Sputtering target material base with adjustable target material position

Abstract

The utility model relates to the technical field of sputtering target materials, in particular to a sputtering target material base with adjustable target material position, which comprises a working table, transverse guide rails are fixed on the upper surface of the working table close to the left side and the right side, and a support rod capable of moving left and right is clamped on the guide rails. Target material fixing bases are fixed to the positions, close to the upper ends, of the opposite sides of the supporting rods on the left side and the right side, and an electric lifting rod is fixed to the middle of the lower surface of the workbench. The distance between the target material and the workpiece is adjusted through adjustment of the supporting rod, and after adjustment is completed, the workpiece fixing bases are driven by the motor to rotate, so that the workpiece rotates relative to the target material clamped in the target material fixing bases on the left side and the right side, and comprehensive sputtering is carried out; and meanwhile, the electric lifting rod drives the workpiece fixing seat to perform continuous lifting adjustment so as to perform sputtering coating on different positions of the workpiece, manual adjustment for multiple times is not needed, and sputtering coating adjustment of the workpiece is more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering target materials, in particular to a sputtering target material base with adjustable target material position. Background Art

[0002] The main coating methods used in metal coating processing include ion plating, radio frequency magnetron sputtering, vacuum evaporation, chemical vapor deposition, etc. The distance between the sputtering target and the workpiece changes (the distance becomes larger), which will change the sputtering effect and lead to uneven coating. In addition, when the target size is relatively small relative to the workpiece, the distance from the target to different positions on the workpiece will vary, which will also lead to uneven coating.

[0003] Chinese patent publication number CN213507168U discloses a sputtering target base with adjustable target position, comprising a base, a column on the base, a placement platform at the upper end of the column, a workpiece seat on the placement platform, a rotating drum rotatably provided on the column, a turntable on the drum, a drive motor on the base, a driving gear on the output shaft of the drive motor, a latching tooth on the turntable, an arc-shaped mounting plate on both sides of the turntable, a vertical plate on the turntable, a movable movable seat between the arc-shaped mounting plate and the vertical plate, a sleeve above the movable seat, a lifting rod inside the sleeve, and a target fixing seat at the upper end of the lifting rod. The advantage of this utility model over the prior art is that the position of the target fixing seat is adjustable, and the distance between the target and the workpiece can be adjusted in real time during the coating process according to changes in target thickness or other processing requirements.

[0004] When sputtering, the above-mentioned sputtering target base with adjustable target position needs to drive the entire turntable to rotate, thereby driving the target fixing seats on both sides to rotate simultaneously to sputter the workpiece. During sputtering, the two target fixing seats also need to be adjusted in height multiple times to ensure sputtering at different positions of the workpiece. The structure of the entire device is somewhat complex, and it is not convenient to use and adjust during sputtering. Utility Model Content

[0005] In order to solve the problems that the structure of the sputtering target base with adjustable target position is complex and inconvenient to use and adjust during sputtering, the utility model proposes a sputtering target base with adjustable target position.

[0006] In order to solve the above technical problems, the utility model is implemented through the following technical solutions: a sputtering target base with adjustable target position, comprising a workbench, wherein the upper surface of the workbench is fixed with horizontal guide rails near the left and right sides, and the guide rails are clamped with support rods that can move left and right, and the opposite sides of the support rods on the left and right sides are fixed with target fixing seats near the upper ends, an electric lifting rod is fixed to the middle part of the lower surface of the workbench, and the top rod of the electric lifting rod passes through the workbench and is fixed to a fixed plate, a cover is fixed on the upper side of the fixed plate, and a motor is fixed on the inner side of the cover, and the output shaft of the motor passes through the top of the cover and is fixed to a workpiece fixing seat.

[0007] As a preferred solution, a plurality of insertion rods are fixed to the edge of the lower port of the cover shell, and a hanging platform is fixed to the side of the lower end of the insertion rod facing the center of the cover shell, and the upper surface of the fixed plate is provided with a socket that cooperates with the insertion rod.

[0008] As a preferred solution, the upper end of the output shaft of the motor passes through the top of the cover shell and is fixed with a square connector, and the upper end of the connector passes through the workpiece fixing seat and is fixed with a blocking screw.

[0009] As a preferred solution, vertically upward side plates are fixed on both the left and right sides of the workpiece fixing seat, and a tightening screw is installed on the outer thread of one of the side plates, and a sleeve hole is opened in the center of the workpiece fixing seat.

[0010] As a preferred solution, the size of the sleeve hole is the same as the cross-sectional size of the connector, and a recessed groove for hiding the blocking screw is provided at the upper end of the sleeve hole.

