shaped target material, wherein the special-shaped target material comprises a target material backing plate, a target material embryo and a cooling member, wherein the target material embryo is fixedly connected to the first surface of the target material backing plate, and the cooling member is fixedly connected to the second surface of the target material backing plate, and the second surface is arranged opposite to the first surface. The auxiliary tooling comprises:

[0009] The main body includes a first carrying surface and a receiving groove formed in the first carrying surface, wherein the first carrying surface is used to carry the second surface; the receiving groove is used to receive the cooling element, the inner contour of the receiving groove is adapted to the outer contour of the cooling element, the bottom surface of the receiving groove has a first connecting hole, and the cooling element has a first through hole capable of communicating with the first connecting hole;

[0010] The first fastener passes through the first through hole and is fixedly connected to the first connecting hole to fasten the cooling member to the main body.

[0011] Optionally, the first carrying surface has a first positioning structure, and the second surface is provided with a second positioning structure that cooperates with the first positioning structure.

[0012] Optionally, the first positioning structure is a positioning hole, and the second positioning structure is a positioning protrusion matched with the positioning hole; or

[0013] The first positioning structure is a positioning protrusion, and the second positioning structure is a positioning hole matched with the positioning protrusion.

[0014] Optionally, the subject also includes:

[0015] A second carrying surface is provided opposite to the first carrying surface, the second carrying surface further having a countersunk hole provided concentrically with the first positioning structure, and the second surface further having a second connecting hole provided concentrically with the second positioning structure;

[0016] The second fastener can pass through the countersunk hole and the first positioning structure to be threadedly connected, so that the main body and the special-shaped target material are fixedly connected together.

[0017] Optionally, the main body is a cylinder with a notch, the notch forms a receiving groove, and the end surface of the cylinder forms the first loading surface.

[0018] Optionally, the number of the first positioning structures is at least three, and the at least three first positioning structures are arranged at intervals on a circumference centered on the central axis of the main body, and the number of the second positioning structures is the same as the number of the first positioning structures and is arranged in a one-to-one correspondence.

[0019] Optionally, the cooling member also includes a first fixing plate, which is fixed on the second surface; the accommodating groove includes a first accommodating portion opened on the first loading surface, the first accommodating portion is used to accommodate the first fixing plate, and the depth of the first accommodating portion is not less than the height of the first fixing plate protruding from the second surface.

[0020] Optionally, the cooling member also includes a second fixed plate connected to the first fixed plate at an angle, the second fixed plate is opened on the outer peripheral side wall of the main body, and the accommodating groove also includes a second accommodating portion connected to the first accommodating portion. When the special-shaped target material is installed on the main body, the bottom surface of the groove of the second accommodating portion is in contact with the second fixed plate.

[0021] Optionally, the cooling member further comprises a cooling pipeline mounted on the second fixing plate;

[0022] The first connecting hole is opened on the bottom surface of the groove of the second accommodating portion and is arranged away from the cooling pipeline. The first through hole is opened on the second fixing plate.

[0023] Optionally, the number of the first connection holes is at least four, and the number of the first through holes is the same as the number of the first connection holes and is arranged in a one-to-one correspondence.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows: the auxiliary tooling includes a main body and a first fastener, the main body includes a first carrying surface, a receiving groove and a first fastener, the first carrying surface carries the target material target embryo of the special-shaped target material, the receiving groove is opened on the first carrying surface and is used to accommodate the cooling part of the special-shaped target material, the inner contour of the receiving groove is adapted to the outer contour of the cooling part, the bottom surface of the receiving groove has a first connecting hole, the cooling part of the special-shaped target material has a first through hole that can be connected to the first connecting hole, the first fastener passes through the first through hole and is fixedly connected to the first connecting hole, so that the auxiliary tooling can clamp the special-shaped target material well, and then when making the special-shaped target material or replacing the target material target embryo, the special-shaped target material can be concentrically processed using a lathe. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic structural diagram of a special-shaped target material applicable to the auxiliary tooling provided in an embodiment of the present utility model;

[0026] Figure 2 This is an exploded schematic diagram of a special-shaped target material applicable to the auxiliary tooling provided in an embodiment of the present utility model;

[0027] Figure 3 It is a structural schematic diagram of the auxiliary tooling provided by an embodiment of the utility model;

[0028] Figure 4 yes Figure 3 Schematic diagram of the cross-section structure of the auxiliary tooling;

[0029] Figure 5 It is a schematic diagram of the exploded structure of the auxiliary tooling and the special-shaped target material provided by the embodiment of the utility model.

[0030] In the picture:

[0031] 100. Special-shaped targets;

[0032] 101. Target material back plate; 1011. First surface; 1012. Second surface; 1013. Second positioning structure; 1014. Second connecting hole.

