Substrate camber measuring device of 3D visual semiconductor device
By adopting a combined design of a mobile clamp and a laser rangefinder in the substrate arcuate measurement device of 3D vision semiconductor devices, the problem of the inability to measure the deformation differences of different positions of the substrate in the prior art is solved, and the accurate measurement of the substrate arcuate is achieved, and the flexibility and accuracy of measurement are improved.
Patent Information
- Application Number
- CN202422555865.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-23
- Publication Date
- 2025-08-22
- Estimated Expiration
- 2034-10-23
AI Technical Summary
The substrate arcuate measurement device of the existing 3D vision semiconductor devices can only measure the deformation tolerance of the substrate after deformation, and cannot measure the deformation difference at different positions of the substrate during deformation.
Using a design including a base plate assembly, a measurement assembly and an auxiliary assembly, the substrate is clamped by moving the clamp and measuring the arc of the substrate at different positions using the first and second laser rangefinders, combining the electric telescopic rod and the slide rail structure to achieve stable clamping and measurement of the substrate.
It realizes accurate measurement of the arc distance at different positions of the substrate under different arcuate states, improves the flexibility and practicality of measurement, and ensures the accuracy and stability of measurement data.
Smart Images
Figure CN223258879U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of substrate detection, in particular to a substrate arch measurement device for a 3D visual semiconductor device. Background Art
[0002] 3D vision semiconductor devices are a type of semiconductor elements that play a key role in 3D vision systems, and the substrate is one of the indispensable components in semiconductor devices. It has the functions of fixing chips and components, maintaining the stability of the device structure, providing a basis for circuit wiring, realizing signal transmission and interaction as well as heat conduction, resisting the influence of the external environment, and preventing static electricity and electromagnetic interference.
[0003] The toughness of a substrate is an important characteristic that measures its ability to resist fracture and deformation when subjected to external forces. Existing substrate arch measurement devices for 3D vision semiconductor devices mostly use hydraulic devices for measurement. A conical plate is installed in the middle of the upper pressure plate, and two conical plates are installed on the lower pressure plate, located at both ends of the upper conical plate. The upper pressure plate presses down on the middle of the substrate to deform it to complete the arch test. However, this does not belong to the deformation generated in the natural state. It can only measure its deformation tolerance, but cannot measure the deformation difference at different positions of the substrate during the deformation process. Therefore, there are certain defects. Utility Model Content
[0004] (1) Technical problems solved
[0005] In response to the shortcomings of the existing technology, the utility model provides a substrate arch measurement device for 3D visual semiconductor devices, which has the advantages of being able to measure the arch distance at different positions under different arch states, solving the problem that the arch measurement can only be performed on fixed points at this stage.
[0006] (2) Technical solution
[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a substrate arch measuring device for a 3D visual semiconductor device, comprising a base plate assembly, a measuring assembly and an auxiliary assembly, wherein the base plate assembly comprises a stable base plate, a stable side bar is fixed on the side of the stable base plate, and a movable splint is movably connected to the side of the stable side bar. The stable base plate is directional, and stable side bars are installed on both sides. The length of the stable side bar is at least twice the length of the stable base plate. At the same time, movable splints are installed at both ends between the two stable side bars. The movable splint is in the shape of a right-angled groove. The two ends of the substrate are fitted in the groove body. When the movable splint approaches the middle, the substrate is gradually bent in an arc shape.
[0008] The measuring assembly includes a mover movably connected to a stable side rod, a first laser rangefinder is fixed on the mover, and a protrusion is fixed on the side of the mover, and a second laser rangefinder is fixed on the side of the protrusion. The first laser rangefinder and the second laser rangefinder are both composed of a laser emitter and a rangefinder. The laser emitter emits a laser beam to an object and reflects it, and the rangefinder receives the reflected laser beam to calculate the distance.
