High-temperature oxidation process suspension jig for silicon carbide ring

Abstract

The utility model discloses a high-temperature oxidation process suspension jig for a silicon carbide ring, which belongs to the technical field of silicon carbide rings and comprises support frames, the support frames are symmetrically arranged, a fixing groove is formed in the top end of each support frame, a cross rod for hanging the silicon carbide ring is arranged in an inner cavity of each fixing groove, and the cross rods are arranged in the inner cavities of the fixing grooves. Stacking structures used for stacking the supporting frames are arranged on the surfaces of the supporting frames, the silicon carbide rings are hung in a cross rod hanging mode through cooperation of the supporting frames and the cross rods, and through arrangement of the stacking structures, the multiple sets of supporting frames can be stacked and matched to hang the multiple sets of silicon carbide rings. The silicon carbide ring is suspended in the furnace for oxidation, so that the cost of the silicon carbide oxidation process is reduced, the support frames can be quickly stacked and disassembled, the time for stacking and disassembling the support frames is shortened, and the assembly and disassembly work of the support frames is simplified.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide rings, in particular to a high-temperature oxidation process suspension jig for silicon carbide rings. Background Art

[0002] In the semiconductor industry, the oxidation process for silicon carbide (SiC) components is a key step in semiconductor component manufacturing. It plays a crucial role in reducing the metal content and particle size on the SiC surface, thereby improving the reliability of SiC components. The quality of the SiC surface oxide layer directly affects the number of components formed within the cavity, impacting key parameters such as film thickness and uniformity in products processed through the RTP process. To form a dense silicon dioxide (SiO2) film on the surface of the SiC ring, a thermal oxidation process is required. Thermal oxidation processes can be categorized by the oxidizing atmosphere: dry oxygen oxidation, water vapor oxidation, and wet oxygen oxidation. Currently, the most commonly used method is dry oxygen oxidation, which uses dry air or oxygen as the oxidizing atmosphere and reacts at high temperatures to form a uniform, dense SiO2 film.

[0003] During the SiC oxidation process, trays made of the same SiC material or other high-temperature resistant materials are typically stacked in multiple layers to hold the semiconductor SiC ring components to be oxidized. Because of the need for contact between the ring base and the components, three to four Pins are used to support the components. However, this requires the production of numerous SiC trays and a certain number of Pin bases, increasing the cost of the SiC oxidation process. A predetermined number of Pin bases are placed in fixed positions on the tray, and the product is then placed on top of the Pins. New trays are then stacked, and so on. This operation places high demands on the operator, requiring careful handling. Removing the product after oxidation requires the same process, which is both time-consuming and cumbersome. Therefore, a suspension jig for SiC rings in the high-temperature oxidation process is needed. Utility Model Content

[0004] The purpose of the present utility model is to provide a suspension jig for a high-temperature oxidation process of silicon carbide rings. By cooperating with a support frame and a cross bar, the silicon carbide rings are suspended by the cross bar. By setting a stacking structure, multiple groups of support frames can be stacked, and several groups of silicon carbide rings are hung together. The silicon carbide rings are suspended in a furnace for oxidation, which reduces the cost of the silicon carbide oxidation process, allows the support frames to be quickly stacked and disassembled, shortens the stacking and disassembly time of the support frames, simplifies the assembly and disassembly of the support frames, and solves the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a high-temperature oxidation process suspension jig for silicon carbide rings, comprising two symmetrically arranged groups of support frames, each group of support frames including a plurality of support frames, each of which has a fixing groove at the top; a cross bar for hanging silicon carbide rings arranged in the inner cavity of the fixing groove; and a stacking structure arranged between the upper and lower support frames in the same group for stacking the upper and lower support frames.

[0006] Preferably, the stacking structure includes a positioning portion, the positioning portion is fixedly connected to the upper surface of the support frame, and a fixing hole adapted to the positioning portion is opened on the lower surface of the support frame, and an inner cavity of the fixing hole is engaged with the positioning portion.

[0007] Preferably, a first card slot is provided on the upper surface of the support frame, the inner cavity of the first card slot is connected to the inner cavity of the fixing slot, and a second card slot is provided on the lower surface of the support frame, and the shapes of the first card slot and the second card slot are trapezoidal.

[0008] Preferably, four groups of the positioning portions are provided, wherein two groups of the positioning portions are symmetrically distributed on the upper surface of the support frame, and the other two groups of the positioning portions are symmetrically distributed at both ends of the inner cavity of the first card slot.

