Clamp and production equipment
By designing the clamping assembly of the fixture, using the interference contact and groove settings, the problem of unstable clamping after bonding of semiconductor devices is solved, and the effect of stable clamping and damage reduction is achieved.
Patent Information
- Application Number
- CN202422610185.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-28
- Publication Date
- 2025-08-22
- Estimated Expiration
- 2034-10-28
AI Technical Summary
In the prior art, the clamping of semiconductor devices after bonding is unstable, making it difficult to ensure the stability of bonding.
A clamp is provided, including a base and a clamping assembly, the clamping assembly consists of a first clamping member and a second clamping member, forming a clamping cavity with the clamping member to be clamped through interference contact, and a groove is provided on the clamping surface to reduce the contact area and reduce damage.
The stable clamping of semiconductor devices is achieved to ensure adhesive stability while reducing damage to the device by the clamping assembly.
Smart Images
Figure CN223260582U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor equipment technology, and in particular to a fixture and production equipment. Background Art
[0002] With the development of society, semiconductor devices play a core role in modern electronic technology and information technology. In the production process of semiconductor devices, it is necessary to bond the package substrate with the chip soldered to the shell.
[0003] After bonding is completed, in order to ensure the stability of the bonding, the semiconductor device needs to be clamped for a certain period of time to ensure the stability of the bonding. However, the clamping stability of the existing structure is poor, making it difficult to ensure the bonding effect of the semiconductor device. Utility Model Content
[0004] The clamp provided in the embodiment of the present application can stably clamp the member to be clamped on both sides along the second direction through the first clamping member and the second clamping member, and clamp the member to be clamped to achieve the desired effect.
[0005] In a first aspect, an embodiment of the present application provides a clamp, comprising:
[0006] base;
[0007] A clamping assembly, the clamping assembly comprising a first clamping member and a second clamping member connected to the same side of the base along a first direction, the first clamping member having a first clamping surface facing the second clamping member, the second clamping member having a second clamping surface facing the first clamping member, the first clamping surface and the second clamping surface being spaced apart in a second direction and respectively abutting against two opposing surfaces of a to-be-clamped member along the second direction, the second direction intersecting the first direction;
[0008] The clamping assembly is in interference contact with the clamped piece, the first clamping surface is recessed inward to form a first groove, and the second clamping surface is recessed inward to form a second groove.
[0009] In some embodiments, the first groove is formed by a depression on a side surface of the first clamping member facing away from the base; and / or,
[0010] The second groove is formed by a depression on a side surface of the second clamping member facing away from the base.
[0011] In some embodiments, the first groove is arranged in the middle of the first clamping member along the third direction, and the first clamping member forms two first clamping portions on both sides of the first groove along the third direction, and the third direction, the second direction, and the first direction intersect with each other.
[0012] In some embodiments, there are multiple second grooves, and the second clamping member forms a second clamping portion between adjacent second grooves, and a projection of at least part of the second clamping portion in the second direction overlaps with a projection of the first groove in the second direction.
[0013] In some embodiments, at least a portion of a projection of the first clamping portion in the second direction overlaps with a projection of the second groove in the second direction.
[0014] In some embodiments, the first clamping portion includes a first arcuate surface connecting the first clamping surface and the groove side surface of the first groove; and / or the second clamping portion includes a second arcuate surface connecting the second clamping surface and the groove side surface of the second groove.
[0015] In some embodiments, the first clamping member includes a first main body portion and a first connecting portion connected to each other, and the second clamping member includes a second main body portion and a second connecting portion connected to each other, the first main body portion is connected to an end of the second connecting portion away from the second main body portion, and the second main body portion is connected to an end of the first connecting portion away from the first main body portion.
[0016] In some embodiments, a through hole is provided through the base along the first direction, and a projection of the through hole in the first direction is at least partially located between the first clamping surface and the second clamping surface.
[0017] In some embodiments, the first clamping member and the second clamping member enclose a clamping cavity, and the object to be clamped can be located inside the clamping cavity;
[0018] The size of the clamping cavity in the first direction is larger than that in the second direction, the size of the clamping cavity in the third direction is larger than that in the second direction, and the third direction, the second direction and the first direction intersect each other.