[0033] 102. Target material and target embryo;

[0034] 103, cooling element; 1031, first through hole; 1032, first fixing plate; 1033, second fixing plate; 1034, cooling pipeline;

[0035] 1. First loading surface; 11. First positioning structure;

[0036] 2. Accommodation slot; 21. First connecting hole; 22. First accommodation portion; 23. Second accommodation portion;

[0037] 3. Peripheral sidewall;

[0038] 4. Second loading surface; 41. Countersunk hole;

[0039] 5. First fastener. DETAILED DESCRIPTION

[0040] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0041] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0042] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0043] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0044] Figure 1 The following is a schematic diagram showing the structure of a special-shaped target material suitable for the auxiliary tooling provided in an embodiment of the utility model. Figure 2 The figure shows the exploded schematic diagram of the special-shaped target material to which the auxiliary tooling provided by the present invention is applicable. Figures 1 to 2 As shown, the special-shaped target 100 includes a target backing plate 101, a target embryo 102, and a cooling element 103. The target backing plate 101 includes a first surface 1011 and a second surface 1012 disposed opposite each other. The target embryo 102 is fixedly connected to the first surface 1011. The cooling element 103 includes a first fixing plate 1032, a second fixing plate 1033, and a cooling pipe 1034. The first fixing plate 1032 is fixed to the second surface 1012, and the second fixing plate 1033 is connected to the first fixing plate 1032 at an angle. The cooling pipe 1034 is installed on the second fixing plate 1033 and is used to connect to an external liquid cooling system, thereby achieving cooling of the target backing plate 101 and the target embryo 102 when the target temperature rises. Due to the provision of the cooling element 103, the special-shaped target 100 is not disc-shaped as a whole, which is inconvenient to clamp.

[0045] In order to facilitate the concentricity processing of the above-mentioned special-shaped target material 100, the present application provides an auxiliary tooling to fix the special-shaped target material 100 to achieve the concentricity processing of the special-shaped target material 100, and at the same time facilitate the special-shaped target material 100 to ensure the concentricity of the target material target embryo 102 and the target material backing plate 101 after replacing the target material target embryo 102.

[0046] Figure 3The following is a schematic diagram showing the structure of the auxiliary tooling provided by the present invention. Figure 4 Shown Figure 3 The cross-sectional diagram of the auxiliary tooling. Figures 3 and 4 As shown, the auxiliary tooling includes a main body, which includes a first carrier surface 1 for supporting the second surface 1012 of the special-shaped target 100. In order to accommodate the cooling member 103 of the special-shaped target 100, the main body also includes a receiving groove 2 opened on the first carrier surface 1 and used to accommodate the cooling member 103.

[0047] In order to completely accommodate the cooling element 103 in the receiving groove 2 without spatial interference, the inner contour of the receiving groove 2 is adapted to the outer contour of the cooling element 103. Figures 3 and 4 As shown, the accommodating groove 2 also includes a first accommodating portion 22, which is opened on the first carrier surface 1 and is used to accommodate the first fixing plate 1032, wherein the depth of the first accommodating portion 22 is not less than the height of the first fixing plate 1032 protruding from the second surface 1012 to prevent the first accommodating portion 22 from protruding from the first carrier surface 1, causing the first carrier surface 1 to be unable to support the second surface 1012.

[0048] Furthermore, the cooling member 103 also includes a second fixing plate 1033 connected to the first fixing plate 1032 at an angle and opened on the outer peripheral side wall 3 of the main body. The accommodating groove 2 also includes a second accommodating portion 23 connected to the first accommodating portion 22. When the special-shaped target material 100 is installed on the main body, the bottom surface of the groove of the second accommodating portion 23 is in contact with the second fixing plate 1033, so that the first loading surface 1 is used as the first support surface and the bottom surface of the groove of the second accommodating portion 23 is used as the second support surface, thereby ensuring the stability of the main body in clamping the special-shaped target material 100.

[0049] Continue as Figures 3 and 4 As shown, in order to prevent the cooling member 103 from being broken due to stress concentration between the first fixing plate 1032 and the second fixing plate 1033 fixed at an angle, the angle between the first fixing plate 1032 and the second fixing plate 1033 is an arc transition, and the angle between the first accommodating portion 22 and the second accommodating portion 23 is also an arc transition, and is adapted to the arc transition angle between the first fixing plate 1032 and the second fixing plate 1033, thereby preventing scratches between the accommodating groove 2 and the cooling member 103 when the special-shaped target material 100 is fixed to the main body, thereby causing damage to the cooling member 103.

[0050] Although the receiving groove 2 can accommodate the cooling member 103, when the special-shaped target 100 is subjected to concentricity processing, the cutting force will cause the special-shaped target 100 to be displaced relative to the main body, making it impossible to determine the center of the special-shaped target 100 and thus complete the concentricity processing.

