Nozzle corrector and cleaning device

Abstract

The utility model provides a nozzle corrector and cleaning device relates to semiconductor technical field, the nozzle corrector includes base, correction seat and flow velocity monitoring subassembly, the correction seat is provided on the base, in the correction seat is provided with two fluid channel, two ends of two fluid channel respectively pass through the correction seat both sides surface, and the flow velocity monitoring subassembly is provided with the flow velocity monitoring subassembly. Two first correcting openings and two second correcting openings are formed in the two sides of the correcting base respectively, the second correcting openings are used for being connected with and fixing the nozzle head, and the flow speed monitoring assembly is arranged on the correcting base and gives an alarm when the flow speeds of fluid in the two fluid channels are different. Compared with the prior art, the flow velocity condition of the two nozzle heads can be monitored in real time through the fluid monitoring assembly, so that the pressure difference of the nozzle heads is detected, and an alarm is given when the flow velocity is different, so that the spraying pressure of the spraying nozzle can be corrected in time, the uniformity of the spraying pressure is ensured, and cracks caused by non-uniform stress of a welding part are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a nozzle corrector and a cleaning device. Background Art

[0002] In advanced packaging technologies (such as 2.5D / 3D packaging), multiple flip-chips with different functions are typically integrated into a single module for packaging. The flip-chip substrates feature numerous bumps with minimal spacing between them. This poses a significant challenge in cleaning residual flux from the bottom bumps of the chips after flipping. Existing cleaning processes employ multiple spray nozzles at the top and bottom of the cleaning mesh belt. Clogged nozzles can affect spray pressure, leading to pressure differentials. This differential can lead to uneven stress on the solder joints between the bumps during cleaning, causing cracks. Utility Model Content

[0003] The purpose of the utility model is to provide a nozzle corrector and cleaning device, which can detect the pressure difference of the spray nozzle, facilitate and timely correct the spray pressure of the spray nozzle, ensure the uniformity of the spray pressure, and avoid cracks caused by uneven force on the welding part.

[0004] The embodiment of the present utility model is achieved as follows:

[0005] In the first aspect, the utility model provides a nozzle corrector, comprising a base, a correction seat and a flow rate monitoring component, the correction seat being arranged on the base, and two fluid channels being arranged in the correction seat, the two ends of the two fluid channels respectively passing through the two side surfaces of the correction seat, and forming two first correction ports and two second correction ports on both sides respectively, the second correction port being used to connect and fix the nozzle head, the first correction port being used to discharge the fluid, the flow rate monitoring component being arranged on the correction seat, and being used to monitor the flow rate of the fluid in the two fluid channels, and to issue an alarm when the flow rate of the fluid in the two fluid channels is different.

[0006] In an optional embodiment, the correction seat includes an integrally arranged support portion, a transfer triangle portion and a top support portion, the support portion is arranged at a side edge of the base and extends upward, the top support portion is arranged at the top end of the support portion and is arranged at an angle to the support portion, the transfer triangle portion is arranged between the support portion and the top support portion, the two first correction ports are arranged on the surface of the top support portion, the two second correction ports are arranged on the surface of the transfer triangle portion, and the two fluid channels both pass through the transfer triangle portion and the top support portion.

[0007] In an optional embodiment, the top side surface of the supporting portion is parallel to the top side surface of the base.

[0008] In an optional embodiment, a line connecting the two first correction ports and a line connecting the two second correction ports are parallel to each other, and the two fluid channels are parallel to each other.

[0009] In an optional embodiment, the adapter triangle portion has a mounting bevel, the two second correction openings are arranged on the mounting bevel, and two sides of the mounting bevel are respectively joined to the surface of the support portion and the surface of the top support portion.

[0010] In an optional embodiment, the angle between the installation slope and the surface of the support portion is 45°.

[0011] In an optional embodiment, the flow rate monitoring component includes an indicator light and two flow rate monitors, the two flow rate monitors are respectively arranged in the two fluid channels, and are used to monitor the flow rate of the fluid in the fluid channels, and the indicator light is electrically connected to the two flow rate monitors at the same time.

[0012] In an optional embodiment, the indicator light is fitted on the side wall of the correction seat and is used to light up a red light when the flow rates of the fluid in the two fluid channels are different, and the indicator light is used to light up a green light when the flow rates of the fluid in the two fluid channels are the same.

[0013] In an optional embodiment, the second correction port is provided with a positioning slot, and the positioning slot is used to hold the nozzle head.

