Rotatable furnace tube

Abstract

The utility model provides a rotatable furnace tube which comprises an outer furnace tube, an inner furnace tube, a heating device, an upper furnace cover and a lower furnace door, the inner furnace tube is installed in the outer furnace tube to form a straight-through cavity, the upper furnace cover is installed at the upper ends of the outer furnace tube and the inner furnace tube in a covering mode, and a center hole is formed in the center of the upper furnace cover; the magnetofluid sealing assembly is in sealing connection with the upper end of the inner furnace tube and the edge of the center hole of the upper furnace cover, and the rotating device is arranged in the straight-through cavity and connected with a transmission shaft of the magnetofluid sealing assembly. The magnetic fluid sealing assembly is installed at the upper end of the furnace tube in a sealed mode, the gap between the inner furnace tube and the upper furnace cover can be sealed, meanwhile, the rotating device can be driven through an external rotating power source, sealing and vacuumizing of the straight-through cavity are not affected, the rotating device is arranged on the upper portion of the furnace tube, and therefore the rotating device can be used for sealing the furnace tube. Opening and closing of the lower furnace door at the lower end are not affected, opening and closing of the lower furnace door are facilitated, and meanwhile hoisting of the inner furnace tube is not affected.

Description

Technical Field

[0001] The utility model relates to the technical field of solar energy, in particular to a rotatable furnace tube. Background Art

[0002] The photovoltaic industry currently uses two types of furnaces for diffusion, oxidation, annealing, doping, PECVD, and LPCVD processes: vertical and horizontal. Both types of furnaces require silicon wafers to be placed in specific carriers and transferred into a reaction chamber for processing. Specific reactive gases are introduced to achieve specific coating, diffusion, oxidation, and thin film deposition processes on the wafers. In existing two-layer furnace tube designs, the base and top walls of the double-layer furnace tube are sealed at both ends to form a straight annular cavity. The wafer to be processed is placed in this straight annular cavity, and the cavity is heated using the heating layer on the double-layer furnace tube. Alternatively, the furnace body can be configured as an inner and outer furnace body, with the inner furnace cavity sealed.

[0003] However, the problems with the furnace tube of the above structure are mainly:

[0004] First, if under negative pressure, when the process gas enters the cavity from the vent pipe installed on the base, the annular vacuum air cavity is small, and most of the process gas will flow along the wall, and only a small part of the process gas will come into contact with the wafer to be processed. That is, the process gas flow direction in this furnace tube is single and it cannot guarantee that the introduced gas can be evenly diffused into the entire annular cavity.

[0005] Secondly, the carrier structure is fixed and its position and angle cannot be adjusted. This placement method can lead to localized unevenness in the gas and thermal fields when reactant gases are introduced or when there are temperature differences. This leads to poor uniformity when decomposing and reacting with the silicon wafer at high temperatures. The process uniformity at the ends and tail of the carrier can also vary greatly, affecting the overall process yield and causing uneven quality of cells produced within the same batch. Utility Model Content

[0006] In order to solve the technical problem in the prior art that the position of the carrier in the furnace tube cannot be adjusted, the utility model provides a rotatable furnace tube.

[0007] The technical solution adopted in this utility model is:

[0008] The utility model proposes a rotatable furnace tube, which comprises an outer furnace tube, an inner furnace tube, a heating device, an upper furnace cover and a lower furnace door. The upper ends of the inner furnace tube are open, the inner furnace tube is hoisted in the outer furnace tube to form a straight-through chamber, the upper furnace cover is covered with the upper ends of the outer furnace tube and the inner furnace tube, and a center hole is provided at the center position; the utility model also comprises a magnetic fluid sealing component that seals the upper end of the inner furnace tube and the edge of the center hole of the upper furnace cover, and a rotating device for a transmission shaft connected to the magnetic fluid sealing component is arranged in the straight-through chamber, and the rotating device is provided with a plurality of carrier hoisting positions with adjustable positions and angles.

[0009] Specifically, the rotating device includes:

[0010] A supporting fixed disc is located at the upper end of the straight-through chamber, and the supporting fixed disc is connected to the transmission shaft and is driven to rotate by the transmission shaft;

[0011] A plurality of lifting support seats are installed on the bottom surface of the supporting disc, located in the straight-through chamber and surrounding the inner furnace tube. The lifting support seats are used to lift the carrier to form the carrier lifting position.

