Quartz furnace tube

Abstract

The utility model belongs to the field of semiconductor manufacturing, and relates to a quartz furnace tube, which comprises a tube body, one end of the tube body is closed to form a closed end, the middle part of the closed end is provided with a ventilation interface, the closed end is also provided with at least two thermocouple interfaces, and the thermocouple interfaces are arranged close to the edge of the closed end. The furnace tube has the beneficial effects that the plurality of thermocouple interfaces are arranged at the closed end of the furnace tube, and the furnace tube can be rotated to enable different thermocouple interfaces to be positioned at the bottom of the closed end during use every time, so that deformation of the quartz furnace tube is prevented from accumulating in one direction, and the service life of the furnace tube is prolonged.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing, and in particular to a quartz furnace tube. Background Art

[0002] In semiconductor manufacturing, wafers undergo high-temperature doping and diffusion to form a PN junction. During this process, if the temperature is too high, the quartz furnace tube can collapse and deform. Furthermore, since the tube requires access to gas and a thermocouple inserted at the bottom for temperature detection, a vent port is required in the middle of the tube end and a thermocouple port at the bottom. Long-term use of quartz furnace tubes at high temperatures can lead to cumulative deformation, causing them to bend downward, collapse severely, and even become unsuitable for use in diffusion furnaces, resulting in their scrapping. Utility Model Content

[0003] In order to solve the technical problem in the prior art that long-term use of a furnace tube at high temperature will cause cumulative deformation of the quartz furnace tube, the present application provides a quartz furnace tube.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is a quartz furnace tube, comprising a tube body, one end of the tube body is closed to form a closed end, a ventilation interface is provided in the middle of the closed end, and the closed end is also provided with at least two thermocouple interfaces, and the thermocouple interfaces are arranged near the edge of the closed end.

[0005] In some embodiments, there are two thermocouple interfaces, which are symmetrically arranged on both sides of the ventilation interface.

[0006] In some embodiments, reinforcing ribs are further provided on the outer wall of the tube body.

[0007] In some embodiments, the reinforcing ribs are strip-shaped protrusions arranged along the axial direction of the tube body, the number of the strip-shaped protrusions is consistent with the number of the thermocouple interfaces, and the positions of the strip-shaped protrusions and the thermocouple interfaces correspond to each other in the circumferential direction.

[0008] In some embodiments, the outer surface of the strip-shaped protrusion is provided with a serration structure.

[0009] In some embodiments, the reinforcing ribs include a corundum support bar and a corundum support ring, the tube body is sleeved in the corundum support ring, the corundum support bar is connected to the corundum support ring and extends along the axial direction of the tube body.

[0010] In some embodiments, there are two corundum support rings, which are respectively sleeved on both ends of the tube body. The corundum support bar is connected to the two corundum support rings, and there is only one corundum support bar.

[0011] In some embodiments, the inner diameter of the corundum support ring is larger than the outer diameter of the tube body.

[0012] Beneficial effect: In this application, multiple thermocouple interfaces are set at the closed end of the furnace tube. Each time the furnace tube is used, the furnace tube can be rotated so that different thermocouple interfaces are located at the bottom of the closed end, thereby avoiding the accumulation of deformation of the quartz furnace tube in one direction and extending the service life of the furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the structure of a quartz furnace tube according to an embodiment;

[0014] Figure 2 This is a schematic structural diagram of a quartz furnace tube according to another embodiment;

[0015] Figure 3 Schematic diagram of the structure of a quartz furnace tube with a sawtooth structure;

[0016] Figure 4 Schematic diagram of another quartz furnace tube structure;

[0017] Figure 5 Schematic diagram of the structure of the corundum support bar and the corundum support ring;

[0018] In the figure, 1. tube body, 2. closed end, 3. ventilation interface, 4. thermocouple interface, 5. strip-shaped protrusion, 6. serrated structure, 7. corundum support ring, 8. corundum support strip. DETAILED DESCRIPTION

[0019] The present application will be further described below in conjunction with specific embodiments. Obviously, the embodiments described are only a portion of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative changes are within the scope of protection of the present application.

[0020] The scheme adopted in this application is as follows: Figures 1 to 5 As shown, a quartz furnace tube includes a tube body 1, one end of the tube body 1 is closed to form a closed end 2, a ventilation interface 3 is provided in the middle of the closed end 2, and the closed end 2 is also provided with at least two thermocouple interfaces 4, and the thermocouple interfaces 4 are arranged near the edge of the closed end 2.

[0021] Each time the quartz furnace tube is used, the thermocouple interfaces 4 at different positions can be located at the bottom of the closed end 2, and thermocouples can be inserted into the corresponding thermocouple interfaces 4. The other thermocouple interfaces 4 are closed with end covers. This not only meets the need of inserting thermocouples at the bottom of the quartz furnace tube for temperature detection, but also different positions of the quartz furnace tube in the circumferential direction are located at the bottom each time it is used, thereby avoiding the accumulation of deformation of the quartz furnace tube in one direction, avoiding serious deformation, resulting in incompatibility with the diffusion furnace, and leading to scrapping, thereby extending the service life of the quartz furnace tube.

[0022] Specifically, if Figure 1 As shown, in one embodiment, there are two thermocouple interfaces 4, symmetrically arranged on either side of the vent interface 3. During one use, one thermocouple interface 4 is positioned at the bottom. During the next use, the furnace tube is rotated so that the other thermocouple interface 4 is positioned at the bottom. This ensures that the two high-temperature deformation directions of the furnace tube are opposite, preventing cumulative deformation in the same direction during use, thereby extending the service life of the furnace tube.