[0011] As a preferred solution, a sliding sleeve is fixed to the lower end of the support rod, and an adjusting screw is threadedly mounted on the upper surface of the sliding sleeve near the right end.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] During the sputtering process, the distance between the target and the workpiece is adjusted by adjusting the support rod. After the adjustment is completed, the motor drives the workpiece fixing seat to rotate so that the workpiece rotates relative to the targets clamped in the target fixing seats on the left and right sides to perform comprehensive sputtering. At the same time, the electric lifting rod drives the workpiece fixing seat to continuously rise and fall to perform sputtering on different positions of the workpiece, eliminating the need for multiple manual adjustments, making the sputtering adjustment of the workpiece more convenient.

[0014] At the same time, there is no need to set a turntable to rotate the targets on both sides, and there is no need to set a mechanism to drive the turntable to rotate, so the overall structure is simpler. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a schematic diagram of the cover of the utility model;

[0017] Figure 3 It is a schematic diagram of the motor of the present utility model;

[0018] Figure 4 This is a schematic diagram of a workpiece fixing seat of the present utility model;

[0019] Figure 5 It is a schematic diagram of the support rod of the present utility model.

[0020] In the figure: 1. Workbench; 2. Guide rail; 3. Support rod; 31. Sliding sleeve; 32. Adjusting screw; 4. Target fixing seat; 5. Workpiece fixing seat; 51. Side plate; 52. Tightening screw; 53. Hole; 6. Cover; 61. Insert rod; 62. Hanging platform; 7. Electric lifting rod; 8. Motor; 81. Connector; 82. Blocking screw. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is in no way intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0023] Unless otherwise specifically stated, the relative arrangement of the parts and steps, the numerical expressions and the numerical values ​​set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values ​​should be interpreted as being merely exemplary and not as limitations. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, and therefore, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0024] In the description of the present invention, it needs to be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention; the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself.

[0025] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0026] In addition, it should be noted that the use of words such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood as limiting the scope of protection of this utility model.

[0027] like Figure 1 As shown, a sputtering target base with adjustable target position includes a workbench 1, a horizontal guide rail 2 is fixed to the upper surface of the workbench 1 near the left and right sides, and a support rod 3 that can move left and right is clamped on the guide rail 2, a target fixing seat 4 is fixed to the opposite side of the left and right support rods 3 near the upper end, an electric lifting rod 7 is fixed to the middle part of the lower surface of the workbench 1, and the top rod of the electric lifting rod 7 passes through the workbench 1 and is fixed to a fixed plate 71, a cover shell 6 is fixed on the upper side of the fixed plate 71, and a motor 8 is fixed on the inner side of the cover shell 6, and the output shaft of the motor 8 passes through the top of the cover shell 6 and is fixed to a workpiece fixing seat 5. The distance between the target and the workpiece is adjusted by adjusting the support rod 3. After the adjustment is completed, the workpiece fixing seat 5 is driven by the motor 8 to rotate so that the workpiece rotates relative to the target materials clamped in the target fixing seats 4 on the left and right sides, thereby performing comprehensive sputtering. At the same time, the electric lifting rod 7 drives the workpiece fixing seat 5 to perform continuous lifting and adjustment so as to perform sputtering on different positions of the workpiece. There is no need for manual adjustment multiple times, making the sputtering adjustment of the workpiece more convenient. At the same time, there is no need to set a turntable to rotate the target materials on both sides, nor is there a mechanism for driving the turntable to rotate. The overall structure is simpler.

[0028] One side of the target holder 4 is fixed to the support rod 3 by welding or screws, and a cavity for placing the target is provided on the side of the target holder 4 away from the support rod 3. The target holder 4 uses screws installed on the outer circumference to tighten and fix the target.

[0029] like Figure 2 As shown, a plurality of insertion rods 61 are fixed to the edge of the lower port of the cover shell 6, and a hanging platform 62 is fixed to the side of the lower end of the insertion rod 61 facing the center of the cover shell 6, and a socket that cooperates with the insertion rod 61 is opened on the upper surface of the fixed plate 71. The cover shell 6 is inserted into the socket on the fixed plate 71 using the insertion rod 61. At this time, the insertion rod 61 is hung on the lower surface of the fixed plate 71 using the hanging platform 62 for clamping and fixing.

[0030] like Figure 3 As shown, the upper end of the output shaft of the motor 8 passes through the top of the cover 6 and is fixed with a square connector 81. The square connector 81 is inserted into the workpiece fixing seat 5 and can drive the workpiece fixing seat 5 to rotate when the square connector 81 rotates.

