Ultrahigh-purity graphite crucible detection device for semiconductors

Abstract

The utility model discloses an ultra-pure graphite crucible detection device for semiconductors, which belongs to the field of graphite processing and comprises a workbench, a turntable is rotatably mounted on the upper surface of the workbench, a slide way is transversely arranged on the upper surface of the turntable, a double-threaded rod is rotatably mounted on the inner side of the slide way, a knob is arranged at the end of the double-threaded rod, and the turntable is provided with a rotating shaft. The rotary knob is arranged on the outer side of the rotary disc, movable columns are symmetrically installed on the inner side of the sliding way in a sliding mode, the two movable columns are symmetrically screwed on the double-thread rod, lifting rods are arranged on the tops of the movable columns, clamping blocks are symmetrically arranged on the tops of the two sides of the lifting rods, and the two clamping blocks clamp and fix a crucible. Rubber pads are glued to the surfaces of the sides, away from the lifting rods, of the clamping blocks, the crucible is clamped through the moving columns on the two sides so that the crucible can be kept in a suspended state, then the stability of the crucible during detection is guaranteed, meanwhile, the crucible can be rotated, and the convenience during detection of the inner side surface and the outer side surface is improved.

Description

Technical Field

[0001] The utility model relates to the field of graphite processing, and more specifically to a detection device for an ultra-high purity graphite crucible for semiconductors. Background Art

[0002] Graphite crucibles, also known as copper molten ladle or copper molten ladle, are crucibles made from graphite, clay, silica, and wax stone. Graphite crucibles are primarily used for melting non-ferrous metals and their alloys, such as copper, brass, gold, silver, zinc, and lead. Ultra-high-purity graphite crucibles for semiconductors are manufactured from graphite that meets standard specifications. According to the "Guidance Catalog for the First Batch Application Demonstration of Key New Materials (2024 Edition)," ultra-high-purity graphite for semiconductors must have an ash content of ≤5 ppm; B, Al, and Fe content of ≤0.01 ppm; and a resistivity (μΩ·m) of 11 to 15.

[0003] After the graphite crucible is formed, sand holes or cracks may remain on its surface. Therefore, the surface of the graphite crucible needs to be inspected after production to ensure the quality of subsequent use. However, since the bottom of most graphite crucibles is an arc-shaped structure, it is impossible to clamp and fix the graphite crucible during surface inspection, making inspection difficult. Utility Model Content

[0004] 1. Technical problems to be solved

[0005] In view of the problems existing in the prior art, the purpose of the present invention is to provide an ultra-high purity graphite crucible detection device for semiconductors, which can effectively fix the crucible and adjust the height and angle of the crucible to facilitate the detection of the crucible surface.

[0006] 2. Technical solution

[0007] In order to solve the above problems, the present invention adopts the following technical solutions.

[0008] The top of the movable frame is provided with a lifting rod, and the top of the movable frame is provided with a lifting rod. The lifting rod has a lifting rod and a lifting rod under the lifting rod. The lifting rod has a lifting rod under the lifting rod. The top of the movable frame is provided with a lifting rod. The lifting rod has a lifting rod under the lifting rod. The lifting rod has a lifting rod under the lifting rod.

[0009] Furthermore, a fixing pin is inserted and pulled out of the outer side of the movable column, and positioning holes are evenly opened on the outer side of the lifting rod. The inner dimensions of the movable column and the positioning holes are adapted to each other.

[0010] Furthermore, the surface of the column is evenly provided with limiting ring grooves, the limiting ring grooves are evenly distributed up and down, and the front side of the limiting ring groove is provided with a positioning groove.

[0011] Furthermore, a sliding hole is opened on the inner side of the rotating seat, and a limiting sliding rod is slidably installed inside the sliding hole, and the limiting sliding rod corresponds to the limiting ring groove.

[0012] Furthermore, the end of the limiting sliding rod is adapted to the inner dimensions of the positioning groove.

[0013] Furthermore, a spring is provided inside the sliding hole, and the spring contacts the front end surface of the limiting sliding rod. A control bolt is vertically provided on the upper surface of the limiting sliding rod, and the control bolt passes through the upper surface of the rotating seat.

[0014] 3. Beneficial effects

[0015] Compared with the existing technology, the advantages of the present invention are: the present invention provides an ultra-high purity graphite crucible detection device for semiconductors, which clamps the crucible by movable columns on both sides to keep the crucible in a suspended state, thereby ensuring the stability of the crucible during detection, and at the same time it can be rotated to improve the convenience of detecting the inner and outer surfaces.

