High-temperature thermal evaporation source cooled by single-loop circulating water channel

Abstract

The utility model relates to a high-temperature thermal evaporation source cooled by a single-loop circulating water channel. The high-temperature thermal evaporation source comprises a base, a crucible, an electrode insulating seat, an electrode, a thermocouple, a heating wire and the single-loop circulating water channel, the electrode insulating seat and the single-loop circulating water channel are respectively arranged in the base, and the crucible is detachably arranged in a heating cavity of the base; the electrode penetrates through the electrode insulating seat and is connected with the heating wire, and the electrode is isolated from the crucible through the electrode insulating seat; the heating wire is arranged outside the crucible in a surrounding manner in the length direction of the crucible; the thermocouple abuts against the bottom of the crucible. Through the design that the single-loop circulating water channel is matched with the base, compared with a traditional interlayer water cooling mode, the machining process is simple, the more stable and reliable high-sealing-performance design is provided, and the advantages of being simple in structure and easy to assemble are achieved by combining the design of the crucible, the electrode insulating base, the electrode, the thermocouple and the heating wire; and electrodes, thermocouples and heating wires in different forms can be adopted to meet different requirements of different evaporation materials, so that the device has the advantage of wide adaptability.

Description

Technical Field

[0001] The present application relates to the field of high-temperature thermal evaporation sources, and in particular to a high-temperature thermal evaporation source cooled by a single-loop circulating water channel. Background Art

[0002] A high-temperature thermal evaporation source is a device used to heat film materials to vaporize and evaporate them, and can be used in the field of thin film growth in ultra-high vacuum equipment.

[0003] The heating part of the high-temperature thermal evaporation source is composed of a resistance wire wound on a mounted ceramic base. By placing the sample in the crucible, the resistance wire is energized to generate heat and directly transfer it to the crucible.

[0004] When the sample overheats or the experiment ends, the water cooling cycle can be activated to neutralize some of the heat, allowing the chamber to cool rapidly. This evaporation source design facilitates efficient evaporation of materials in high-temperature environments, which is particularly important for applications requiring high-quality thin film deposition.

[0005] Traditional high-temperature thermal evaporation sources use a sandwich water cooling method, which makes welding processing complicated, has the risk of leakage, and is prone to damage other structural parts. Utility Model Content

[0006] Based on this, it is necessary to provide a high-temperature heat evaporation source for single-loop circulating water cooling.

[0007] In one embodiment, a high-temperature thermal evaporation source cooled by a single-loop circulating water channel includes a base, a crucible, an electrode insulating base, an electrode, a thermocouple, a heating wire, and a single-loop circulating water channel;

[0008] The electrode insulation seat and the single-loop circulating water channel are respectively arranged in the base, and the crucible is detachably arranged in the heating chamber of the base;

[0009] The heating wire passes through the electrode insulating seat and is connected to the electrode, and the electrode is isolated from the crucible by the electrode insulating seat;

[0010] The heating wire is arranged outside the crucible in the length direction of the crucible;

[0011] The thermocouple is in contact with the bottom of the crucible.

[0012] The high-temperature thermal evaporation source cooled by the single-loop circulating water channel, through the design of the single-loop circulating water channel and the base, has a simpler processing process than the traditional sandwich water cooling method, provides a more stable and reliable high-sealing design, and combines the design of the crucible, electrode insulation seat, electrode, thermocouple and heating wire, with the advantages of simple structure and easy assembly. Different types of electrodes, thermocouples and heating wires can also be used to meet the different requirements of different evaporation materials, thus having the advantage of wide adaptability.

[0013] In one embodiment, the single-loop circulating water channel is opened in the base; or,

[0014] The single-loop circulating water channel is a water pipe, and the water pipe is arranged in the base.

[0015] In one embodiment, the heating wires are evenly arranged outside the crucible in the longitudinal direction of the crucible; or,

[0016] The crucible is uniformly surrounded by the heating wire in the length direction, except for the bottom; or

[0017] The heating wires are evenly arranged outside the top of the crucible in the longitudinal direction of the crucible; or,

[0018] The crucible has an upper portion and a lower portion in its length direction, and the density of the heating wires in the upper portion is greater than that in the lower portion; or

[0019] There are two groups of heating wires, the two groups of heating wires are arranged differently, and the two groups of heating wires are respectively configured to be connected to different controllers.

