Glass core substrate FOUP carrying box

Abstract

The utility model relates to the technical field of glass core substrate production, in particular to a glass core substrate FOUP carrying box. The device comprises a box body, a cover plate and a base plate supporting mechanism, the base plate supporting mechanism is arranged in the box body, the cover plate is detachably connected to an opening in the front end of the box body, the base plate supporting mechanism comprises side edge supporting assemblies and a middle supporting assembly, and the two sides in the box body are each provided with a set of side edge supporting assemblies; a group of middle supporting assemblies are arranged in the middle in the box body, the side edge supporting assemblies and the middle supporting assemblies are of a multi-layer structure, and the side edge supporting assemblies and the middle supporting assemblies on each layer form a three-point contact mode to support the glass core substrate. According to the carrying box, the middle supporting set is additionally arranged, the situation that the middle of a large-size substrate collapses due to the fact that the large-size substrate is too long can be effectively prevented, and the stability of the substrate in the box body and the product quality are improved; a three-point contact mode is adopted among the middle support group, the lateral support group and the substrate, so that the contact area is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of glass core substrate production, in particular to a glass core substrate FOUP carrying box. Background Art

[0002] Glass core substrate cassettes are primarily used to hold, store, and transport glass substrates in semiconductor production. To simplify transportation and minimize the risk of contamination, specialized glass core substrate cassettes are used to handle and store substrates. Currently, common glass core substrate cassettes are primarily suitable for round glass wafers, limited to sizes between 8 and 12 inches.

[0003] Existing glass core substrate cassettes are generally only suitable for 8- to 12-inch round substrates, making it difficult to produce larger, square substrates. The lack of support in the center of the cassette can lead to deformation when the substrate is large. The large contact area between the support rods and the substrate can easily damage the substrate.

[0004] Secondly, the relatively small space inside the substrate cassette and the need to separate multiple substrates make storage and usage inefficient. It's difficult to protect the glass substrate cassette from moisture and static electricity. External static electricity and internal moisture can damage the substrates, affecting their usability. During the cover snap-on process, the top edge of the wafer can get stuck in the gap or edge of the curved storage slot, causing the wafer to crack. Utility Model Content

[0005] The utility model provides a glass core substrate FOUP carrying box, aiming to solve the problems of existing glass core substrate boxes having small space, low storage and use efficiency, and easy damage to substrates.

[0006] The utility model provides a glass core substrate FOUP carrying box, comprising a box body, a cover plate, and a substrate support mechanism, wherein the substrate support mechanism is arranged inside the box body, and the cover plate is detachably connected to the front end opening of the box body, and the substrate support mechanism comprises a side support assembly and a middle support assembly, a group of side support assemblies are arranged at both sides of the box body, and a group of middle support assemblies are arranged at the middle position of the box body, the side support assemblies and the middle support assemblies are a multi-layer structure, and the side support assemblies and the middle support assemblies of each layer form a three-point contact method to support the glass core substrate.

[0007] As a further improvement of the present invention, the side support assembly includes a side fixing column, a side support rod, a sleeve, and an O-ring. The side fixing column is connected in the box body, and multiple side support rods are respectively connected in parallel to the side fixing column. Both ends of the side support rod are connected with a sleeve. One end of the side support rod is connected to the side fixing column at the end through the sleeve. Each side support rod is connected to at least one O-ring, and the glass core substrate is in contact with the O-ring.

[0008] As a further improvement of the present invention, the intermediate support assembly includes an intermediate fixed column, an intermediate support rod, and an O-ring. The intermediate fixed column is connected to the box body, and multiple intermediate support rods are respectively connected to the intermediate fixed column in parallel. Each intermediate support rod is connected to at least one O-ring, and the glass core substrate is in contact with the O-ring.

[0009] As a further improvement of the present invention, a spring sheet group is provided on the cover plate. After the cover plate is docked with the box body, the spring sheet group presses against one end of the glass core substrate.