[0016] At the same time, the device can detect and observe the inner and outer surfaces of the crucible through different clamping methods, thereby improving the practicality of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the inner wall detection structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the outer wall detection structure of the utility model;

[0019] Figure 3 For the utility model Figure 2 Schematic diagram of the enlarged structure of area A.

[0020] Explanation of the numbers in the figure: 1. Workbench; 2. Turntable; 21. Slide; 22. Double-threaded rod; 23. Knob; 3. Lifting rod; 31. Positioning hole; 32. Clamping block; 33. Rubber pad; 4. Moving column; 41. Fixing pin; 5. Support seat; 6. Vertical column; 61. Limiting ring groove; 62. Positioning groove; 7. Rotating seat; 71. Sliding hole; 72. Limiting slide rod; 73. Control bolt; 74. Spring; 8. Beam; 9. Searchlight tube; 91. Light baffle. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0022] Example:

[0023] See also Figure 1 and Figure 2 As shown, the ultra-high purity graphite crucible detection device for semiconductors includes a workbench 1, a turntable 2 is rotatably installed on the upper surface of the workbench 1, a slideway 21 is horizontally opened on the upper surface of the turntable 2, a double-threaded rod 22 is rotatably installed on the inner side of the slideway 21, and a knob 23 is provided at the end of the double-threaded rod 22 to facilitate the rotation of the double-threaded rod 22 from the outside, and the knob 23 is placed on the outer side of the turntable 2, and a moving column 4 is symmetrically slidably installed on the inner side of the slideway 21, and the two moving columns 4 are symmetrically screwed on the double-threaded rod 22, and the two moving columns 4 rotate on different threaded surfaces respectively, and a lifting rod 3 is provided on the top of the moving column 4, and a fixing pin 41 is inserted and pulled out on the outer side of the moving column 4, and positioning holes 31 are evenly opened on the outer side of the lifting rod 3, and the internal dimensions of the moving column 4 and the positioning hole 31 are adapted to each other to adjust the height and maintain the height stability to adapt to the detection work of crucibles of different sizes.

[0024] Among them, clamping blocks 32 are symmetrically arranged on the top of both sides of the lifting rod 3. The two clamping blocks 32 clamp and fix the crucible. The surface of the clamping block 32 on the side away from the lifting rod 3 is glued with a rubber pad 33 to prevent the clamping force from being too large and causing damage to the crucible surface. When the inner wall of the crucible is inspected, the crucible mouth is facing upward, and the outer surface of the crucible is clamped in and out by the clamping blocks 32. Conversely, when the outer wall is inspected, the crucible can be turned upside down so that the clamping blocks 32 clamp the inner wall of the crucible from the inside to the outside, ensuring that there is no foreign matter on the surface of the crucible, so as to pass The turntable 2 at the bottom rotates, and a support base 5 is provided on the rear side of the upper surface of the workbench 1. A column 6 is vertically provided on the top of the support base 5. A rotating base 7 is slidably installed on the surface of the column 6. A crossbeam 8 is slidably installed on the front end of the rotating base 7. The crossbeam 8 is fixed to the rotating base 7 by bolts to adjust the position of the bottom searchlight tube 9. A searchlight tube 9 is rotatably installed below the front end of the crossbeam 8. A light blocking plate 91 is provided on one side of the surface of the searchlight tube 9. The light blocking plate 91 rotates together with the searchlight tube 9 to block the reverse light.

[0025] Please refer to Figure 2 and Figure 3 As shown, the surface of the column 6 is evenly provided with a limiting ring groove 61, and the limiting ring grooves 61 are evenly distributed up and down. A positioning groove 62 is provided on the front side of the limiting ring groove 61, and a sliding hole 71 is provided on the inner side of the rotating seat 7. A limiting slide rod 72 is slidably installed inside the sliding hole 71. The limiting slide rod 72 corresponds to the limiting ring groove 61, and can enter the limiting ring groove 61 through the limiting slide rod 72 to maintain the height of the rotating seat 7, and can be rotated along the axis of the column 6 to facilitate the loading and unloading of the crucible.

[0026] Among them, the end of the limiting slide bar 72 is adapted to the inner size of the positioning groove 62. When the rotating seat 7 rotates to the front side, the end of the limiting slide bar 72 can enter the interior of the positioning groove 62 to maintain the stability of the forward angle.

[0027] Please refer to Figure 3 As shown, a spring 74 is provided inside the sliding hole 71, and the spring 74 is in contact with the front end surface of the limiting slide bar 72. The elastic force of the spring 74 is used to ensure that the limiting slide bar 72 always has a force toward the column 6. A control bolt 73 is vertically provided on the upper surface of the limiting slide bar 72, and the control bolt 73 passes through the upper surface of the rotating seat 7, so as to facilitate the control of the limiting slide bar 72 from the outside.

