Target material rotation driving structure and magnetron sputtering equipment

Abstract

The utility model discloses a target material rotation driving structure and magnetron sputtering equipment. The rear end of the target rotation driving structure is used for being connected with a vacuum coating chamber, the target rotation driving structure comprises a rotating shaft, a sealing shaft sleeve and a first bearing, the sealing shaft sleeve is arranged on the periphery of the rotating shaft, and the first bearing is located between the sealing shaft sleeve and the rotating shaft and arranged on the front side of the rotating shaft in a sleeving mode. The first bearing is arranged between the sealing shaft sleeve and the rotating shaft, the first bearing is arranged on the front side of the rotating shaft in a sleeving mode, the first bearing plays a role in supporting the front side of the rotating shaft, when the rear end of the target rotation driving structure is connected with the vacuum coating chamber, the front side of the rotating shaft cannot droop due to gravity, and the concentricity of the rotating shaft during rotation is guaranteed; and the rotating shaft is more stable when driving the target material to rotate, so that the sputtering coating effect is better.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a target material rotation driving structure and magnetron sputtering equipment. Background Art

[0002] Magnetron sputtering coating technology is widely used in the production of metal thin films. The basic principle of sputtering coating is to cause argon gas to glow discharge under vacuum conditions. Argon atoms are ionized into argon ions. Under the action of the electric field, they are accelerated to bombard a cathode target made of plating material. The target particles are sputtered and deposited, eventually forming a thin film. Existing magnetron sputtering coating equipment generally includes a rotating target drive device, a rotating target, and a vacuum coating chamber. The sputtering process of the rotating target is carried out in the vacuum coating chamber. Existing rotating target drive devices place the target material at the end of a rotating shaft, and the rotation of the rotating shaft drives the target material to rotate.

[0003] The existing target material rotation drive device is fixed to the vacuum coating chamber through the end portion. However, when the length of the rotating shaft is long, the other end opposite to the fixed portion will sag slightly under the action of gravity, affecting the concentricity of the rotating shaft during rotation. When driving the target material to rotate, it will shake, which is not stable enough. In addition, the shaking of the target material will further affect the effect of sputtering coating. Utility Model Content

[0004] The main technical problem solved by the utility model is to provide a target material rotation drive structure and a magnetron sputtering device, which solves the problem that the rotating shaft of the existing target material rotation drive device is prone to shaking and is not stable when driving the target material to rotate.

[0005] In order to solve the above technical problems, a technical solution adopted by the present invention is to provide a target material rotation drive structure. The rear end of the target material rotation drive structure is used to connect to the vacuum coating chamber. The target material rotation drive structure includes a rotating shaft, a sealing sleeve and a first bearing. The sealing sleeve is arranged on the periphery of the rotating shaft. The first bearing is located between the sealing sleeve and the rotating shaft. The first bearing sleeve is arranged on the front side of the rotating shaft.

[0006] In some embodiments, the target material rotation driving structure further includes a first seal, which is an oil seal, and the first seal is disposed between the rotating shaft and the sealing sleeve.

[0007] In some embodiments, the target rotation driving structure further includes a second seal disposed in front of the first seal.

[0008] In some embodiments, a fixing hole is provided on the sealing sleeve, and the fixing hole is used to connect to the vacuum coating chamber.

[0009] In some embodiments, the rotating shaft is a hollow structure, a fixed shaft is provided inside the rotating shaft, a connecting cavity is provided inside the fixed shaft, and the connecting cavity is used for passing a water pipe.

[0010] In some embodiments, a second bearing is provided between the rotating shaft and the fixed shaft.

[0011] Based on the same inventive concept, the present invention also provides a magnetron sputtering device, including the above-mentioned target material rotation drive structure.

[0012] The beneficial effect of the present invention is that a first bearing is arranged between the sealing sleeve and the rotating shaft, and the first bearing sleeve is arranged on the front side of the rotating shaft. The first bearing supports the front side of the rotating shaft. When the rear end of the target material rotation drive structure is connected to the vacuum coating chamber, the front side of the rotating shaft will not sag due to gravity, thereby ensuring the concentricity of the rotating shaft during rotation. The rotating shaft is more stable when driving the target material to rotate, and the sputtering coating effect is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural diagram of an embodiment of the present utility model. DETAILED DESCRIPTION

[0014] To facilitate understanding of the present invention, the present invention is described in more detail below with reference to the accompanying drawings and specific embodiments. The accompanying drawings illustrate preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described in this specification. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of the present invention.

[0015] It should be noted that, unless otherwise defined, all technical and scientific terms used in this specification have the same meanings as those commonly understood by those skilled in the art in the technical field of this utility model. The terms used in this specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model. The term "and / or" as used in this specification includes any and all combinations of one or more of the relevant listed items.

[0016] Figure 1 An embodiment of the target material rotation drive structure of the utility model is shown. The rear end of the target material rotation drive structure is used to connect to the vacuum coating chamber. The target material rotation drive structure includes a rotating shaft 1, a sealing sleeve 2, and a first bearing 3. The sealing sleeve 2 is arranged on the periphery of the rotating shaft 1, and the first bearing 3 is located between the sealing sleeve 2 and the rotating shaft 1. The first bearing 3 is sleeved on the front side of the rotating shaft 1.