[0012] Furthermore, the lower end of the inner furnace tube is sealed in an outwardly convex hemispherical shape.

[0013] Furthermore, a supporting step is provided on the inner wall of the inner furnace tube near the upper end, the lower part of the supporting step is connected to an inner supporting flange for hoisting the inner furnace tube, and the upper part of the supporting step is connected to an inner sealing flange, and the inner sealing flange is sealed with the magnetic fluid sealing assembly.

[0014] Furthermore, the outer edge of the inner end surface of the upper furnace cover is sealed and connected to the upper end of the outer furnace tube, and the edge of the inner end surface of the lower furnace door is sealed and connected to the lower end of the outer furnace tube.

[0015] Specifically, the magnetic fluid sealing assembly is annular and has a corresponding center hole in the middle. It includes: an inner ring part, an outer ring part, and the annular transmission shaft located between the inner ring part and the outer ring part. The inner ring part is sealed with the inner sealing flange at the upper end of the inner furnace tube, and the outer ring part is sealed with a circle edge of the upper furnace cover surrounding the center hole.

[0016] Specifically, the heating device includes: an internal heat source arranged on the inner side of the inner furnace tube, an external heat source arranged on the outer side of the outer furnace tube, and heat dissipation devices are provided around the outer heat source and the inner heat source.

[0017] Preferably, the outer end surfaces of the upper furnace cover and the lower furnace door away from the straight-through chamber protrude outward to form a spherical protrusion, the inner end surface of the upper furnace cover surrounding the center hole is provided with a partition to form an insulation ring package, and the inner end surface of the lower furnace door is provided with a partition to form an insulation package.

[0018] Furthermore, an outer support step is provided on the outer wall of the outer furnace tube near the upper end face, and an outer support flange is installed below the outer support step.

[0019] Furthermore, the outer wall of the outer furnace tube is provided with a frame flange near the upper end face and the lower end face respectively. The frame flange at the upper end is used to install the top hanging bracket or the connecting support frame, and the frame flange at the lower end is used to install the driving structure of the lower furnace door.

[0020] Furthermore, the lower furnace door is driven to open and close by a driving structure, and the driving structure includes:

[0021] A furnace door translation guide rail, the furnace door translation guide rail being mounted on a frame flange at the lower end of the outer furnace tube;

[0022] The connecting plate is slidably connected to the furnace door translation guide rail and can slide along the length direction of the furnace door translation guide rail;

[0023] The furnace door switch driving device is installed in the middle of the connecting plate and connected to the lower furnace door, which can drive the lower furnace door to move up and down;

[0024] The furnace door translation drive device is installed on the connecting plate and drives the connecting plate and the lower furnace door to slide along the length direction of the furnace door translation guide rail.

[0025] Compared with the prior art, the utility model adopts a magnetic fluid sealing assembly to be sealed at the upper end of the furnace tube, which can not only seal the gap between the inner furnace tube and the upper furnace cover, but also enable the rotating device to be driven by an external rotating power source without affecting the sealing and vacuuming of the straight-through chamber. Moreover, the rotating device is placed on the top of the furnace tube without affecting the opening and closing of the lower furnace door below, making it convenient to open and close the lower furnace door, and at the same time does not affect the lifting of the inner furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0027] Figure 1 It is a schematic diagram of an embodiment of the present utility model.

[0028] 11. Outer furnace tube;

[0029] 111. Frame flange; 112. External sealing flange; 113. External fixing flange; 114. External support flange; 115. Support block;

[0030] 12. Inner furnace tube;

[0031] 121. Inner sealing flange; 122. Support step; 123. Inner fixing flange; 124. Inner support flange;

[0032] 13. Direct access to the chamber;

[0033] 2. Install the furnace cover;

[0034] 21. Insulation ring package;

[0035] 3. Lower furnace door; 31. Insulation bag;

[0036] 41. Connecting plate; 42. Furnace door translation guide rail; 43. Furnace door switch drive device; 44. Furnace door translation drive device; 45. Gear; 46. Rack; 47. Motion guide column;

[0037] 5. Rotating device; 50. Carrier; 51. Supporting fixed disc; 52. Lifting support seat;

[0038] 6. Magnetic fluid sealing assembly;

[0039] 61. Outer ring; 62. Inner ring; 63. Transmission shaft;

[0040] 71. External heat source; 72. Internal heat source. DETAILED DESCRIPTION

[0041] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0042] The principle and structure of the present invention are described in detail below with reference to the accompanying drawings and embodiments.

