Device for cleaning and recycling materials on OLED evaporation baffle

By designing material cleaning and recycling equipment on OLED evaporation baffle, using dry ice sandblasting and negative pressure recovery technology, the cost increase caused by the adhesion of organic materials on the baffle of the evaporation machine is solved, and efficient material recycling and environmentally friendly treatment are achieved.

CN223255381UActive Publication Date: 2025-08-22TOPWAY HIGH-TECH(CHENGDU)ADVANCED MATERIAL CO LTD
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Patent Information

Application Number
CN202422617444.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-29
Publication Date
2025-08-22
Estimated Expiration
2034-10-29

AI Technical Summary

Technical Problem

During the OLED evaporation process, the adhesion of organic materials on the baffles around each chamber of the evaporation machine leads to an increase in production costs and low material utilization.

Method used

A material cleaning and recycling equipment on the OLED evaporation baffle is designed, including a glove box, a V-shaped groove, a dry ice sandblasting assembly, a clamping mechanism and a negative pressure recovery mechanism. The rotary evaporation baffle is driven by a rotary motor to perform dry ice sandblasting cleaning, and organic materials are recovered using a filter layer and a negative pressure recovery mechanism.

Benefits of technology

It realizes stable clamping of baffles of different sizes and shapes, ensures safety and accuracy of the cleaning process, reduces material waste, recycles and filters organic materials, meets environmental protection requirements, and reduces production costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides cleaning and recycling equipment for materials on an OLED evaporation baffle. The cleaning and recycling equipment comprises a glove box, a V-shaped groove capable of being disassembled quickly, a negative pressure recycling mechanism, a dry ice sand blasting assembly and a clamping mechanism. The rotary motor drives the clamping mechanism to rotate the evaporation baffle, and meanwhile the dry ice sand blasting assembly is used for cleaning. A coarse filtering layer and a fine filtering layer are arranged in the V-shaped groove and used for filtering organic materials. And the negative pressure recovery mechanism recovers the organic material powder in the gas. Transverse plate holes are formed in the side surfaces of the V-shaped grooves, so that the transverse plate frames can be conveniently taken out and placed, and the filter screens can be conveniently replaced and cleaned. The equipment can rapidly clean materials on the evaporation baffle, meanwhile, organic material powder is recycled and filtered, and the cleaning efficiency and the material utilization rate are improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of OLED production, in particular to a device for cleaning and recycling materials on an OLED vapor deposition baffle. Background Art

[0002] During the OLED evaporation process, organic materials are mainly evaporated onto the evaporated Glass substrate using precision masks and metal masks. At the same time, a large amount of organic materials will adhere to the baffles around each chamber of the evaporation machine. In addition, some evaporation materials are expensive and have low utilization rates, which leads to increased production costs. Therefore, it is urgent to reduce production costs through material recycling. Utility Model Content

[0003] The purpose of the utility model is to provide an OLED evaporation baffle material cleaning and recycling device, which can clean and recycle organic materials on the baffles around each chamber of the evaporation machine.

[0004] In order to solve the above technical problems, the present invention adopts the following solutions:

[0005] A device for cleaning and recovering materials on an OLED evaporation baffle comprises a glove box, wherein a hole is opened on the bottom of the glove box, a quick-detachable V-groove is installed at the position of the hole, the lower end of the V-groove is connected to a negative pressure recovery mechanism via a quick-detach device, a dry ice sandblasting assembly is installed on the side wall inside the glove box, a rotary motor is installed on the top shell of the glove box, a rotary shaft passes through the top shell of the glove box and is vertically connected to the rotary motor, the lower end of the rotary shaft is vertically connected to a cylinder mounting plate, the cylinder is vertically arranged on the cylinder mounting plate, a clamping mounting plate parallel to the cylinder mounting plate is provided at the lower end of the cylinder, and a clamping mechanism is vertically installed on the clamping mounting plate.

[0006] Further,

[0007] The side surfaces of the V-shaped groove are provided with transverse plate holes according to the widths of the first transverse plate frame and the second transverse plate frame. The first transverse plate frame and the second transverse plate frame are inserted into the V-shaped groove through the transverse plate holes. A coarse filter layer and a fine filter layer are placed in the first transverse plate frame and the second transverse plate frame respectively, and a sealing ring is provided between the first transverse plate frame, the second transverse plate frame and the transverse plate holes.

