Supporting device of single crystal furnace

Abstract

The utility model discloses a single crystal furnace supporting device, which comprises: a main frame, which is used for supporting a single crystal furnace, and the bottom of the main frame is provided with a plurality of first adjustable cushion blocks; the extension frame comprises a bottom frame and two inclined pipes arranged at intervals, one ends of the inclined pipes are fixedly connected with the main frame, the other ends of the inclined pipes are fixedly connected with the bottom frame, the bottom frame is fixedly connected with the main frame, the bottom frame is located below an auxiliary furnace chamber lifting mechanism of the single crystal furnace and used for supporting the auxiliary furnace chamber lifting mechanism, and a second adjustable cushion block is arranged at the bottom of the bottom frame; the second adjustable cushion block is located under the auxiliary furnace chamber lifting mechanism, and the side, away from the main frame, of the bottom frame is detachably fixed to the ground. The second adjustable cushion block is arranged at the bottom of the bottom frame, located under the auxiliary furnace chamber lifting mechanism and used for supporting the auxiliary furnace chamber lifting mechanism, so that the supporting effect on the single crystal furnace is improved, and the situation that the single crystal furnace deviates, and drawing of single crystals is affected is avoided.

Description

Technical Field

[0001] The utility model generally relates to the field of single crystal furnaces, and in particular to a supporting device for a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals using the Czochralski method.

[0003] The support method of the single crystal furnace is to build a cement foundation, drive chemical bolts into the four corners of the single crystal furnace base to provide support, and dig a circular sand pit around the cement foundation for shock absorption.

[0004] Although the four corners of the single crystal furnace can share the weight of gravity, the presence of the auxiliary furnace chamber lifting mechanism causes the actual center of gravity of the entire furnace to shift toward the auxiliary furnace chamber lifting mechanism, and this position is not effectively supported. Under the influence of the single crystal furnace's gravity, the level of the single crystal furnace will gradually shift, affecting the pulling of single crystals. Utility Model Content

[0005] In view of the above-mentioned defects or deficiencies in the prior art, it is desired to provide a supporting device for a single crystal furnace with good supporting effect.

[0006] In a first aspect, the support device of the single crystal furnace of the present invention comprises:

[0007] A main frame, which is used to support the single crystal furnace, and a plurality of first adjustable pads are provided at the bottom of the main frame;

[0008] An extension frame includes a base frame and two inclined tubes arranged at intervals, one end of the inclined tube is fixedly connected to the main frame, the other end of the inclined tube is fixedly connected to the base frame, the base frame is fixedly connected to the main frame, the base frame is located below the auxiliary furnace chamber lifting mechanism of the single crystal furnace, the base frame is used to support the auxiliary furnace chamber lifting mechanism, a second adjustable pad is provided at the bottom of the base frame, the second adjustable pad is located directly below the auxiliary furnace chamber lifting mechanism, and the side of the base frame away from the main frame is detachably fixed to the ground.

[0009] According to the technical solution provided in the embodiment of the present application, a second adjustable pad is provided at the bottom of the base frame, and the second adjustable pad is located directly below the auxiliary furnace chamber lifting mechanism. The second adjustable pad supports the auxiliary furnace chamber lifting mechanism, thereby improving the support effect on the single crystal furnace and avoiding the single crystal furnace from being offset, which affects the pulling of the single crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Other features, objects and advantages of the present application will become more apparent upon reading the detailed description of non-limiting embodiments made with reference to the following drawings:

[0011] Figure 1 This is a schematic structural diagram of a support device for a single crystal furnace according to an embodiment of the present utility model;

[0012] Figure 2 This is a schematic structural diagram of a support device for a single crystal furnace according to an embodiment of the present utility model. DETAILED DESCRIPTION

[0013] The present application will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely for the purpose of explaining the relevant utility model and are not intended to limit the utility model. It should also be noted that, for ease of description, only the portions relevant to the utility model are shown in the accompanying drawings.

[0014] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0015] Please refer to Figure 1 and 2 The supporting device of the single crystal furnace of the present invention includes a main frame 100 and an extension frame 200.

[0016] The main frame 100 is used to support the single crystal furnace. A plurality of first adjustable pads 110 are provided at the bottom of the main frame 100. The main frame 100 supports the single crystal furnace. The first adjustable pads 110 provided at the bottom of the main frame 100 support the main frame 100. By adjusting the height of the first adjustable pads, the horizontal position of the main frame 100 is changed, thereby maintaining the single crystal furnace connected to the main frame 100 in a vertical position. Multiple first adjustable pads 110 may be provided, and may include, but are not limited to, four first adjustable pads 110. This ensures the stability of the first adjustable pads 110 supporting the main frame 100.

[0017] The extension frame 200 includes a base frame 210 and two spaced apart inclined tubes 220. The base frame 210 is fixedly connected to the main frame 100. One end of the inclined tube 220 is fixedly connected to the main frame 100, and the other end of the inclined tube 220 is fixedly connected to the base frame 210. The inclined tube 220, base frame 210, and main frame 100 form a triangle, ensuring the stability of the connection between the extension frame 200 and the main frame 100.