[0019] In a second aspect, an embodiment of the present application provides a production device for producing semiconductor devices, wherein the production device includes the clamp described above, and the part to be clamped is the semiconductor device;
[0020] The semiconductor device includes a semiconductor body and a pin portion protruding from the semiconductor body along the second direction. The first clamping surface abuts against the semiconductor body, and the pin portion is located inside the first groove.
[0021] According to the above provided by the present application, in an embodiment of the present application, a clamp is used to clamp the part to be clamped, and the first clamping member and the second clamping member are used to clamp the part to be clamped on both sides along the second direction, so as to clamp the part to be clamped to achieve the desired effect. The base, the first clamping member and the second clamping member are enclosed to form a clamping cavity, and the part to be clamped can be inside the clamping cavity. The first clamping surface and the second clamping surface are respectively in contact with the two relative surfaces of the part to be clamped along the second direction, and the clamping assembly and the part to be clamped are in interference contact to generate a force on the part to be clamped. At the same time, a first groove is provided on the first clamping surface to reduce the contact area between the first clamping surface and the part to be clamped; a second groove is provided on the second clamping surface to reduce the contact area between the second clamping surface and the part to be clamped. Through the above-mentioned arrangement, while ensuring the clamping effect of the clamping assembly on the part to be clamped, the contact with the part to be clamped can be reduced, thereby reducing the damage of the clamping assembly to the part to be clamped. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] The features, advantages and technical effects of exemplary embodiments of the present application will be described below with reference to the accompanying drawings.
[0023] Figure 1 A schematic structural diagram of a clamp provided in some embodiments of the present application;
[0024] Figure 2 A schematic diagram of the axonometric structure of a single clamping assembly in a clamp provided in some embodiments of the present application;
[0025] Figure 3 A schematic top view of a single clamping assembly in a clamp provided in some embodiments of the present application;
[0026] Figure 4 A schematic structural diagram of a semiconductor device in a fixture provided in some embodiments of the present application.
[0027] Marking Description:
[0028] 100, fixture, 200, semiconductor device; 201, semiconductor body; 202, lead portion;
[0029] 10. Base; 11. Through hole;
[0030] 20. Clamping assembly; 21. First clamping member; 211. First clamping surface; 212. First groove; 213. First clamping portion; 214. First curved surface; 215. First body portion; 216. First connecting portion; 22. Second clamping member; 221. Second clamping surface; 222. Second groove; 223. Second clamping portion; 224. Second curved surface; 225. Second body portion; 226. Second connecting portion; 23. Clamping cavity;
[0031] X, first direction; Y, second direction; Z, third direction.
[0032] In the drawings, like parts are given like reference numerals, but the drawings are not necessarily drawn to scale. DETAILED DESCRIPTION
[0033] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is merely to provide a better understanding of the present application by illustrating the examples of the present application.
[0034] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "include..." do not exclude the presence of other identical elements in the process, method, article or device that includes the elements.
[0035] With the development of society, semiconductor devices play a core role in modern electronic technology and information technology. In the production process of semiconductor devices, it is necessary to bond the package substrate with the chip soldered to the shell.
[0036] After bonding is completed, in order to ensure the stability of the bonding, the semiconductor device needs to be stably clamped for a certain period of time to ensure the stability of the bonding. In the prior art, semiconductor devices are usually clamped using clamps, which have a weak clamping force and are unstable, making it difficult to ensure the stability of the bonding of the semiconductor device.
[0037] In view of this, first of all, please refer to Figures 1 to 3The embodiment of the present application provides a clamp 100, which includes a base 10 and a clamping assembly 20. The clamping assembly 20 includes a first clamping member 21 and a second clamping member 22 connected to the same side of the base 10 along a first direction X. The first clamping member 21 has a first clamping surface 211 facing the second clamping member 22, and the second clamping member 22 has a second clamping surface 221 facing the first clamping member 21. The first clamping surface 211 and the second clamping surface 221 are spaced apart in a second direction Y and respectively abut against two opposing surfaces of a part to be clamped along the second direction Y, where the second direction Y intersects the first direction X. The clamping assembly 20 is in interference contact with the part to be clamped, the first clamping surface 211 is recessed inwardly to form a first groove 212, and the second clamping surface 221 is recessed inwardly to form a second groove 222.