[0008] Further,

[0009] The dry ice sandblasting assembly includes a dry ice sandblasting machine, a dry ice delivery hose, a sandblasting gun head, a robotic arm, and a PLC control end. The PLC control end for controlling the mechanical wall is installed on the outer wall of the glove box, and the robotic arm is installed on the side wall inside the glove box. The robotic arm is fixedly connected to the sandblasting gun head. The tail of the sandblasting gun head is sealed with a dry ice delivery hose passing through the bottom of the glove box, and the other end of the dry ice delivery hose is connected to the dry ice sandblasting machine outside the glove box.

[0010] Further,

[0011] The clamping mounting plate is provided with left-right strip grooves that penetrate vertically on both sides of the connection with the cylinder. Slide rails are installed in the strip grooves in the slotting direction, and sliders that can slide freely are installed on the slide rails.

[0012] Further,

[0013] The widths of the two strip-shaped grooves should be the same and on the same straight line, the axes of the slide rails arranged in the two strip-shaped grooves should coincide, and the widths of the slider and the strip-shaped groove should be equal.

[0014] Further,

[0015] The clamping mechanism includes a clamping motor, a telescopic rod, a moving block, a first power rod, a second power rod, a fixed column, a suction cup, and a clamping shell. The clamping motor is arranged on a slider, the telescopic rod passes through the slider and is connected to the clamping motor, the other end of the telescopic rod is vertically connected to the moving block, the first power rod is respectively arranged on both sides of the moving block and is hinged, the other end of the first power rod is connected to the second power rod, the other end of the second power rod is outside the clamping shell and a suction cup is installed on the inner side of the end of the second power rod, the fixed column is connected to the bottom and top surfaces of the clamping shell at the same time, and the second power rod is sleeved on the fixed column.

[0016] Further,

[0017] The clamping shell has a cavity for accommodating the moving block, and the moving block can move in the cavity.

[0018] Further,

[0019] The negative pressure recovery mechanism includes an air pipe, a high negative pressure fan, and a gas recovery box. One end of the air pipe is connected to the V-groove through a quick-release device, and the other end is connected to the air inlet of the high negative pressure fan. The air outlet of the high negative pressure fan is connected to the gas recovery box through the air pipe.

[0020] The utility model has the beneficial effects:

[0021] 1. The design of the clamping mechanism allows for stable clamping of OLED production baffles of varying sizes and shapes, ensuring safety and accuracy during the recycling process. The combination of sliders and rails enables the clamping mechanism to move freely along the strip grooves, further increasing the flexibility and adaptability of the equipment.

[0022] 2. V-shaped grooves and built-in coarse and fine filter layers collect and filter organic materials removed from the evaporation baffle, reducing material waste. A negative pressure recovery mechanism recycles the gas within the glove box and filters out organic material powder, resulting in a relatively pure gas that is easily processed and reused, meeting environmental requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the structure of the utility model;

[0024] Figure 2 This is an enlarged schematic diagram of point A;

[0025] Figure 3 It is a side sectional view of the clamping mechanism;

[0026] Figure 4 It is a top view of the clamping installation plate;

[0027] Figure 5 It is a schematic diagram of the V-groove structure;

[0028] Figure 6 Schematic diagram of the structure of the first transverse plate frame and the second transverse plate frame;

[0029] Figure 7 This is a front view of the glove box.

[0030] The accompanying drawings are marked as follows: 1-glove box, 2-V-shaped groove, 20-first horizontal plate frame, 21-second horizontal plate frame, 22-coarse filter screen, 23-fine filter screen, 3-dry ice sandblasting assembly, 30-dry ice sandblasting machine, 31-dry ice delivery hose, 32-sandblasting gun head, 33-robotic arm, 34-PLC control end, 4-rotating motor, 5-rotating shaft, 6-cylinder mounting plate, 7-cylinder, 8-clamping mounting plate, 80-strip groove, 81-slide rail, 82-slider, 9-clamping mechanism, 90-clamping motor, 91-telescopic rod, 92-moving block, 93-first power rod, 94-second power rod, 95-fixed column, 96-suction cup, 97-clamping shell, 10-quick release device, 11-negative pressure recovery mechanism, 110-trachea, 111-high negative pressure fan, 112-gas recovery box. DETAILED DESCRIPTION

[0031] The present invention will be further described in detail below in conjunction with the embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0032] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0033] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "opened," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0034] Example

[0035] See also Figures 1 to 7 :

[0036] A material cleaning and recovery device for an OLED evaporation baffle includes a glove box 1. A hole is opened on the bottom of the glove box 1. A quick-detachable V-groove 2 is installed at the position of the hole. The lower end of the V-groove 2 is connected to a negative pressure recovery mechanism 11 via a quick-detach device 10. A dry ice sandblasting assembly 3 is installed on the side wall inside the glove box 1. A rotating motor 4 is installed on the top outer shell of the glove box 1. A rotating shaft 5 passes through the top outer shell of the glove box 1 and is vertically connected to the rotating motor 4. The lower end of the rotating shaft 5 is vertically connected to a cylinder mounting plate 6. A cylinder 7 is vertically arranged on the cylinder mounting plate 6. A clamping mounting plate 8 parallel to the cylinder mounting plate 6 is provided at the lower end of the cylinder 7. A clamping mechanism 9 is vertically installed on the clamping mounting plate 8.