[0020] In one embodiment, the crucible is tapered along its length.

[0021] In one embodiment, the thermocouple is a C-type thermocouple.

[0022] In one embodiment, the single-loop circulating water channel cooled high-temperature thermal evaporation source further includes a protective cover (10, 11), the protective cover (10, 11) is detachably connected to the base, and the electrode and the thermocouple are partially located in the protective cover (10, 11).

[0023] In one embodiment, the high-temperature thermal evaporation source cooled by the single-loop circulating water channel further includes a first insulating sleeve and a third insulating sleeve respectively placed outside the two electrodes; or,

[0024] The high-temperature heat evaporation source cooled by the single-loop circulating water channel further includes a fifth insulating sleeve and a sixth insulating sleeve which are arranged in the heating cavity of the base and are sequentially placed outside the heating wire.

[0025] In one embodiment, the high-temperature thermal evaporation source cooled by the single-loop circulating water channel further includes a heating wire fixing ring.

[0026] The heating wire fixing ring is respectively connected to the base and the heating wire to fix the heating wire;

[0027] The edge of the heating wire fixing ring is chamfered to prevent charge accumulation.

[0028] In one embodiment, the high-temperature thermal evaporation source cooled by the single-loop circulating water channel further includes a baffle, a baffle shaft, a pneumatic magnetic coupling structure, a rotary cylinder, and a coupling;

[0029] The rotary cylinder is driven and connected to the baffle shaft through the coupling and the pneumatic magnetic coupling structure in sequence;

[0030] The baffle shaft passes through the base, and the end of the baffle shaft is connected to the baffle;

[0031] The baffle is configured to have a state of shielding the crucible and a state of not shielding the crucible under the drive of the baffle shaft.

[0032] In one embodiment, the high-temperature thermal evaporation source cooled by the single-loop circulating water channel further includes an insulating ring and a cover plate.

[0033] The cover plate is arranged on the base through the insulating ring to support the edge of the top of the crucible;

[0034] The baffle shaft also passes through the insulating ring and the cover plate;

[0035] The cover plate is protruded at a contact position with the edge portion, so as to form a gap between the edge portion and the base. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 This is a structural schematic diagram of an embodiment of a high-temperature thermal evaporation source cooled by a single-loop circulating water channel as described in this application.

[0038] Figure 2 for Figure 1 An enlarged schematic diagram of part of the structure of the embodiment shown.

[0039] Figure 3 for Figure 1 A schematic structural diagram of the first part of the embodiment is shown.

[0040] Figure 4 for Figure 1 A schematic structural diagram of the second part of the embodiment shown.

[0041] Figure 5 for Figure 1 The third structural diagram of the embodiment is shown.

[0042] Figure 6 for Figure 1 Isolated schematic diagram of the base shown in the illustrated embodiment.

[0043] Figure 7 for Figure 6 A schematic structural diagram of the base shown in the embodiment shown.

[0044] Figure 8 for Figure 7 A schematic diagram of the base shown in the embodiment shown in another direction.

[0045] Figure 9 for Figure 7 A schematic diagram of the base shown in the embodiment shown in another direction.

[0046] Figure 10 for Figure 1 Isolated schematic diagram of the crucible shown in the illustrated embodiment.

[0047] Figure 11 for Figure 10 Schematic diagram of the structure of the crucible shown in the embodiment shown.

[0048] Figure 12 This is a schematic structural diagram of the first embodiment of the heating wire of the high-temperature thermal evaporation source cooled by the single-loop circulating water channel described in this application.

[0049] Figure 13 This is a structural schematic diagram of the second embodiment of the heating wire of the high-temperature thermal evaporation source cooled by the single-loop circulating water channel described in this application.

[0050] Figure 14 This is a structural schematic diagram of the third embodiment of the heating wire of the high-temperature thermal evaporation source cooled by the single-loop circulating water channel described in this application.

[0051] Figure 15 This is a structural schematic diagram of the fourth embodiment of the heating wire of the high-temperature thermal evaporation source cooled by the single-loop circulating water channel described in this application.