[0051] Figure 5The figure shows the exploded structure diagram of the special-shaped target material 100 and the auxiliary tooling provided by the embodiment of the utility model. Figure 3-Figure 5 As shown, a first connecting hole 21 is provided on the bottom surface of the groove of the second accommodating portion 23, which is arranged to avoid the cooling pipe 1034. When the first carrier surface 1 carries the second surface 1012, a first through hole 1031 corresponding to and connected to the first connecting hole 21 is provided on the second fixing plate 1033. The first fastener 5 can pass through the first through hole 1031 and the first connecting hole 21 to achieve a fixed connection between the first through hole 1031 and the first connecting hole 21, so as to fasten the cooling member 103 to the main body, so that the first fastener 5 can be inserted into the first through hole 1031 from the outside without interfering with the cooling pipe 1034.

[0052] Specifically, the number of the first connection holes 21 is at least four, and the number of the first through holes 1031 is the same as the number of the first connection holes 21 and is arranged in a one-to-one correspondence, thereby facilitating locking of the main body and the special-shaped target 100 .

[0053] Concentricity refers to the positional relationship between a point element (such as an axis or a circle center) in the diameter direction of a rotating body and a reference center element. Concentricity processing must have a processing reference so that the lathe can be used to perform coaxial processing on the special-shaped target 100. Figure 3-4 As shown, the first carrier surface 1 has a first positioning structure 11, and the second surface 1012 of the target backing plate 101 has a second positioning structure 1013 that is positioned and matched with the first positioning structure 11. The first positioning structure 11 and the second positioning structure 1013 are positioned together to determine the position of the target backing plate 101 relative to the main body, and then the target backing plate 101 and the target embryo 102 fixed together are subjected to trial cutting processing to obtain the spatial position of the center axis of the target backing plate 101 relative to the main body, and finally the spatial position of the processing reference (the center axis of the target backing plate 101) is obtained. Only after the spatial position of the processing reference is known, can the centrality of the target embryo 102 relative to the center axis of the target backing plate 101 be ensured when cutting the target embryo 102.

[0054] like Figures 4 and 5As shown, the main body is a cylinder with a notch, and the notch forms a receiving groove 2. The end face of the cylinder forms a first carrying surface 1, thereby ensuring that when the first carrying surface 1 carries the second surface 1012, the central axis of the main body coincides with the axis of the target material backing plate 101. When the three-jaw chuck of the lathe clamps the main body, the self-centering function of the three-jaw chuck is utilized to ensure that the axis of the three-jaw chuck coincides with the central axis of the main body, and the spatial position of the axis of the three-jaw chuck is fixed and unchanged, so that when the three-jaw chuck clamps the main body, the spatial position of the central axis of the main body can be quickly determined, and thus there is no need to adjust the spatial position of the main body when installing the main body to the main shaft of the lathe, ensuring that the central axis of the main body coincides with the axis of the lathe main shaft, and ultimately improving the efficiency of the centrality processing.

[0055] Furthermore, the three first positioning mechanisms 11 are arranged at intervals on a circle centered on the central axis of the main body, and the number of the second positioning structures 1013 is the same as the number of the first positioning structures 11 and is arranged one-to-one, so that the center axis of the main body is determined by three points to ensure that the axis of the target backing plate 101 coincides with the axis of the target backing plate 101. As long as the special-shaped target 100 can be placed normally on the main body, it can be determined that the central axis of the main body coincides with the axis of the target backing plate 101, and the spatial position of the central axis of the main body is determined when the main body is installed on the lathe spindle, so the spatial position of the axis of the target backing plate 101 can be quickly determined, without the need to test-cut the target backing plate 101 as there is only one first positioning mechanism 11. In other embodiments, the first carrier surface 1 may have any number of three or more first positioning structures 11, such as four positioning mechanisms, five positioning mechanisms, or six positioning mechanisms. As long as the number of second positioning structures 1013 is the same as the number of first positioning structures 11 and they are arranged one-to-one, it can be ensured that the central axis of the main body coincides with the axis of the target material backing plate 101, and no limitation is imposed here.

[0056] For example, the first positioning structure 11 can be a positioning hole, and the second positioning structure 1013 can be a positioning protrusion. The positioning hole and the positioning protrusion cooperate with each other to determine the relative position of the target material backing plate 101 relative to the main body, thereby facilitating the concentricity processing of the special-shaped target material 100. Of course, in other embodiments, the first positioning structure 11 can be a positioning protrusion, and the second positioning structure 1013 can be a positioning hole. As long as the first positioning structure 11 and the second positioning structure 1013 can cooperate with each other to determine the relative position of the target material backing plate 101 relative to the main body, there is no limitation here.