[0037] The cylinder mounting plate 6, the cylinder 7, the clamping mounting plate 8 and the clamping mechanism 9 on the clamping mounting plate 8 are driven to rotate by the rotating motor 4. The clamping mechanism 9 can stably clamp the evaporation baffle so that the evaporation baffle rotates along with the clamping mechanism 9. The dry ice sandblasting assembly 3 on the side wall of the glove box 1 is then used for dry ice blasting to clean the evaporation baffle. The heavier organic materials cleaned from the evaporation baffle fall into the V-shaped groove 2 for collection. The negative pressure recovery mechanism 11 can recover the gas in the box and drive the organic material powder in the gas into the V-shaped groove 2.

[0038] Further,

[0039] Horizontal plate holes are opened on the side of the V-shaped groove 2 according to the width of the first horizontal plate frame 20 and the second horizontal plate frame 21. The first horizontal plate frame 20 and the second horizontal plate frame 21 are inserted into the V-shaped groove 2 through the horizontal plate holes. The coarse filter layer and the fine filter layer are placed in the first horizontal plate frame 20 and the second horizontal plate frame 21 respectively, and sealing rings are set between the first horizontal plate frame 20, the second horizontal plate frame 21 and the horizontal plate holes.

[0040] The first horizontal plate frame 20 is used to install a coarse filter 22 for filtering larger and heavier organic materials falling from the evaporation baffle. The second horizontal plate frame 21 is used to install a fine filter 23 for filtering the powder of organic materials in the gas. The two layers of filter screens with different filtration degrees are set to prevent the recovered organic materials from having too large a difference in size, which makes the filter screen more easily clogged. The holes in the horizontal plate make it easier to take out and put in the first horizontal plate frame 20 and the second horizontal plate frame 21. The sealing ring ensures that the glove box 1 is a closed space.

[0041] Further,

[0042] The dry ice sandblasting assembly 3 includes a dry ice sandblasting machine 30, a dry ice delivery hose 31, a sandblasting gun head 32, a robotic arm 33, and a PLC control terminal 34. The PLC control terminal 34 for controlling the robotic arm 33 is installed on the outer wall of the glove box 1, and the robotic arm 33 is installed on the side wall inside the glove box 1. The robotic arm 33 is fixedly connected to the sandblasting gun head 32. The tail of the sandblasting gun head 32 is sealed with the dry ice delivery hose 31 passing through the bottom of the glove box 1. The other end of the dry ice delivery hose 31 is connected to the dry ice sandblasting machine 30 outside the glove box 1.

[0043] The PLC control terminal 34 is used to control the motion trajectory of the robot arm 33, thereby determining the path of the dry ice blasting.

[0044] Further,

[0045] The clamping mounting plate 8 is provided with vertically penetrating left and right strip grooves on both sides of the connection with the cylinder 7. A slide rail 81 is installed in the strip groove in the slotting direction, and a freely sliding slider 82 is installed on the slide rail 81.

[0046] Further,

[0047] The widths of the two strip-shaped grooves 80 should be the same and on the same straight line, the axes of the slide rails 81 provided in the two strip-shaped grooves 80 should coincide, and the widths of the slider 82 and the strip-shaped groove 80 should be equal.

[0048] The width of the slider 82 should be close to the width of the strip groove 80 in order to prevent the slider 82 from deflecting on the slide rail 81 .

[0049] Further,

[0050] The clamping mechanism 9 includes a clamping motor 90, a telescopic rod 91, a moving block 92, a first power rod 93, a second power rod 94, a fixed column 95, a suction cup 96, and a clamping shell 97. The clamping motor 90 is arranged on the slider 82, the telescopic rod 91 passes through the slider 82 and is connected to the clamping motor 90, the other end of the telescopic rod 91 is vertically connected to the moving block 92, the first power rod 93 is respectively arranged on both sides of the moving block 92 and is hinged, the other end of the first power rod 93 is connected to the second power rod 94, the other end of the second power rod 94 is outside the clamping shell 97 and a suction cup 96 is installed on the inner side of the end of the second power rod 94, the fixed column 95 is connected to the bottom and top surfaces of the clamping shell 97 at the same time, and the second power rod 94 is sleeved on the fixed column 95.