[0052] Figure 16 This is a structural schematic diagram of the fifth embodiment of the heating wire of the high-temperature thermal evaporation source cooled by the single-loop circulating water channel described in this application.

[0053] Figure numerals: high-temperature thermal evaporation source 100, base 1, crucible 2, first heating wire fixing ring 3, second heating wire fixing ring 4, insulating ring 5, electrode insulating seat 6, baffle 7, baffle shaft 8, cover plate 9, first protective cover 10, second protective cover 11, first insulating sleeve 12, second insulating sleeve 13, third insulating sleeve 14, fourth insulating sleeve 15, fifth insulating sleeve 16, sixth insulating sleeve 17, first oxygen-free copper washer 18, second oxygen-free copper washer 19, electrode 20, pneumatic magnetic coupling structure 21, rotating cylinder 22, coupling 23, thermocouple 24, heating wire 25, single-loop circulating water channel 26, heating chamber 27, support 28, fixing part 29, length direction 200, bottom 201, top 202, upper part 203, lower part 204, edge part 205, water flow direction 260. DETAILED DESCRIPTION

[0054] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0055] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0056] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0057] In this application, unless otherwise expressly specified or limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or that the first feature and the second feature are indirectly in contact through an intermediate medium. Furthermore, a first feature being “above,” “above,” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below,” “below,” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0058] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0059] The present application discloses a high-temperature thermal evaporation source cooled by a single-loop circulating water channel, which includes some or all of the technical features of the following embodiments; that is, the high-temperature thermal evaporation source cooled by a single-loop circulating water channel includes some or all of the following structures. In one embodiment of the present application, a high-temperature thermal evaporation source cooled by a single-loop circulating water channel includes a base, a crucible, an electrode insulating seat, an electrode, a thermocouple, a heating wire and a single-loop circulating water channel; the electrode insulating seat and the single-loop circulating water channel are respectively arranged in the base, and the crucible is detachably arranged in the heating chamber of the base; the electrode is connected to the heating wire through the electrode insulating seat, and the electrode is isolated from the crucible by the electrode insulating seat; the heating wire is arranged outside the crucible in the length direction of the crucible; the thermocouple abuts the bottom of the crucible. The high-temperature thermal evaporation source cooled by the single-loop circulating water channel is designed with a single-loop circulating water channel and a base. Compared with the traditional sandwich water cooling method, the processing technology is simple and a more reliable and reliable high-sealing design is provided. The design of the crucible, electrode insulation seat, electrode, thermocouple and heating wire has the advantages of simple structure and easy assembly. Different forms of electrodes, thermocouples and heating wires can also be used to meet the different requirements of different evaporation materials, so it has the advantage of wide adaptability. Figures 1 to 16 , the high-temperature thermal evaporation source of the single-loop circulating water channel cooling is described in detail.

[0060] In one embodiment, a high temperature thermal evaporation source 100 cooled by a single loop circulating water channel is Figure 1 and Figure 2As shown, it includes a base 1, a crucible 2, an electrode insulation seat 6, an electrode 20, a thermocouple 24, a heating wire 25 and a single-loop circulating water channel 26; the electrode insulation seat 6 and the single-loop circulating water channel 26 are respectively arranged in the base 1. The design of the single-loop circulating water channel 26 and the base 1 is simple in processing technology compared with the traditional interlayer water cooling method, and provides a more stable and reliable high-sealing design; and the cooling method of the base 1 by the single-loop circulating water channel 26 is more uniform than the traditional interlayer water cooling method.

[0061] In each embodiment, the crucible 2 is removably disposed within the heating chamber 27 of the base 1; the crucible 2 is used to hold materials to be evaporated, including solid and liquid substances. Furthermore, the heating filament 25 passes through the electrode insulating seat 6 and is connected to the electrode 20, and the electrode 20 is isolated from the crucible 2 by the electrode insulating seat 6; that is, the electrode 20 is electrically connected to the heating filament 25 within the heating chamber 27. Exemplarily, a portion of the heating filament 25 is located within the heating chamber 27, while the remaining portion passes through the electrode insulating seat 6 and is electrically connected to the electrode 20.

