Quickly detached gas spray header

Abstract

The utility model relates to the technical field of gas spraying equipment, in particular to a gas spraying head capable of being quickly disassembled, and aims to solve the problem that the gas spraying head is relatively complicated to clean in the prior art. The gas spray header comprises a quick release head which is arranged at one end of a spray pipe through threaded connection; the upper end of the spraying head is arranged on the quick-release head, and a plurality of air outlets are densely formed in the lower end face of the spraying head; and the cross section area of the upper part of the air outlet hole is large, and the cross section area of the lower part of the air outlet hole is small. The spray header is quickly mounted and dismounted through the quick dismounting head, so that the spray header can be quickly dismounted for deep cleaning after the spray header is used for a certain period of time or when sprayed gas is replaced and the spray header is cleaned, the cleanliness is ensured, the cleaning process is relatively simple, and the cleaning efficiency is improved. And the spraying head is prevented from being cleaned in a mounting state.

Description

Technical Field

[0001] The utility model relates to the technical field of wireless information collection equipment, in particular to a quickly disassembled gas shower head. Background Art

[0002] In the field of semiconductor process equipment, the gas shower head is a key device, mainly used to evenly spray various gases onto the wafer surface for deposition or etching processes such as chemical vapor deposition (CVD) and etching. In these processes, the performance and design of the gas shower head have a crucial impact on the process results.

[0003] The gas shower head needs to be cleaned after being used for a certain period of time or when the spraying gas is replaced. The cleaning method in the prior art is relatively complicated. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a quick-disassembly gas shower head to solve the problem of the prior art that the cleaning of the gas shower head is relatively complicated.

[0005] Based on the above-mentioned purpose, the utility model provides a quick-detachable gas spray head, including a quick-detachable head, which is arranged at one end of a spray pipe through a threaded connection; the spray head, the upper end of which is arranged on the quick-detachable head, and the lower end surface of which is densely provided with a plurality of air outlet holes; the longitudinal section of the air outlet hole is an inverted "eight" shape, the cross-sectional area of ​​the upper part is large, and the cross-sectional area of ​​the lower part is small.

[0006] As a further improvement of the present application, the air outlet holes are arranged on the bottom surface of the shower head in a concentric circle manner, and the spacing between adjacent air outlet holes in the outer circle is smaller than the spacing between adjacent air outlet holes in the inner circle.

[0007] As a further improvement of the present application, an inner step is provided inside the quick-release head, and sealing rings are provided at the upper and lower ends of the inner step respectively. The end of the spray pipe is in contact and sealed with the sealing ring at the upper end of the inner step; the upper end of the spray head is in contact and sealed with the sealing ring at the lower end of the inner step.

[0008] As a further improvement of the present application, a positioning groove is provided on the outer side of the upper part of the sprinkler head; a positioning hole is provided below the inner step inside the quick-release head, and a reset spring and a positioning pin are provided in the positioning hole, and the two ends of the reset spring are respectively connected to one end of the positioning pin and the bottom of the positioning hole, and the end of the positioning pin away from the reset spring cooperates with the positioning groove to define the sprinkler head.

[0009] As a further improvement of the present application, the end of the positioning pin away from the return spring is triangular, and the two inclined surfaces of the triangle are located on the upper and lower sides.

[0010] As a further improvement of the present application, the diameter of the positioning pin is greater than the width of the positioning groove.

[0011] As a further improvement of the present application, the quick-release head is provided with a circle of positioning ring on the outside; the outside of the spray head is provided with a claw that cooperates with the positioning ring; the middle part of the claw is movably connected to the outside of the spray head through a pin shaft, and the pin shaft is provided with a torsion spring, and the two ends of the torsion spring are respectively connected to the claw and the outer wall of the spray head; the upper end of the claw is provided with a protrusion block, and when engaged, the protrusion block is located at the upper end of the positioning ring.