[0014] In the second aspect, the utility model provides a cleaning device, including a cleaning mesh belt and a nozzle corrector as described in any one of the aforementioned embodiments, wherein the cleaning mesh belt is provided with multiple nozzle heads, the nozzle corrector is provided on the cleaning mesh belt, and the two second correction ports are used to connect and fix two of the nozzle heads.

[0015] The beneficial effects of the embodiments of the present utility model include:

[0016] The nozzle corrector and cleaning device provided by the embodiment of the present utility model sets the correction seat on the base, and the correction seat has two fluid channels built in. The two ends of the two fluid channels respectively pass through the two side surfaces of the correction seat, and form two first correction ports and two second correction ports respectively. The second correction port is used to connect and fix the nozzle head, and the first correction port is used to discharge the fluid. The flow rate monitoring component is set on the correction seat and is used to monitor the flow rate of the fluid in the two fluid channels, and at the same time, an alarm is issued when the flow rate of the fluid in the two fluid channels is different. Compared with the existing technology, the nozzle corrector provided by the embodiment of the present utility model can monitor the flow rate of the two nozzle heads in real time through the fluid monitoring component, thereby detecting the pressure difference of the nozzle heads, and issuing an alarm when the flow rate is different, so that the spray pressure of the spray nozzle can be corrected in time, ensuring the uniformity of the spray pressure, and avoiding cracks caused by uneven force on the welding part. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic diagram of the structure of the nozzle corrector provided by an embodiment of the utility model at a first viewing angle;

[0019] Figure 2 A schematic diagram of the structure of the nozzle corrector provided by an embodiment of the present utility model at a second viewing angle;

[0020] Figure 3 A schematic diagram of the structure of the nozzle corrector provided by an embodiment of the present utility model from a third perspective;

[0021] Figure 4 A schematic structural diagram of the nozzle corrector provided in an embodiment of the present utility model from a fourth perspective.

[0022] icon:

[0023] 100-nozzle corrector; 110-base; 130-correction seat; 131-support part; 133-adapter triangle; 135-top support part; 137-mounting slope; 150-flow rate monitoring assembly; 151-indicator light; 153-flow rate monitor; 170-fluid channel; 171-first correction port; 173-second correction port; 175-positioning slot. DETAILED DESCRIPTION

[0024] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0027] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0029] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0030] As disclosed in the background technology, in the existing cleaning process, multiple spray nozzles are designed at the upper and lower ends of the cleaning mesh belt. The multiple spray nozzles may affect the spray pressure due to blockage, which may easily lead to pressure difference. Once the pressure difference occurs, during the cleaning process, the welding parts between the bumps are prone to uneven force and cause cracks.

[0031] Furthermore, in the prior art, the pressure / flow of the spray nozzle is usually monitored by a machine, and can only monitor the pressure within the same pipeline to identify the pressure of the spray nozzle. This is inefficient and difficult to identify the difference in spray pressure in a timely manner. The blockage or damage of the spray nozzle can easily lead to a pressure difference.

[0032] In order to solve the above problems, an embodiment of the present invention provides a nozzle corrector and a cleaning device. The specific structure of the nozzle corrector is introduced in detail below.

[0033] Please refer to Figures 1 to 4 This embodiment provides a nozzle corrector 100 of the utility model, which can detect the pressure difference of the spray nozzle, facilitate timely correction of the spray pressure of the spray nozzle, ensure the uniformity of the spray pressure, and avoid cracks caused by uneven force on the welding part.

[0034] The nozzle corrector 100 provided in this embodiment includes a base 110, a correction seat 130 and a flow rate monitoring component 150. The correction seat 130 is arranged on the base 110, and two fluid channels 170 are arranged in the correction seat 130. The two ends of the two fluid channels 170 respectively penetrate the two side surfaces of the correction seat 130, and form two first correction ports 171 and two second correction ports 173 on both sides. The second correction port 173 is used to connect and fix the nozzle head, and the first correction port 171 is used to discharge the fluid. The flow rate monitoring component 150 is arranged on the correction seat 130, and is used to monitor the flow rate of the fluid in the two fluid channels 170, and to issue an alarm when the flow rate of the fluid in the two fluid channels 170 is different.