[0009] The auxiliary component includes a support rod fixed on the stable side rod, an auxiliary side rod fixed at one end of the support rod, a reflector fixed at the bottom of the auxiliary side rod, the first laser rangefinder corresponds to the reflector, support rods are fixed at both ends of the top of the stable side rod, the top of the support rod is fixed at the corresponding positions at both ends of the bottom of the auxiliary side rod, and a strip reflector is fixed at the bottom of the auxiliary side rod. When the mover moves, the first laser rangefinder can continuously emit and receive laser beams on the reflector to measure the distance between the first laser rangefinder and the reflector.
[0010] When measuring the thickness of the substrate of the 3D vision semiconductor device, the substrate to be tested is placed on a stable base plate. At this time, the two ends of the substrate are in a suspended state. By controlling the output ends of the electric telescopic rods at both ends to be retracted inward, the movable clamping plate is moved closer to the stable base plate. After contacting the two ends of the substrate, the movable clamping plate is continuously clamped toward the middle, causing the substrate to gradually deform and arch upward. The laser rangefinder at the bottom of the movable clamping plate is controlled to emit a laser beam to measure the distance between the two movable clamping plates. At this time, the first and second laser rangefinders are controlled to operate. The first laser rangefinder emits a laser beam to the reflector, and the second The laser rangefinder emits a laser beam onto the substrate. The laser beam is reflected after being emitted to the surface of the target object. The reflected beam is received by the rangefinder installed in the laser detector and the distance is calculated. The parallel distance measured by the first laser rangefinder is subtracted from the distance of each position of the substrate curvature measured by the second laser rangefinder to obtain the curvature of the substrate at different positions. At the same time, the curvature data of the substrate at different spacings of the movable splint are obtained by combining it with the moving spacing measured between the laser rangefinders. After the test is completed, the electric telescopic rod is controlled to extend so that the movable splint is expanded to both ends until it is separated from both ends of the substrate, and then the substrate can be taken out.
[0011] As a further improvement of the above solution, a rubber knob is fixed on the stable base plate.
[0012] Through the above technical solution, the top of the rubber knob is higher than the top surface of the stable base plate, so that when the substrate is placed on the stable base plate, the rubber knob increases the friction resistance between the contact surface with the stable base plate, thereby preventing the substrate from slipping and causing deviation when clamped by the moving clamp, thereby affecting the final measurement data.
[0013] As a further improvement of the above solution, a stabilizing slide rail is provided on the stabilizing side rod, and the bottom of the mover is slidably connected to the stabilizing slide rail.
[0014] Through the above technical solution, a groove is provided at the bottom of the mover that matches the side of the stable slide rail, and a driving component for controlling its operation is installed in the mover, so that the mover can move on the stable slide rail, thereby driving the first and second laser rangefinders to move and measure the height and curvature of the substrate at different positions.
[0015] As a further improvement of the above solution, a limiting slide rail is provided on the side of the stabilizing side bar, and a slide rail device is fixed on the movable splint, and the slide rail device is slidably connected to the limiting slide rail.
[0016] Through the above technical solution, slides are installed at both ends of the movable splint, and a groove is opened on the side of the slide, which coincides with the side of the limiting slide rail to improve the stability of the movement of the movable splint. At the same time, a driving component is installed in the slide to drive the slide to move on the limiting slide rail. When the two movable splints approach the middle, the substrate is clamped and arched.
[0017] As a further improvement of the above solution, an electric telescopic rod is fixed in the stable side rod, a linkage plate is fixed at one end of the electric telescopic rod, a linkage rod is fixed at one end of the linkage plate, and one end of the linkage rod is fixed on the movable splint.
[0018] Through the above technical solution, electric telescopic rods are installed inside both ends of the stabilizing side rods and operate synchronously. When the output end of the telescopic rod is retracted inward, the connecting rod is driven to move simultaneously through the connecting plate, so that the movable splint moves closer to the stabilizing bottom plate between the stabilizing side rods.