[0043] The carriers within existing furnace tubes are typically fixed, with no ability to adjust their position or angle. This placement can lead to localized unevenness in the gas and thermal fields when reactant gases are introduced or when there are temperature differences. This can lead to poor uniformity during high-temperature decomposition and reaction with the silicon wafers. This can also cause significant differences in process uniformity at the ends and tail of the carrier, impacting overall process yield and causing uneven quality of cells produced within the same batch.

[0044] In this regard, Figure 1 As shown, the utility model proposes a rotatable furnace tube, specifically comprising: the furnace tube includes an outer furnace tube 11, an inner furnace tube 12, an upper furnace cover 2, a lower furnace door 3, a heating device, a magnetic fluid sealing assembly 6 and a rotating device 5;

[0045] The inner furnace tube 12 and the outer furnace tube 11 are both in the shape of a circular tube, wherein the upper and lower ends of the outer furnace tube 11 are open, and the upper end of the inner furnace tube 12 is open and the lower end is closed, so that the top of the inner furnace tube 12 can be hoisted and positioned, that is, the inner furnace tube 12 coaxially arranged is hoisted in the outer furnace tube 11, and after installation, an accommodating space is formed between the outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube, that is, a straight-through chamber 13; a center hole is provided at the center position of the upper furnace cover 2, and the outer edge of the upper furnace cover 2 is sealedly connected to the upper end of the outer furnace tube 11, and a circle of gap is left between the inner edge (a circle surrounding its center hole) and the inner furnace tube 12, and the magnetic fluid sealing assembly 6 is installed outside the gap, that is, it is sealedly connected to the inner edge of the upper furnace cover 2 (a circle surrounding its center hole) and the upper end of the inner furnace tube 12, so that the upper end of the straight-through chamber 13 is sealed; the edge of the lower furnace door 3 is sealedly connected to the lower end of the outer furnace tube, so that the lower end of the straight-through chamber is sealed;

[0046] The rotating device 5 is arranged in the straight-through chamber 13. A plurality of carrier hoisting positions are provided below the rotating device 5 around the outer wall of the inner furnace tube 12. The rotating device 5 is connected to the transmission shaft 63 of the magnetic fluid sealing assembly 6. By driving the transmission shaft 63 to rotate from the outside, the rotating device 5 in the straight-through chamber 13 rotates, thereby driving the carrier located on the carrier hoisting position in the straight-through chamber to rotate around the inner furnace tube, changing its position and angle.

[0047] By adopting a magnetic fluid sealing assembly and sealing it at the upper end of the furnace tube, the gap between the inner furnace tube and the upper furnace cover can be sealed, and at the same time, the rotating device can be driven by an external rotating power source without affecting the sealing and vacuuming of the straight-through chamber. Moreover, placing the rotating device on the top of the furnace tube does not affect the opening and closing of the lower furnace door below, making it convenient to open and close the lower furnace door, and at the same time does not affect the lifting of the inner furnace tube.

[0048] In a specific embodiment, the rotating device 5 includes: a supporting fixed disc 51 and a lifting support seat 52. The supporting fixed disc 51 is specifically divided into a tubular vertical connection part and an annular part connected to the bottom of the vertical connection part. The top of the vertical connection part is directly connected to the bottom of the transmission shaft 63 of the magnetic fluid sealing assembly, so that when the transmission shaft 63 rotates, it can drive the annular part located at the bottom of the vertical connection part to rotate synchronously. The annular part is a circular ring panel. The lifting support seat 52 is installed on the bottom surface of the annular part. Specifically, it can be hung or directly hoisted and connected, and surround the inner furnace tube 12. The bottom of the lifting support seat 52 is used to lift the vehicle 50 to form a vehicle lifting position; in addition, the rotational power source of the rotary furnace tube is arranged outside the furnace tube, that is, outside the straight-through chamber, and the transmission shaft is driven to rotate by connecting the part of the transmission shaft located outside the straight-through chamber, that is, the supporting fixed disc is driven to rotate.