[0051] like Figure 3 As shown, a second power rod 94 is mounted on the fixed column 95. The fixed column 95 is a fixed rotation point. When the clamping motor 90 extends and retracts the telescopic rod 91, it pushes the moving block 92 to move. The movement of the moving block 92 pushes the first power rod 93 hinged to it to expand to both sides, causing the upper half of the bending part of the second power rod 94 hinged to the first power rod 93 to expand outward, and the lower half to approach. A suction cup 96 is installed on the inner side of the end of the second power rod 94 to be able to more firmly fix the evaporation baffle.

[0052] Further,

[0053] The clamping shell 97 has a cavity for accommodating the moving block 92, and the moving block 92 can move in the cavity. The moving trajectory of the moving block 92 is determined by the cavity.

[0054] Further,

[0055] The negative pressure recovery mechanism 11 includes an air pipe 110, a high negative pressure fan 111, and a gas recovery box 112. One end of the air pipe 110 is connected to the V-shaped groove 2 through a quick-release device 10, and the other end is connected to the air inlet of the high negative pressure fan 111. The air outlet of the high negative pressure fan 111 is connected to the gas recovery box 112 through the air pipe 110.

[0056] The gas in the glove box 1 is extracted outwards by the high negative pressure blower 111, and the organic material powder in the gas is filtered out by the coarse filter and fine filter in the V-shaped groove 2. The relatively pure gas is collected in the gas recovery box 112 to facilitate subsequent gas processing and reuse.

[0057] The design principle of this utility model is:

[0058] First, the evaporation baffle to be cleaned is stably clamped by the clamping mechanism 9. The clamping mechanism 9 is driven by the clamping motor 90 to drive the telescopic rod 91, which in turn pushes the moving block 92, so that the first power rod 93 and the second power rod 94 are linked, and finally the evaporation baffle is firmly fixed by the suction cup 96.

[0059] Subsequently, the rotating motor 4 is started to drive the cylinder mounting plate 6, the cylinder 7, the clamping mounting plate 8 and the clamping mechanism 9 to rotate as a whole. At the same time, the motion trajectory of the robotic arm 33 is set through the PLC control terminal 34, and the dry ice sandblasting assembly 3 is operated to perform dry ice sandblasting on the rotating evaporation baffle.

[0060] During the cleaning process, heavier organic materials fall into the V-shaped groove 2 at the bottom of the glove box 1. This groove is equipped with a coarse filter layer and a fine filter layer, respectively, to filter out larger and heavier organic materials and organic material powder in the gas. To ensure the airtightness of the glove box 1, a sealing ring is installed between the V-shaped groove 2 and the horizontal frame.

[0061] If the baffle needs to be re-clamped and adjusted during the cleaning process, the operation can be adjusted through the hole on the glove box and the gloves on the hole.

[0062] At the same time, the negative pressure recovery mechanism 11 is started, and the high negative pressure fan 111 extracts the gas in the glove box 1 through the air pipe 110. The organic material powder in the gas is filtered through the filter in the V-shaped groove 2, and the relatively pure gas is sent to the gas recovery box 112 for subsequent processing and reuse.

[0063] If the organic material is to be removed from the V-groove 2, it is necessary to open the quick-release device 10, which can quickly cancel the connection between the V-groove 2 and the air pipe 110. After placing a clean container at the outlet below the V-groove 2, the second horizontal plate frame 21 is taken out first, and the sealing ring set in the horizontal plate hole is used to scrape the organic material powder on the fine filter screen in the second horizontal plate frame 21 into the container below the V-groove 2. Then, the same operation is performed on the first horizontal plate frame 20 as on the second horizontal plate frame 21. After completion, the first horizontal plate frame 20 and the second horizontal plate frame 21 are inserted into the original position and the V-groove 2 and the air pipe 110 are connected using the quick-release device 10.

[0064] If you need to replace or clean the coarse filter layer or the fine filter layer, you only need to take out the corresponding horizontal plate frame to replace or clean the coarse filter layer or the fine filter layer, and then insert it into the original position after completion.

