Integrated structure protection disc pressing sheet for single crystal furnace

Abstract

The utility model discloses an integrated structure protective plate pressing sheet for a single crystal furnace, which comprises an integrated protective plate pressing sheet body, and a first reinforcing rib and a second reinforcing rib are arranged at the bottom of the protective plate pressing sheet body and are perpendicular to each other. According to the utility model, the contact area between the protection disc pressing sheet and the protection disc heat-preservation soft felt is reduced, and the heat loss is reduced; and meanwhile, an integrated structure is adopted, so that the protective plate pressing sheet has no splicing gap, corrosion of corrosive gas in the furnace to the thermal insulation material is reduced, the service life is prolonged, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon manufacturing and processing, in particular to an integrated structured protective disc pressing sheet for a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment and grow dislocation-free single crystal silicon using the Czochralski method. Inside the single crystal furnace, the thermal field is primarily composed of a set of components, including a guide tube, various graphite components, a heater, a furnace bottom guard plate, and insulation materials. The guard plate is placed inside the lower insulation tube, on top of the platen felt layer, to protect the insulation platen felt layer from damage. The guard plate protects the insulation material from corrosion while also blocking heat loss. Uneven heat distribution can lead to uneven crystal growth and defects such as dislocations. In high-temperature environments, the guard plate material will leak heat to a certain extent, resulting in increased growth power. This can also corrode the insulation material, increasing production costs and reducing the service life of the guard plate. Utility Model Content

[0003] The purpose of the utility model is to provide an integrated structure protective disc pressing piece for a single crystal furnace. The protective disc pressing piece is prepared by casting. The bottom of the protective disc pressing piece body is provided with a first reinforcing rib and a second reinforcing rib perpendicular to each other, as well as a plurality of auxiliary reinforcing ribs, thereby realizing a protective disc pressing piece with no splicing gap, extended service life and reduced heat loss, thereby solving the problems existing in the prior art.

[0004] In order to solve the above technical problems, the present invention adopts the following solutions:

[0005] An integrated structured plate guard for a single crystal furnace comprises an integrated plate guard body. A first reinforcing rib and a second reinforcing rib are provided at the bottom of the plate guard body. The first and second reinforcing ribs are perpendicular to each other.

[0006] Furthermore, the number of the first reinforcing ribs and the second reinforcing ribs are both two and they divide the bottom of the disc protection sheet body into nine area frames.

[0007] Furthermore, a support rod through hole is provided at the center of the protective disc pressing plate body, and two gas cylinder holes are provided on both sides of the same horizontal line as the support rod through hole, and electrode sheath holes are provided on both sides of the gas cylinder hole. The support rod through hole, gas cylinder hole and electrode sheath hole are respectively located in one of the area frames.

[0008] Furthermore, it also includes a plurality of secondary reinforcing ribs, wherein the secondary reinforcing ribs are located between the two first reinforcing ribs.

[0009] Furthermore, the positional relationship of the plurality of secondary reinforcing ribs includes parallel or vertical.

[0010] Furthermore, the thickness of the disc protection pressing sheet body is 10 to 12 mm.

[0011] Furthermore, the thickness of the first reinforcing rib, the second reinforcing rib and the auxiliary reinforcing rib is 5 to 8 mm, and the width is 8 to 12 mm.

[0012] Furthermore, the connection between the disc protection plate body and the first reinforcing rib, the second reinforcing rib and the auxiliary reinforcing rib is formed by casting.

[0013] Furthermore, the disc protection plate body, the first reinforcing rib, the second reinforcing rib and the auxiliary reinforcing rib are all made of carbon-carbon composite material.

[0014] The utility model has the beneficial effects:

[0015] The utility model directly contacts the protective disc thermal insulation soft felt through the first reinforcing rib, the second reinforcing rib and the auxiliary reinforcing rib arranged at the bottom of the protective disc pressing plate body, thereby reducing the contact area between the protective disc pressing plate and the protective disc thermal insulation soft felt and reducing heat loss; at the same time, an integrated structure is adopted so that the protective disc pressing plate has no splicing gap, reducing the corrosion of the thermal insulation material caused by the corrosive gas in the furnace, extending the service life, and thus reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the utility model;

[0017] Figure 2 This is another structural diagram of the present utility model.