[0038] The clamp 100 provided in the embodiment of the present application is used to clamp a part to be clamped. The first clamping member 21 and the second clamping member 22 stably clamp the part to be clamped on both sides along the second direction Y, thereby clamping the part to be clamped to achieve the desired effect.
[0039] Specifically, when the structure of the part to be clamped involves bonding, the part needs to be clamped for a period of time to ensure the stability of the bonding within the part. For example, the part to be clamped can be a pre-manufactured semiconductor device 200, and the clamping of the clamp 100 described above ensures that the relevant structures within the semiconductor device 200 are bonded and stabilized. During the clamping process, the part to be clamped only needs to be placed in the clamp 100 of the embodiment of the present application to achieve the desired clamping effect.
[0040] The clamp 100 provided in an embodiment of the present application includes a base 10 and a clamping assembly 20 connected to the base 10. The clamping assembly 20 clamps the object to be clamped. The clamping assembly 20 includes a first clamping member 21 and a second clamping member 22 connected to the same side of the base 10 along a first direction X. The first clamping member 21 has a first clamping surface 211 facing the second clamping member 22, and the second clamping member 22 has a second clamping surface 221 facing the first clamping member 21. The first clamping surface 211 and the second clamping surface 221 are spaced apart in the second direction Y.
[0041] It is understood that a side surface of the base 10 and the first clamping surface 211 and the second clamping surface 221 together form a clamping cavity 23, and the object to be clamped can be positioned within the clamping cavity 23. The first clamping surface 211 and the second clamping surface 221 respectively abut against two opposing surfaces of the object to be clamped along the second direction Y, and the clamping assembly 20 and the object to be clamped are in interference contact to generate a force on the object to be clamped.
[0042] The distance between the first clamping member 21 and the second clamping member 22 protruding from the base 10 along the first direction X is consistent with the size of the clamping cavity 23 in the first direction X, and the distance between the second clamping surface 221 and the first clamping surface 211 in the second direction Y is consistent with the size of the clamping cavity 23 in the second direction Y. The above two sizes are specifically set in combination with the parts to be clamped.
[0043] In order to facilitate adjustment of the size of the clamping cavity 23 in the first direction X, multiple first clamping members 21 and multiple second clamping members 22 can be provided. The multiple first clamping members 21 are detachably connected in the first direction X. Similarly, the multiple second clamping members 22 are also detachably connected in the first direction X. By stacking different numbers of first clamping members 21 and second clamping members 22 in the first direction X, the size of the clamping cavity 23 in the first direction X can be adjusted.
[0044] At the same time, in order to facilitate the adjustment of the size of the clamping cavity 23 in the second direction Y, the first clamping member 21 and the base 10 can be detachably connected, and the second clamping member 22 can also be detachably connected to the base 10. By changing the connection position of the first clamping member 21 and the second clamping member 22 on the base 10, the spacing distance between the first clamping surface 211 and the second clamping surface 221 in the second direction Y is adjusted, and the size of the clamping cavity 23 in the second direction Y is adjusted in turn.
[0045] Furthermore, in order to ensure that the clamping assembly 20 has a clamping effect on the part to be clamped, the contact with the part to be clamped is reduced, and the damage to the part to be clamped by the clamping assembly 20 is reduced. A first groove 212 is provided on the first clamping surface 211, and a second groove 222 is provided on the second clamping surface 221. The first groove 212 is formed on one side of the first clamping surface 211 to avoid the part to be clamped, thereby reducing the contact area between the first clamping surface 211 and the part to be clamped. The second groove 222 is formed on one side of the second clamping surface 221 to avoid the part to be clamped, thereby reducing the contact area between the second clamping surface 221 and the part to be clamped. By providing the first groove 212 and the second groove 222, the clamping effect of the clamping assembly 20 on the part to be clamped can be ensured while reducing the contact with the part to be clamped and reducing the damage to the part to be clamped by the clamping assembly 20.
