Target material rotation driving structure and magnetron sputtering equipment

Abstract

The utility model discloses a target material rotation driving structure and magnetron sputtering equipment. Comprising a sealing seat, a flange seat, a rotating assembly, a first insulating part and a second insulating part, the flange seat is arranged in the sealing seat, the rotating assembly is used for driving a target material to rotate, the rotating assembly comprises a rotating shaft, the rotating shaft is arranged in the sealing seat, the first insulating part is arranged between the sealing seat and the rotating shaft, and the second insulating part is arranged on the flange seat. The first insulating part is arranged between the sealing seat and the rotating shaft, the second insulating part is arranged on the flange seat, the first insulating part and the second insulating part jointly play an insulating role, the insulating effect of the target material rotation driving structure is improved, and the target material rotation driving structure is not prone to breakdown.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a target material rotation driving structure and magnetron sputtering equipment. Background Art

[0002] Magnetron sputtering is currently a widely used thin-film deposition technology. With the continuous advancement of sputtering technology and the exploration of new functional thin films, its application has expanded into many production and scientific research fields. In magnetron sputtering, the material to be deposited serves as a target, fixed to a cathode, and the substrate serves as an anode. The system is evacuated, then filled with gas. A high voltage is applied between the cathode and anode, creating a glow discharge. During the sputtering process, the coupling of magnetic and electric fields causes electrons to spiral near the target surface, increasing the ionization rate of gas molecules. The resulting cations bombard the target at high speeds under the influence of the electric field, causing the sputtered ions to detach from the target surface and deposit on the substrate, forming a thin film. Driving the target to rotate is a crucial step in magnetron sputtering coating. The device that drives the target rotation is typically sealed and electrically charged, typically reaching 300-1000 volts. Existing target rotation devices only have an internal insulation layer, which can easily break down when the voltage is too high. This breakdown can cause a short circuit in the entire device, disrupting the entire coating process. Therefore, the existing device for driving the target material to rotate has poor insulation effect and is easily broken down. Utility Model Content

[0003] The main technical problem solved by the utility model is to provide a target material rotation driving structure and a magnetron sputtering device, so as to solve the problem that the existing device for driving the target material to rotate has poor insulation effect and is easily broken down.

[0004] In order to solve the above technical problems, a technical solution adopted by the present invention is to provide a target material rotation drive structure, including a sealing seat, a flange seat, a rotating assembly, a first insulating member and a second insulating member. The flange seat is arranged in the sealing seat, and the rotating assembly is used to drive the target material to rotate. The rotating assembly includes a rotating shaft, which is arranged in the sealing seat. The first insulating member is arranged between the sealing seat and the rotating shaft, and the second insulating member is arranged on the flange seat.

[0005] In some embodiments, the first insulating member is a hollow structure, and the first insulating member is disposed around the outer surface of the rotating shaft.

[0006] In some embodiments, the target rotation driving structure further includes a fixing plate, which abuts against an upper end of the first insulating member.

[0007] In some embodiments, a sealing ring is provided between the first insulating member and the sealing seat.

[0008] In some embodiments, a sealing ring is provided between the second insulating member and the flange seat.

[0009] In some embodiments, the rotating assembly further includes a driving member and a target material connecting member. The driving member is connected to the rotating shaft and is used to drive the rotating shaft to rotate. The rotating shaft is connected to the target material connecting member and the target material connecting member is used to connect the target material.

[0010] Based on the same inventive concept, the present invention also provides a magnetron sputtering device, including the above-mentioned target material rotation drive structure.

[0011] The beneficial effect of the present invention is that a first insulating member is provided between the sealing seat and the rotating shaft, and a second insulating member is provided on the flange seat, the first insulating member and the second insulating member jointly play an insulating role, thereby improving the insulation effect of the target material rotation drive structure and making it less likely to be penetrated. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural diagram of an embodiment of the present utility model. DETAILED DESCRIPTION

[0013] To facilitate understanding of the present invention, the present invention is described in more detail below with reference to the accompanying drawings and specific embodiments. The accompanying drawings illustrate preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described in this specification. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of the present invention.

[0014] It should be noted that, unless otherwise defined, all technical and scientific terms used in this specification have the same meanings as those commonly understood by those skilled in the art in the technical field of this utility model. The terms used in this specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model. The term "and / or" as used in this specification includes any and all combinations of one or more of the relevant listed items.

[0015] For the description of the present invention, the non-limiting Figure 1 The marks "front", "rear", "up", "down", "left" and "right" shown in the figure are used to facilitate understanding of the embodiment and are not intended to limit the present invention. Among them, the front-to-back direction represents the longitudinal direction, the left-to-right direction represents the transverse direction, and the up-down direction represents the vertical direction.

[0016] Figure 1An embodiment of the target material rotation drive structure of the present invention is shown, which includes a sealing seat 1, a flange seat 2, a rotating assembly 3, a first insulating member 4 and a second insulating member 5. The flange seat 2 is arranged in the sealing seat 1, and the rotating assembly 3 is used to drive the target material to rotate. The rotating assembly 3 includes a rotating shaft 31, and the rotating shaft 31 is arranged in the sealing seat 1. The first insulating member 4 is arranged between the sealing seat 1 and the rotating shaft 31, and the second insulating member 5 is arranged on the flange seat 2.

[0017] In the present invention, a first insulating member 4 is provided between the sealing seat 1 and the rotating shaft 31, and a second insulating member 5 is provided on the flange seat 2. The first insulating member 4 and the second insulating member 5 jointly play an insulating role, thereby improving the insulation effect of the target material rotation drive structure and making it less likely to be broken down.

[0018] In some embodiments, as Figure 1 As shown, the first insulating member 4 is a hollow structure, and the first insulating member 4 is disposed around the outer surface of the rotating shaft 31. By surrounding the first insulating member 4 around the outer surface of the rotating shaft 31, the insulation effect is better.