[0010] As a further improvement of the present invention, the spring sheet group is composed of a plurality of spring sheets arranged in sequence, each spring sheet corresponds to a glass core substrate, the two ends of the spring sheet are connected to the inner wall of the cover plate, the middle part of the spring sheet forms a spring sheet protrusion protruding from the inner wall of the cover plate, and the spring sheet protrusion presses against the glass core substrate.

[0011] As a further improvement of the present invention, the front end of the box body is provided with an inwardly concave deformation cavity, the deformation cavity is provided with a lock bolt, the cover plate is provided with a rotating clip, the end of the rotating clip is provided with a lock head, the cover plate is sealed and connected to the deformation cavity of the box body, and the rotating clip is screwed to insert the lock head into the lock bolt.

[0012] As a further improvement of the present invention, the glass core substrate FOUP carrying box also includes a crane transport connecting block, which is installed on the top of the box body. The crane transport connecting block is provided with a fool-proof triangular notch, and the crane transport connecting block is docked with the crane.

[0013] As a further improvement of the present invention, the glass core substrate FOUP carrying box further includes a bottom fixing plate connected to the bottom of the box body, and the bottom fixing plate is provided with a positioning hole docking with the positioning pin of the AGV.

[0014] As a further improvement of the present invention, the glass core substrate FOUP carrying box further includes handles connected to both sides of the box body.

[0015] As a further improvement of the present invention, the glass core substrate FOUP carrying box further includes an RFID card. A card slot is provided on the outer wall of the box, and the RFID card is connected to the card slot.

[0016] The beneficial effects of the utility model are:

[0017] (1) For the production of square glass core substrates, it can be applied to larger-sized square substrates, making it more convenient for the automated production of larger-sized substrates and improving the productivity and applicability of larger-sized square glass substrates;

[0018] (2) As the substrate size increases, the number of chips that can be produced increases, and at the same time, the production and processing efficiency can be effectively improved, thereby saving costs and achieving the effect of cost reduction and profit;

[0019] (3) The addition of an intermediate support partition group can effectively prevent the large-sized substrate from collapsing in the middle due to its own excessive length, thereby improving the stability of the substrate inside the box and the product quality;

[0020] (4) The three-point multi-point contact method between the middle support group, the lateral support group and the substrate greatly reduces the contact area, avoids dust pollution of the substrate due to friction, thereby ensuring the cleanliness of the substrate and reducing the rework rate and scrap rate of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a partial exploded view of the glass core substrate FOUP carrier box of the present invention;

[0022] Figure 2 This is a bottom view of the box body of the utility model;

[0023] Figure 3 It is a structural diagram of the side support assembly and the middle support assembly of the utility model;

[0024] Figure 4 It is an inner side view of the cover plate of the utility model;

[0025] Figure 5 It is a structural diagram of the overhead crane handling connection block of the utility model. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.

[0027] like Figure 1As shown, a glass core substrate FOUP carrying box of the present invention includes a box body 1, a cover plate 2, and a substrate support mechanism. The substrate support mechanism is arranged inside the box body 1, and the cover plate 2 is detachably connected to the front end opening of the box body 1. The substrate support mechanism includes side support components 3 and middle support components 4. A group of side support components 3 are provided at both sides of the box body 1, and a group of middle support components 4 are provided at the middle position of the box body 1. The side support components 3 and the middle support components 4 are a multi-layer structure, and the side support components 3 and the middle support components 4 of each layer constitute a three-point contact method to support the glass core substrate.

[0028] Box 1 is used to secure other components. Its primary functions are to prevent dust, water, and oil contamination. It isolates the internal components from direct contact with the surrounding environment, preventing dust, water, and oil from entering the machine during transport. This effectively protects the glass core substrate FOUP carrier from damage, ensuring the integrity and cleanliness of the substrates and improving product quality.

