Vibration isolation and demagnetization foundation for precision equipment

Abstract

The utility model relates to the technical field of magnetic shielding construction, and discloses a precision equipment vibration isolation and demagnetization foundation which comprises a bearing platform, a stress cage, a plurality of steel pipe piles, a plurality of first boundary beams and a plurality of second boundary beams. The bearing platform is used for placing precise equipment; the steel pipe piles extend in the third direction, the first edge beams are arranged at intervals in the second direction, the second edge beams are arranged at intervals in the first direction, and the stress cage is made of glass fibers. The multiple steel pipe piles are arranged in an array mode, the ends of the steel pipe piles are embedded and fixed in the bearing platform, the stress cages are arranged in the bearing platform and fixedly connected with the bearing platform, the stress cages and the steel pipe piles are arranged at intervals in the third direction, the first edge beams and the second edge beams are fixedly connected at the intersections, and the bearing platform is spaced from the beams. The independent steel pipe piles are arranged, and a distance is reserved between the bearing platform and the beam, so that the influence of floor vibration on equipment is greatly reduced; meanwhile, glass fibers are adopted to prevent a magnetic field generated by the steel from influencing a precise instrument.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetic shielding construction, in particular to a vibration isolation and demagnetization foundation for precision equipment. Background Art

[0002] With the advancement of science, the use of high-precision instruments to study the microscopic world has become an indispensable means. However, high-precision instruments have extremely stringent requirements for the surrounding environment. Improper handling of the surrounding environment will distort research results. For example, environmental vibration and magnetic fields have a significant impact on the use of electron microscopes. Regarding how to address the impact of vibration and magnetic fields on electron microscopes, there is currently a lack of research literature and experience on vibration isolation and demagnetization of electron microscopes in civil engineering, and there are no relevant civil engineering standards or regulations. To solve the above problems, electron microscopes must be equipped with vibration-damping tables and magnetic shielding covers. However, after the construction of some electron microscopes, the vibration isolation and demagnetization effects are not ideal because existing measures cannot block the vibration source and magnetic field at the source, affecting the accuracy of test results and resulting in a waste of investment.

[0003] In order to solve the strict requirements of vibration reduction and demagnetization in the use environment of high-precision instruments such as electron microscopes, ensure the use effect of high-precision instruments, and fill the gap in this field in China. Utility Model Content

[0004] The purpose of the utility model is to solve the strict requirements on vibration reduction and demagnetization in the use environment of high-precision instruments such as electron microscopes, so as to ensure the use effect of high-precision instruments.

[0005] In order to achieve the above-mentioned purpose, the utility model provides a precision equipment vibration isolation and demagnetization foundation comprising: a bearing platform, a force cage, a plurality of steel pipe piles, a plurality of first side beams and a plurality of second side beams;

[0006] The platform is used to place precision equipment;

[0007] The steel pipe piles extend along the third direction, the first side beams extend along the first direction, the second side beams extend along the second direction, a plurality of first side beams are spaced apart along the second direction, a plurality of second side beams are spaced apart along the first direction, and the stress cage is made of glass fiber;

[0008] A plurality of steel pipe piles are arranged in an array, the ends of the steel pipe piles are embedded and fixed in the cap, a force cage is arranged in the cap and fixedly connected to the cap, the force cage and the steel pipe piles are spaced apart along the third direction, the first side beam and the second side beam are fixedly connected to each other at the intersection, and the cap is spaced apart from the first side beam and the second side beam;

[0009] The first direction, the second direction and the third direction are perpendicular to each other.

[0010] Furthermore, the distance between the pedestal and the first side beam is set to L1, and the distance between the pedestal and the second side beam is set to L2, satisfying the following relationship: 30mm<L1<50mm, and / or 30mm<L2<50mm.

[0011] Furthermore, the force cage includes a plurality of ribs, which are spaced apart along the third direction and fixed in the base.

[0012] Furthermore, the rib plate includes a plurality of first glass fiber ribs extending in a first direction, a plurality of second glass fiber ribs extending in a second direction, and a plurality of U-shaped fasteners. The plurality of first glass fiber ribs are arranged at intervals along the second direction, and the plurality of second glass fiber ribs are arranged at intervals along the first direction. The intersection of the first glass fiber ribs and the second glass fiber ribs is tied and fixed by U-shaped fasteners.

[0013] Furthermore, the foundation includes a body and a cushion layer, the body and the cushion layer are arranged along the third direction, the force cage is fixedly connected to the body, and the steel pipe pile passes through the cushion layer and is fixed in the body.