[0046] In summary, in the embodiment of the present application, the clamp 100 is used to clamp the part to be clamped, and the first clamping member 21 and the second clamping member 22 are used to clamp the part to be clamped on both sides along the second direction Y, so as to clamp the part to be clamped to achieve the desired effect. The base 10, the first clamping member 21 and the second clamping member 22 are enclosed to form a clamping cavity 23, and the part to be clamped can be located inside the clamping cavity 23. The first clamping surface 211 and the second clamping surface 221 respectively abut against two opposite surfaces of the part to be clamped along the second direction Y, and the clamping assembly 20 and the part to be clamped are in interference contact to generate a force on the part to be clamped. At the same time, a first groove 212 is provided on the first clamping surface 211 to reduce the contact area between the first clamping surface 211 and the part to be clamped; a second groove 222 is provided on the second clamping surface 221 to reduce the contact area between the second clamping surface 221 and the part to be clamped. Through the above arrangement, the clamping function of the clamping assembly 20 on the part to be clamped can be ensured while the contact with the part to be clamped can be reduced, thereby reducing damage to the part to be clamped by the clamping assembly 20.
[0047] In some embodiments, the first groove 212 is formed by a depression on a side of the first clamping member 21 facing away from the base 10 , and / or the second groove 222 is formed by a depression on a side of the second clamping member 22 facing away from the base 10 .
[0048] During actual operation, the part to be clamped enters the clamping cavity 23 from one end of the first clamping part 21 and the second clamping part 22 away from the base 10. In the process of the part to be clamped entering the clamping cavity 23 along the first direction X, it is inevitable that contact and extrusion will occur between the first clamping surface 211 and the second clamping surface 221. In order to reduce the wear of the first clamping part 21 and the second clamping part 22 on the part to be clamped, the first groove 212 is formed by the depression of the side surface of the first clamping part 21 away from the base 10, and the second groove 222 is formed by the depression of the side surface of the second clamping part 22 away from the base 10.
[0049] Through the above arrangement, it is equivalent to that the first groove 212 extends along the first direction X on the first clamping member 21, and the second groove 222 extends along the first direction X on the second clamping member 22. Furthermore, the first groove 212 is provided through the first clamping member 21 along the first direction X, and the second groove 222 is provided through the second clamping member 22 along the first direction X.
[0050] It can be understood that the first groove 212 penetrates the first clamping member 21 along the first direction X, which is equivalent to dividing the first clamping member 21 into at least a first portion and a second portion along the third direction Z, and the third direction Z, the second direction Y, and the first direction X intersect with each other. The first groove 212 is provided in the first portion, and the first portion always avoids the clamping member during the clamping process. The second groove 222 is provided on the second clamping member 22 for the same reason. Through the above-mentioned arrangement, the clamping assembly 20 can always avoid the clamping member in the portion where the first groove 212 and the second groove 222 are provided, thereby reducing wear on the clamping member.
[0051] In some embodiments, the first groove 212 is disposed in the middle of the first clamping member 21 along the third direction Z, and the first clamping member 21 forms two first clamping portions 213 on both sides of the first groove 212 along the third direction Z.
[0052] It is understood that the first grooves 212 are centrally located on the first clamping member 21 in the third direction Z. The two first clamping portions 213 on either side of the first grooves 212 contact the clamped member to generate a compressive force. The centralized arrangement of the first grooves 212 allows for the centralized avoidance of certain specific areas on the clamped member, reducing the contact area between the first clamping surface 211 and the clamped member while also allowing for the avoidance of certain specific structures on the clamped member.
[0053] In some embodiments, there are multiple second grooves 222 , and the second clamping member 22 forms a second clamping portion 223 between adjacent second grooves 222 . The projection of at least part of the second clamping portion 223 in the second direction Y overlaps with the projection of the first groove 212 in the second direction Y.
[0054] The second grooves 222 and the second clamping portions 223 are arranged in an interlaced manner on the second clamping member 22 to reduce the contact area between the second clamping surface 221 and the object to be clamped. Furthermore, by overlapping the projection of at least a portion of the second clamping portion 223 in the second direction Y with the projection of the first groove 212 in the second direction Y, the second clamping portion 223 can exert a force on the object to be clamped in the region of the first groove 212. The forces exerted by the second clamping portion 223 and the first clamping portion 213 are interlaced in the third direction Z, generating a certain degree of squeezing force on the object to be clamped along the third direction Z, thereby improving the clamping effect of the clamping assembly 20 on the object to be clamped.