[0029] like Figure 3 As shown, the side support assembly 3 includes a side fixing column 31, a side support rod 32, a sleeve 33, and an O-ring 5. The side fixing column 31 is connected to the box body 1, and multiple side support rods are respectively connected to the side fixing column 31 in parallel. Both ends of the side support rod 32 are connected with a sleeve 33. One end of the side support rod 32 is docked with the side fixing column 31 at the end through the sleeve 33. At least one O-ring 5 is connected to each side support rod 32, and the glass core substrate is in contact with the O-ring 5.

[0030] The side support assembly 3 is a mechanism used to support both sides of the glass core substrate. Only the O-ring 5 contacts the glass core substrate, supporting the glass substrate in a multi-point contact manner, significantly reducing the contact area and preventing dust contamination of the substrate due to friction, thereby ensuring the cleanliness of the substrate. The side fixing column 31 constitutes the framework of the entire side support assembly 3 and fixes the side support rod 32. Multiple parallel side support rods 32 form a multi-layer area for placing glass core substrates, with each layer containing a glass core substrate. The shaft sleeves 33 at each end of the side support rod 32 are used to clamp the ends of the glass core substrate to achieve a limiting effect. The O-ring 5 material has good resilience. After the inner diameter of the O-ring 5 is expanded with a tool, it can be placed on the side support rod 32.

[0031] The intermediate support assembly 4 includes an intermediate fixing column 41, an intermediate support rod 42, and an O-ring 5. The intermediate fixing column 41 is connected to the box body 1, and multiple intermediate support rods 42 are respectively connected to the intermediate fixing column 41 in parallel. Each intermediate support rod 42 is connected to at least one O-ring 5, and the glass core substrate is in contact with the O-ring 5.

[0032] The intermediate support assembly 4 is a mechanism for supporting the middle part of the substrate and preventing the substrate from collapsing in the middle due to its own excessive length. Among them, only the O-ring 5 is in contact with the glass core substrate, supporting the glass core substrate in a multi-point contact manner, greatly reducing the contact area, avoiding the impact of dust generated by friction on the substrate, and thus ensuring the cleanliness of the substrate. The intermediate fixed column 41 constitutes the frame of the entire intermediate support assembly 4 and fixes the intermediate support rod 42. Multiple parallel intermediate support rods 42 constitute a multi-layer area for placing the glass core substrate, and each layer supports the middle position of a glass core substrate. The length of the intermediate support rod 42 is 3 / 4 of the length of the side support rod 32, and the glass core substrate is light in weight. The intermediate support rod 42 can effectively meet the load-bearing requirements, and the glass core substrate will not fall when placed on it. The material of the O-ring 5 has good resilience. After the inner diameter of the O-ring 5 is enlarged by a tool, it can be put on the intermediate support rod 42.

[0033] The middle support assembly 4, the side support assembly 3 and the glass core substrate are in contact with each other in a three-point multi-point contact manner, which can effectively prevent the large-sized substrate from collapsing in the middle due to its own excessive length and is suitable for larger-sized square glass substrates.

[0034] like Figure 4 As shown, the cover plate 2 is provided with a spring assembly 21. After the cover plate 2 is docked with the housing 1, the spring assembly 21 presses against one end of the glass core substrate. The spring assembly 21 is composed of a plurality of springs 22 arranged in sequence, each corresponding to a glass core substrate. The ends of the springs 22 are connected to the inner wall of the cover plate 2. The middle portion of the springs 22 forms a spring protrusion that protrudes from the inner wall of the cover plate 2. The spring protrusion 22 presses against the glass core substrate. Each spring 22 is formed by bending a steel sheet multiple times to form a protrusion in the middle. The protrusion of the spring 22 can directly contact the glass core substrate, and the elasticity generated by the protrusion acts as a buffer for the glass core substrate.