[0019] As a further improvement of the above solution, a laser rangefinder is fixed to the bottom of the movable clamping plate.
[0020] Through the above technical solution, laser rangefinders are installed at corresponding positions on the bottom of the two movable splints. The laser rangefinder is specifically composed of a laser transmitter and a receiver. By emitting and receiving laser beams, the distance between the two movable splints is measured.
[0021] As a further improvement of the above solution, a fixed frame is fixed to the side of the auxiliary side bar.
[0022] Through the above technical solution, the two auxiliary side bars are fixed by a fixed frame, thereby preventing the auxiliary side bars from shaking.
[0023] Compared with the prior art, the present invention provides a substrate arch measurement device for 3D vision semiconductor devices, which has the following beneficial effects:
[0024] 1. The substrate arch measurement device for 3D vision semiconductor devices has movable clamps installed at both ends of a stable base plate. The output end of the electric telescopic rod is retracted into the interior, so that the movable clamps approach the middle and clamp the substrate. The arch of the substrate varies according to the different spacings at which the movable clamps are clamped to the middle. The first and second laser rangefinders can measure the arch data of the substrate under different clamping forces, greatly increasing its practicality.
[0025] 2. The substrate arch measurement device of the 3D vision semiconductor device is equipped with stabilizing side bars on both sides of a stabilizing base plate. A mover is slidably connected to the stabilizing side plate. The first and second laser rangefinders are installed on the mover. The positions of the first and second laser rangefinders are adjusted by moving the mover, so that the arch of different positions of the substrate can be measured, further improving the flexibility and practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 This is a schematic diagram of the overall top view of the device of the utility model;
[0027] Figure 2 This is a schematic diagram of the overall bottom structure of the device of the utility model;
[0028] Figure 3 For this utility model Figure 1 Schematic diagram of the structure at A in the middle;
[0029] Figure 4 For this utility model Figure 1 Schematic diagram of the structure at B in the middle;
[0030] Figure 5 For this utility model Figure 2 Schematic diagram of the structure at point C in the middle.
[0031] In the accompanying drawings, the components represented by the reference numerals are as follows:
[0032] 1. Bottom plate assembly; 101. Stable bottom plate; 102. Rubber knob; 103. Stable side bar; 104. Stable slide rail; 105. Limiting slide rail; 106. Movable clamp; 1061. Laser rangefinder; 107. Slide rail; 108. Electric telescopic rod; 110. Linkage plate; 111. Linkage rod;
[0033] 2. Measuring assembly; 201. Mover; 202. First laser rangefinder; 203. Bump; 204. Second laser rangefinder;
[0034] 3. Auxiliary components; 301. Support rod; 302. Auxiliary side rod; 303. Fixed frame; 304. Reflector. DETAILED DESCRIPTION
[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0036] Example 1
[0037] See also Figure 1-5 As shown, the substrate arch measuring device of the 3D vision semiconductor device proposed in this embodiment includes a base plate component 1, a measuring component 2 and an auxiliary component 3. The base plate component 1 includes a stable base plate 101, a stable side bar 103 is fixed to the side of the stable base plate 101, and a movable clamping plate 106 is movably connected to the side of the stable side bar 103. The stable base plate 101 is directional, and stable side bars 103 are installed on both sides. The length of the stable side bar 103 is at least twice the length of the stable base plate 101. At the same time, movable clamping plates 106 are installed at both ends between the two stable side bars 103. The movable clamping plate 106 is in the shape of a right-angled groove. The two ends of the substrate are attached to the groove body. When the movable clamping plate 106 approaches the middle, the substrate is gradually bent in an arc shape.
[0038] The measuring component 2 includes a mover 201 movably connected to the stable side rod 103, a first laser rangefinder 202 is fixed on the mover 201, and a protrusion 203 is fixed to the side of the mover 201, and a second laser rangefinder 204 is fixed to the side of the protrusion 203. The first laser rangefinder 202 and the second laser rangefinder 204 are both composed of a laser emitter and a rangefinder. The laser emitter emits a laser beam to the object and reflects it, and the rangefinder receives the reflected laser beam to calculate the distance.