[0009] Preferably, both sides of the cross bar are arranged in the form of bevels, and the cross bar is arranged in the form of a triangle.

[0010] Preferably, the support frames are provided in a plurality of groups, and the plurality of groups of support frames are stacked in sequence.

[0011] Preferably, the silicon carbide rings hung on the crossbar are provided in several groups, and the distance between each group of silicon carbide rings is greater than 3CM.

[0012] Preferably, the distance between the bottom end of each group of support frames and the top end of the silicon carbide ring is greater than 3CM.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] The utility model provides a hanging jig for a high-temperature oxidation process of silicon carbide rings. The silicon carbide rings are suspended by the crossbar through the cooperation of the support frame and the crossbar. A stacking structure is set up so that multiple groups of support frames can be stacked, and several groups of silicon carbide rings are hung in the furnace for oxidation. The silicon carbide rings are hung in the furnace, which reduces the cost of the silicon carbide oxidation process, enables the support frames to be quickly stacked and disassembled, shortens the time for stacking and disassembling the support frames, and simplifies the assembly and disassembly of the support frames.

[0015] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention can be achieved and obtained by the structures indicated in the description and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of the stacked support frames of the present invention;

[0017] Figure 2 This is a schematic diagram of the structure of the utility model from a side view;

[0018] Figure 3 This is a schematic diagram of the structure of a set of support frames of the present invention when viewed from above;

[0019] Figure 4 This is a structural diagram of the disassembled support frame and crossbar of the utility model.

[0020] In the figure: 1. support frame; 2. fixing slot; 3. cross bar; 4. stacking structure; 41. positioning part; 42. fixing hole; 5. first card slot; 6. second card slot. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] See also Figure 1-4 The utility model provides a technical solution: a high-temperature oxidation process suspension jig for silicon carbide rings, comprising two symmetrically arranged groups of support frames 1, each group of support frames 1 including a plurality of support frames 1, each support frame 1 having a fixing groove 2 at the top; a cross bar 3 for hanging the silicon carbide ring arranged in the inner cavity of the fixing groove 2; and a stacking structure 4 arranged between the upper and lower groups of support frames 1 for stacking the upper and lower support frames 1.

[0023] The silicon carbide rings are passed through the cross bars 3 in sequence, and the silicon carbide rings are hung by the cross bars 3. Then, the cross bars 3 on which the silicon carbide rings are hung are placed in the fixing grooves 2. The positions of the cross bars 3 on the support frames 1 are fixed by the fixing grooves 2. By setting the stacking structure 4, multiple groups of support frames 1 can be stacked, and several groups of silicon carbide rings are hung. The silicon carbide rings are hung in the furnace for oxidation, which reduces the cost of the silicon carbide oxidation process, enables the support frames 1 to be quickly stacked and disassembled, shortens the time for stacking and disassembling the support frames 1, and simplifies the assembly and disassembly of the support frames 1.

[0024] The stacking structure 4 includes a positioning portion 41, which is fixedly connected to the upper surface of the support frame 1. The lower surface of the support frame 1 is provided with a fixing hole 42 that is compatible with the positioning portion 41. The inner cavity of the fixing hole 42 cooperates with the positioning portion 41. When stacking, the two groups of support frames 1 are combined side by side, and then another group of support frames 1 is taken and placed on the top of the two groups of support frames 1. When the positioning portion 41 is inserted into the inner cavity of the fixing hole 42, the three groups of support frames 1 can be stacked. In this way, the support frames 1 can be stacked in sequence.

[0025] A first card slot 5 is provided on the upper surface of the support frame 1, and the inner cavity of the first card slot 5 is connected to the inner cavity of the fixing slot 2. A second card slot 6 is provided on the lower surface of the support frame 1. The shapes of the first card slot 5 and the second card slot 6 are trapezoidal. Through the cooperation of the first card slot 5 and the second card slot 6, the stacked support frames 1 are assisted in supporting and the stability of the connection between the support frames 1 is enhanced.

[0026] There are four groups of positioning parts 41, two groups of positioning parts 41 are symmetrically distributed on the upper surface of the support frame 1, and the other two groups of positioning parts 41 are symmetrically distributed at both ends of the inner cavity of the first card slot 5. By setting the number of positioning parts 41, the connection of the support frame 1 is supported to avoid positional displacement between the support frames 1 after stacking.

