Coating device capable of regulating and controlling airflow

Abstract

The utility model provides a coating device capable of regulating and controlling airflow. The coating device comprises a plurality of pump assemblies, a coating chamber and connecting pieces for connecting the pump assemblies with the coating chamber, an air flow proportional valve is arranged on the connecting piece and is used for controlling the flow of the air path; the airflow proportional valve comprises a valve body, a valve element and magnetic fluid. A magnetic fluid is arranged above the valve body; a valve core is arranged in the valve body; the valve element is arranged on a shaft rod of the magnetic fluid. According to the utility model, the airflow proportional valve is arranged between the coating chamber and the pump assembly, so that the air exhaust rate of the pump assembly to the coating chamber can be adjusted, the pressure of the coating chamber can be adjusted in an auxiliary manner to be stabilized in a range required by a process, and the quality of a film layer is further improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of PVD equipment coating devices and relates to a coating device capable of regulating airflow. Background Art

[0002] Physical Vapor Deposition (PVD) technology refers to the technology of using physical methods to vaporize the surface of a material source (solid or liquid) into gaseous atoms or molecules, or partially ionize it into ions under vacuum conditions, and then deposit a thin film with certain special functions on the surface of the substrate through a low-pressure gas (or plasma) process reaction, so that the components have properties such as wear resistance, corrosion resistance, and lubrication.

[0003] PVD equipment is a type of thin film deposition equipment. It is the carrier of PVD technology and is mainly used in semiconductors, solar cells, optical magnetic recording media, optical components, energy-saving glass, LEDs, tool modification, high-end decorative products and other fields.

[0004] The PVD equipment is connected to the coating device and is equipped with a mechanical pump, Roots pump, molecular pump or diffusion pump. The current PVD continuous coating equipment is equipped with several molecular pumps in each coating chamber. The vacuum range of the coating chamber in standby mode is 10 -5 ~10 -6 Pa, when the film is formed, the coating chamber is equipped with a gas flow meter according to the process requirements to fill a certain amount of gas, but because the molecular pump pumping speed is too fast, the coating vacuum pressure is low 10 -1 ~5×10 -1 Pa, such as tungsten oxide WO X The film forming pressure (1-10Pa) required by the process cannot be met, which affects the film properties, the looseness of the film molecular structure, and the film stress needs to be improved.

[0005] In summary, a novel coating device for PVD equipment is provided, which can adjust the pumping rate of the pump component to the coating chamber and assist in regulating the pressure of the coating chamber to be stable within the range required by the process, thereby improving the quality of the film layer. Utility Model Content

[0006] In response to the shortcomings of the existing technology, the purpose of the present invention is to provide a coating device with adjustable airflow. By arranging an airflow proportional valve between the coating chamber and the pump assembly, the pump assembly's pumping rate of the coating chamber can be adjusted, and the pressure of the coating chamber can be regulated to stabilize within the range required by the process, thereby improving the quality of the film layer.

[0007] To achieve this purpose, the present invention adopts the following technical solutions:

[0008] The utility model provides a coating device with adjustable airflow, the coating device comprising a plurality of pump components, a coating chamber and a connector connecting the pump components and the coating chamber;

[0009] The connecting piece is provided with an air flow proportional valve, and the air flow proportional valve is used to control the flow of the air path;

[0010] The air flow proportional valve includes a valve body, a valve core and a magnetic fluid;

[0011] A magnetic fluid is provided above the valve body;

[0012] A valve core is provided in the valve body; the valve core is provided on the shaft of the magnetic fluid.

[0013] In the present invention, there is no limitation on the specific number of pump components, and those skilled in the art can determine the number according to actual conditions. One end of the valve core is fixed to the shaft of the magnetic fluid by a screw.

[0014] The utility model provides a coating device with adjustable airflow. By arranging a specific airflow proportional valve between the coating chamber and the pump assembly, it is possible to adjust the pump assembly's pumping rate of the coating chamber and assist in regulating the pressure of the coating chamber to be stable within the range required by the process, thereby improving the quality of the film layer.

[0015] As a preferred technical solution of the present invention, the pump assembly includes any one of a molecular pump, a diffusion pump, a mechanical pump or a Roots pump, or a combination of at least two of them.

[0016] As a preferred technical solution of the present invention, the connecting member includes a first pipe and a flange arranged on the first pipe along the axis.

[0017] In the present invention, an air flow proportional valve is provided on the first pipeline. The first pipeline and the flange can be connected by welding or bolt connection.

