Control system of vacuum sintering furnace and vacuum sintering furnace

Abstract

The utility model relates to the technical field of sintering furnaces, and provides a control system of a vacuum sintering furnace, which is characterized in that a second output port of an upper computer is electrically connected with a coil of a second relay through a normally closed contact of a fourth relay; a third output port of the upper computer is electrically connected with a coil of a third relay through a normally closed contact of a fourth relay; a fourth output port of the upper computer is electrically connected in series with a coil of the fourth relay; the power supply, a normally open contact of the first relay, the first electromagnetic valve and the common terminal are electrically connected in series in sequence; the power supply, a normally open contact of the second relay, the second electromagnetic valve and the common terminal are electrically connected in series in sequence; the power supply, a normally open contact of the third relay, the third electromagnetic valve and the common terminal are electrically connected in series in sequence; and the power supply, a normally open contact of the fourth relay, the fourth electromagnetic valve and the common terminal are electrically connected in series in sequence. The gas outlet of the vacuum sintering furnace cavity controls the formic acid and nitrogen mixed gas inlet and the nitrogen inlet, one-way interlocking is achieved, and resources are saved.

Description

Technical Field

[0001] The utility model relates to the technical field of sintering furnaces, in particular to a control system of a vacuum sintering furnace and the vacuum sintering furnace. Background Art

[0002] Semiconductor chip packaging requires a vacuum environment, typically achieved using a vacuum furnace. The vacuum furnace needs to be filled with nitrogen and formic acid, or a nitrogen-formic acid mixture. When filling the nitrogen-formic acid mixture, nitrogen is first charged into a formic acid tank, the gas outlet of which is then connected to the vacuum furnace. The gas outlet of the vacuum sintering furnace cavity controls the inlet of the formic acid-nitrogen mixture and the nitrogen inlet. When exhausting waste gas, the nitrogen inlet and the formic acid-nitrogen mixture inlet need to be closed, failing to achieve one-way interlocking, resulting in a waste of resources and unsafe conditions. Summary of the Invention

[0003] The utility model provides a control system of a vacuum sintering furnace and a vacuum sintering furnace, which are used to solve the problem in the prior art that an air outlet and an air inlet of a vacuum furnace cavity cannot be one-way interlocked, resulting in waste of resources and unsafety.

[0004] A control system for a vacuum sintering furnace comprises a host computer, a second relay, a third relay, a fourth relay, a second solenoid valve, a third solenoid valve, a fourth solenoid valve, a power supply and a common terminal; the second output port of the host computer is electrically connected to the coil of the second relay via the normally closed contact of the fourth relay; the third output port of the host computer is electrically connected to the coil of the third relay via the normally closed contact of the fourth relay; the fourth output port of the host computer is electrically connected in series with the coil of the fourth relay; the power supply, the normally open contact of the first relay, the first solenoid valve and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the second relay, the second solenoid valve and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the third relay, the third solenoid valve and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the fourth relay, the fourth solenoid valve and the common terminal are electrically connected in series in sequence.

[0005] According to the control system of the vacuum sintering furnace of the present invention, the control system further includes a first relay, and the first output port of the host computer, the normally open contact of the second relay and the coil of the first relay are electrically connected in series.

[0006] According to the control system of the vacuum sintering furnace of the present invention, the control system further includes a first solenoid valve, a power supply, a normally open contact of the first relay, the first solenoid valve and a common terminal which are electrically connected in series in sequence.

[0007] According to the control system of the vacuum sintering furnace of the present invention, the power supply is 24V, and the common terminal is 0V.

[0008] A vacuum sintering furnace comprises a control system of the vacuum sintering furnace, a vacuum sintering furnace cavity, a first gas tank and a formic acid tank; one end of a first solenoid valve is connected to the first gas tank, the other end of the first solenoid valve is connected to the inlet end of the formic acid tank, one end of a second solenoid valve is connected to the outlet end of the formic acid tank, the other end of the second solenoid valve is connected to the first inlet end of the vacuum sintering furnace cavity, one end of a third solenoid valve is connected to the first gas tank, the other end of the third solenoid valve is connected to the second inlet end of the vacuum sintering furnace, and a fourth solenoid valve is connected to the outlet end of the vacuum sintering furnace cavity.

[0009] According to the vacuum sintering furnace of the present invention, the first gas tank is a nitrogen tank.

