Condensate water discharging mechanism for vacuum coating machine

Abstract

The utility model relates to the technical field of vacuum coating machines, in particular to a condensate water discharging mechanism for a vacuum coating machine, which comprises a coating machine body, a refrigerating machine arranged outside the coating machine body, an annular groove arranged on the inner side wall of the coating machine body, a spiral cold trap tube arranged in the annular groove, two ends of the cold trap tube connected with the refrigerating machine, and a water outlet arranged on the inner side wall of the coating machine body. Scraping frames are arranged in the blocking frames in a sliding mode, sliding holes are formed in the four corners of each scraping frame, sliding rods are arranged in the sliding holes in a sliding mode, the lower ends of the sliding rods are fixedly connected with the bottom of the coating machine body, supporting plates are arranged on the two sides between the two scraping frames, and the lower ends of the supporting plates are fixedly connected with the bottom of the coating machine body. And a reciprocating mechanism capable of driving the scraping frame to reciprocate and lift is arranged on the supporting plate. According to the utility model, large-area condensate water can be conveniently scraped and collected, the scraping effect is good, and the vacuum coating effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating machines, in particular to a condensed water discharge mechanism for vacuum coating machines. Background Art

[0002] Vacuum coating machines mainly refer to a type of coating that requires a relatively high vacuum level. There are many types of coating machines, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, and many more. The main concepts are categorized into evaporation and sputtering.

[0003] Water vapor is a typical environmental contaminant within the vacuum chamber of coating equipment, accounting for 65% to 95% of the residual gas within the chamber. When the vacuum reaches 10E-2Pa, water vapor is difficult to expel from the chamber using standard vacuum pumps. This is a typical contaminant with adverse effects, serving as a source of workpiece contamination and impacting product yield and quality. Water vapor in vacuum applications not only impacts the quality of the vacuum system but also hinders vacuum levels, thus affecting process results. Cold traps in coating equipment capture water vapor within the vacuum chamber and condense it on the surface, thereby increasing the vacuum level during evacuation.

[0004] In the existing technology, vacuum coating machines often use a spiral cold trap tube to surround the vacuum cavity, which can achieve a better condensation effect. However, in this way, the cavity wall of the vacuum cavity will adhere to the surface of the cold trap tube over a large area, resulting in a decrease in the condensation effect and inconvenience in scraping and collecting the condensed water. Therefore, we have introduced a condensed water discharge mechanism for vacuum coating machines. Utility Model Content

[0005] The purpose of the utility model is to provide a condensation water discharge mechanism for a vacuum coating machine, which is convenient for scraping and collecting condensation water over a large area, has good scraping effect, improves the effect of vacuum coating, and solves the problems raised in the above-mentioned background technology.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A condensation water discharge mechanism for a vacuum coating machine comprises a coating machine body, a refrigerator is provided on the outside of the coating machine body, an annular groove is opened on the inner wall of the coating machine body, a cold trap tube is provided in the annular groove, the cold trap tube is arranged in a spiral shape, both ends of the cold trap tube are connected to the refrigerator, a baffle is fixedly provided in the opening of the annular groove, a scraper frame is slidably provided inside the baffle, sliding holes are provided at the four corners of the scraper frame, a sliding rod is slidably provided in the sliding hole, the lower end of the sliding rod is fixedly connected to the bottom of the coating machine body, support plates are provided on both sides between the two scraper frames, the lower end of the support plate is fixedly connected to the bottom of the coating machine body, and a reciprocating mechanism that can drive the scraper frame to move back and forth is provided on the support plate.

[0008] Preferably, the reciprocating mechanism includes a motor, which is fixedly arranged in the middle of the side wall of the support plate. A turntable is fixedly provided at the output end of the motor, and a slider is fixedly provided at the edge of the turntable away from the motor. A horizontal strip frame is slidingly provided on the outside of the slider, and both ends of the strip frame are fixedly connected to the inner wall of the scraping frame.