[0018] As a preferred technical solution of the present invention, the valve body is a cavity structure.

[0019] As a preferred technical solution of the present invention, an O-ring is provided in the magnetic fluid.

[0020] The magnetic fluid is fixed on the upper side of the valve body by screws.

[0021] In the present invention, an O-ring is provided in the magnetic fluid to seal the magnetic fluid with the valve body, thereby avoiding problems such as reduced efficiency and quality caused by air leakage during the air extraction process.

[0022] As a preferred technical solution of the present invention, the magnetic fluid is connected to a cylinder.

[0023] The cylinder is connected to the second valve through a second pipeline.

[0024] In the present invention, the cylinder comprises a rotary cylinder; and the second valve comprises a pneumatic valve.

[0025] As a preferred technical solution of the present invention, the valve core rotates around the central axis of the magnetic fluid.

[0026] As a preferred technical solution of the present invention, the diameter of the valve core is the same as the diameter of the pump assembly.

[0027] In the present invention, the specific size of the valve core is designed according to the size of the pump assembly.

[0028] As a preferred technical solution of the present invention, the opening angle of the valve core is 0-90°, for example, it can be 10°, 20°, 30°, 40°, 50°, 60°, 70° or 80°, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0029] In the present invention, the opening angle of the valve core is the angle between the valve core and the valve body.

[0030] In the utility model, when the coating is not in the state, the valve core and the valve body are parallel at 0°, and the pump assembly has the fastest pumping rate for the coating chamber. During coating, a certain amount of process gas is introduced into the coating chamber. If the vacuum pressure is low, the opening angle of the valve core is adjusted by manual control or pneumatic control, and the pump assembly's pumping rate for the coating chamber is adjusted to make the process pressure meet the use requirements.

[0031] Compared with the prior art, the beneficial effects of the present invention are:

[0032] The utility model provides a coating device with adjustable airflow, wherein the airflow proportional valve includes a valve body, a valve core and a magnetic fluid. By arranging the airflow proportional valve between the coating chamber and the pump assembly, the pump assembly's pumping rate of the coating chamber can be adjusted, and the pressure of the coating chamber can be assisted in being stabilized within the range required by the process, thereby improving the quality of the film layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A side view of the air flow proportional valve provided in Example 1;

[0034] Figure 2 A cross-sectional view of the air flow proportional valve provided in Example 1;

[0035] Among them, 1 is air flow proportional valve, 2 is first pipeline, 11 is valve body, 12 is valve core, and 13 is magnetic fluid. DETAILED DESCRIPTION

[0036] It should be understood that, in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0037] It should be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0038] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0039] Example 1

[0040] This embodiment provides a coating device with adjustable airflow, the coating device comprising a pump assembly, a coating chamber, and a connector connecting the pump assembly and the coating chamber;

[0041] The connecting member includes a first pipe and a flange arranged on the first pipe along the axis;

[0042] The first pipe 2 is provided with an air flow proportional valve 1, and the air flow proportional valve 1 (such as Figure 1-2 As shown) is used to control the flow of the gas circuit;

[0043] The air flow proportional valve 1 includes a valve body 11, a valve core 12 and a magnetic fluid 13;

[0044] The valve body 11 is a hollow structure;

[0045] An O-ring is provided in the magnetic fluid 13; the magnetic fluid 13 is fixed to the top of the valve body 11 by screws;

[0046] The valve body 11 is provided with a valve core 12; the valve core 12 is fixed to the shaft of the magnetic fluid 13 by screws; the valve core 12 rotates around the central axis of the magnetic fluid 13;

[0047] The diameter of the valve core 12 is the same as the diameter of the pump assembly;

[0048] The pump component is a molecular pump.

[0049] When tungsten oxide coating is performed using the coating device provided in this embodiment, the valve core is parallel to the valve body at 0° in the non-coating state. At this time, the molecular pump has the fastest pumping rate for the coating chamber. When tungsten oxide coating is performed, a certain amount of process gas needs to be introduced, resulting in a low vacuum pressure in the coating chamber. The opening angle of the valve core is adjusted to meet the process pressure conditions of the coating chamber, thereby improving the quality of the film layer.

[0050] Example 2

[0051] This embodiment provides a coating device with adjustable airflow, and further defines, on the basis of Example 1, that the magnetic fluid is connected to a rotating cylinder; the rotating cylinder is connected to a pneumatic valve through a second pipe; and the valve core rotates around the central axis of the magnetic fluid through the rotating cylinder.