[0028] Working principle: The graphite crucible is lifted by an external crane and moved to the top of the turntable 2. The rotating knob 23 can control the rotation of the double-threaded rod 22, and then the two movable columns 4 can be controlled to move closer or farther away from each other. When inspecting the outer surface of the crucible, the crucible can be turned upside down and the two outer clamping blocks 32 can be used to clamp the crucible away from each other. Conversely, the outer surface of the crucible can be clamped by the two inner clamping blocks 32 to keep the crucible in a vertical state and keep it open upward. Due to the presence of the spring 74, the end of the limiting slide 72 always has a backward force. Then the rotating seat 7 can slide along the axis of the column 6 and enter the limiting ring groove 61 through the limiting slide 72 to maintain high stability and allow the rotating seat 7 to rotate for the installation of the crucible. When installed in place, the rotating seat 7 can be rotated to the front so that the limiting slide 72 can enter the positioning groove 62 to keep it fixed. The crucible surface is illuminated by the searchlight tube 9 to achieve surface observation and inspection.

[0029] The above description is merely a preferred embodiment of the present invention; however, the scope of protection of the present invention is not limited thereto. Any person skilled in the art who, within the technical scope disclosed in the present invention, makes equivalent substitutions or modifications based on the technical solutions and improved concepts of the present invention shall be covered by the scope of protection of the present invention.

Claims

1. A semiconductor ultra-high purity graphite crucible detection device, comprising a workbench (1), characterized in that: A turntable (2) is rotatably mounted on the upper surface of the workbench (1), a slideway (21) is transversely opened on the upper surface of the turntable (2), a double-threaded rod (22) is rotatably mounted on the inner side of the slideway (21), a knob (23) is provided at the end of the double-threaded rod (22), and the knob (23) is placed on the outer side of the turntable (2), a moving column (4) is symmetrically slidably mounted on the inner side of the slideway (21), two of the moving columns (4) are symmetrically screwed on the double-threaded rod (22), a lifting rod (3) is provided on the top of the moving column (4), and clamping blocks (32) are symmetrically provided on the top of both sides of the lifting rod (3), and the two moving columns (4) are symmetrically screwed on the double-threaded rod (22). The clamping block (32) clamps and fixes the crucible, and a rubber pad (33) is glued to the surface of the clamping block (32) on the side facing away from the lifting rod (3). A support seat (5) is provided on the rear side of the upper surface of the workbench (1), and a column (6) is vertically provided on the top of the support seat (5). A rotating seat (7) is slidably installed on the surface of the column (6), and a crossbeam (8) is slidably installed at the front end of the rotating seat (7). The crossbeam (8) is fixed to the rotating seat (7) by bolts, and a searchlight tube (9) is rotatably installed below the front end of the crossbeam (8), and a light shielding plate (91) is provided on one side of the surface of the searchlight tube (9).

2. The semiconductor ultra-high purity graphite crucible detection device according to claim 1, characterized in that: A fixing pin (41) is inserted and pulled out of the outer side of the movable column (4), and positioning holes (31) are evenly opened on the outer side of the lifting rod (3). The inner dimensions of the movable column (4) and the positioning holes (31) are adapted to each other.

3. The semiconductor ultra-high purity graphite crucible detection device according to claim 1, wherein: The surface of the column (6) is evenly provided with limiting ring grooves (61), the limiting ring grooves (61) are evenly distributed up and down, and a positioning groove (62) is provided on the front side of the inner portion of the limiting ring groove (61).

4. The semiconductor ultra-high purity graphite crucible detection device according to claim 3, characterized in that: A sliding hole (71) is provided on the inner side of the rotating seat (7), and a limiting sliding rod (72) is slidably installed inside the sliding hole (71), and the limiting sliding rod (72) corresponds to the limiting ring groove (61).

5. The semiconductor ultra-high purity graphite crucible detection device according to claim 4, characterized in that: The end of the limiting slide rod (72) is adapted to the inner dimensions of the positioning groove (62).

6. The semiconductor ultra-high purity graphite crucible detection device according to claim 5, characterized in that: A spring (74) is provided inside the sliding hole (71), and the spring (74) contacts the front end surface of the limiting sliding rod (72). A control bolt (73) is vertically provided on the upper surface of the limiting sliding rod (72), and the control bolt (73) passes through the upper surface of the rotating seat (7).

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