[0062] In one embodiment, the electrode 20 is mounted on the base 1 through a sealing ring such as an oxygen-free copper gasket; for example, Figure 1 and Figure 4 As shown, the electrode 20 is mounted on the base 1 via a first oxygen-free copper washer 18 and a second oxygen-free copper washer 19. As an example, the first oxygen-free copper washer 18 is a CF35 oxygen-free copper washer, which connects the base 1 to the vacuum chamber to achieve a higher vacuum level. The second oxygen-free copper washer 19 is a CF16 oxygen-free copper washer, which connects the electrode 20 and the pneumatic magnetic coupling structure 21 to the base 1, respectively. The oxygen-free copper washers fill the gap where the electrode 20 is mounted, preventing liquid and gas leakage. They also help alleviate stress concentration caused by inaccurate component positioning, thereby ensuring that the electrode 20 is stably mounted on the base 1.

[0063] As an example, the electrode insulating seat 6 forms a gap with the base 1, so that one end of the base 1 serves as the heating chamber 27, and the other end can be connected to the electrode 20 and the thermocouple 24, thereby effectively protecting the electrode 20 and the thermocouple 24 and preventing high-temperature evaporation from damaging the electrode 20 and the thermocouple 24.

[0064] In each embodiment, Figure 2As shown, the heating wire 25 is disposed outside the crucible 2 along the length 200 of the crucible 2. The heating wire 25 can directly contact the crucible 2 or have a gap therebetween to heat the crucible 2. The thermocouple 24 abuts the bottom 201 of the crucible 2 to detect the temperature at the bottom 201 of the crucible 2. In one embodiment, the thermocouple 24 is a C-type thermocouple. In this embodiment, a high-temperature resistant C-type thermocouple is used to accurately read the temperature of the crucible 2. Compared to the K-type thermocouples used in traditional high-temperature thermal evaporation sources, this offers the advantages of higher and more accurate temperature measurement. Thus, the design of the base 1, which combines the crucible 2, the electrode insulation base 6, the electrode 20, the thermocouple 24, the heating wire 25, and the single-loop circulating water channel 26, has the advantages of a simple structure and easy assembly. Different types of electrodes 20, thermocouples 24, and heating wire 25 can also be used to meet the varying requirements of different evaporation materials, thus offering the advantage of wide adaptability.

[0065] In one embodiment, the single-loop circulating water channel cooled high-temperature thermal evaporation source 100 further includes a heating wire fixing ring, which is connected to the base 1 and the heating wire 25 respectively to fix the heating wire 25; and the edge of the heating wire fixing ring is chamfered to prevent charge accumulation. As an example, Figure 2 As shown, there are two heating wire retaining rings, including a first heating wire retaining ring 3 and a second heating wire retaining ring 4. Specifically, the single-loop circulating water channel-cooled high-temperature thermal evaporation source 100 also includes a first heating wire retaining ring 3 and a second heating wire retaining ring 4. The first heating wire retaining ring 3 and the second heating wire retaining ring 4 are connected to the base 1 and the heating wire 25, respectively, and the edges of the first heating wire retaining ring 3 and the second heating wire retaining ring 4 are chamfered. For example, the first heating wire retaining ring 3 and the second heating wire retaining ring 4 are integrally molded from boron nitride ceramic material, which has a low thermal expansion coefficient, is corrosion-resistant, has excellent heat resistance, and has excellent thermal conductivity. They serve as insulating rings to support and secure the heating wires. This structural design is easy to manufacture, low-cost, requires minimal assembly requirements, and provides excellent insulation. Furthermore, the chamfered edges prevent charge accumulation and breakdown of the ceramic. In contrast, alumina ceramic, traditionally used for retaining heating wires, is fragile and has a high thermal expansion coefficient, which can easily cause the insulation layer to rupture.