[0023] In some embodiments, as Figures 2 to 5 As shown, in order to reduce the deformation of the quartz furnace tube at high temperatures, reinforcing ribs are further provided on the outer wall of the tube body 1. The reinforcing ribs strengthen or support the structure of the quartz furnace tube, which can further reduce the deformation of the quartz furnace tube at high temperatures.

[0024] like Figure 2 As shown, in one embodiment, the reinforcing ribs are strip-shaped protrusions 5 arranged axially along the tube body 1. The number of the strip-shaped protrusions 5 is consistent with the number of the thermocouple interfaces 4, and the positions of the strip-shaped protrusions 5 and the thermocouple interfaces 4 correspond to each other in the circumferential direction. The strip-shaped protrusions 5 and the tube body 1 are both made of quartz. The strip-shaped protrusions 5 are integrated with the surface of the tube body 1. When the quartz furnace tube is in use, a certain thermocouple interface 4 is located at the bottom, and the corresponding strip-shaped protrusions 5 are also located at the bottom of the quartz furnace tube. The strip-shaped protrusions 5 strengthen the strength of the tube body 1, which helps to reduce the deformation of the quartz furnace tube at high temperatures. At the same time, the reinforcing ribs are set in a strip shape, which occupies a smaller proportion of the area of ​​the tube body 1, has less effect on the temperature distribution in the quartz furnace tube, and will not affect the high-temperature diffusion in the tube body 1.

[0025] like Figure 3 As shown, in one embodiment, in order to further improve the strength of the strip-shaped protrusion 5 , a serration structure 6 is provided on the outer surface of the strip-shaped protrusion 5 .

[0026] like Figure 4 and 5As shown, as an alternative to the scheme of providing strip-shaped protrusions 5 integrally with the tube body 1, in some embodiments, the reinforcing ribs include corundum support strips 8 and corundum support rings 7. The tube body 1 is sleeved within the corundum support rings 7. The corundum support strips 8 are connected to the corundum support rings 7 and extend axially along the tube body 1. The corundum support strips are high-temperature resistant and will not thermally deform at the high-temperature doping and diffusion temperatures of the wafer. The corundum support strips 8 support the tube body 1, preventing the tube body 1 from collapsing severely at high temperatures.

[0027] like Figure 4 and 5 As shown, specifically, in one embodiment, there are two corundum support rings 7, each of which is sleeved on either end of the tube body 1. A single corundum support bar 8 is connected to the two corundum support rings 7. The corundum support bar 8 is secured to the outer wall of the furnace tube using the corundum support rings 7. During each use, the corundum support rings 7 and the tube body 1 can be rotated relative to each other, thereby positioning different thermocouple interfaces 4 at the bottom while the corundum support bar 8 remains in place. During each use, the corundum support bar 8 remains at the bottom of the furnace tube, providing support. Furthermore, the corundum support rings 7 and corundum support bar 8 occupy a relatively small area of ​​the tube body 1, thus having little impact on the temperature distribution within the quartz furnace tube and preventing any influence on the diffusion of high temperatures within the tube body 1.

[0028] Since the thermal expansion coefficients of the tube body 1 made of corundum and quartz are different, in order to avoid large internal stress between the corundum support ring 7 and the tube body 1, in some embodiments, the inner diameter of the corundum support ring 7 is larger than the outer diameter of the tube body 1.

[0029] Although the present disclosure is disclosed as above, the protection scope of the present disclosure is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure, and these changes and modifications will fall within the protection scope of this application.

Claims

1. A quartz furnace tube, characterized in that: The invention comprises a tube body (1), wherein one end of the tube body (1) is closed to form a closed end (2), a ventilation interface (3) is provided in the middle of the closed end (2), and the closed end (2) is also provided with at least two thermocouple interfaces (4), and the thermocouple interfaces (4) are provided near the edge of the closed end (2).

2. The quartz furnace tube according to claim 1, characterized in that There are two thermocouple interfaces (4), which are symmetrically arranged on both sides of the ventilation interface (3).

3. The quartz furnace tube according to claim 1 or 2, characterized in that: Reinforcing ribs are also provided on the outer wall of the tube body (1).

4. The quartz furnace tube according to claim 3, characterized in that The reinforcing ribs are strip-shaped protrusions (5) arranged axially along the tube body (1), the number of the strip-shaped protrusions (5) is consistent with the number of the thermocouple interfaces (4), and the positions of the strip-shaped protrusions (5) and the thermocouple interfaces (4) correspond to each other in the circumferential direction.

5. The quartz furnace tube according to claim 4, characterized in that The outer surface of the strip-shaped protrusion (5) is provided with a sawtooth structure (6).

6. The quartz furnace tube according to claim 3, characterized in that The reinforcing rib comprises a corundum support strip (8) and a corundum support ring (7); the tube body (1) is sleeved in the corundum support ring (7); the corundum support strip (8) is connected to the corundum support ring (7) and extends along the axial direction of the tube body (1).

7. The quartz furnace tube according to claim 6, characterized in that There are two corundum support rings (7), which are respectively sleeved on both ends of the tube body (1); the corundum support bar (8) is connected to the two corundum support rings (7), and there is only one corundum support bar (8).

8. The quartz furnace tube according to claim 7, characterized in that The inner diameter of the corundum support ring (7) is larger than the outer diameter of the tube body (1).

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