[0010] The utility model ensures that the air inlet of the formic acid tank is opened only when the gas outlet of the formic acid tank is opened, thereby preventing safety risks caused by excessive pressure in the formic acid tank. The gas outlet of the vacuum sintering furnace cavity controls the inlet of the formic acid-nitrogen mixture and the nitrogen inlet. When exhaust gas is discharged, the nitrogen inlet and the formic acid-nitrogen mixture inlet are closed, achieving a one-way interlock, saving resources and improving safety. When the gas outlet is closed, if there is an excess of nitrogen or formic acid-nitrogen mixture, the gas outlet can release pressure, thus ensuring the safety of the vacuum sintering furnace cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0012] 1. Figure 1 It is a structural diagram of a vacuum sintering furnace;

[0013] 2. Figure 2 Schematic diagram of the control system structure of the vacuum sintering furnace Figure 1 ;

[0014] 3. Figure 3 Schematic diagram of the control system structure of the vacuum sintering furnace Figure 2 ;

[0015] 4. Figure 4 Schematic diagram of the control system structure of the vacuum sintering furnace Figure 3 ;

[0016] Figure numerals: 1, first solenoid valve; 2, second solenoid valve; 3, third solenoid valve; 4, fourth solenoid valve; 5, formic acid tank. DETAILED DESCRIPTION

[0017] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0018] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0019] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on specific circumstances.

[0020] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," or "above" a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0021] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or at least one embodiment or example in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0022] The following combination Figure 1-4 A control system for a vacuum sintering furnace according to an embodiment of the present invention is described, comprising a host computer, a second relay K02, a third relay K03, a fourth relay K04, a second solenoid valve 2, a third solenoid valve 3, a fourth solenoid valve 4, a power supply and a common terminal; the second output port of the host computer is electrically connected to the coil of the second relay K02 through the normally closed contact of the fourth relay K04; the third output port of the host computer is electrically connected to the coil of the third relay K03 through the normally closed contact of the fourth relay K04; the fourth output port of the host computer is electrically connected in series with the coil of the fourth relay K04; the power supply, the normally open contact of the first relay K01, the first solenoid valve 1 and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the second relay K02, the second solenoid valve 2 and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the third relay K03, the third solenoid valve 3 and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the fourth relay K04, the fourth solenoid valve 4 and the common terminal are electrically connected in series in sequence.

[0023] The second output port, the third output port and the fourth output port of the host computer are high level outputs, and the ports output 24V control signals.

[0024] Relays K01-K04 are safety intermediate relays with a forced-guiding function. The host computer controls the intermediate relay coils. The closing and opening of the intermediate relay coils determine the state of the relay contacts. The relay contact state determines whether the solenoid valves are energized. When the solenoid valves are energized, the power gas is connected, which can drive the corresponding pneumatic valves.

[0025] When the host computer's fourth output port outputs a high level, the coil of the fourth relay K04 is energized, the normally open contact of the fourth relay K04 closes, and the fourth solenoid valve 4 opens to vent the vacuum sintering furnace cavity. However, the second and third solenoid valves 2 and 3 are controlled by the fourth relay K04. When the fourth solenoid valve 4 vents, the second and third solenoid valves 2 and 3 close. When the second output port of the host computer outputs a high level and the fourth solenoid valve 4 closes, the coil of the second relay K02 is energized, the normally open contact of the second relay K02 closes, and the second solenoid valve 2 opens, allowing the formic acid and nitrogen mixture in the formic acid tank 5 to enter the vacuum sintering furnace cavity. When the third output port of the host computer outputs a high level and the fourth solenoid valve 4 closes, the coil of the third relay K03 is energized, the normally open contact of the third relay K03 closes, and the third solenoid valve 3 opens the nitrogen tank, allowing nitrogen to enter the vacuum sintering furnace cavity. In other words, when filling with nitrogen or a formic acid and nitrogen mixture, the vacuum sintering furnace cavity's gas outlet must be closed. When discharging the gas in the vacuum sintering furnace cavity, the valves for filling nitrogen and formic acid nitrogen mixture should be closed. However, when the second solenoid valve 2 and the third solenoid valve 3 are inflating the vacuum sintering furnace cavity, the fourth solenoid valve 4 is closed. If the gas is overfilled, the fourth solenoid valve 4 is also opened to release the pressure.