[0035] The spring clip assembly 21 secures the glass substrate within the glass core substrate FOUP carrier. This prevents friction between the substrate and the support rods during transport within the housing 1, potentially causing surface wear. It also acts as a buffer and absorbs shock. The spring clip assembly 21 protrudes a few millimeters from the inner wall of the cover 2. When the cover 2 is closed over the housing 1, the spring clip assembly 21 presses against the glass core substrate, forcing it against the sleeves 33 on the side support rods 32. This allows the front and rear sleeves 33 to engage the glass core, securing the substrate in place.

[0036] like Figure 1 As shown, the front end of the box body 1 is provided with an inwardly concave deformation cavity 11, the deformation cavity 11 is provided with a lock bolt 12, the cover plate 2 is provided with a rotating clip 23, and the end of the rotating clip 23 is provided with a lock head 24. The cover plate 2 is sealed and connected to the deformation cavity 11 of the box body 1, and the rotating clip 23 is screwed to insert the lock head 24 into the lock bolt 12.

[0037] The outer cover mechanism and the cover plate 2 cooperate to form a closed space. The front end of the transport box body 1 is concave. After the cover plate 2 is closed, it is embedded in the front end of the box body 1. Through the rotary snap mechanism of the cover plate 2, a specific key is used to rotate to change the opening and closing state, and the lock 24 pops out and is inserted into the card slot 13 at the front end of the box body 1. At this time, the cover plate 2 will firmly clamp the box body 1 to form a closed structure.

[0038] The internal structure of the rotary buckle adopts a rotating and retractable method, which is mainly used to lock the cover plate 2. The opening and closing state is changed by rotating with a specific key, so that a closed space is formed inside the box to isolate the invasion of external pollution and ensure the cleanliness of the substrate.

[0039] like Figure 2 As shown, the glass core substrate FOUP transport box also includes an overhead crane transport connection block 6, which is mounted on the top of the box body 1. The overhead crane transport connection block 6 is provided with a triangular notch 61 to prevent misalignment, allowing the overhead crane to interface with the transport box. The overhead crane transport connection block 6 is used for transporting and transferring materials by the overhead crane. The triangular notch 61 in the overhead crane transport connection block 6 serves as a foolproof feature, helping to distinguish the orientation of the transport box 1 when the overhead crane is hooking it up. This helps prevent operational errors caused by misalignment, reduces time waste, and improves production efficiency. Circular notches 62 are located in the center and around the periphery of the overhead crane transport connection block 6 for grabbing and lifting by the overhead crane.

[0040] The glass core substrate FOUP carrier box also includes a bottom fixing plate 7, which is connected to the bottom of the box body 1 and has positioning holes 71 that mate with the AGV's positioning pins. This bottom fixing plate 7 is used to position the glass core substrate FOUP carrier box. It also protects the chassis of the box body 1 from unnecessary damage and ensures stable support, making it suitable for AGV production.

[0041] The partially circular positioning holes 71 of the bottom fixing plate 7 cooperate with the positioning pins on the AGV to provide positioning, enabling the AGV to quickly transport the glass core substrate FOUP carrier box to the corresponding machine that needs the material. Furthermore, the partially located holes of the bottom fixing plate 7 can be positioned with the production machine to connect and secure the carrier box 1, standardizing the accuracy of the material retrieval position, achieving a flexible connection between incoming materials and processing, logistics and production, improving work efficiency, and reducing labor costs.

[0042] The overhead crane transport connection block 6 cooperates with the bottom fixing plate 7 to make the glass core substrate FOUP carrying box compatible with both overhead crane and AGV production modes. It is suitable for multiple production modes, helps to build a fully automatic production line, and realizes the popularization of unmanned production workshops.

[0043] The glass core substrate FOUP carrier box also includes handles 8 attached to both sides of the box body 1. These handles 8 are used to transport and transfer the entire glass core substrate FOUP carrier box. Located on both sides of the box body 1, these handles 8 allow the glass core substrate FOUP carrier box to be grasped, manipulated, and moved. The handles 8 are available in different colors to distinguish between substrate types or states.