[0019] In some embodiments, as Figure 1 As shown, the target rotation drive structure further includes a fixing plate 6, which abuts against the upper end of the first insulating member 4. By abutting the fixing plate 6 against the upper end of the first insulating member 4, the first insulating member 4 can be fixed to prevent the first insulating member 4 from vibrating or displacing when the rotating shaft 31 rotates.

[0020] The magnetron sputtering process is carried out in a vacuum environment, so the airtightness of the entire target rotation drive structure must be ensured.

[0021] In some embodiments, as Figure 1 As shown, a sealing ring 7 is provided between the first insulating member 4 and the sealing seat 1. The number of sealing rings 7 can be adjusted according to actual conditions. In this embodiment, three sealing rings 7 are provided between the first insulating member 4 and the sealing seat 1, thereby improving the airtightness of the target rotation drive structure.

[0022] In some embodiments, as Figure 1 As shown, a sealing ring 7 is provided between the second insulating member 5 and the flange seat 2, which further improves the airtightness of the target material rotation drive structure and ensures the normal progress of the magnetron sputtering process.

[0023] In some embodiments, as Figure 1As shown, the rotating assembly 3 also includes a driving member 32 and a target material connecting member 33. The driving member 32 is connected to the rotating shaft 31. The driving member 32 can be a motor or a hydraulic pump. The driving member 32 is used to drive the rotating shaft 31 to rotate. The rotating shaft 31 is connected to the target material connecting member 33, and the target material connecting member 33 is used to connect the target material. The driving member 32 drives the rotating shaft 31 to rotate, and the rotating shaft 31 is connected to the target material connecting member 33. The target material connecting member 33 also rotates accordingly, thereby driving the target material to rotate. The rotating assembly 3 has a compact structure and takes up little space.

[0024] The driving member 32 may be directly connected to the rotating shaft 31 . When it is inconvenient to directly connect the driving member 32 to the rotating shaft 31 , a transmission connection may be achieved through the transmission member 34 .

[0025] In some embodiments, as Figure 1 As shown, the output shaft of the driving member 32 is connected to the transmission member 34, which can be a belt or a gear, and the transmission member 34 is rotatably connected to the rotating shaft 31. By providing the transmission member 34, the transmission connection between the driving member 32 and the rotating shaft 31 is realized, which is more convenient.

[0026] In some embodiments, as Figure 1 As shown, the target connector 33 includes a main body 331 and a clamping portion 332. The clamping portion 332 extends along the outer edge of the main body 331 in a direction away from the rotation axis 31. The main body 331 is connected to the rotation axis 31. When the target is connected to the target connector 33, the clamping portion 332 contacts the side of the target, improving stability during rotation.

[0027] In some embodiments, as Figure 1 As shown, the target connector 33 further includes extensions 333, which extend along both sides of the bottom of the main body 331 toward the rotation axis 31. The extensions 333 abut against the side edges of the rotation axis 31. By abutting the extensions 333 against the side edges of the rotation axis 31, the stability of the target connector 33 can be increased when it rotates synchronously with the rotation axis 31, making it less susceptible to damage.

[0028] like Figure 1 As shown, a sealing ring 7 is provided between the rotating shaft 31 and the target material connecting member 33 . There are two sealing rings 7 , which are respectively located at the top and side of the rotating shaft 31 , so as to achieve a better sealing effect.

[0029] Based on the same inventive concept, the present invention also provides a magnetron sputtering device, including the above-mentioned target material rotation drive structure.

[0030] Thus, the present invention discloses a target material rotation drive structure and magnetron sputtering equipment; the structure includes a sealing seat, a flange seat, a rotating assembly, a first insulating member, and a second insulating member. The flange seat is disposed within the sealing seat. The rotating assembly is used to drive the target material to rotate. The rotating assembly includes a rotating shaft disposed within the sealing seat. The rotating shaft is disposed between the sealing seat and the rotating shaft. The first insulating member is disposed between the sealing seat and the rotating shaft, and the second insulating member is disposed on the flange seat. By disposing the first insulating member between the sealing seat and the rotating shaft and disposing the second insulating member on the flange seat, the first insulating member and the second insulating member jointly serve as an insulator, thereby improving the insulation effect of the target material rotation drive structure and making it less susceptible to breakdown.

[0031] The above are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A target material rotation drive structure, characterized in that: It includes a sealing seat, a flange seat, a rotating assembly, a first insulating member and a second insulating member. The flange seat is arranged in the sealing seat. The rotating assembly is used to drive the target material to rotate. The rotating assembly includes a rotating shaft, which is arranged in the sealing seat. The first insulating member is arranged between the sealing seat and the rotating shaft, and the second insulating member is arranged on the flange seat.

2. The target material rotation driving structure according to claim 1, characterized in that: The first insulating member is a hollow structure and is disposed around the outer surface of the rotating shaft.

3. The target material rotation driving structure according to claim 2, characterized in that: The target material rotation driving structure further includes a fixing plate, which abuts against the upper end of the first insulating member.

4. The target rotation driving structure according to claim 1, characterized in that: A sealing ring is provided between the first insulating member and the sealing seat.

5. The target rotation driving structure according to claim 1, characterized in that: A sealing ring is provided between the second insulating member and the flange seat.

6. The target rotation driving structure according to claim 1, characterized in that: The rotating assembly further includes a driving member and a target material connecting member. The driving member is connected to the rotating shaft and is used to drive the rotating shaft to rotate. The rotating shaft is connected to the target material connecting member and the target material connecting member is used to connect the target material.

7. A magnetron sputtering device, characterized in that: The target material rotation drive structure includes any one of claims 1 to 6.

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