[0049] In a specific embodiment, the inner furnace tube 12 has an open upper end and a closed lower end, specifically a hemispherical shape. This hemispherical lower end of the inner furnace tube 12 can withstand greater pressure and better accommodate vacuum requirements within the vertical furnace. The space between the outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube 11 serves as a reaction chamber, which is part of the aforementioned sealed through-chamber 13. Once the carrier 50 enters the vertical furnace tube, it is primarily placed within the reaction chamber.

[0050] Specifically, an annular supporting step 122 is provided on the inner wall of the inner furnace tube 12 near the upper end opening. The supporting step 122 can be connected to the flange by screws. Specifically, the lower part of the supporting step 122 is connected to the inner supporting flange 124. The inner supporting flange 124 can be used to connect the connector or hanging bracket for hanging the inner furnace tube 12, and can provide force to the inner furnace tube to ensure that the inner furnace tube is suspended on the inner side of the outer furnace tube. The hanging connection is not limited to piles set on the ceiling, etc.; the upper part of the supporting step 122 is connected to the inner fixing flange 123, and the inner fixing flange 123 is used to fit and install the inner sealing flange 121. The upper end face of the inner sealing flange 121 is sealed with the bottom surface of the magnetic fluid sealing assembly, so that the magnetic fluid sealing assembly is sealed and connected to the upper end of the inner furnace tube.

[0051] In a specific embodiment, the magnetic fluid sealing assembly 6 is located at the top of the furnace tube. The magnetic fluid sealing assembly 6 specifically includes an annular outer ring portion 61, an inner ring portion 62 and a transmission shaft 63. The top surface of the outer ring portion 61 is sealed with the edge of the center hole of the upper furnace cover 2; the top surface of the inner ring portion 62 is sealed with the inner sealing flange at the upper end of the inner furnace tube 12. The gap between the inner ring portion 62 and the outer ring portion 61 of the magnetic fluid sealing assembly 6 is a ring-shaped rotating sealing space, and the transmission shaft 63 passes through the rotating sealing space of the magnetic fluid sealing assembly 6;

[0052] A magnetic fluid (not shown in the figure) is set in the gap between the inner wall surface of the transmission shaft 63 and the outer wall surface of the inner ring part 62 of the magnetic fluid sealing assembly. Specifically, multiple ring grooves can be set on the inner wall surface of the transmission shaft 63 or multiple ring grooves can be set on the outer wall surface of the inner ring part of the magnetic fluid sealing assembly to place the magnetic fluid, forming multiple rings of sealing rings located in the gap between the inner wall surface of the transmission shaft 63 and the outer wall surface of the inner ring part 62 of the magnetic fluid sealing assembly 6;

[0053] The magnetic fluid is also set in the same way on the outer wall surface of the transmission shaft and the inner wall surface of the outer ring part of the magnetic fluid sealing assembly. Permanent magnets are provided inside the outer ring part 61 and the inner ring part 62, and the magnetic poles serve as the inner wall of the rotating sealing space, so that the magnetic fluid can surround the transmission shaft 63, thereby forming multiple circles of sealing rings located in the gap between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring part of the magnetic fluid sealing assembly.

[0054] In a specific embodiment, at least one inner ring permanent magnet is provided in the inner ring part of the magnetic fluid sealing assembly, and the two inner pole shoes of the inner ring permanent magnet surround the inner wall surface of the transmission shaft, and an inner annular groove is provided on the inner wall surface of the transmission shaft corresponding to the inner pole shoe, and a magnetic fluid is provided in the inner annular groove. After the magnetic field is generated, the magnetic fluid will form a plurality of inner sealing rings on the inner annular groove on the inner wall surface of the transmission shaft; at least one outer ring permanent magnet is provided in the outer ring part of the magnetic fluid sealing assembly, and the two outer pole shoes of the outer ring permanent magnet surround the outer wall surface of the transmission shaft, and an outer annular groove is provided on the outer wall surface of the transmission shaft corresponding to the outer pole shoe, and a magnetic fluid is provided in the outer annular groove. After the magnetic field is generated, the magnetic fluid will form a plurality of outer sealing rings on the outer annular groove on the outer wall surface of the transmission shaft.