[0044] The glass core substrate FOUP carrier box also includes an RFID card 9. A card slot 13 is provided on the outer wall of the box body 1, and the RFID card 9 is connected to the card slot 13. The card slot 13 can facilitate the replacement of the RFID card 9, and the RFID card 9 can be used to read, record, and store relevant data.

[0045] This glass core substrate FOUP offers high cleanliness, excellent wear resistance, antistatic properties, low outgassing, dimensional stability, and recyclability. It primarily houses, stores, and transports glass substrates in semiconductor production. It simplifies the glass substrate transportation process and minimizes the risk of contamination.

[0046] The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and the specific implementation of the present invention cannot be considered to be limited to these descriptions. For those skilled in the art of the present invention, without departing from the concept of the present invention, several simple deductions or substitutions can be made, which should be considered to fall within the scope of protection of the present invention.

Claims

1. A glass core substrate FOUP carrier box, characterized in that: The invention comprises a box body, a cover plate, and a substrate support mechanism, wherein the substrate support mechanism is arranged inside the box body, the cover plate is detachably connected to the front end opening of the box body, the substrate support mechanism comprises a side support assembly and a middle support assembly, a group of side support assemblies are arranged at both sides of the box body, and a group of middle support assemblies are arranged at the middle position of the box body, the side support assemblies and the middle support assemblies are a multi-layer structure, and the side support assemblies and the middle support assemblies of each layer form a three-point contact method to support the glass core substrate.

2. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The side support assembly includes a side fixing column, a side support rod, a sleeve, and an O-ring. The side fixing column is connected in the box body, and multiple side support rods are respectively connected in parallel to the side fixing column. Both ends of the side support rod are connected with a sleeve. One end of the side support rod is connected to the side fixing column at the end through the sleeve. Each side support rod is connected to at least one O-ring, and the glass core substrate is in contact with the O-ring.

3. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The intermediate support assembly includes an intermediate fixing column, an intermediate support rod, and an O-ring. The intermediate fixing column is connected to the box body, and multiple intermediate support rods are respectively connected to the intermediate fixing column in parallel. Each intermediate support rod is connected to at least one O-ring, and the glass core substrate is in contact with the O-ring.

4. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The cover plate is provided with a spring piece group, and after the cover plate is connected to the box body, the spring piece group presses against one end of the glass core substrate.

5. The glass core substrate FOUP carrier box according to claim 4, characterized in that: The spring sheet group is composed of a plurality of spring sheets arranged in sequence, each of which corresponds to a glass core substrate. The two ends of the spring sheet are connected to the inner wall of the cover plate, and the middle of the spring sheet forms a spring sheet protrusion protruding from the inner wall of the cover plate, and the spring sheet protrusion supports the glass core substrate.

6. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The front end of the box body is provided with an inwardly concave deformation cavity, the deformation cavity is provided with a lock bolt, the cover plate is provided with a rotating clip, the end of the rotating clip is provided with a lock head, the cover plate is sealed and connected to the deformation cavity of the box body, and the rotating clip is screwed to insert the lock head into the lock bolt.

7. The glass core substrate FOUP carrier box according to claim 1, characterized in that: It also includes a crane transport connection block, which is installed on the top of the box body. The crane transport connection block is provided with a fool-proof triangular notch, and the crane transport connection block is docked with the crane.

8. The glass core substrate FOUP carrier box according to claim 1, characterized in that: It also includes a bottom fixing plate, which is connected to the bottom of the box body and is provided with a positioning hole that is docked with the positioning pin of the AGV.

9. The glass core substrate FOUP carrier box according to claim 1, wherein: The box also includes handles, which are connected to both sides of the box body.

10. The glass core substrate FOUP carrier box according to claim 1, wherein: It also includes an RFID card. The outer wall of the box body is provided with a card slot, and the RFID card is connected in the card slot.

Images