[0066] In one embodiment, the combination Figure 2 and Figure 3The single-loop circulating waterway-cooled high-temperature thermal evaporation source 100 further includes a baffle 7, a baffle shaft 8, a pneumatic magnetic coupling structure 21, a rotary cylinder 22, and a coupling 23. The rotary cylinder 22 sequentially drives and connects to the baffle shaft 8 through the coupling 23 and the pneumatic magnetic coupling structure 21. The baffle shaft 8 passes through the base 1, and the end of the baffle shaft 8 is connected to the baffle 7. The baffle 7 is configured to have a state of shielding the crucible 2 and a state of not shielding the crucible 2 under the drive of the baffle shaft 8. This structural design, on the one hand, helps reduce the risk of water leakage by having the baffle shaft 8 pass through the base 1. On the other hand, driven by the rotating cylinder 22, the baffle 7 can selectively block or unblock the crucible 2, so that the crucible 2 is either blocked by the baffle 7 or not, that is, exposed to the outside world. The baffle 7 can effectively block or control gas exchange, thereby playing a role in regulating and controlling the evaporation process, ensuring uniform evaporation of the material and uniform coating. Furthermore, by adjusting the air gap between the magnetically conductive rotor and the permanent magnet rotor through the pneumatic magnetic coupling structure 21, torque transmission and speed regulation can be achieved by varying the magnitude of the magnetic field. Therefore, there is no mechanical connection between the motor and the load shaft, which overcomes the shortcomings of mechanical seals. This makes it particularly suitable for flammable and explosive environments, and it features features such as medium isolation, contactless transmission, and precise control.

[0067] In one embodiment, Figure 2 As shown, the single-loop circulating water channel-cooled high-temperature thermal evaporation source 100 further includes an insulating ring 5 and a cover plate 9. The cover plate 9 is mounted on the base 1 via the insulating ring 5 to support the edge 205 of the top 202 of the crucible 2. The baffle shaft 8 also passes through the insulating ring 5 and the cover plate 9. The cover plate 9 is raised at the contact point with the edge 205 to form a gap between the edge 205 and the base 1. As an example, the cover plate 9 is made of stainless steel, with four small bosses on the side facing away from the base 1 to support the crucible 2. A gap is formed in the middle to facilitate the removal and placement of the crucible 2.

[0068] In one embodiment, the single-loop circulating water channel cooled high-temperature thermal evaporation source 100 further includes a protective cover, which is detachably connected to the base 1, and the electrode 20 and the thermocouple 24 are partially located in the protective cover. As an example, Figure 2As shown, the protective cover includes a first protective cover 10 and a second protective cover 11. The first protective cover 10 and the second protective cover 11 are detachably connected to the base 1 to protect the electrode 20 and the thermocouple 24 and prevent the high-temperature evaporated evaporation from splashing and causing damage to the electrode 20 and the thermocouple 24. As an example, the first protective cover 10 and the second protective cover 11 are each integrally formed stainless steel parts. The use of movable and detachable stainless steel protective covers helps prevent the evaporation from splashing onto the electrode 20 and the thermocouple 24 and causing a short circuit.

[0069] In one embodiment, Figure 1 and Figure 4 As shown, the single-loop circulating water channel cooled high-temperature thermal evaporation source 100 further includes a first insulating sleeve 12 and a third insulating sleeve 14 respectively sleeved on the outside of the two electrodes 20, that is, the first insulating sleeve 12 is sleeved on the outside of one electrode 20, and the third insulating sleeve 14 is sleeved on the outside of the other electrode 20, so as to protect the electrodes 20 from being sputtered by evaporants generated by high-temperature thermal evaporation, thereby effectively protecting the electrodes 20.

[0070] In other embodiments, Figure 2 and Figure 5 As shown, the single-loop circulating water channel cooled high-temperature thermal evaporation source 100 further includes a second insulating sleeve 13 and a fourth insulating sleeve 15 which are sleeved on the two power connection ends of the heating wire 25, that is, the second insulating sleeve 13 is sleeved on one power connection end of the heating wire 25, and the fourth insulating sleeve 15 is sleeved on the other power connection end of the heating wire 25 to protect the power connection ends of the heating wire 25.

[0071] In one embodiment, Figure 2 As shown, the single-loop circulating water channel-cooled high-temperature thermal evaporation source 100 further includes a fifth insulating sleeve 16 and a sixth insulating sleeve 17 disposed within the heating chamber 27 of the base 1 and sequentially positioned over the heating wire 25. By way of example, the fifth insulating sleeve 16 is a one-piece molded component made of PBN, and the sixth insulating sleeve 17 is a one-piece molded component made of alumina ceramic. In conjunction with the embodiment having the insulating ring 5 and the electrode insulating seat 6, the space enclosed by the insulating ring 5, the fifth insulating sleeve 16, the electrode insulating seat 6, and the sixth insulating sleeve 17 constitute a double-layer thermal shielding space, forming a unique double-layer thermal shielding design that ensures more uniform and stable heating of the crucible 2 and a longer heat retention period.