[0018] Figure numerals: 1-disk guard pressing plate body, 10-support rod through hole, 11-air guide cylinder hole, 12-electrode sheath hole, 2-first reinforcing rib, 3-second reinforcing rib, 4-area frame, 5-secondary reinforcing rib. DETAILED DESCRIPTION

[0019] The present invention will be further described in detail below in conjunction with the embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0020] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0021] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "opened," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0022] Example 1

[0023] Embodiment 1 of the present invention is an integrated structure protective disc pressing sheet for a single crystal furnace, comprising an integrated protective disc pressing sheet body 1, wherein the bottom of the protective disc pressing sheet body 1 is provided with a first reinforcing rib 2 and a second reinforcing rib 3, and the first reinforcing rib 2 and the second reinforcing rib 3 are perpendicular to each other.

[0024] The utility model is an integrated structure of the plate-guarding sheet mainly comprising a plate-guarding sheet body 1 and a first reinforcing rib 2 and a second reinforcing rib 3 perpendicular to each other at the bottom of the plate-guarding sheet. The plate-guarding sheet body 1 has no joint gaps and is an integrated structure. Thus, in the high temperature environment during the crystal pulling process, the corrosive gas existing in the single crystal furnace is reduced from entering the insulation material below the plate-guarding sheet through the joint gaps in the existing plate-guarding sheet, thereby reducing the corrosion rate of the insulation material. At the same time, the first reinforcing rib 2 and the second reinforcing rib 3 are directly in contact with the top of the insulation material. At the same time, the first reinforcing rib 2 and the second reinforcing rib 3 are evenly distributed at the bottom of the plate-guarding sheet body 1, evenly bearing the pressure brought by the plate-guarding sheet body 1 and the single crystal furnace above it, thereby increasing the mechanical strength of the plate-guarding sheet body 1 above the insulation material and extending the length of the plate-guarding sheet body 1. At the same time, the first reinforcing rib 2 and the second reinforcing rib 3 are directly in contact with the insulation material, reducing the area of ​​the plate-guarding sheet body 1 in direct contact with the insulation material, thereby reducing heat loss and achieving reduced power consumption.

[0025] In some preferred embodiments, the number of the first reinforcing ribs 2 and the second reinforcing ribs 3 are both two, and the bottom of the disc guard pressing plate body 1 is divided into nine area frames 4. A support rod through hole 10 is provided at the center of the disc guard pressing plate body 1, and two gas cylinder holes 11 are provided on both sides of the same horizontal line as the support rod through hole 10. Electrode sheath holes 12 are respectively provided on both sides of the gas cylinder hole 11. The support rod through hole 10, the gas cylinder hole 11, and the electrode sheath hole 12 are each located in one of the area frames 4.

[0026] Specifically, the first reinforcing rib 2 and the second reinforcing rib 3 together constitute nine areas, wherein the protective disc pressing sheet body 1 is provided with a support rod through hole 10, two gas tube holes 11, and four electrode sheath holes 12. The two gas tube holes 11 are symmetrical with each other with the support rod through hole 10 as the symmetry point and are within one of the area frames 4; the four electrode sheath holes 12 are evenly distributed in the area frame 4 located around the protective disc pressing sheet.

[0027] It should be noted that the regional frame 4 here only serves as a space division formed by the vertical intersection of the first reinforcing ribs 2 and the second reinforcing ribs 3.

[0028] In some preferred embodiments, the plate-protecting plate body 1 further includes a plurality of secondary reinforcing ribs 5, each located between two first reinforcing ribs 2. The secondary reinforcing ribs 5 may be positioned parallel or perpendicular to each other. The secondary reinforcing ribs 5 are primarily used to increase the mechanical strength of the plate-protecting plate body 1 above the insulation material, thereby extending the life of the plate-protecting plate body 1.

[0029] In some preferred embodiments, the thickness of the plate-guarding plate body 1 is 10-12 mm. The thickness of the first reinforcing ribs 2, second reinforcing ribs 3, and secondary reinforcing ribs 5 is 5-8 mm, and the width is 8-12 mm. The thickness of the plate-guarding plate body 1 combined with the thickness of the first reinforcing ribs 2, second reinforcing ribs 3, and secondary reinforcing ribs 5 results in a final thickness of 15-18 mm, ensuring sufficient mechanical strength during the crystal pulling process. At the same time, when the widths of the first reinforcing ribs 2, second reinforcing ribs 3, and secondary reinforcing ribs 5 are within this range, the resulting mechanical strength is optimal, heat consumption is minimized, and crystallization of the ingot is facilitated.

