Air inlet mechanism for diamond growth

Abstract

The utility model discloses an air inlet mechanism for diamond growth, and relates to the technical field of diamond growth, a cover body is arranged on an operation box, and a substrate table and a water cooling table are arranged in the operation box; an air inlet pipe is arranged above the cover body; an air outlet is formed in the bottom of the operation box; the turntable is screwed on the cover body through a sealing bearing in a penetrating manner; the dispersion pipes are respectively inserted and fixed on the rotary table; the first connecting pipes are connected with the upper ends of the dispersing pipes in a penetrating mode. The second connecting pipe is in through connection with the air inlet pipe through a sealing bearing; the diameter of a first gear is far smaller than that of a gear ring, and under the action of a steering speed reducer, a first connecting pipe, a dispersing pipe and a rotating disc rotate slowly, so that airflow can be dispersed, uniformly and slowly enter a cover body and an operation box; the airflow velocity is reduced while the airflow is homogenized, so that the airflow can be stable and uniform, the stability and uniformity of the airflow are improved, the operation box is filled with growth gas, and the consistency of diamond growth is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of diamond growth, in particular to an air intake mechanism for diamond growth. Background Art

[0002] In existing MPCVD (Microwave Plasma Chemical Vapor Deposition) equipment, the air intake system directly impacts the plasma formation of the growth gas. A conventional approach involves directing air intake from the top center of the housing, blowing it directly onto the substrate table. However, this intake method fails to evenly distribute air within the process chamber, resulting in poor diamond growth consistency. Furthermore, increased intake airflow can lead to uneven flow, impacting diamond product quality. Therefore, a novel air intake mechanism for diamond growth has been proposed. Utility Model Content

[0003] The purpose of the utility model is to address the defects and shortcomings of the existing technology and provide an air intake mechanism for diamond growth, so that the airflow can be dispersed, uniform and slowly enter the cover body and the operating box; while uniforming the airflow, the airflow speed is reduced so that the airflow can be stable and uniform, the stability and uniformity of the airflow are improved, the growth gas is filled in the operating box, and the consistency of diamond growth is ensured.

[0004] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions: it comprises an operating box, a cover body and an air inlet pipe; the operating box is provided with a cover body, and a substrate table and a water cooling table are provided in the operating box; an air inlet pipe is provided above the cover body; and an air outlet is provided at the bottom of the operating box;

[0005] It also contains:

[0006] A turntable, wherein the turntable is screwed onto the cover body through a sealed bearing;

[0007] Dispersion tubes, the number of which is several and each of which is inserted and fixed on the turntable;

[0008] A No. 1 connecting pipe, wherein the number of the No. 1 connecting pipes is several and each of the connecting pipes is connected to the upper end of the dispersion pipe;

[0009] A second connecting pipe, the second connecting pipe is connected to the intake pipe through a sealed bearing;

[0010] The dispersion mechanism is arranged in the operation box.

[0011] Preferably, the gear ring is fixed on the No. 2 connecting pipe, and the left side of the gear ring is engaged with a No. 1 gear. A No. 1 rotating shaft is inserted and fixed in the middle of the No. 1 gear. The No. 1 rotating shaft is driven by a rotating motor, and the rotating motor is fixed on the operating box through a bracket; the rotating motor is connected to an external power supply.

[0012] Preferably, the diameter of the No. 1 gear is much smaller than the diameter of the gear ring. The bottom of the No. 1 shaft is connected to a steering reducer, the left end of the steering reducer is connected to the No. 2 shaft, and the No. 2 shaft is connected to the output shaft of the rotating motor.

[0013] Preferably, the bottom of the steering reducer is fixed to the bracket via a mounting bracket, and the mounting bracket is arranged in an "L"-shaped structure.

[0014] Preferably, the dispersion mechanism comprises:

[0015] A conical plate is provided below the dispersion pipe; the conical plate is provided with a plurality of guide grooves; and a plurality of through holes are provided through the conical plate;

[0016] Sealing plates, the number of which is several and which are respectively distributed in an annular shape and fixed on the annular wall of the conical plate;

[0017] Sliders, there are several of them, and they are fixed on the cover plate respectively;

[0018] The slide rail is fixed in the operating box, and the slider is slidably arranged on the slide rail.

[0019] Preferably, a plurality of fan blades are respectively distributed in a ring shape above the conical plate, and the fan blades are connected by a third rotating shaft, and the third rotating shaft is fixed on the conical plate.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] 1. Equipped with a turntable, dispersion pipe, No. 1 connecting pipe, and No. 2 connecting pipe, which can disperse the airflow of the growth gas into the operating box;

[0022] 2. The diameter of the No. 1 gear is much smaller than the diameter of the gear ring. Under the action of the steering reducer, the No. 1 connecting pipe, dispersion pipe, and turntable rotate slowly, so that the air flow can be dispersed, evenly, and slowly enter the cover and operation box;

[0023] 3. The air flow blows on the conical plate, is evacuated through the guide groove and flows downward through the through hole, while uniforming the air flow, reducing the air flow speed, making the air flow stable and uniform, improving the stability and uniformity of the air flow, filling the operating box with growth gas, and ensuring the consistency of diamond growth. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural diagram of the present utility model.