[0012] The beneficial effects of the present invention are as follows: the spray head can be quickly installed and disassembled through the quick-release head, so that when the spray head is cleaned after a certain period of use or when the spray gas is changed, the spray head can be quickly disassembled for deep cleaning, which ensures the cleanliness and makes the cleaning process simpler, avoiding the need to clean the spray head in the installed state. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0014] Figure 1 This is a schematic structural diagram of a quick-disassembly gas shower head according to an embodiment of the present invention;

[0015] Figure 2 This is a bottom view of a quick-detachable gas shower head without claws according to an embodiment of the present invention;

[0016] Figure 3 This is a front view of a quick-detachable gas shower head provided with claws according to an embodiment of the present invention.

[0017] Among them, 1. quick-release head; 11. inner step; 12. sealing ring; 13. positioning hole; 14. return spring; 15. positioning pin; 16. positioning ring; 2. spray pipe; 3. spray head; 31. air outlet; 32. positioning groove; 33. claw; 34. torsion spring. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0019] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the usual meanings understood by people with ordinary skills in the field to which this utility model belongs. The "first", "second" and similar words used in this utility model do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative position relationships. When the absolute position of the object being described changes, the relative position relationship may also change accordingly.

[0020] like Figure 1 and Figure 2 As shown, a quick-detachable gas shower head comprises a quick-detach head 1, threadedly attached to one end of a shower pipe 2; a shower head 3, the upper end of which is mounted on the quick-detach head 1 and has a plurality of closely spaced gas outlets 31 on its lower end. The longitudinal cross-section of the gas outlets 31 is an inverted "eight" shape, with a larger cross-sectional area at the top and a smaller cross-sectional area at the bottom. The inverted "eight" shape of the gas outlets 31 compresses the exiting gas first and then rapidly depressurizes it at the outlet end, allowing the gas to diffuse quickly and evenly, ensuring process requirements and uniformly spraying the gas onto the wafer surface for deposition or etching.

[0021] The quick-release head 1 allows the spray head 3 to be quickly installed and removed, so that when the spray head 3 is cleaned after being used for a certain period of time or when the spraying gas is changed, the spray head 3 can be quickly removed for deep cleaning, thereby ensuring cleanliness and simplifying the cleaning process, thereby avoiding the need to clean the spray head 3 when it is installed.

[0022] like Figure 2 As shown, further, to ensure uniform air output, the air outlet holes 31 are arranged in a concentric circle on the bottom surface of the shower head 3, and the spacing between adjacent air outlet holes 31 in the outer circle is smaller than the spacing between adjacent air outlet holes 31 in the inner circle. In this way, the air outlet holes 31 in the outer circle are densely distributed, while the air outlet holes 31 in the inner circle are more sparsely distributed, resulting in better overall air output uniformity.

[0023] In order to maintain the seal, an inner step 11 is provided inside the quick-release head 1, and sealing rings 12 are respectively provided at the upper and lower ends of the inner step 11. The end of the spray pipe 2 is in contact and sealed with the sealing ring 12 at the upper end of the inner step 11; the upper end of the spray head 3 is in contact and sealed with the sealing ring 12 at the lower end of the inner step 11.

[0024] In order to maintain contact and maintain pressure between the quick-release head 1 and the sprinkler head 3, a positioning groove 32 is provided on the outer side of the upper part of the sprinkler head 3; a positioning hole 13 is provided below the inner step 11 inside the quick-release head 1, and a return spring 14 and a positioning pin 15 are provided in the positioning hole 13, and the two ends of the return spring 14 are respectively connected to one end of the positioning pin 15 and the bottom of the positioning hole 13, and the end of the positioning pin 15 away from the return spring 14 cooperates with the positioning groove 32 to define the sprinkler head 3.

[0025] The end of the positioning pin 15 away from the return spring 14 is triangular in shape, with two oblique surfaces located at the top and bottom. The positioning groove 32 has a right triangle cross-section, with the upper portion of the cross-section being the hypotenuse of the right triangle, which cooperates with the oblique surface of the positioning pin 15. The positioning pin 15 squeezes the positioning groove 32, causing it to move upward, thereby ensuring pressure between the quick-release head 1 and the spray head 3.

[0026] When disassembling the shower head 3 , the shower head 3 is pulled downward, the positioning groove 32 squeezes the positioning pin 15 , the positioning pin 15 moves into the positioning hole 13 , and the shower head 3 is pulled out to complete the disassembly.