[0035] It should be noted that in this embodiment, the correction seat 130 is disposed on the base 110, and the correction seat 130 has two built-in fluid channels 170. The two ends of the two fluid channels 170 respectively penetrate the two side surfaces of the correction seat 130 and form two first correction ports 171 and two second correction ports 173, respectively. The second correction ports 173 are used to connect and fix the nozzle head, while the first correction ports 171 are used to discharge fluid. The flow rate monitoring component 150 is disposed on the correction seat 130 and is used to monitor the flow rate of the fluid in the two fluid channels 170 and to issue an alarm when the flow rate of the fluid in the two fluid channels 170 differs. The nozzle corrector 100 provided in this embodiment can monitor the flow rate of the two nozzle heads in real time through the fluid monitoring component, thereby detecting the pressure difference between the nozzle heads. When the flow rates differ, an alarm is issued, thereby enabling timely correction of the spray pressure of the spray nozzle, ensuring the uniformity of the spray pressure, and avoiding cracks caused by uneven force on the welded parts.

[0036] The correction seat 130 includes an integrally arranged support portion 131, an adapter triangle portion 133 and a top support portion 135. The support portion 131 is arranged on one side edge of the base 110 and extends upward. The top support portion 135 is arranged at the top end of the support portion 131 and is arranged at an angle to the support portion 131. The adapter triangle portion 133 is arranged between the support portion 131 and the top support portion 135. The two first correction ports 171 are arranged on the surface of the top support portion 135. The two second correction ports 173 are arranged on the surface of the adapter triangle portion 133. The two fluid channels 170 both pass through the adapter triangle portion 133 and the top support portion 135. Specifically, the base 110 is arranged in a horizontal direction, the support part 131 is integrally arranged on one side edge of the base 110, the top support part 135 is arranged at the top of the support part 131, and the adapter triangle part 133 is arranged at the angle between the support part 131 and the top support part 135. By setting the adapter triangle part 133, the fluid channel 170 can be formed in conjunction with the top support part 135, which facilitates the fluid monitoring component to accurately monitor the fluid flow rate.

[0037] In this embodiment, the top surface of the supporting portion 135 is parallel to the top surface of the base 110. Specifically, the supporting portion 135 is also plate-shaped and arranged in the horizontal direction. The supporting portion 135 and the base 110 are parallel to each other, and a receiving space for accommodating the nozzle head is formed therebetween.

[0038] In this embodiment, the line connecting the two first correction ports 171 and the line connecting the two second correction ports 173 are parallel to each other, and the two fluid channels 170 are also parallel to each other. Specifically, the two fluid channels 170 are symmetrically distributed, and the apertures and opening directions of the flow channels are the same, thereby ensuring that the fluid flow rate in the two fluid channels 170 is the same under normal circumstances.

[0039] In this embodiment, the triangular adapter portion 133 has a mounting bevel 137, on which two second correction ports 173 are disposed. The sides of the mounting bevel 137 are respectively bonded to the surfaces of the support portion 131 and the top support portion 135. Specifically, the provision of the mounting bevel 137 allows the two nozzle tips to be better fitted to the two second correction ports 173, and also ensures that the opening directions of the second correction ports 173 at the inlet and the first correction ports 171 at the outlet are not aligned, thereby ensuring a smooth and uniform flow rate within the fluid channel 170, facilitating measurement.

[0040] In this embodiment, the angle between the installation inclined surface 137 and the surface of the support portion 131 is 45°.

[0041] In this embodiment, the flow rate monitoring assembly 150 includes an indicator light 151 and two flow rate monitors 153. The two flow rate monitors 153 are respectively disposed in two fluid channels 170 and are used to monitor the flow rate of the fluid in the fluid channels 170. The indicator light 151 is electrically connected to both flow rate monitors 153. Specifically, the flow rate monitors 153 are disposed in the fluid channels 170 and can monitor the flow rate of the fluid in the fluid channels 170 in real time. The indicator light 151 can emit different brightness levels based on the detection results of the two flow rate monitors 153 to provide an alarm.

[0042] Furthermore, an indicator light 151 is attached to the side wall of the correction seat 130 and is configured to illuminate red when the flow rates of the fluids in the two fluid channels 170 are different, and illuminate green when the flow rates of the fluids in the two fluid channels 170 are the same. It should be noted that the electronic control means between the indicator light 151 and the flow rate monitor 153 can refer to flow monitoring devices in the prior art.