[0026] In some embodiments, the system further includes a first relay K01 and a first solenoid valve 1. The first output port of the host computer, the normally open contact of the second relay K02, and the coil of the first relay K01 are electrically connected in series. The second solenoid valve 2 is controlled by a fourth relay K04. When the fourth solenoid valve 4 is closed, i.e., the normally closed contact of the fourth relay K04 is closed, the second output port of the host computer outputs a high potential of 24V. This energizes the coil of the second relay K02, closes the normally open contact of the second relay K02, energizes the coil of the first relay K01, closes the normally open contact of the first relay K01, and opens the first solenoid valve 1. This ensures that after the outlet of the formic acid tank 5 is opened, the inlet of the formic acid tank 5 is also opened, preventing excessive pressure from nitrogen entering the formic acid tank 5. The first output port of the host computer outputs a high level.

[0027] In some embodiments, the coil of the first relay K01 is connected in parallel with a resistor and capacitor connected in series, the coil of the second relay K02 is connected in parallel with a resistor and capacitor connected in series, the coil of the third relay K03 is connected in parallel with a resistor and capacitor connected in series, and the coil of the fourth relay K04 is connected in parallel with a resistor and capacitor connected in series. This achieves interference removal and filtering functions for the coils of the first solenoid valve 1, the second solenoid valve 2, the third solenoid valve 3, and the fourth solenoid valve 4.

[0028] In some embodiments, the power supply, the normally open contact of the first relay K01 , the first solenoid valve 1 , and the common terminal are electrically connected in series in sequence.

[0029] In some embodiments, the power supply is 24V and the common terminal is 0V.

[0030] A vacuum sintering furnace includes a control system, a vacuum sintering furnace cavity, a first gas tank, and a formic acid tank 5. One end of a first solenoid valve 1 is connected to the first gas tank, the other end of the first solenoid valve 1 is connected to the inlet of the formic acid tank 5, one end of a second solenoid valve 2 is connected to the outlet of the formic acid tank 5, the other end of the second solenoid valve 2 is connected to the first inlet of the vacuum sintering furnace cavity, one end of a third solenoid valve 3 is connected to the first gas tank, the other end of the third solenoid valve 3 is connected to the second inlet of the vacuum sintering furnace, and a fourth solenoid valve 4 is connected to the outlet of the vacuum sintering furnace cavity. The vacuum sintering furnace is a single-cavity vacuum sintering furnace or a multi-cavity vacuum sintering furnace.

[0031] In some embodiments, the first gas tank is a nitrogen tank.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A control system for a vacuum sintering furnace, characterized in that: It includes a host computer, a second relay, a third relay, a fourth relay, a second solenoid valve, a third solenoid valve, a fourth solenoid valve, a power supply and a common terminal; the second output port of the host computer is electrically connected to the coil of the second relay through the normally closed contact of the fourth relay; the third output port of the host computer is electrically connected to the coil of the third relay through the normally closed contact of the fourth relay; the fourth output port of the host computer is electrically connected in series with the coil of the fourth relay; the power supply, the normally open contact of the first relay, the first solenoid valve and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the second relay, the second solenoid valve and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the third relay, the third solenoid valve and the common terminal are electrically connected in series in sequence; the power supply, the normally open contact of the fourth relay, the fourth solenoid valve and the common terminal are electrically connected in series in sequence.

2. The control system of the vacuum sintering furnace according to claim 1, characterized in that: It also includes a first relay, and the first output port of the host computer, the normally open contact of the second relay and the coil of the first relay are electrically connected in series.

3. The control system of the vacuum sintering furnace according to claim 2, characterized in that: It also includes a first solenoid valve, a power supply, a normally open contact of the first relay, the first solenoid valve and a common terminal which are electrically connected in series in sequence.

4. The control system of the vacuum sintering furnace according to claim 1, characterized in that: The power supply is 24V, and the common terminal is 0V.

5. A vacuum sintering furnace, characterized in that: The invention comprises a control system of a vacuum sintering furnace, a vacuum sintering furnace cavity, a first gas tank and a formic acid tank; one end of a first solenoid valve is connected to the first gas tank, the other end of the first solenoid valve is connected to the inlet end of the formic acid tank, one end of a second solenoid valve is connected to the outlet end of the formic acid tank, the other end of the second solenoid valve is connected to the first inlet end of the vacuum sintering furnace cavity, one end of a third solenoid valve is connected to the first gas tank, the other end of the third solenoid valve is connected to the second inlet end of the vacuum sintering furnace, and a fourth solenoid valve is connected to the outlet end of the vacuum sintering furnace cavity.

6. The vacuum sintering furnace according to claim 5, characterized in that: The first gas tank is a nitrogen tank.

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