[0025] Figure 2 yes Figure 1 Enlarged view of part A in .

[0026] Figure 3 It is a schematic diagram of the internal structure of the utility model.

[0027] Figure 4 yes Figure 3 Enlarged view of part B in .

[0028] Description of reference numerals:

[0029] Operation box 1, cover 2, air intake pipe 3, turntable 4, dispersion pipe 5, No. 1 connecting pipe 6, No. 2 connecting pipe 7, gear ring 8, No. 1 gear 9, No. 1 rotating shaft 10, rotating motor 11, bracket 12, steering reducer 13, No. 2 rotating shaft 14, mounting frame 15, dispersion mechanism 16, conical plate 16-1, guide groove 16-2, through hole 16-3, sealing plate 16-4, slider 16-5, slide rail 16-6, fan blade 16-7, No. 3 rotating shaft 16-8. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. The preferred embodiments in the description are only used as examples. All other embodiments obtained by those skilled in the art without making any creative work are within the scope of protection of the present invention.

[0031] This specific implementation adopts the following technical solutions:

[0032] See also Figure 1-4 This embodiment includes an operation box 1, a cover 2 and an air inlet pipe 3; the operation box 1 is provided with a cover 2, and the operation box 1 is provided with a substrate stage and a water cooling stage; the air inlet pipe 3 is provided above the cover 2; and an air outlet is provided at the bottom of the operation box 1;

[0033] It also contains:

[0034] The turntable 4 is screwed onto the cover 2 via a sealed bearing;

[0035] Dispersion tubes 5, there are several dispersion tubes 5, and each of them is inserted and fixed on the turntable 4;

[0036] A number of first connecting pipes 6, each of which is connected to the upper end of the dispersion pipe 5;

[0037] A second connecting pipe 7, which is connected to the air intake pipe 3 via a sealed bearing;

[0038] The gear ring 8 is sleeved and fixed on the No. 2 connecting tube 7. The left side of the gear ring 8 is meshed with a No. 1 gear 9. The middle of the No. 1 gear 9 is fixed with a No. 1 rotating shaft 10. The No. 1 rotating shaft 10 is driven by a rotating motor 11, and the rotating motor 11 is fixed to the operation box 1 through a bracket 12; the rotating motor 11 is connected to an external power supply, and the specific model of the rotating motor 11 is directly purchased and installed from the market according to actual use requirements; the diameter of the No. 1 gear 9 is much smaller than the diameter of the gear ring 8, and the bottom of the No. 1 rotating shaft 10 is connected to a steering reducer 13, and the left end of the steering reducer 13 is connected to the No. 2 rotating shaft 14, and the No. 2 rotating shaft 14 is connected to the output shaft of the rotating motor 11; the bottom of the steering reducer 13 is fixed to the bracket 12 through a mounting bracket 15, and the mounting bracket 15 is arranged in an "L" shape;

[0039] The dispersion mechanism 16 is provided in the operation box 1 and includes:

[0040] The conical plate 16-1 is provided below the dispersion pipe 5; the conical plate 16-1 is provided with a plurality of guide grooves 16-2; and the conical plate 16-1 is provided with a plurality of through holes 16-3;

[0041] Sealing plates 16-4, the number of said sealing plates 16-4 is several, and they are respectively distributed in an annular shape and fixed on the annular wall of the conical plate 16-1;

[0042] Slide blocks 16-5, there are several slide blocks 16-5, and each of them is fixed to the sealing plate 16-4 by bolts;

[0043] Slide rail 16-6, the slide rail 16-6 is fixed in the operation box 1 by bolts, and the slider 16-5 is slidably arranged on the slide rail 16-6;

[0044] The fan blades 16-7 are in several numbers and are respectively distributed in a ring shape above the conical plate 16-1. The fan blades 16-7 are connected by a third rotating shaft 16-8, and the third rotating shaft 16-8 is fixed on the conical plate 16-1.

[0045] When the present invention is used, air is taken in through the air intake pipe 3, and the airflow enters the operating box 1 through the No. 2 connecting pipe 7, the No. 1 connecting pipe 6, and the dispersion pipe 5. The rotary motor 11 is started to rotate the No. 2 rotating shaft 14, which drives the No. 1 rotating shaft 10 to rotate, and drives the No. 1 gear 9 to rotate, thereby rotating the No. 2 connecting pipe 7. The diameter of the No. 1 gear 9 is much smaller than the diameter of the gear ring 8. Under the action of the steering reducer 13, the No. 1 connecting pipe 6, the dispersion pipe 5, and the turntable 4 rotate slowly, so that the airflow can be dispersed, evenly, and slowly enter the cover body 2 and the operating box 1.