[0039] In addition, it should be noted that the second laser rangefinder 204 is located above the stable base plate 101, so that it can emit a laser beam to the bottom of the bent substrate to measure the curvature of each position of the substrate.
[0040] The auxiliary component 3 includes a support rod 301 fixed on the stabilizing side rod 103, an auxiliary side rod 302 is fixed at one end of the support rod 301, a reflector 304 is fixed at the bottom of the auxiliary side rod 302, the first laser rangefinder 202 corresponds to the reflector 304, and support rods 301 are fixed at both ends of the top of the stabilizing side rod 103. The top of the support rod 301 is fixed at the corresponding positions at both ends of the bottom of the auxiliary side rod 302. By fixing a strip reflector 304 at the bottom of the auxiliary side rod 302, when the mover 201 moves, the first laser rangefinder 202 can continuously emit and receive laser beams to the reflector 304, and measure the distance between the first laser rangefinder 202 and the reflector 304.
[0041] The working principle of the substrate arch measurement device of the 3D vision semiconductor device proposed in this embodiment is as follows: when in use, the substrate to be tested is placed on the stable base plate 101, at which time the two ends of the substrate are in a suspended state (located between the stable side bars 103 on both sides), and the output ends of the electric telescopic rods 108 at both ends are controlled to be retracted inward, so that the movable clamping plate 106 approaches the stable base plate 101. After contacting the two ends of the substrate, the movable clamping plate 106 is continuously clamped toward the middle, so that the substrate gradually deforms and arches upward, and the laser rangefinder 1061 at the bottom of the movable clamping plate 106 is controlled to emit a laser beam to measure the distance between the two movable clamping plates 106. At this time, the first and second laser rangefinders are controlled to operate, and the first laser rangefinder 202 emits a laser beam onto the reflective plate 304, while the second laser rangefinder 202 emits a laser beam onto the reflective plate 304, and the second laser rangefinder 202 emits a laser beam onto the reflective plate 304. The optical rangefinder 204 emits a laser beam onto the substrate. The laser beam is reflected after being emitted to the surface of the target object (the reflector 304 is the target object of the first laser rangefinder 202, and the substrate is the target object of the second laser rangefinder 204). The reflected beam is received by the rangefinder installed in the laser detector and the distance is calculated. The distance of each position of the substrate curvature measured by the second laser rangefinder 204 is subtracted from the parallel distance measured by the first laser rangefinder 202 to obtain the curvature of the substrate at different positions. At the same time, the moving distance measured between the laser rangefinder 1061 is used to obtain the curvature data of the substrate at different spacings of the movable clamping plate 106. After the test is completed, the electric telescopic rod 108 is controlled to extend, so that the movable clamping plate 106 is expanded to both ends until it is separated from both ends of the substrate, and then the substrate can be taken out.
[0042] Example 2
[0043] See also Figure 1-5As shown, the substrate curvature measuring device of the 3D vision semiconductor device proposed in this embodiment, based on the embodiment one, this embodiment also includes: a rubber convex button 102 is fixed on the stable base plate 101, a stable slide rail 104 is provided on the stable side bar 103, the bottom of the mover 201 is slidably connected to the stable slide rail 104, a limiting slide rail 105 is provided on the side of the stable side bar 103, and at the same time, a slide device 107 is fixed on the moving clamping plate 106, the slide device 107 is slidably connected to the limiting slide rail 105, an electric telescopic rod 108 is fixed in the stable side bar 103, a linkage plate 110 is fixed at one end of the electric telescopic rod 108, a linkage rod 111 is fixed at one end of the linkage plate 110, one end of the linkage rod 111 is fixed on the moving clamping plate 106, a laser rangefinder 1061 is fixed at the bottom of the moving clamping plate 106, and a fixed frame 303 is fixed to the side of the auxiliary side bar 302.