[0072] In one embodiment, Figure 6 and Figure 7 As shown, the single-loop circulating water channel 26 is opened in the base 1; or, the single-loop circulating water channel 26 is a water pipe, and the water pipe is set in the base 1. In this embodiment, the water flow direction 260 of the single-loop circulating water channel 26 is as follows: Figure 6and Figure 7 As shown, a single-inlet and single-outlet single-loop circulation design is formed; and the base 1 is provided with a support member 28 and a fixing member 29, the support member 28 is used to space and support other structural members in the heating chamber 27, and the fixing member 29 is used to fix the thermocouple 24. For example, combined with Figure 8 and Figure 9 In this embodiment, the fixing member 29 is disposed between the two pipes of the single-circuit circulating water channel 26. That is, the position of the fixing member 29 is defined by the two pipes of the single-circuit circulating water channel 26. This structural design allows for a very flexible implementation of the single-circuit circulating water channel 26. Furthermore, unlike conventional technologies, the single-circuit circulating water channel 26 is not formed by assembling two structural members to form a sandwich, thus providing a more secure and reliable high sealing performance.

[0073] In one embodiment, Figure 10 and Figure 11 As shown, the crucible 2 has a taper along its length 200°. For example, the crucible 2 is integrally formed from a boron nitride ceramic material with a low thermal expansion coefficient, corrosion resistance, excellent heat resistance, and excellent thermal conductivity. The crucible 2 has a slight taper to facilitate loading and unloading. In this embodiment, the crucible 2 is made of pyrolytic boron nitride (PBN). In other embodiments, the crucible 2 can also be made of quartz or pyrolytic graphite (PG). The crucible 2 is not susceptible to sudden heating, but requires uniform cooling.

[0074] In one embodiment, Figure 2 As shown, the heating wire 25 is evenly arranged outside the crucible 2 in the longitudinal direction 200 of the crucible 2, combined with Figure 10 and Figure 12 , that is, evenly distributed along the entire length of the crucible 2 to evenly heat the crucible 2.

[0075] Alternatively, in one embodiment, in combination Figure 10 and Figure 13 The crucible 2 is uniformly surrounded by the heating filament 25 along its length 200, except for the bottom 201. This embodiment is a shortened version of the standard filament of the previous embodiment. It does not reach the bottom of the crucible 2, making the lower part of the crucible 2 significantly cooler.

[0076] Alternatively, in one embodiment, in combination Figure 10 and Figure 14 The heating wires 25 are evenly arranged outside the top 202 of the crucible 2 in the longitudinal direction 200 of the crucible 2; with this structural design, only the uppermost part of the crucible 2 is heated, so that a maximum temperature difference is formed between the bottom 201 of the crucible 2 and the top 202 of the crucible 2.

[0077] Alternatively, in one embodiment, in combination Figure 10 and Figure 15 The crucible 2 has an upper portion 203 and a lower portion 204 in its length direction 200, and the density of the heating filaments 25 in the upper portion 203 is greater than the density of the heating filaments 25 in the lower portion 204; with such a structural design, the crucible 2 has a denser portion in the upper portion 203 than the standard filaments, so the upper portion 203 is heated higher.

[0078] Alternatively, in one embodiment, in combination Figure 2 and Figure 16 The heating wires 25 are arranged in two groups, each of which is configured to connect to a different controller. For example, the heating wires 25 include two types of heating wires, which can be independently operated by two proportional-integral-differential (PID) controllers to meet the different temperature requirements of different evaporation materials. For example, high-melting-point tantalum or tungsten wires are used as the heating wires 25, for example, one heating wire 25 is tantalum and the other is tungsten.

[0079] It can be seen from the above embodiments that the high-temperature thermal evaporation source 100 cooled by the single-loop circulating water channel can meet the different requirements of various evaporation materials through different forms of heating wires 25, thereby further improving the adaptability of the high-temperature thermal evaporation source 100 cooled by the single-loop circulating water channel.