[0027] Furthermore, the crossbar 3 is polygonal in shape. Preferably, both sides of the crossbar 3 are beveled, and the crossbar 3 is triangular in shape. The triangular shape of the crossbar 3 can avoid excessive contact between the inner portion of the silicon carbide ring and the surface of the crossbar 3, thereby reducing the contact area between the crossbar 3 and the silicon carbide ring.

[0028] The support frames 1 are provided in several groups, and the several groups of support frames 1 are stacked in sequence. By providing the several groups of support frames 1, the stacking number of support frames 1 is increased, so that the number of silicon carbide rings that can be hung in the furnace is increased.

[0029] There are several groups of silicon carbide rings hanging on the crossbar 3, and the distance between each group of silicon carbide rings is greater than 3CM. The distance between the silicon carbide rings is set to allow air to circulate in the furnace during heating.

[0030] The distance between the bottom end of each support frame 1 and the top end of the silicon carbide ring is greater than 3CM. By setting the distance between the support frame 1 and the silicon carbide ring, the support frame 1 and the silicon carbide ring are prevented from being too close to each other and the air flow in the furnace is facilitated during heating.

[0031] During specific use: the silicon carbide ring is passed through the cross bar 3 in sequence, the silicon carbide ring is hung by the cross bar 3, and then the cross bar 3 with the silicon carbide ring is placed in the fixing groove 2, and the position of the cross bar 3 on the support frame 1 is fixed by the fixing groove 2. When stacking, the two groups of support frames 1 are combined side by side, and then another group of support frames 1 is taken and placed on the top of the two groups of support frames 1. When the positioning part 41 is inserted into the inner cavity of the fixing hole 42, the three groups of support frames 1 can be stacked. In this way, several groups of support frames 1 can be stacked in sequence, which reduces the cost of the silicon carbide oxidation process, enables the support frames 1 to be quickly stacked and disassembled, shortens the time for stacking and disassembling the support frames 1, and simplifies the assembly and disassembly of the support frames 1.

[0032] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high temperature oxidation process suspension jig for silicon carbide rings, characterized in that: include: Two groups of support frames (1) are symmetrically arranged, each group of support frames (1) comprises a plurality of support frames (1), and a fixing groove (2) is provided at the top of each support frame (1); A crossbar (3) disposed in the inner cavity of the fixing groove (2) for hanging a silicon carbide ring; A stacking structure (4) is provided between the upper and lower support frames (1) in the same group and is used for stacking the upper and lower support frames (1).

2. The high temperature oxidation process suspension jig for silicon carbide rings according to claim 1, characterized in that: The stacking structure (4) includes a positioning portion (41), the positioning portion (41) is fixedly connected to the upper surface of the support frame (1), and the lower surface of the support frame (1) is provided with a fixing hole (42) adapted to the positioning portion (41), and the inner cavity of the fixing hole (42) is engaged with the positioning portion (41).

3. The high temperature oxidation process suspension jig for silicon carbide rings according to claim 2, characterized in that: The upper surface of the support frame (1) is provided with a first card slot (5), the inner cavity of the first card slot (5) is communicated with the inner cavity of the fixing slot (2), and the lower surface of the support frame (1) is provided with a second card slot (6), the first card slot (5) and the second card slot (6) are arranged in a trapezoidal shape.

4. The high temperature oxidation process suspension jig for silicon carbide rings according to claim 3, characterized in that: Four groups of positioning portions (41) are provided, wherein two groups of positioning portions (41) are symmetrically distributed on the upper surface of the support frame (1), and the other two groups of positioning portions (41) are symmetrically distributed at both ends of the inner cavity of the first card slot (5).

5. The high temperature oxidation process suspension jig for silicon carbide rings according to claim 1, characterized in that: The support frames (1) are provided in a plurality of groups, and the plurality of groups of support frames (1) are stacked in sequence.

6. The high temperature oxidation process suspension jig for silicon carbide rings according to claim 1, characterized in that: The silicon carbide rings hung on the crossbar (3) are arranged in a plurality of groups, and the distance between each group of silicon carbide rings is greater than 3CM.

7. The high temperature oxidation process suspension jig for silicon carbide rings according to claim 1, characterized in that: The crossbar (3) is arranged in a polygonal shape.

8. The high temperature oxidation process suspension jig for silicon carbide rings according to claim 7, characterized in that: The crossbar (3) is arranged in a triangular shape.

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