[0044] The top of the rubber knob 102 is higher than the top surface of the stable base plate 101, so that when the substrate is placed on the stable base plate 101, the rubber knob 102 increases the friction resistance between the contact surface with the stable base plate 101, thereby preventing the substrate from slipping and causing deviation when the mobile clamping plate 106 is clamped, thereby affecting the final measurement data. The bottom of the mover 201 is provided with a groove body that matches the side of the stable slide rail 104, and the mover 201 is equipped with a driving component for controlling its operation, so that the mover 201 can move on the stable slide rail 104, thereby driving the first and second laser rangefinders to move, and measuring the height and curvature of the substrate at different positions. Sliders 107 are installed at both ends of the mobile clamping plate 106, and the side of the slider 107 is provided with a groove body, which matches the side of the limiting slide rail 105, thereby improving the stability of the movement of the mobile clamping plate 106. Qualitatively, a driving assembly is installed in the slide 107, which is used to drive the slide 107 to move on the limiting slide 105. When the two moving splints 106 approach the middle, the base plate is clamped and arched. Electric telescopic rods 108 are installed inside both ends of the stable side bar 103, and operate synchronously. When the output end of the telescopic rod is retracted inward, the connecting rod 111 is driven to move simultaneously through the connecting plate 110, so that the moving splint 106 is close to the stable base plate 101 between the stable side bars 103. Laser rangefinders 1061 are installed at the corresponding positions at the bottom of the two moving splints 106. The laser rangefinder 1061 is specifically composed of a laser transmitter and a receiver. By emitting and receiving laser beams, the distance between the two moving splints 106 is measured. The two auxiliary side bars 302 are fixed by a fixed frame 303 to prevent the auxiliary side bars 302 from shaking.
[0045] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A substrate arch measurement device for a 3D vision semiconductor device, comprising a base plate assembly, a measurement assembly, and an auxiliary assembly, characterized in that: The base plate assembly includes a stable base plate, a stable side bar fixed to the side of the stable base plate, and a movable splint movably connected to the side of the stable side bar; The measuring assembly includes a mover movably connected to a stable side rod, a first laser rangefinder is fixed on the mover, and a convex block is fixed on the side of the mover, and a second laser rangefinder is fixed on the side of the convex block; The auxiliary component includes a support rod fixed on the stable side rod, an auxiliary side rod is fixed at one end of the support rod, a reflective plate is fixed at the bottom of the auxiliary side rod, and the first laser rangefinder corresponds to the reflective plate.
2. The substrate crown measurement device for a 3D vision semiconductor device according to claim 1, wherein: A rubber convex button is fixed on the stable bottom plate.
3. The substrate crown measurement device for a 3D vision semiconductor device according to claim 1, wherein: The stable side rod is provided with a stable slide rail, and the bottom of the mover is slidably connected to the stable slide rail.
4. The substrate crown measurement device for a 3D vision semiconductor device according to claim 3, wherein: A limited slide rail is provided on the side of the stabilizing side bar, and a slide rail device is fixed on the movable splint, and the slide rail device is slidably connected to the limited slide rail.
5. The substrate crown measurement device for a 3D vision semiconductor device according to claim 4, wherein: An electric telescopic rod is fixed in the stable side rod, a linkage plate is fixed at one end of the electric telescopic rod, a linkage rod is fixed at one end of the linkage plate, and one end of the linkage rod is fixed on the movable splint.
6. The substrate crown measurement device for a 3D vision semiconductor device according to claim 5, wherein: A laser rangefinder is fixed on the bottom of the movable clamping plate.
7. The substrate crown measurement device for a 3D vision semiconductor device according to claim 1, wherein: A fixed frame is fixed to the side of the auxiliary side bar.