[0055] The outer end surface of the upper furnace cover 2 away from the straight chamber 13 protrudes outward to form a spherical protrusion. Since the straight chamber 13 needs to be vacuumed, the outer end surface of the upper furnace cover is set to a spherical protrusion protruding upward to withstand greater pressure and prevent the internal vacuum from being sucked out of shape.

[0056] An insulation ring is provided on the inner end surface of the upper furnace cover surrounding the center hole. The insulation ring is formed by providing a partition on the inner end surface of the upper furnace cover surrounding the center hole. Reinforcement ribs with through holes and insulation components such as water cooling can be provided in the insulation ring. The reinforcement ribs can improve the support strength, and insulation components such as water cooling can prevent the heat in the chamber from overflowing from the upper end.

[0057] The lower furnace door 3 is a spherical protrusion structure protruding downwards. This allows the lower furnace door to withstand greater pressure and prevent the lower furnace door from being sucked out when the confined space in the furnace tube is evacuated, causing damage to the lower furnace door.

[0058] At the same time, a partition is set on the inner end surface of the lower furnace door to form an insulation bag. Insulation components such as water cooling can be installed in the insulation bag to prevent heat from escaping from the lower end of the chamber. Reinforcement ribs with through holes can also be set to improve the strength of the bulge of the lower furnace door.

[0059] In a specific embodiment, a frame flange 111 is provided on the outer wall of the outer furnace tube near the upper end face and the lower end face respectively. The frame flange 111 at the upper end is used to install the top hanging bracket, or to directly hang the outer furnace tube. The frame flange 111 at the lower end is used to install the driving structure of the lower furnace door, or to be installed on a support frame to support the outer furnace tube.

[0060] Furthermore, a circle of outwardly protruding external support steps is provided on the outer wall of the outer furnace tube near the upper end, and a circle of support blocks 115 are padded under the outer support steps. An external support flange 114 is provided between the support blocks 115 and the frame flange 111 at the upper end, so that the outer furnace tube 11 can be supported by the frame flange at the upper end.

[0061] The outer furnace tube 11 is provided with an outer fixing flange 113 below the frame flange at the lower end thereof for fixing and installing an outer sealing flange 112 . The outer sealing flange is used for sealing connection with the outer edge of the lower furnace door 3 .

[0062] The heating device specifically includes: an internal heat source 72 arranged on the inner side of the inner furnace tube 12, and an external heat source 71 on the outer side of the outer furnace tube 11. The internal and external heat sources can heat the straight-through chamber 13 of the furnace tube 1 through the tube walls of the inner and outer furnace tubes.

[0063] The external heat source 71 is specifically located between the two support flanges of the outer furnace tube 11 ; the internal heat source 72 is specifically located below the inner support flange 124 of the inner furnace tube 12 and above the hemispherical bottom.

[0064] In a specific embodiment, the external heat source and the internal heat source are integrated, that is, the electric heating wire is directly wound around the inner and outer furnace tubes to directly heat the closed cavity.

[0065] In a preferred embodiment, the external heat source 71 and the internal heat source 72 are both arranged in a ring shape and arranged along the height direction of the inner and outer furnace tubes. Specifically, they can be divided into multiple groups of independent heating sections along the height direction of the furnace tubes, so as to achieve layered corresponding heating and improve the overall heating efficiency.

[0066] Alternatively, the external heat source and the internal heat source are divided into a plurality of independent heating sections, and the plurality of heating sections are arranged around the inner furnace tube and the outer furnace tube at intervals.

[0067] The internal and external heating sources can specifically be resistance wire heating furnace tubes, infrared heating, electromagnetic induction heating, etc.

[0068] In a further embodiment, a heat sink is provided around the external and internal heat sources to quickly and stably regulate the temperature of the reactor tubes. The heat sink may be independent or integrated with the heating device. The heat sink may be manually controlled or automatically controlled by collecting temperature signals, pressure signals, etc. Any method that can achieve automatic control is included in this scope. The heat sink may be an air-cooled structure or a water-cooled structure. However, this is not limited to the above structures, and any mechanism with heat exchange and heat dissipation functions is included in this scope.