[0017] In the present invention, a first bearing 3 is provided between the sealing sleeve 2 and the rotating shaft 1. The first bearing 3 is sleeved on the front side of the rotating shaft 1. The first bearing 3 supports the front side of the rotating shaft 1. When the rear end of the target rotation drive structure is connected to the vacuum coating chamber, the front side of the rotating shaft 1 will not sag due to gravity, thereby ensuring the concentricity of the rotating shaft 1 during rotation. The rotating shaft 1 is more stable when driving the target to rotate, and the sputtering coating effect is better.

[0018] It should be noted that one end of the rotating shaft 1 is connected to the output end of the power source, and the other end of the rotating shaft 1 is used to connect to the target material. The rotating shaft 1 is driven by the power source to rotate, and the rotating shaft 1 further drives the target material to rotate. The power source can be driven by a motor or a hydraulic drive.

[0019] In some embodiments, as Figure 1 As shown, the target rotation drive structure further includes a first seal 4, which is an oil seal and is disposed between the rotating shaft 1 and the sealing sleeve 2. By disposing the first seal 4 between the rotating shaft 1 and the sealing sleeve 2, leakage of lubricating oil can be effectively prevented.

[0020] In some embodiments, as Figure 1 As shown, the target material rotation drive structure further includes a second seal 5, which can be a silicone seal ring or the like. The second seal 5 is arranged in front of the first seal 4. By providing the second seal 5 in the gap between the rotating shaft 1 and the sealing sleeve 2, the airtightness of the target material rotation drive structure is improved.

[0021] In some embodiments, as Figure 1 As shown, the sealing sleeve 2 is provided with a fixing hole 21, which is used to connect to the vacuum coating chamber. Connecting to the vacuum coating chamber through the fixing hole 21 is more convenient.

[0022] In some embodiments, as Figure 1 As shown, the rotating shaft 1 is a hollow structure. A fixed shaft 6 is also disposed inside the rotating shaft 1. A connecting cavity 61 is disposed within the fixed shaft 6 for passing a water pipe. By disposing the fixed shaft 6 and the connecting cavity 61 within the fixed shaft 6, the internal space of the rotating shaft 1 is efficiently utilized. A water pipe can be passed through the connecting cavity 61 for heat dissipation, creating a favorable environment for magnetron sputtering coating and improving the efficiency of magnetron sputtering.

[0023] In some embodiments, as Figure 1 As shown, a second bearing 7 is provided between the rotating shaft 1 and the fixed shaft 6. By providing the second bearing 7 between the rotating shaft 1 and the fixed shaft 6, the stability of the rotating shaft 1 during rotation is further improved, and the efficiency of magnetron sputtering is improved.

[0024] Based on the same inventive concept, the present invention also provides a magnetron sputtering device, including the above-mentioned target material rotation drive structure.

[0025] It can be seen that the present invention discloses a target material rotation drive structure and a magnetron sputtering device. The rear end of the target material rotation drive structure is used to connect to the vacuum coating chamber. The target material rotation drive structure includes a rotating shaft, a sealing sleeve and a first bearing. The sealing sleeve is arranged on the periphery of the rotating shaft. The first bearing is arranged between the sealing sleeve and the rotating shaft. The first bearing sleeve is arranged on the front side of the rotating shaft. By arranging the first bearing between the sealing sleeve and the rotating shaft, the first bearing sleeve is arranged on the front side of the rotating shaft, and the first bearing is supported on the front side of the rotating shaft, when the rear end of the target material rotation drive structure is connected to the vacuum coating chamber, the front side of the rotating shaft will not sag due to gravity, thereby ensuring the concentricity of the rotating shaft during rotation. The rotating shaft is more stable when driving the target material to rotate, and the sputtering coating effect is better.

[0026] The above are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A target material rotation drive structure, characterized in that: The rear end of the target material rotation drive structure is used to connect to the vacuum coating chamber. The target material rotation drive structure includes a rotating shaft, a sealing sleeve and a first bearing. The sealing sleeve is arranged on the periphery of the rotating shaft. The first bearing is located between the sealing sleeve and the rotating shaft. The first bearing sleeve is arranged on the front side of the rotating shaft.

2. The target material rotation driving structure according to claim 1, characterized in that: The target material rotation driving structure further includes a first seal, which is an oil seal and is disposed between the rotating shaft and the sealing sleeve.

3. The target material rotation driving structure according to claim 2, characterized in that: The target material rotation driving structure further includes a second sealing member, which is arranged on the front side of the first sealing member.

4. The target rotation driving structure according to claim 1, characterized in that: The sealing sleeve is provided with a fixing hole, and the fixing hole is used for connecting to the vacuum coating chamber.

5. The target rotation driving structure according to claim 1, characterized in that: The rotating shaft is a hollow structure. A fixed shaft is provided inside the rotating shaft. A communicating cavity is provided inside the fixed shaft. The communicating cavity is used for passing a water pipe.

6. The target rotation driving structure according to claim 5, characterized in that: A second bearing is provided between the rotating shaft and the fixed shaft.

7. A magnetron sputtering device, characterized in that: The target material rotation drive structure includes any one of claims 1 to 6.

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