[0009] Preferably, the sliding rod wall is located at the lower side of the scraper frame and a spring is provided in the movable sleeve.

[0010] Preferably, an annular collecting groove is provided at the lower edge of the coating machine body, a drain pipe is provided on the groove wall of the annular collecting groove, and a valve is provided on the drain pipe.

[0011] Preferably, a circular block is fixedly provided on the upper end of the sliding rod.

[0012] Preferably, the diameter of the circular block is larger than the aperture of the sliding hole.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] The vacuum coating machine, which is convenient for discharging condensed water, is provided with a refrigerator, a scraping frame, a baffle frame, a coating machine body, a turntable, a support plate, a motor, a strip frame, a slider, a cold trap tube, an annular collection tank, a drain pipe, a round block, a slide bar and a spring. When water vapor adheres to the surface of the baffle frame over a large area, the motor is started, and the output end of the motor drives the turntable to rotate, and the turntable drives the slider to rotate. The slider moves back and forth in the strip frame and drives the strip frame to rise and fall back and forth, and the strip frame drives the scraping frame to rise and fall back and forth, and the scraping frame scrapes the water vapor on the surface of the baffle frame into the annular collection tank. After the motor is turned off, the spring pushes the scraping frame upward to reset it, and scraping is completed. When the vacuum coating is completed, the valve is opened to discharge the condensed water in the annular collection tank, which is convenient for scraping and collecting the condensed water over a large area, has a good scraping effect, and improves the effect of the vacuum coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural schematic diagram of a condensed water discharge mechanism for a vacuum coating machine.

[0016] Figure 2 This is a schematic diagram of the internal structure of a condensed water discharge mechanism for a vacuum coating machine.

[0017] Figure 3 for Figure 2 An enlarged schematic diagram of part A in the figure.

[0018] Figure 4 for Figure 2 An enlarged schematic diagram of part B in the middle.

[0019] In the figure: 1. Refrigerator; 2. Scraper frame; 3. Stop frame; 4. Coating machine body; 5. Turntable; 6. Support plate; 7. Motor; 8. Bar frame; 9. Slider; 10. Cold trap tube; 11. Annular collecting trough; 12. Drain pipe; 13. Round block; 14. Sliding rod; 15. Spring. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] See also Figures 1 to 4 , the utility model provides a technical solution:

[0022] A condensed water discharge mechanism for a vacuum coating machine includes a coating machine body 4, a refrigerator 1 is provided on the outside of the coating machine body 4, an annular groove is opened on the inner wall of the coating machine body 4, a cold trap tube 10 is provided in the annular groove, the cold trap tube 10 is arranged in a spiral shape, and both ends of the cold trap tube 10 are connected to the refrigerator 1, a baffle 3 is fixedly provided in the opening of the annular groove, a scraper frame 2 is slidably provided inside the baffle 3, the scraper frame 2 is provided with sliding holes at the four corners, a slide rod 14 is slidably provided in the slide hole, the lower end of the slide rod 14 is fixedly connected to the bottom of the coating machine body 4, support plates 6 are provided on both sides between the two scraper frames 2, the lower end of the support plate 6 is fixedly connected to the bottom of the coating machine body 4, and a reciprocating mechanism that can drive the scraper frame 2 to move back and forth is provided on the support plate 6.

[0023] The reciprocating mechanism includes a motor 7, which is electrically connected to an external power supply through a control switch. The motor 7 is fixedly arranged in the middle of the side wall of the support plate 6. A turntable 5 is fixedly provided at the output end of the motor 7. A slider 9 is fixedly provided at the edge of the turntable 5 away from the motor 7. A horizontal strip frame 8 is slidingly provided on the outside of the slider 9. The two ends of the strip frame 8 are fixedly connected to the inner wall of the scraping frame 2.