[0052] When the coating device provided in this embodiment is used to coat tungsten nickel oxide, the air valve is in an unpowered state in the non-coating state, and the valve core opening angle is controlled to 0° by rotating the air cylinder. At this time, the molecular pump has the fastest pumping rate for the coating chamber. When tungsten nickel oxide coating is performed, the air valve is in an energized state, and a certain amount of process gas is introduced, resulting in a low vacuum pressure in the coating chamber. The opening angle of the valve core is adjusted by rotating the air valve to meet the process pressure conditions of the coating chamber, thereby improving the quality of the film layer.

[0053] Example 3

[0054] This embodiment provides a coating device with adjustable airflow, the coating device comprising a pump assembly, a coating chamber, and a connector connecting the pump assembly and the coating chamber;

[0055] The connecting member includes a first pipe and a flange arranged on the first pipe along the axis;

[0056] An air flow proportional valve is provided on the first pipeline, and the air flow proportional valve is used to control the flow of the air circuit;

[0057] The air flow proportional valve includes a valve body, a valve core and a magnetic fluid;

[0058] The valve body is a square cavity structure;

[0059] An O-ring is provided in the magnetic fluid; the magnetic fluid is fixed to the top of the valve body by screws;

[0060] A valve core is provided in the valve body; the valve core is fixed to the shaft of the magnetic fluid by screws; the valve core rotates around the central axis of the magnetic fluid;

[0061] The diameter of the valve core is the same as the diameter of the pump assembly;

[0062] The pump assembly is a diffusion pump.

[0063] When tungsten oxide coating is performed using the coating device provided in this embodiment, the valve core is parallel to the valve body at 0° in the non-coating state. At this time, the diffusion pump has the fastest pumping rate for the coating chamber. When tungsten oxide coating is performed, a certain amount of process gas needs to be introduced, resulting in a low vacuum pressure in the coating chamber. The opening angle of the valve core is adjusted to meet the process pressure conditions of the coating chamber, thereby improving the quality of the film layer.

[0064] Comparative Example 1

[0065] This comparative example provides a coating device, which has the same conditions as Example 1 except that the air flow proportional valve is not provided.

[0066] When the coating device provided in this comparative example is used to coat tungsten oxide, the vacuum pressure in the coating chamber is too low due to the excessive pumping speed of the molecular pump during the coating process, which fails to meet the film formation requirements and thus affects the film quality.

[0067] The applicant declares that the above is only a specific implementation method of the present invention, but the protection scope of the present invention is not limited thereto. Technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by technicians in the relevant technical field within the technical scope disclosed in the present invention fall within the protection scope and disclosure scope of the present invention.

Claims

1. A coating device with adjustable airflow, characterized in that: The coating device includes a plurality of pump assemblies, a coating chamber and a connector connecting the pump assemblies and the coating chamber; The connecting piece is provided with an air flow proportional valve, and the air flow proportional valve is used to control the flow of the air path; The air flow proportional valve includes a valve body, a valve core and a magnetic fluid; A magnetic fluid is provided above the valve body; A valve core is provided in the valve body; the valve core is provided on the shaft of the magnetic fluid.

2. The coating device with adjustable airflow according to claim 1, characterized in that: The pump assembly includes any one of a molecular pump, a diffusion pump, a mechanical pump or a Roots pump, or a combination of at least two of them.

3. The coating device with adjustable airflow according to claim 1, characterized in that: The connecting member includes a first pipe and a flange arranged on the first pipe along an axis.

4. The coating device with adjustable airflow according to claim 1, characterized in that: The valve body is a hollow structure.

5. The coating device with adjustable airflow according to claim 1, characterized in that: An O-type sealing ring is provided in the magnetic fluid; The magnetic fluid is fixed on the upper side of the valve body by screws.

6. The film coating device with adjustable airflow according to claim 1, characterized in that: The magnetic fluid is connected to a cylinder; The cylinder is connected to the second valve through a second pipeline.

7. The film coating device with adjustable airflow according to claim 1, characterized in that: The valve core rotates around the central axis of the magnetic fluid.

8. The film coating device with adjustable airflow according to claim 1, characterized in that: The diameter of the valve core is the same as the diameter of the pump assembly.

9. The film coating device with adjustable airflow according to claim 1, characterized in that: The opening angle of the valve core is 0-90°.

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