[0057] Continue as Figures 4 and 5As shown, the main body also has a second carrying surface 4 and a second fastener (not shown in the figure) arranged opposite to the first carrying surface 1, and the second carrying surface 4 is also provided with a countersunk hole 41 arranged concentrically with the first positioning structure 11, and the second surface 1012 is also provided with a second connecting hole 1014 arranged concentrically with the second positioning structure 1013. The second fastener can pass through the countersunk hole 41, the first positioning structure 11, the second positioning structure 1013 and the second connecting hole 1014 and be threadedly connected, so that the main body and the special-shaped target material 100 are fixedly connected together, further improving the stability of the auxiliary tooling in clamping the special-shaped target material 100.

[0058] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. An auxiliary tooling for concentricity processing of a special-shaped target material, wherein the special-shaped target material (100) comprises a target material backing plate (101), a target material embryo (102) and a cooling member (103), wherein the target material embryo (102) is fixedly connected to a first surface (1011) of the target material backing plate (101), and the cooling member (103) is fixedly connected to a second surface (1012) of the target material backing plate (101), and the second surface (1012) is arranged opposite to the first surface (1011), characterized in that: The auxiliary tooling includes: A main body comprises a first carrying surface (1) and a receiving groove (2) provided on the first carrying surface (1), wherein the first carrying surface (1) is used to carry the second surface (1012); the receiving groove (2) is used to accommodate the cooling member (103), the inner contour of the receiving groove (2) is adapted to the outer contour of the cooling member (103), the bottom surface of the receiving groove (2) has a first connecting hole (21), and the cooling member (103) has a first through hole (1031) capable of communicating with the first connecting hole (21); A first fastener (5), the first fastener (5) passes through the first through hole (1031) and is fixedly connected to the first connecting hole (21) to fasten the cooling member (103) to the main body.

2. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 1, characterized in that: The first carrier surface (1) has a first positioning structure (11), and the second surface (1012) is provided with a second positioning structure (1013) that is positioned and matched with the first positioning structure (11).

3. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 2, characterized in that: The first positioning structure (11) is a positioning hole, and the second positioning structure (1013) is a positioning protrusion that matches the positioning hole; or The first positioning structure (11) is a positioning protrusion, and the second positioning structure (1013) is a positioning hole that matches the positioning protrusion.

4. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 3, characterized in that: The subject also includes: a second carrying surface (4) disposed opposite to the first carrying surface (1), the second carrying surface (4) further comprising a countersunk hole (41) disposed concentrically with the first positioning structure (11), and the second surface (1012) further comprising a second connecting hole (1014) disposed concentrically with the second positioning structure (1013); A second fastener is capable of passing through the countersunk hole (41), the first positioning structure (11), the second positioning structure (1013) and being threadedly connected to the second connecting hole (1014), so as to fix the main body and the special-shaped target material (100) together.

5. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 2, characterized in that: The main body is a cylinder with a notch, the notch forms the accommodating groove (2), and the end surface of the cylinder forms the first carrying surface (1).

6. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 5, characterized in that: The number of the first positioning structures (11) is at least three, and the at least three first positioning structures (11) are arranged at intervals on a circumference centered on the central axis of the main body. The number of the second positioning structures (1013) is the same as the number of the first positioning structures (11) and is arranged in a one-to-one correspondence.

7. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 1, characterized in that: The cooling member (103) further includes a first fixing plate (1032), which is fixed on the second surface (1012); the accommodating groove (2) includes a first accommodating portion (22) opened on the first carrier surface (1), and the first accommodating portion (22) is used to accommodate the first fixing plate (1032), and the depth of the first accommodating portion (22) is not less than the height of the first fixing plate (1032) protruding from the second surface (1012).

8. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 7, characterized in that: The cooling member (103) further includes a second fixing plate (1033) connected to the first fixing plate (1032) at an angle, and the second fixing plate (1033) is provided on the outer peripheral side wall (3) of the main body. The accommodating groove (2) further includes a second accommodating portion (23) connected to the first accommodating portion (22). When the special-shaped target material is installed on the main body, the bottom surface of the groove of the second accommodating portion (23) is in contact with the second fixing plate (1033).

9. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 8, characterized in that: The cooling element (103) further includes a cooling pipeline (1034) installed on the second fixing plate (1033); The first connecting hole (21) is provided on the bottom surface of the groove of the second accommodating portion (23) and is arranged to avoid the cooling pipeline (1034); the first through hole (1031) is provided on the second fixing plate (1033).

10. The auxiliary tooling for concentricity processing of special-shaped targets according to claim 9, characterized in that: The number of the first connection holes (21) is at least four, and the number of the first through holes (1031) is the same as the number of the first connection holes (21) and is arranged in a one-to-one correspondence.

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