[0046] The air flow blows on the conical plate 16-1, and the air flow is evacuated through the guide groove 16-2 and flows downward through the through hole 16-3. While the air flow is uniform, the air flow speed is reduced, so that the air flow can be stable and uniform, and the stability and uniformity of the air flow are improved, so that the growth gas fills the operating box 1, ensuring the consistency of diamond growth; when the air flow is large, the sealing plate 16-4 and the slider 16-5 move on the slide rail 16-6, and the fan blade 16-7 rotates, so that the conical plate 16-1 can rotate slightly, reducing the impact of the air flow and playing a role in slowing down the air flow speed.

[0047] Compared with the prior art, the beneficial effects of the present invention are:

[0048] 1. A turntable 4, a dispersion pipe 5, a No. 1 connecting pipe 6, and a No. 2 connecting pipe 7 are provided to disperse the flow of the growth gas into the operation box 1;

[0049] 2. The diameter of the No. 1 gear 9 is much smaller than the diameter of the gear ring 8. Under the action of the steering reducer 13, the No. 1 connecting pipe 6, the dispersion pipe 5, and the turntable 4 rotate slowly, so that the air flow can be dispersed, uniform, and slowly enter the cover body 2 and the operating box 1;

[0050] 3. The airflow blows on the conical plate 16-1, is evacuated through the guide groove 16-2 and flows downward through the through hole 16-3, while uniforming the airflow, reducing the airflow speed, making the airflow stable and uniform, improving the stability and uniformity of the airflow, so that the growth gas fills the operating box 1, ensuring the consistency of diamond growth;

[0051] 4. The fan blades 16-7 are provided to push the conical plate 16-1 to rotate when the airflow is large, thereby reducing the impact of the airflow and slowing down the airflow speed.

[0052] For those skilled in the art, they can modify the technical solutions described in the aforementioned embodiments and make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the scope of protection of the present utility model.

Claims

1. An air intake mechanism for diamond growth, comprising an operating box (1), a cover (2), and an air intake pipe (3); the operating box (1) is provided with the cover (2), and a substrate stage and a water cooling stage are provided inside the operating box (1); the air intake pipe (3) is provided above the cover (2); and an air outlet is provided at the bottom of the operating box (1); It is characterized by: It also contains: A turntable (4), wherein the turntable (4) is screwed onto the cover (2) through a sealed bearing; Dispersion tubes (5), the number of the dispersion tubes (5) is several, and each of the dispersion tubes (5) is inserted and fixed on the turntable (4); A No. 1 connecting pipe (6), wherein the number of the No. 1 connecting pipe (6) is several and each of the connecting pipes (6) is connected to the upper end of the dispersion pipe (5); A second connecting pipe (7), wherein the second connecting pipe (7) is connected to the air inlet pipe (3) through a sealing bearing; A dispersion mechanism (16), wherein the dispersion mechanism (16) is arranged in the operating box (1).

2. The air intake mechanism for diamond growth according to claim 1, characterized in that: A gear ring (8) is sleeved and fixed on the No. 2 connecting pipe (7). A No. 1 gear (9) is meshed on the left side of the gear ring (8). A No. 1 rotating shaft (10) is inserted and fixed in the middle of the No. 1 gear (9). The No. 1 rotating shaft (10) is driven by a rotating motor (11). The rotating motor (11) is fixed to the operating box (1) through a bracket (12); and the rotating motor (11) is connected to an external power supply.

3. The air intake mechanism for diamond growth according to claim 2, characterized in that: The diameter of the first gear (9) is much smaller than the diameter of the gear ring (8). The bottom of the first rotating shaft (10) is connected to a steering reducer (13). The left end of the steering reducer (13) is connected to the second rotating shaft (14). The second rotating shaft (14) is connected to the output shaft of the rotating motor (11).

4. The air intake mechanism for diamond growth according to claim 3, characterized in that: The bottom of the steering reducer (13) is fixed to the bracket (12) via a mounting frame (15), and the mounting frame (15) is arranged in an "L"-shaped structure.

5. The air intake mechanism for diamond growth according to claim 1, characterized in that: The dispersion mechanism (16) comprises: A conical plate (16-1), the conical plate (16-1) is arranged below the dispersion pipe (5); a plurality of guide grooves (16-2) are provided on the conical plate (16-1); a plurality of through holes (16-3) are opened through the conical plate (16-1); Sealing plates (16-4), the number of the sealing plates (16-4) is several and they are respectively distributed in an annular shape and fixed on the annular wall of the conical plate (16-1); Slide blocks (16-5), the number of the slide blocks (16-5) being several and being fixed on the sealing plate (16-4) respectively; A slide rail (16-6) is fixed in the operating box (1), and a slider (16-5) is slidably arranged on the slide rail (16-6).

6. The air intake mechanism for diamond growth according to claim 5, characterized in that: A plurality of fan blades (16-7) are respectively distributed in an annular shape above the conical plate (16-1), and the fan blades (16-7) are connected by a third rotating shaft (16-8), which is fixed on the conical plate (16-1).

Images