[0069] In a specific embodiment, the lower furnace door is an integral whole, and its opening and closing and translation are controlled by a driving structure. The driving structure controls the lower furnace door to separate from the lower end surface of the lower furnace tube when it moves downward, and then controls the lower furnace door to translate in the vertical axial direction of the furnace tube to leak out of the lower end opening of the outer furnace tube, so that the carrier can be placed in or taken out.

[0070] Specifically, the driving structure includes: a furnace door translation guide rail 42, a motion guide column 47, a furnace door switch driving device 43, a furnace door translation driving device 44, and a connecting plate 41;

[0071] There are two furnace door translation guide rails 42, which are installed on the frame flange 111 at the lower end of the outer furnace tube 11, and the two furnace door translation guide rails 42 are arranged in parallel at intervals. The lower furnace door 3 is located between the two furnace door translation guide rails. The connecting plate 41 connects the two furnace door translation guide rails 42 horizontally and can slide along the length direction of the furnace door translation guide rails 42; the middle part of the connecting plate 41 is provided with a furnace door switch drive device 43, which can be preferably a telescopic cylinder, whose telescopic rod is vertically connected to the middle part of the lower furnace door 3 upward, which can drive the lower furnace door 3 to move up and down. ; The furnace door translation drive device 44 is arranged on one side or one end of the connecting plate 41, and specifically a driving motor can be preferably used. A rack 46 is provided on the side of one of the furnace door translation guide rails 42 along its length direction, and the gear 45 sleeved on the rotating shaft of the driving motor is engaged with the rack 46, that is, when the driving motor drives the gear to rotate, the reverse thrust provided by the rack engagement pushes the connecting plate to slide along the furnace door translation guide rail, that is, drives the lower furnace door to translate in the axial direction perpendicular to the furnace tube, that is, moves in the horizontal direction, and leaks out of the lower end opening of the outer furnace tube.

[0072] Furthermore, the motion guide post 47 can be directly installed vertically on the outer end surface of the lower furnace door 3, and a through hole corresponding to the motion guide post 47 is provided on the connecting plate 41. When the lower furnace door 3 moves downward, the motion guide post 47 can assist the movement of the lower furnace door to avoid deviation.

[0073] The opening and closing of the lower furnace door are as follows:

[0074] The lower furnace door is in a sealed state with the lower end surface of the outer furnace tube. When the lower furnace door needs to be opened, the telescopic rod of the furnace door switch drive device switches from the ejected state to the retracted state, that is, the telescopic rod is retracted downward, causing the lower furnace door to move downward and separate from the lower end surface of the lower furnace tube;

[0075] The furnace door translation drive device then drives the entire connecting plate to slide along the furnace door translation guide rail, so that the connecting plate and the furnace door switch drive device installed on the connecting plate and the lower furnace door connected to the furnace door switch drive device slide along the furnace door translation guide rail as a whole, that is, move in the horizontal direction, so that the lower end opening of the outer furnace tube is exposed, and the carrier can be taken and placed.

[0076] When the lower end opening of the outer furnace tube is in a leaking state and the lower furnace door needs to be closed, the furnace door translation drive device drives the entire connecting plate to slide along the furnace door translation guide rail, so that the connecting plate, the furnace door switch drive device installed on the connecting plate, and the lower furnace door connected to the furnace door switch drive device slide along the furnace door translation guide rail as a whole, that is, move in the horizontal direction, so that the lower furnace door moves horizontally to just below the lower end opening of the outer furnace tube;

[0077] Then control the telescopic rod of the furnace door switch drive device to switch from the contracted state to the ejected state, that is, the telescopic rod is ejected upward, causing the lower furnace door to move upward, and the outer edge is sealed against the lower end surface of the lower furnace tube.

[0078] In other embodiments, the lower furnace door may also be provided with multiple small furnace doors (not shown in the figure), i.e., furnace openings, and furnace covers corresponding to each small furnace door. The size and shape of the furnace openings match the size and shape of the side surfaces of the carrier. Specifically, the shape of the furnace openings may be consistent with the shape of the side surfaces of the carrier, and the size may be slightly larger than the size of the side surfaces of the carrier, and each furnace cover may be opened separately.

[0079] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0080] Unless otherwise specifically stated, the relative arrangement of the parts and steps, the numerical expressions and the numerical values ​​set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values ​​should be interpreted as being merely exemplary and not as limitations. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, and therefore, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0081] In the description of the present invention, it needs to be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention; the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself.