[0065] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Based on the technical essence of the present invention and within the spirit and principles of the present invention, any simple modification, equivalent replacement and improvement of the above embodiment shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A material cleaning and recycling device for an OLED evaporation baffle, comprising a glove box (1), characterized in that: The bottom of the glove box (1) is provided with a hole, and a quick-detachable V-shaped groove (2) is installed at the position of the hole. The lower end of the V-shaped groove (2) is connected to a negative pressure recovery mechanism (11) via a quick-detachable device (10). A dry ice sandblasting assembly (3) is installed on the side wall of the glove box (1). A rotating motor (4) is installed on the top shell of the glove box (1). A rotating shaft (5) passes through the top shell of the glove box (1) and is vertically connected to the rotating motor (4). The lower end of the rotating shaft (5) is vertically connected to a cylinder mounting plate (6). The cylinder (7) is vertically arranged on the cylinder mounting plate (6). A clamping mounting plate (8) parallel to the cylinder mounting plate (6) is provided at the lower end of the cylinder (7), and a clamping mechanism (9) is vertically installed on the clamping mounting plate (8).

2. The OLED evaporation baffle material cleaning and recycling device according to claim 1, characterized in that: The side surfaces of the V-shaped groove (2) are provided with transverse plate holes according to the widths of the first transverse plate frame (20) and the second transverse plate frame (21); the first transverse plate frame (20) and the second transverse plate frame (21) are inserted into the V-shaped groove (2) through the transverse plate holes; a coarse filter screen (22) and a fine filter screen (23) are placed in the first transverse plate frame (20) and the second transverse plate frame (21), respectively; and sealing rings are provided between the first transverse plate frame (20), the second transverse plate frame (21) and the transverse plate holes.

3. The material cleaning and recycling equipment for OLED evaporation baffles according to claim 1, characterized in that: The dry ice sandblasting assembly (3) comprises a dry ice sandblasting machine (30), a dry ice delivery hose (31), a sandblasting gun head (32), a mechanical arm (33), and a PLC control terminal (34). The PLC control terminal (34) for controlling the mechanical wall is installed on the outer wall of the glove box (1). The mechanical arm (33) is installed on the inner side wall of the glove box (1). The mechanical arm (33) is fixedly connected to the sandblasting gun head (32). The tail of the sandblasting gun head (32) is sealedly connected to the dry ice delivery hose (31) passing through the bottom of the glove box (1). The other end of the dry ice delivery hose (31) is connected to the dry ice sandblasting machine (30) outside the glove box (1).

4. The OLED evaporation baffle material cleaning and recycling device according to claim 1, characterized in that: The clamping mounting plate (8) is provided with two strip grooves extending vertically and horizontally on both sides of the connection with the cylinder (7). A slide rail (81) is installed in the strip groove in the slotting direction, and a slider (82) capable of sliding freely is installed on the slide rail (81).

5. The material cleaning and recycling equipment for OLED evaporation baffles according to claim 4, characterized in that: The widths of the two strip-shaped grooves (80) should be the same and on the same straight line, the axes of the slide rails (81) provided in the two strip-shaped grooves (80) should coincide, and the widths of the slider (82) and the strip-shaped groove (80) should be equal.

6. The material cleaning and recycling equipment for OLED evaporation baffles according to claim 4, characterized in that: The clamping mechanism (9) comprises a clamping motor (90), a telescopic rod (91), a moving block, a first power rod (93), a second power rod (94), a fixed column (95), a suction cup (96), and a clamping shell (97). The clamping motor (90) is arranged on the slider (82), the telescopic rod (91) passes through the slider (82) and is connected to the clamping motor (90), the other end of the telescopic rod (91) is vertically connected to the moving block (92), the first power rod (93) is respectively arranged on both sides of the moving block (92) and is hinged, the other end of the first power rod (93) is connected to the second power rod (94), the other end of the second power rod (94) is outside the clamping shell (97) and is installed with a suction cup (96) on the inner side of the end of the second power rod (94), the fixed column (95) is simultaneously connected to the bottom surface and the top surface of the clamping shell (97), and the second power rod (94) is sleeved on the fixed column (95).

7. The OLED evaporation baffle material cleaning and recycling device according to claim 6, characterized in that: The clamping shell (97) has a cavity for accommodating the moving block (92), and the moving block (92) can move in the cavity.

8. The OLED evaporation baffle material cleaning and recycling device according to claim 1, characterized in that: The negative pressure recovery mechanism (11) comprises an air pipe (110), a high negative pressure fan (111), and a gas recovery box (112); one end of the air pipe (110) is connected to the V-shaped groove (2) via a quick-release device (10), and the other end is connected to the air inlet of the high negative pressure fan (111); and the air outlet of the high negative pressure fan (111) is connected to the gas recovery box (112) via the air pipe (110).