[0030] In some preferred embodiments, the connection between the disc-protecting pressing plate body 1 and the first reinforcing rib 2, the second reinforcing rib 3, and the secondary reinforcing rib 5 is formed by casting. The casting method avoids the generation of gaps in the connection between the disc-protecting pressing plate body 1 and the first reinforcing rib 2, the second reinforcing rib 3, and the secondary reinforcing rib 5, thereby preventing the reduction of mechanical strength.

[0031] In some preferred embodiments, the plate guard sheet body 1, first reinforcing rib 2, second reinforcing rib 3, and secondary reinforcing rib 5 are all made of carbon-carbon composite material. The use of carbon-carbon composite material improves the thermal insulation performance of the plate guard sheet, while reducing the wear and tear of the plate guard sheet, reducing the replacement frequency, and lowering the cost of crystal pulling.

[0032] The working principle of the present invention is as follows: when in use, the plate guard pressing sheet body 1 is placed above the plate guard insulation soft felt, wherein the single crystal furnace bottom solid felt is provided below the insulation soft felt, wherein the top of the support rod is located in the support rod through hole 10, the top of the gas guide tube is located in the gas guide tube hole 11, and multiple electrode sheaths are respectively located in their corresponding electrode sheath holes 12, and the first reinforcing rib 2, the second reinforcing rib 3, and the auxiliary reinforcing rib 5 provided at the bottom of the plate guard pressing sheet body 1 are in direct contact with the plate guard insulation soft felt, reducing the contact area between the plate guard pressing sheet and the plate guard insulation soft felt and reducing heat loss; at the same time, an integrated structure is adopted, so that the plate guard pressing sheet has no splicing gap, reducing the corrosion of the insulation material by the corrosive gas in the furnace, extending the service life, and thus reducing the production cost.

[0033] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Based on the technical essence of the present invention and within the spirit and principles of the present invention, any simple modification, equivalent replacement and improvement of the above embodiment shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. An integrated structured plate-guarding sheet for a single crystal furnace, characterized in that: The invention comprises an integrated disc protection pressing plate body (1), wherein a first reinforcing rib (2) and a second reinforcing rib (3) are provided at the bottom of the disc protection pressing plate body (1), and the first reinforcing rib (2) and the second reinforcing rib (3) are perpendicular to each other.

2. The integrated structured plate-guarding sheet for a single crystal furnace according to claim 1, characterized in that: The number of the first reinforcing ribs (2) and the number of the second reinforcing ribs (3) are both two and they divide the bottom of the disc protection pressing plate body (1) into nine area frames (4).

3. The integrated structured plate-guarding sheet for a single crystal furnace according to claim 2, characterized in that: A support rod through hole (10) is provided at the center of the disc protection plate body (1), two gas cylinder holes (11) are provided on both sides of the same horizontal line as the support rod through hole (10), and electrode sheath holes (12) are provided on both sides of the gas cylinder hole (11), and the support rod through hole (10), the gas cylinder hole (11), and the electrode sheath hole (12) are respectively located in one of the area frames (4).

4. The integrated structured plate-guarding sheet for a single crystal furnace according to claim 2, characterized in that: It also includes a plurality of secondary reinforcing ribs (5), wherein the secondary reinforcing ribs (5) are located between the two first reinforcing ribs (2).

5. The integrated structured plate-guarding sheet for a single crystal furnace according to claim 4, characterized in that: The positional relationship of the plurality of secondary reinforcing ribs (5) includes parallel or vertical.

6. The integrated structured plate-guarding sheet for a single crystal furnace according to claim 5, characterized in that: The thickness of the disc protection pressing sheet body (1) is 10-12 mm.

7. The integrated structured plate-guarding sheet for a single crystal furnace according to claim 5, characterized in that: The thickness of the first reinforcing rib (2), the second reinforcing rib (3) and the auxiliary reinforcing rib (5) is 5 to 8 mm, and the width is 8 to 12 mm.

8. The integrated structured plate-guarding sheet for a single crystal furnace according to claim 5, characterized in that: The connection between the disc protection pressing plate body (1) and the first reinforcing rib (2), the second reinforcing rib (3), and the auxiliary reinforcing rib (5) is formed by casting.

9. The integrated structured plate-guarding sheet for a single crystal furnace according to claim 5, characterized in that: The disc protection pressing plate body (1), the first reinforcing rib (2), the second reinforcing rib (3), and the auxiliary reinforcing rib (5) are all made of carbon-carbon composite material.

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