[0082] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0083] In addition, it should be noted that the use of words such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood as limiting the scope of protection of this utility model.

[0084] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A rotatable furnace tube, comprising: An outer furnace tube, an inner furnace tube, a heating device, an upper furnace cover and a lower furnace door, the upper ends of the inner furnace tube are open, the inner furnace tube is installed in the outer furnace tube to form a straight-through chamber, the upper furnace cover is covered on the upper ends of the outer furnace tube and the inner furnace tube, and a center hole is provided at the center position; it is characterized in that it also includes a magnetic fluid sealing assembly that seals the upper end of the inner furnace tube and the edge of the center hole of the upper furnace cover, and a rotating device for the transmission shaft connected to the magnetic fluid sealing assembly arranged in the straight-through chamber, and the rotating device is provided with a plurality of carrier hoisting positions with adjustable positions and angles.

2. The rotatable furnace tube according to claim 1, wherein: The rotating device comprises: A supporting fixed disc is located at the upper part of the straight-through chamber, and the supporting fixed disc is connected to the transmission shaft and is driven to rotate by the transmission shaft; A plurality of lifting support seats are installed on the bottom surface of the supporting disc, located in the straight-through chamber and surrounding the inner furnace tube. The lifting support seats are used to lift the carrier to form the carrier lifting position.

3. The rotatable furnace tube according to claim 1, wherein: The lower end of the inner furnace tube is sealed in an outwardly convex hemispherical shape.

4. The rotatable furnace tube according to claim 1, wherein: A supporting step is provided on the inner wall of the inner furnace tube near the upper end, the lower part of the supporting step is connected to an inner supporting flange for hoisting the inner furnace tube, and the upper part of the supporting step is connected to an inner sealing flange, which is sealed with the magnetic fluid sealing assembly.

5. The furnace tube according to claim 1, wherein The outer edge of the inner end surface of the upper furnace cover is sealed to the upper end of the outer furnace tube, and the edge of the inner end surface of the lower furnace door is sealed to the lower end of the outer furnace tube.

6. The rotatable furnace tube according to claim 4, wherein: The magnetic fluid sealing assembly is annular and has a corresponding center hole in the middle. It includes: an inner ring part, an outer ring part, and the annular transmission shaft located between the inner ring part and the outer ring part. The inner ring part is sealed with the inner sealing flange at the upper end of the inner furnace tube, and the outer ring part is sealed with a circle edge of the upper furnace cover surrounding the center hole.

7. The rotatable furnace tube according to claim 1, wherein: The heating device includes: an inner heat source arranged inside the inner furnace tube, an outer heat source arranged outside the outer furnace tube, and heat dissipation devices are correspondingly provided around the outer heat source and the inner heat source.

8. The furnace tube according to claim 1, wherein The outer end surfaces of the upper furnace cover and the lower furnace door away from the straight-through chamber protrude outward to form a spherical protrusion. The inner end surface of the upper furnace cover surrounding the center hole is provided with a partition to form an insulation ring package, and the inner end surface of the lower furnace door is provided with a partition to form an insulation package.

9. The furnace tube according to claim 1, wherein An outer support step is provided on the outer wall of the outer furnace tube near the upper end surface, and an outer support flange is installed below the outer support step.

10. The furnace tube according to claim 1, wherein The outer wall of the outer furnace tube is provided with a frame flange near the upper end face and the lower end face respectively. The frame flange at the upper end is used to install the top hanging bracket or the connecting support frame, and the frame flange at the lower end is used to install the driving structure of the lower furnace door.

11. The furnace tube according to claim 1, wherein The lower furnace door is driven to open and close by a driving structure, and the driving structure includes: A furnace door translation guide rail, the furnace door translation guide rail being mounted on a frame flange at the lower end of the outer furnace tube; The connecting plate is slidably connected to the furnace door translation guide rail and can slide along the length direction of the furnace door translation guide rail; The furnace door switch driving device is installed in the middle of the connecting plate and connected to the lower furnace door, which can drive the lower furnace door to move up and down; The furnace door translation drive device is installed on the connecting plate and drives the connecting plate and the lower furnace door to slide along the length direction of the furnace door translation guide rail.

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