[0014] Furthermore, the support platform also includes a patch, which is fixedly connected to the outer peripheral wall of the body.

[0015] Furthermore, the thickness of the main body extending along the third direction is H, and H is ≥ 1500 mm.

[0016] Furthermore, the distance between the steel pipe pile and the foundation cap is k, 50mm≤k≤100mm.

[0017] Compared with the prior art, the vibration isolation and demagnetization foundation and construction method of precision equipment in the embodiment of the utility model have the following beneficial effects: (1) the precision instrument is placed on the support platform in the embodiment of the utility model, and the support platform is at a distance from the first side beam and the second side beam, so that the vibration of the floor is physically isolated from the support platform, preventing the vibration from being transmitted from the first side beam and the second side beam to the support platform, which can greatly reduce the impact of external vibration on the precision instrument.

[0018] (2) The material of the stress cage in the prior art is steel. Since steel has a great influence on the magnetic field of precision instruments, in order to achieve the purpose of demagnetizing precision instruments, the material of the stress cage in this embodiment is glass fiber.

[0019] (3) Multiple steel pipe piles extend along the third direction and are arranged in an array, providing the foundation with strong vertical bearing capacity and horizontal stability. The ends of the steel pipe piles are embedded and fixed inside the foundation, making the entire structure more stable and able to effectively resist the influence of external vibrations and geological changes. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a cross-sectional view of the first perspective of the embodiment of the present utility model;

[0021] Figure 2 yes Figure 1 sectional view of

[0022] Figure 3 This is a large-scale drawing of steel pipe piles.

[0023] In the figure, 1, base; 11, body; 12, cushion layer; 13, patch;

[0024] 2. Force cage; 21. Rib plate; 211. First glass fiber reinforcement; 212. Second glass fiber reinforcement; 22. Third glass fiber reinforcement;

[0025] 3. Steel pipe piles; 31. Stirrups;

[0026] 4. First side beam; 5. Second side beam. DETAILED DESCRIPTION

[0027] The following embodiments are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0028] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "vertical", "horizontal", "up", "down", "front", "back", "left", "right", "top", "bottom", "inside" and "outside" used in the present invention to indicate the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0029] In the description of the utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc. should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0030] like Figures 1 to 3 As shown, a vibration isolation and demagnetization foundation for precision equipment according to a preferred embodiment of the present invention comprises: a cap 1, a force cage 2, a plurality of steel pipe piles 3, a plurality of first side beams 4 and a plurality of second side beams 5;

[0031] Platform 1 is used to place precision equipment;

[0032] The steel pipe piles 3 extend along the third direction, the first side beams 4 extend along the first direction, the second side beams 5 extend along the second direction, a plurality of first side beams 4 are arranged at intervals along the second direction, a plurality of second side beams 5 are arranged at intervals along the first direction, and the stress cage 2 is made of glass fiber;

[0033] A plurality of steel pipe piles 3 are arranged in an array, the ends of the steel pipe piles 3 are embedded and fixed in the cap 1, the force cage 2 is arranged in the cap 1 and fixedly connected to the cap 1, the force cage 2 and the steel pipe piles 3 are spaced apart along the third direction, the first side beam 4 and the second side beam 5 are fixedly connected to each other at the intersection, and the cap 1 and the first side beam 4 and the second side beam 5 are all spaced apart;

[0034] The first direction, the second direction and the third direction are perpendicular to each other.

[0035] Based on the above scheme, the present embodiment places precision instruments on the pedestal 1, and the pedestal 1 is spaced apart from the first side beam 4 and the second side beam 5, so that the vibration of the floor is physically isolated from the pedestal 1, preventing the vibration from being transmitted from the first side beam 4 and the second side beam 5 to the pedestal 1, which can greatly reduce the impact of external vibration on precision instruments. The material of the stress cage 2 in the prior art is steel. Since steel has a great influence on the magnetic field of precision instruments, in order to achieve the purpose of demagnetizing precision instruments, the material of the stress cage 2 in this embodiment is glass fiber. A plurality of steel pipe piles 3 extend along the third direction and are arranged in an array, which can provide the pedestal 1 with strong vertical bearing capacity and horizontal stability. The ends of the steel pipe piles 3 are embedded and fixed inside the pedestal 1, making the entire structure more stable and able to effectively resist the influence of external vibrations and geological changes.