[0024] The wall of the slide bar 14 is located at the lower side of the scraping frame 2 and a spring 15 is provided on the movable sleeve. The spring 15 can ensure that the scraping frame 2 is always on the upper side of the slide bar 14 when the motor 7 is turned off, thereby improving the scraping effect.

[0025] An annular collecting trough 11 is provided at the lower edge of the coating machine body 4 , and a drain pipe 12 is provided on the trough wall of the annular collecting trough 11 . A valve is provided on the drain pipe 12 , and the valve can control the opening and closing of the drain pipe 12 .

[0026] A circular block 13 is fixedly provided on the upper end of the slide rod 14. The diameter of the circular block 13 is larger than the aperture of the slide hole. The circular block 13 can prevent the slide rod 14 from escaping from the slide hole.

[0027] During use, when water vapor adheres to the surface of the baffle frame 3 over a large area, the motor 7 is started, and the output end of the motor 7 drives the turntable 5 to rotate, and the turntable 5 drives the slider 9 to rotate. The slider 9 drives the bar frame 8 to move back and forth while driving the bar frame 8 to rise and fall back and forth, and the bar frame 8 drives the scraping frame 2 to rise and fall back and forth, and the scraping frame 2 scrapes the water vapor on the surface of the baffle frame 3 into the annular collecting groove 11. After turning off the motor 7, the spring 15 pushes the scraping frame 2 upward to reset it, and the scraping is completed. When the vacuum coating is completed, the valve is opened to discharge the condensed water in the annular collecting groove 11, which is convenient for scraping and collecting the condensed water over a large area. The scraping effect is good, which improves the effect of the vacuum coating.

[0028] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A condensed water discharge mechanism for a vacuum coating machine, comprising a coating machine body (4), characterized in that: The coating machine body (4) is provided with a refrigerator (1) on the outside, and an annular groove is provided on the inner side wall of the coating machine body (4), and a cold trap tube (10) is provided in the annular groove, and the cold trap tube (10) is arranged in a spiral shape. Both ends of the cold trap tube (10) are connected to the refrigerator (1), and a retaining frame (3) is fixed in the opening of the annular groove, and a scraping frame (2) is slidably provided inside the retaining frame (3), and the scraping frame (2) is provided with sliding holes at the four corners, and a sliding rod (14) is slidably provided in the sliding hole, and the lower end of the sliding rod (14) is fixedly connected to the bottom of the coating machine body (4), and support plates (6) are provided on both sides between the two scraping frames (2), and the lower end of the support plate (6) is fixedly connected to the bottom of the coating machine body (4), and a reciprocating mechanism that can drive the scraping frame (2) to move back and forth is provided on the support plate (6).

2. The condensed water discharge mechanism for a vacuum coating machine according to claim 1, characterized in that: The reciprocating mechanism comprises a motor (7), the motor (7) being fixedly arranged in the middle of the side wall of the support plate (6), a turntable (5) being fixedly provided at the output end of the motor (7), a slider (9) being fixedly provided at the edge of the turntable (5) away from the motor (7), a horizontal strip frame (8) being slidably provided on the outside of the slider (9), and both ends of the strip frame (8) being fixedly connected to the inner side wall of the scraping frame (2).

3. The condensed water discharge mechanism for a vacuum coating machine according to claim 1, characterized in that: The rod wall of the sliding rod (14) is located at the lower side of the scraping frame (2) and is movably sleeved with a spring (15).

4. The condensed water discharge mechanism for a vacuum coating machine according to claim 1, characterized in that: An annular collecting groove (11) is provided at the lower edge of the coating machine body (4), a drain pipe (12) is provided on the groove wall of the annular collecting groove (11), and a valve is provided on the drain pipe (12).

5. The condensed water discharge mechanism for a vacuum coating machine according to claim 1, characterized in that: A circular block (13) is fixedly provided on the upper end of the slide rod (14).

6. The condensed water discharge mechanism for a vacuum coating machine according to claim 5, characterized in that: The diameter of the circular block (13) is larger than the aperture of the sliding hole.

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