[0031] The upper end of the connector 81 passes through the workpiece fixing seat 5 and is fixed with a blocking screw 82 . The blocking screw 82 is used to limit and block the connector 81 inserted on the workpiece fixing seat 5 , thereby completing locking and fixing.

[0032] like Figure 4As shown, vertically upward side plates 51 are fixed on the left and right sides of the workpiece fixing seat 5, and a tightening screw 52 is installed on the outer thread of one of the side plates 51. When the workpiece is clamped, it is placed between the two side plates 51 and tightened and fixed with the tightening screw 52. A sleeve hole 53 is opened in the center of the workpiece fixing seat 5, and the workpiece fixing seat 5 is connected to the motor 8 using the sleeve hole 53.

[0033] The size of the sleeve hole 53 is the same as the cross-sectional size of the connecting head 81, so that the sleeve hole 53 and the connecting head 81 are tightly connected, and a recessed groove is opened at the upper end of the sleeve hole 53 to hide the blocking screw 82. The recessed groove accommodates and hides the screw tail of the blocking screw 82 to avoid affecting the clamping of the workpiece by the workpiece fixing seat 5.

[0034] like Figure 5 As shown, a sliding sleeve 31 is fixed to the lower end of the support rod 3, and an adjusting screw 32 is threadedly installed on the upper surface of the sliding sleeve 31 near the right end. The support rod 3 is mounted on the guide rail 2 using the sliding sleeve 31 so as to be adjusted to slide left and right. After adjustment, the sliding sleeve 31 is locked and fixed in position by locking the adjusting screw 32.

[0035] In this embodiment, the workpiece is placed on the inner side of the workpiece fixing seat 5 for clamping and fixing. At this time, the positions of the support rods 3 on the left and right sides are adjusted so that the target material in the target material fixing seat 4 maintains a suitable distance from the workpiece. When the workpiece is sputtered, the motor 8 drives the workpiece fixing seat 5 to drive the workpiece to continuously rotate in the horizontal direction. At the same time, the electric lifting rod 7 drives the workpiece to move back and forth in the vertical direction, thereby completing the all-round sputtering treatment of the target material on the workpiece.

[0036] The above is a preferred embodiment of the present invention. Technicians in the field of the present invention can also change and modify the above embodiment. Therefore, the present invention is not limited to the above specific embodiment. Any obvious improvements, replacements or modifications made by technicians in this field on the basis of the present invention are within the scope of protection of the present invention.

Claims

1. A sputtering target base with adjustable target position, comprising a workbench (1), characterized in that: The upper surface of the workbench (1) is fixed with transverse guide rails (2) near the left and right sides, and the guide rails (2) are clamped with support rods (3) that can move left and right. The target material fixing seat (4) is fixed near the upper end position on the opposite side of the support rods (3) on the left and right sides. An electric lifting rod (7) is fixed to the middle part of the lower surface of the workbench (1), and the top rod of the electric lifting rod (7) passes through the workbench (1) and is fixed with a fixed plate (71). A cover (6) is fixed on the upper side of the fixed plate (71), and a motor (8) is fixed on the inner side of the cover (6). The output shaft of the motor (8) passes through the top of the cover (6) and is fixed with a workpiece fixing seat (5).

2. The sputtering target base with adjustable target position according to claim 1, characterized in that: A plurality of insertion rods (61) are fixed to the edge of the lower port of the cover shell (6), and a hanging platform (62) is fixed to the side of the lower end of the insertion rod (61) facing the center of the cover shell (6), and a socket that matches the insertion rod (61) is opened on the upper surface of the fixing plate (71).

3. The sputtering target base with adjustable target position according to claim 2, characterized in that: The upper end of the output shaft of the motor (8) passes through the top of the cover shell (6) and is fixed with a square connector (81), and the upper end of the connector (81) passes through the workpiece fixing seat (5) and is fixed with a blocking screw (82).

4. The sputtering target base with adjustable target position according to claim 3, characterized in that: The left and right sides of the workpiece fixing seat (5) are both fixed with side plates (51) pointing upward vertically, and a tightening screw (52) is threadedly installed on the outer side of one of the side plates (51). A sleeve hole (53) is opened in the center of the workpiece fixing seat (5).

5. The sputtering target base with adjustable target position according to claim 4, characterized in that: The size of the sleeve hole (53) is the same as the cross-sectional size of the connector (81), and a recessed groove for hiding the blocking screw (82) is provided at the upper end of the sleeve hole (53).

6. The sputtering target base with adjustable target position according to claim 1, characterized in that: A sliding sleeve (31) is fixed to the lower end of the support rod (3), and an adjusting screw (32) is threadedly mounted on the upper surface of the sliding sleeve (31) near the right end.

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