[0027] When installing the spray head 3 , the spray head 3 is squeezed upward, and the upper end of the spray head 3 squeezes the positioning pin 15 . The positioning pin 15 moves into the positioning hole 13 and is pressed into the spray head 3 . After the positioning pin 15 is inserted into the positioning groove 32 , the installation is completed.

[0028] In order to facilitate disassembly and installation, the diameter of the positioning pin 15 is larger than the width of the positioning groove 32. The triangle at the end of the positioning pin 15 is prevented from being completely inserted into the positioning groove 32.

[0029] like Figure 1 and Figure 3 As shown, in order to prevent the sprinkler head 3 from falling off, the quick-release head 1 is provided with a circle of positioning ring 16 on the outside; the sprinkler head 3 is provided with a claw 33 on the outside that cooperates with the positioning ring 16; the middle part of the claw 33 is movably connected to the outside of the sprinkler head 3 through a pin shaft, and a torsion spring 34 is provided on the pin shaft, and the two ends of the torsion spring 34 are respectively connected to the claw 33 and the outer wall of the sprinkler head 3; the upper end of the claw 33 is provided with a protruding block, and when engaged, the protruding block is located at the upper end of the positioning ring 16.

[0030] When the clamping claws 33 are engaged, the shower head 3 is integrated with the quick-release head 1 and is difficult to fall off. When disassembly is required, the clamping claws 33 are first released, and then the shower head 3 is pulled to complete the disassembly.

[0031] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Within the scope of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

[0032] The present invention is intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A quick-disassembly gas shower head, characterized in that: include A quick-release head (1) is provided at one end of the spray pipe (2) via a threaded connection; A spray head (3), the upper end of which is arranged on the quick-release head (1), and a plurality of air outlet holes (31) are densely arranged on the lower end surface; The longitudinal section of the air outlet (31) is in the shape of an inverted "eight", with a larger cross-sectional area at the upper portion and a smaller cross-sectional area at the lower portion.

2. The quick-disassembly gas shower head according to claim 1, characterized in that: The air outlet holes (31) are arranged on the bottom surface of the shower head (3) in a concentric circle manner, and the spacing between adjacent air outlet holes (31) in the outer circle is smaller than the spacing between adjacent air outlet holes (31) in the inner circle.

3. The quick-disassembly gas shower head according to claim 1, characterized in that: An inner step (11) is provided inside the quick-release head (1), and sealing rings (12) are provided at the upper and lower ends of the inner step (11). The end of the spray pipe (2) contacts and seals with the sealing ring (12) at the upper end of the inner step (11); and the upper end of the spray head (3) contacts and seals with the sealing ring (12) at the lower end of the inner step (11).

4. The quick-disassembly gas shower head according to claim 3, characterized in that: A positioning groove (32) is provided on the outer side of the upper portion of the shower head (3); A positioning hole (13) is provided below the inner step (11) inside the quick-release head (1), and a reset spring (14) and a positioning pin (15) are provided in the positioning hole (13). The two ends of the reset spring (14) are respectively connected to one end of the positioning pin (15) and the bottom of the positioning hole (13). The end of the positioning pin (15) away from the reset spring (14) cooperates with the positioning groove (32) to define the spray head (3).

5. The quick-disassembly gas shower head according to claim 4, characterized in that: One end of the positioning pin (15) away from the return spring (14) is in the shape of a triangle, with two inclined surfaces of the triangle located at the upper and lower sides.

6. The quick-disassembly gas shower head according to claim 4, characterized in that: The diameter of the positioning pin (15) is greater than the width of the positioning groove (32).

7. The quick-disassembly gas shower head according to claim 1, characterized in that: The quick-release head (1) is provided with a positioning ring (16) on the outside; The outside of the shower head (3) is provided with a claw (33) that cooperates with the positioning ring (16); The middle part of the clamping claw (33) is movably connected to the outside of the spray head (3) through a pin shaft, and a torsion spring (34) is provided on the pin shaft, and the two ends of the torsion spring (34) are respectively connected to the clamping claw (33) and the outer wall of the spray head (3); The upper end of the clamping claw (33) is provided with a protruding block, and when engaged, the protruding block is located at the upper end of the positioning ring (16).

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