[0080] It should be noted that other embodiments of the present application also include a high-temperature thermal evaporation source that can be implemented with single-loop circulating water cooling, which is formed by combining the technical features in the above embodiments.

[0081] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0082] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. A high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel, characterized in that: It includes a base (1), a crucible (2), an electrode insulating base (6), an electrode (20), a thermocouple (24), a heating wire (25) and a single-loop circulating water channel (26); The electrode insulation seat (6) and the single-loop circulating water channel (26) are respectively arranged in the base (1), and the crucible (2) is detachably arranged in the heating chamber (27) of the base (1); The heating wire (25) passes through the electrode insulating seat (6) and is connected to the electrode (20), and the electrode (20) is isolated from the crucible (2) by the electrode insulating seat (6); The heating wire (25) is arranged outside the crucible (2) in the length direction (200) of the crucible (2); The thermocouple (24) abuts against the bottom (201) of the crucible (2).

2. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to claim 1, characterized in that: The single-loop circulating water channel (26) is opened in the base (1); or, The single-loop circulating water channel (26) is a water pipe, and the water pipe is arranged in the base (1).

3. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to claim 1, characterized in that: The heating wire (25) is evenly arranged outside the crucible (2) in the length direction (200) of the crucible (2); or, The crucible (2) is uniformly surrounded by the heating wire (25) in the longitudinal direction (200) thereof, except for the bottom (201); or, The heating wire (25) is evenly arranged outside the top (202) of the crucible (2) in the length direction (200) of the crucible (2); or, The crucible (2) has an upper portion (203) and a lower portion (204) in its length direction (200), and the density of the heating wires (25) in the upper portion (203) is greater than the density of the heating wires (25) in the lower portion (204); or, The number of the heating wires (25) is two groups, the two groups of heating wires (25) are arranged differently, and the two groups of heating wires (25) are respectively configured to be connected to different controllers.

4. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to claim 1, characterized in that: The crucible (2) has a taper in its length direction (200).

5. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to claim 1, characterized in that: The thermocouple (24) is a C-type thermocouple.

6. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to claim 1, characterized in that: It also includes a protective cover (10, 11), which is detachably connected to the base (1), and the electrode (20) and the thermocouple (24) are partially located in the protective cover (10, 11).

7. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to claim 1, characterized in that: It also includes a first insulating sleeve (12) and a third insulating sleeve (14) respectively sleeved outside the two electrodes (20); or, The single-loop circulating water channel cooled high-temperature thermal evaporation source (100) further comprises a fifth insulating sleeve (16) and a sixth insulating sleeve (17) which are arranged in the heating chamber (27) of the base (1) and are sequentially placed outside the heating wire (25).

8. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to claim 1, characterized in that: It also includes a heating wire fixing ring (3, 4), The heating wire fixing rings (3, 4) are respectively connected to the base (1) and the heating wire (25) to fix the heating wire (25); Furthermore, the edges of the heating wire fixing rings (3, 4) are chamfered to prevent charge accumulation.

9. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to any one of claims 1 to 8, characterized in that: It also includes a baffle (7), a baffle shaft (8), a pneumatic magnetic coupling structure (21), a rotary cylinder (22) and a coupling (23); The rotary cylinder (22) sequentially drives and connects to the baffle shaft (8) through the coupling (23) and the pneumatic magnetic coupling structure (21); The baffle shaft (8) passes through the base (1), and the end of the baffle shaft (8) is connected to the baffle (7); The baffle (7) is configured to have a state of shielding the crucible (2) and a state of not shielding the crucible (2) under the drive of the baffle shaft (8).

10. The high-temperature thermal evaporation source (100) cooled by a single-loop circulating water channel according to claim 9, characterized in that: It also includes an insulating ring (5) and a cover plate (9), The cover plate (9) is arranged on the base (1) through the insulating ring (5) to support the edge portion (205) of the top (202) of the crucible (2); The baffle shaft (8) also passes through the insulating ring (5) and the cover plate (9); Furthermore, the cover plate (9) is provided in a raised position at the contact position with the edge portion (205), so as to form a gap between the edge portion (205) and the base (1).

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