[0055] In some embodiments, at least a portion of the projection of the first clamping portion 213 in the second direction Y overlaps with the projection of the second groove 222 in the second direction Y. It is understood that the first clamping portion 213 and the second groove 222 are arranged correspondingly in the third direction Z. Since the second clamping portion 223 is located between the second groove 222, that is, the first clamping portion 213 and the second clamping portion 223 are staggered in the third direction Z. This can avoid the generation of a positive force along the second direction Y between the first clamping portion 213 and the second clamping portion 223, thereby reducing friction when the clamped member enters the clamping cavity 23 and making it easier for the clamped member to enter the clamping cavity 23. Furthermore, when the clamped member is within the clamping cavity 23, the staggered arrangement of the first clamping portion 213 and the second clamping portion 223 in the third direction Z can generate an oblique force on the clamped member in the third direction Z, thereby improving the squeezing effect of the clamping assembly 20 on the clamped member.
[0056] In some embodiments, the first clamping portion 213 includes a first curved surface 214 connecting the first clamping surface 211 and the side surface of the first groove 212. And / or, the second clamping portion 223 includes a second curved surface 224 connecting the second clamping surface 221 and the side surface of the second groove 222.
[0057] The first arcuate surface 214 enables line contact between the first clamping portion 213 and the clamped object, further minimizing the impact on the clamped object while ensuring the clamping effect. The second arcuate surface forms a rounded edge at the contact point between the second clamping portion 223 and the clamped object, reducing wear on the clamped object by the second clamping surface 221.
[0058] Regarding the arrangement of the first curved surface 214, in some embodiments, when the first curved surface 214 is projected in the first direction X, the center of the projected arc of the first curved surface 214 is located inside the first clamping surface 211. In some embodiments, when the first curved surface 214 is projected in the first direction X, the center of the projected arc of the first curved surface 214 is located outside the first clamping surface 211.
[0059] In some embodiments, the first clamping member 21 includes a first main body portion 215 and a first connecting portion 216 that are interconnected, and the second clamping member 22 includes a second main body portion 225 and a second connecting portion 226 that are interconnected. The first main body portion 215 is connected to an end of the second connecting portion 226 that is away from the second main body portion 225, and the second main body portion 225 is connected to an end of the first connecting portion 216 that is away from the first main body portion 215. The end-to-end connection between the first main body portion 215, the first connecting portion 216, the second main body portion 225, and the second connecting portion 226 encloses the two ends of the clamping cavity 23 in the third direction Z, thereby protecting the clamped member and preventing damage to the clamped member from foreign objects at the two ends of the clamping cavity 23 in the third direction Z.
[0060] In some embodiments, a through hole 11 is provided through the base 10 along the first direction X. The projection of the through hole 11 in the first direction X is at least partially located between the first clamping surface 211 and the second clamping surface 221. The provision of the through hole 11 facilitates a technician to remove the object to be clamped from the clamping cavity 23 through the through hole 11 from the side of the base 10 along the first direction X away from the first clamping member 21 and the second clamping member 22.
[0061] In some embodiments, the first clamping member 21 and the second clamping member 22 enclose a clamping cavity 23, and the object to be clamped can be located within the clamping cavity 23. The dimension of the clamping cavity 23 in the first direction X is greater than its dimension in the second direction Y, and the dimension of the clamping cavity 23 in the third direction Z is greater than its dimension in the second direction Y.
[0062] The object to be clamped has a length direction, a width direction, and a thickness direction. The length direction is greater than the thickness direction, the width direction is greater than the thickness direction, and the thickness direction is the direction in which the clamping is required. To reduce the space occupied by the object to be clamped during the clamping process, the thickness direction of the object to be clamped is aligned with the second direction Y of the clamp 100. The second direction Y is set to the vertical direction, and the object to be clamped is clamped vertically to reduce the space occupied by the object in the horizontal direction.
[0063] In some embodiments, a plurality of clamping assemblies 20 are provided, and the plurality of clamping assemblies 20 are spaced apart on the base 10 along the second direction Y. And / or, a plurality of clamping assemblies 20 are provided, and the plurality of clamping assemblies 20 are spaced apart on the base 10 along the third direction Z. The plurality of clamping assemblies 20 on the base 10 fully utilizes its vertical clamping space, thereby improving the clamping efficiency of the fixture 100 for the object to be clamped.