[0036] Preferably, the distance between the pedestal 1 and the first side beam 4 is set to L1, and the distance between the pedestal 1 and the second side beam 5 is set to L2, satisfying the following relationships: 30mm < L1 < 50mm, and / or 30mm < L2 < 50mm. This appropriate distance can reduce the rigid connection between the pedestal 1 and the side beams, thereby reducing the efficiency of vibration transmission and improving the vibration isolation effect. In actual construction, this distance range also takes into account construction convenience and operability.

[0037] Preferably, the stress cage 2 includes a plurality of ribs 21, and the plurality of ribs 21 are arranged at intervals along the third direction and fixed in the base 1. The ribs 21 are arranged at intervals along the third direction and fixed in the base 1, which can significantly improve the longitudinal bearing capacity of the stress cage 2, so that it can better resist the pressure from the weight of precision equipment and external loads. In this embodiment, the stress cage 2 also includes a third glass fiber rib 22, which is arranged around the outer periphery of the plurality of ribs 21 along the third direction, and the ends of the third glass fiber ribs 22 are fixed to the corresponding steel pipe piles 3, which are used to fix the plurality of ribs 21, further improving the stability of the connection between the stress cage 2 and the steel pipe piles 3.

[0038] Preferably, the rib plate 21 includes multiple first glass fiber ribs 211 extending in a first direction, multiple second glass fiber ribs 212 extending in a second direction, and multiple U-shaped fasteners. The multiple first glass fiber ribs 211 are spaced apart along the second direction, and the multiple second glass fiber ribs 212 are spaced apart along the first direction. The intersections of the first and second glass fiber ribs 211, 212 are secured together using U-shaped fasteners. The first glass fiber ribs 211 extend in the first direction, while the second glass fiber ribs 212 extend in the second direction. This ensures that the rib plate 21 has strong support in both directions. The multiple first glass fiber ribs 211 are spaced apart along the second direction, and the multiple second glass fiber ribs 212 are also spaced apart along the first direction. This spacing helps evenly distribute stress and prevent localized stress concentration. Because glass fiber ribs cannot be welded, U-shaped fasteners secure the intersections of the first and second glass fiber ribs 211, 212. The U-shaped fastener serves as a connector to ensure a tight connection and stability between the first and second glass fiber ribs 212. By combining the first and second glass fiber ribs 211, 212, and the U-shaped fastener, the structure of the rib plate 21 becomes more stable.

[0039] like Figure 3 As shown, further preferably, a rib plate 21 is arranged near the steel pipe pile 3, and stirrups 31 are buried inside the steel pipe pile 3. There are multiple stirrups 31, and the multiple stirrups 31 are arranged at intervals along the third direction. The stirrups 31 are used to fix the third glass fiber reinforcement 22.

[0040] Preferably, the pedestal 1 includes a main body 11 and a cushion layer 12, the main body 11 and the cushion layer 12 are arranged along a third direction, the force cage 2 is fixedly connected to the main body 11, and the steel pipe piles 3 pass through the cushion layer 12 and are fixed to the main body 11. The main body 11, cushion layer 12, force cage 2 and steel pipe piles 3 of the pedestal 1 together constitute a strong and stable structure that can withstand loads and forces from all sides. By adjusting the thickness of the cushion layer 12, the installation height of the main body 11 of the pedestal 1 can be controlled to ensure that the precision equipment is in the best working position. Specifically, in this embodiment, the cushion layer 12 is made of C20 concrete, which is a medium-strength concrete with a compressive strength grade of 20 MPa.

[0041] Preferably, the platform 1 includes a patch 13 fixedly attached to the outer peripheral wall of the body 11. This patch 13 serves as a protective layer for the platform 1, preventing direct impact or corrosion from external factors. For example, in humid or corrosive environments, the patch 13 can protect the body 11 of the platform 1 from corrosion, extending its service life. In addition to its functional role, the patch 13 also enhances the appearance of the platform 1.

[0042] Preferably, the thickness of the main body 11 extending along the third direction is H, H ≥ 1500 mm. The main body 11 has a larger volume and mass, thereby being able to provide a stronger load-bearing capacity. This is conducive to the placement of heavy precision equipment, ensuring that the platform 1 does not sink or deform during operation due to insufficient load-bearing capacity of the platform 1. The main body 11 of the thicker platform 1 has higher rigidity in the vertical direction and can better resist the influence of external loads and vibrations. This helps to maintain the stable operation of precision equipment and reduce errors and failures caused by vibration.