[0018] The base frame 210 is located below the auxiliary chamber lifting mechanism 300 of the single crystal furnace. The auxiliary chamber lifting mechanism 300 is placed on the base frame 210 and can support the auxiliary chamber lifting mechanism 300. A second adjustable pad 211 is provided at the bottom of the base frame 210. The second adjustable pad 211 is located directly below the auxiliary chamber lifting mechanism 300 and is placed on the ground. The provision of the second adjustable pad 211 improves the stability of the base frame 210 in supporting the auxiliary chamber lifting mechanism 300. By adjusting the height of the second adjustable pad, the horizontal position of the extension frame 200, that is, the main frame 100, is changed, so that the single crystal furnace connected to the main frame 100 remains in a vertical position.

[0019] The side of the base frame 210 away from the main frame 100 is detachably fixed to the ground, which ensures the stability of the connection between the base frame 210 and the ground, that is, ensures the overall stability of the support device of the single crystal furnace.

[0020] Furthermore, the base frame 210 is removably secured to the ground via a plurality of bolts 212. The provision of multiple bolts 212 ensures the removable securing of the base frame 210 to the ground, thereby ensuring the stability of the connection between the base frame 210 and the ground, and thus the overall stability of the single crystal furnace support device. The number of bolts 212 may be, but is not limited to, two, which facilitates the securing and detachment of the base frame 210 from the ground and reduces installation difficulty.

[0021] Furthermore, the bolts 212 are chemical bolts 212. The chemical bolts 212 have the advantages of strong anchoring force, no expansion stress, quick installation and sufficient bonding, thereby ensuring the reliability of fixing the base frame 210 to the ground.

[0022] Furthermore, the first adjustable spacer 110 and the second adjustable spacer 211 are both configured as adjustment shims, which have the advantages of being easy to install and flexible to adjust, and also have vibration reduction performance.

[0023] Furthermore, four first adjustable pads 110 are provided at the bottom of the main frame 100, and the four first adjustable pads 110 are respectively arranged at the four corners of the bottom of the main frame 100. There are four first adjustable pads 110 in total, which ensures the stability of the first adjustable pads 110 in supporting the main frame 100.

[0024] Furthermore, the auxiliary furnace chamber lifting mechanism 300 is partially located between the two inclined tubes 220, so that the extension frame 200 is evenly stressed.

[0025] Furthermore, the two inclined tubes 220 are parallel to each other, so that the forces on the inclined tubes 220 are balanced.

[0026] Furthermore, a frame 120 is provided at the bottom of the main frame 100, and the frame 120 includes a frame 121, a horizontal tube 122, a vertical tube 123 and a diagonal brace 124. The horizontal tube 122 is fixedly connected to the frame 121, and the two horizontal tubes 122 are fixedly connected to the vertical tube 123 respectively. The diagonal brace 124 is fixedly connected to the frame 121, and the diagonal brace 124 is located at the corner of the frame 121.

[0027] In the embodiment of the present invention, a transverse tube 122, a longitudinal tube 123 and a diagonal brace 124 are provided in the frame 121 to ensure the stability of the frame 120. There are two transverse tubes 122, and a longitudinal tube 123 is provided between the two transverse tubes 122 to improve the strength of the transverse tubes 122.

[0028] The above description is merely a preferred embodiment of the present application and an illustration of the technical principles employed. Those skilled in the art should understand that the scope of the utility model disclosed in this application is not limited to the technical solutions formed by the specific combination of the above-mentioned technical features, but also encompasses other technical solutions formed by any combination of the above-mentioned technical features or their equivalents without departing from the concept of the utility model. For example, a technical solution formed by replacing the above-mentioned features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A support device for a single crystal furnace, characterized in that: include: A main frame, which is used to support the single crystal furnace, and a plurality of first adjustable pads are provided at the bottom of the main frame; An extension frame includes a base frame and two inclined tubes arranged at intervals, one end of the inclined tube is fixedly connected to the main frame, the other end of the inclined tube is fixedly connected to the base frame, the base frame is fixedly connected to the main frame, the base frame is located below the auxiliary furnace chamber lifting mechanism of the single crystal furnace, the base frame is used to support the auxiliary furnace chamber lifting mechanism, a second adjustable pad is provided at the bottom of the base frame, the second adjustable pad is located directly below the auxiliary furnace chamber lifting mechanism, and the side of the base frame away from the main frame is detachably fixed to the ground.

2. The support device for a single crystal furnace according to claim 1, characterized in that: The base frame is detachably fixed to the ground by a plurality of bolts.

3. The support device for a single crystal furnace according to claim 2, characterized in that: The bolts are chemical bolts.

4. The support device for a single crystal furnace according to claim 1, characterized in that: The first adjustable spacer block and the second adjustable spacer block are both configured as adjustment shims.

5. The support device for a single crystal furnace according to claim 1, characterized in that: Four first adjustable pads are provided at the bottom of the main frame, and the four first adjustable pads are respectively arranged at the four corners of the bottom of the main frame.

6. The support device for a single crystal furnace according to claim 1, characterized in that: The auxiliary furnace chamber lifting mechanism is located between the two inclined tubes.

7. The support device for a single crystal furnace according to claim 1, characterized in that: The two inclined tubes are parallel to each other.

8. The support device for a single crystal furnace according to claim 1, characterized in that: A frame is provided at the bottom of the main frame, and the frame includes a frame, a horizontal tube, a vertical tube and a diagonal brace. The horizontal tube is fixedly connected to the frame, and the two horizontal tubes are fixedly connected to the vertical tubes respectively. The diagonal brace is fixedly connected to the frame, and the diagonal brace is located at the corner of the frame.

Images