[0064] In some embodiments, the first clamping surface 211 is provided with a protective layer having a hardness less than that of the first clamping member 21. And / or, the second clamping surface 221 is provided with a protective layer having a hardness less than that of the second clamping member 22. The provision of a protective layer can further reduce damage to the clamping assembly 20 when the clamping member is clamped. For example, if the clamping member is a semiconductor device 200, the protective layer can be made of polytetrafluoroethylene to protect the semiconductor device 200.
[0065] Second, see Figures 1 to 4 The embodiment of the present application provides a production device for producing a semiconductor device 200. The production device includes the above-mentioned clamp 100, and the above-mentioned part to be clamped is a semiconductor device 200. The semiconductor device 200 includes a semiconductor body portion 201 and a pin portion 202 protruding from the semiconductor body portion 201 along the second direction Y. The first clamping surface 211 abuts against the semiconductor body portion 201, and the pin portion 202 is located inside the first groove 212. The production device provided by the embodiment of the present application includes all the technical features of the above-mentioned clamp 100 and has all the above-mentioned technical effects, which will not be repeated here.
[0066] While the present invention has been described with reference to preferred embodiments, various modifications may be made and equivalent components may be substituted without departing from the scope of the present invention. In particular, the various technical features described in the various embodiments may be combined in any manner, provided no structural conflicts exist. The present invention is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions within the scope of the claims.
Claims
1. A clamp, characterized in that: include: base; A clamping assembly, the clamping assembly comprising a first clamping member and a second clamping member connected to the same side of the base along a first direction, the first clamping member having a first clamping surface facing the second clamping member, the second clamping member having a second clamping surface facing the first clamping member, the first clamping surface and the second clamping surface being spaced apart in a second direction and respectively abutting against two opposing surfaces of a to-be-clamped member along the second direction, the second direction intersecting the first direction; The clamping assembly is in interference contact with the part to be clamped, the first clamping surface is recessed inward to form a first groove, and the second clamping surface is recessed inward to form a second groove.
2. The clamp according to claim 1, characterized in that The first groove is formed by a depression on a side of the first clamping member facing away from the base; and / or, The second groove is formed by a depression on a side surface of the second clamping member facing away from the base.
3. The clamp according to claim 1, characterized in that The first groove is provided in the middle of the first clamping member along the third direction. The first clamping member forms two first clamping portions on both sides of the first groove along the third direction. The third direction, the second direction and the first direction intersect each other.
4. The clamp according to claim 3, characterized in that There are multiple second grooves, and the second clamping member forms a second clamping portion between adjacent second grooves. The projection of at least part of the second clamping portion in the second direction overlaps with the projection of the first groove in the second direction.
5. The clamp according to claim 4, characterized in that A projection of at least part of the first clamping portion in the second direction overlaps with a projection of the second groove in the second direction.
6. The clamp according to claim 4, characterized in that The first clamping portion includes a first arcuate surface connecting the first clamping surface and the groove side surface of the first groove; and / or the second clamping portion includes a second arcuate surface connecting the second clamping surface and the groove side surface of the second groove.
7. The clamp according to claim 1, wherein: The first clamping member includes a first main body portion and a first connecting portion connected to each other, and the second clamping member includes a second main body portion and a second connecting portion connected to each other, the first main body portion is connected to an end of the second connecting portion away from the second main body portion, and the second main body portion is connected to an end of the first connecting portion away from the first main body portion.
8. The clamp according to claim 1, wherein: A through hole is provided through the base along the first direction, and a projection of the through hole in the first direction is at least partially located between the first clamping surface and the second clamping surface.
9. The clamp according to claim 1, wherein: The first clamping member and the second clamping member enclose a clamping cavity, and the object to be clamped can be located inside the clamping cavity; The size of the clamping cavity in the first direction is larger than that in the second direction, the size of the clamping cavity in the third direction is larger than that in the second direction, and the third direction, the second direction and the first direction intersect each other.
10. A production equipment for producing semiconductor devices, characterized in that: The production equipment comprises the clamp according to any one of claims 1 to 9, and the part to be clamped is the semiconductor device; The semiconductor device includes a semiconductor body and a pin portion protruding from the semiconductor body along the second direction. The first clamping surface abuts against the semiconductor body, and the pin portion is located inside the first groove.