[0043] Preferably, the distance k at which the steel pipe pile 3 is embedded in the pedestal 1 is 50mm≤k≤100mm. The distance k at which the steel pipe pile 3 is embedded in the pedestal 1 not only ensures a firm connection between the steel pipe pile 3 and the pedestal 1, but also avoids structural problems caused by embedding too deep or too shallow. Too deep embedding will conflict with the force cage 2, while too shallow embedding will affect the stability and reliability of the connection. An appropriate embedding depth helps to effectively transfer the bearing capacity of the steel pipe pile 3 to the pedestal 1, thereby enhancing the structural strength and stability of the entire vibration isolation and demagnetization foundation.

[0044] In summary, the embodiment of the present utility model provides a foundation and construction method for vibration isolation and demagnetization of precision equipment, which places precision instruments on the pedestal 1. The pedestal 1 is spaced apart from the first side beam 4 and the second side beam 5, so that the vibration of the floor is physically isolated from the pedestal 1, preventing the vibration from being transmitted from the first side beam 4 and the second side beam 5 to the pedestal 1, and greatly reducing the impact of external vibration on precision instruments. The material of the force cage 2 in this embodiment is glass fiber. A plurality of steel pipe piles 3 extend along the third direction and are arranged in an array, which can provide the pedestal 1 with strong vertical bearing capacity and horizontal stability. The ends of the steel pipe piles 3 are embedded and fixed inside the pedestal 1, making the entire structure more stable and able to effectively resist the influence of external vibrations and geological changes.

[0045] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and replacements can be made without departing from the technical principles of the present invention. These improvements and replacements should also be regarded as the scope of protection of the present invention.

Claims

1. A vibration isolation and demagnetization foundation for precision equipment, characterized in that: include: A cap, a load cage, multiple steel pipe piles, multiple first side beams and multiple second side beams; The support platform is used to place precision equipment; The steel pipe piles extend along the third direction, the first side beams extend along the first direction, the second side beams extend along the second direction, a plurality of the first side beams are spaced apart along the second direction, a plurality of the second side beams are spaced apart along the first direction, and the stress cage is made of glass fiber; The plurality of steel pipe piles are arranged in an array, the ends of the steel pipe piles are embedded and fixed in the cap, the force cage is arranged in the cap and fixedly connected to the cap, the force cage and the steel pipe piles are spaced apart along the third direction, the first side beam and the second side beam are fixedly connected to each other at the intersection, and the cap is spaced apart from the first side beam and the second side beam; The first direction, the second direction and the third direction are perpendicular to each other.

2. The precision equipment vibration isolation and demagnetization foundation according to claim 1 is characterized in that: The distance between the support platform and the first side beam is set to L1, and the distance between the support platform and the second side beam is set to L2, satisfying the following relationship: 30mm<L1<50mm, and / or 30mm<L2<50mm.

3. The precision equipment vibration isolation and demagnetization foundation according to claim 1, characterized in that: The force cage includes a plurality of ribs, and the plurality of ribs are spaced apart along the third direction and fixed in the support platform.

4. The precision equipment vibration isolation and demagnetization foundation according to claim 3, characterized in that: The rib plate includes a plurality of first glass fiber ribs extending in a first direction, a plurality of second glass fiber ribs extending in a second direction, and a plurality of U-shaped fasteners. The plurality of first glass fiber ribs are arranged at intervals along the second direction, and the plurality of second glass fiber ribs are arranged at intervals along the first direction. The intersection of the first glass fiber ribs and the second glass fiber ribs is tied and fixed by the U-shaped fasteners.

5. The precision equipment vibration isolation and demagnetization foundation according to claim 1, characterized in that: The bearing platform includes a body and a cushion layer, the body and the cushion layer are arranged along a third direction, the stress cage is fixedly connected to the body, and the steel pipe pile passes through the cushion layer and is fixed in the body.

6. The precision equipment vibration isolation and demagnetization foundation according to claim 5, characterized in that: The support platform further includes a patch, and the patch is fixedly connected to the outer peripheral wall of the body.

7. The precision equipment vibration isolation and demagnetization foundation according to claim 6, characterized in that: The thickness of the main body extending along the third direction is H, and H is ≥ 1500 mm.

8. The precision equipment vibration isolation and demagnetization foundation according to claim 1, characterized in that: The distance between the steel pipe pile and the foundation is k, 50mm≤k≤100mm.

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