[0043] It should be noted that in this embodiment, the alarm is implemented by the indicator light 151, so that the cleaning staff can promptly detect abnormal nozzles and make corrections. In other preferred embodiments of the present invention, the alarm can also be implemented by a speaker. That is, when one of the two nozzle heads is abnormal, the flow rate difference will emit an alarm sound, which can also prompt the cleaning staff to make corrections.

[0044] In this embodiment, the second correction port 173 is provided with a positioning slot 175 for retaining the nozzle tip. Specifically, the positioning slot 175 is mushroom-shaped, firmly securing the nozzle tip and preventing it from dislodging from the second correction port 173 during monitoring. Furthermore, the edges of the second correction port 173 are arc-shaped, thereby increasing the inlet area and facilitating nozzle tip insertion.

[0045] The present invention also provides a cleaning device including a cleaning mesh belt and a nozzle corrector 100. The nozzle corrector 100 includes a base 110, a correction seat 130, and a flow rate monitoring assembly 150. The correction seat 130 is disposed on the base 110 and has two fluid channels 170 disposed therein. The ends of the two fluid channels 170 extend through the two side surfaces of the correction seat 130, respectively, and form two first correction ports 171 and two second correction ports 173 on each side. The second correction ports 173 are used to connect and secure the nozzle head, and the first correction ports 171 are used to discharge fluid. The flow rate monitoring assembly 150 is disposed on the correction seat 130 and is used to monitor the flow rate of the fluid in the two fluid channels 170 and to issue an alarm if the flow rates of the fluid in the two fluid channels 170 differ. The cleaning mesh belt is provided with a plurality of nozzle heads. The nozzle corrector 100 is disposed on the cleaning mesh belt. The two second correction ports 173 are used to connect and secure two of the nozzle heads.

[0046] In summary, the nozzle corrector 100 and cleaning device provided in this embodiment have a correction seat 130 disposed on a base 110, and the correction seat 130 has two built-in fluid channels 170. The two ends of the two fluid channels 170 respectively penetrate the two side surfaces of the correction seat 130 and form two first correction ports 171 and two second correction ports 173, respectively. The second correction ports 173 are used to connect and fix the nozzle head, while the first correction ports 171 are used to discharge the fluid. The flow rate monitoring component 150 is disposed on the correction seat 130 and is used to monitor the flow rate of the fluid in the two fluid channels 170 and to issue an alarm when the flow rate of the fluid in the two fluid channels 170 differs. Compared to the prior art, the nozzle corrector 100 provided in this embodiment of the utility model can monitor the flow rate of the two nozzle heads in real time through the fluid monitoring component, thereby detecting the pressure difference between the nozzle heads. When the flow rates differ, an alarm is issued, thereby enabling timely correction of the spray pressure of the spray nozzle, ensuring the uniformity of the spray pressure, and avoiding cracks caused by uneven force on the welded parts.

[0047] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A nozzle corrector, characterized in that: It includes a base, a correction seat and a flow rate monitoring component, the correction seat is arranged on the base, and two fluid channels are arranged in the correction seat, the two ends of the two fluid channels respectively penetrate the two side surfaces of the correction seat, and form two first correction ports and two second correction ports on both sides respectively, the second correction port is used to connect and fix the nozzle head, and the first correction port is used to discharge the fluid, the flow rate monitoring component is arranged on the correction seat, and is used to monitor the flow rate of the fluid in the two fluid channels, and issue an alarm when the flow rate of the fluid in the two fluid channels is different.

2. The nozzle corrector according to claim 1, characterized in that: The correction seat includes an integrally arranged support portion, a transfer triangle portion and a top support portion, the support portion is arranged on one side edge of the base and extends upward, the top support portion is arranged at the top end of the support portion and is arranged at an angle to the support portion, the transfer triangle portion is arranged between the support portion and the top support portion, the two first correction ports are arranged on the surface of the top support portion, the two second correction ports are arranged on the surface of the transfer triangle portion, and the two fluid channels both pass through the transfer triangle portion and the top support portion.

3. The nozzle corrector according to claim 2, characterized in that: The top side surface of the supporting portion is parallel to the top side surface of the base.

4. The nozzle corrector according to claim 2, characterized in that: A line connecting the two first correction ports and a line connecting the two second correction ports are parallel to each other, and the two fluid channels are parallel to each other.

5. The nozzle corrector according to claim 2, characterized in that: The transition triangle portion has a mounting bevel, the two second correction openings are arranged on the mounting bevel, and two sides of the mounting bevel are respectively joined to the surface of the support portion and the surface of the top support portion.

6. The nozzle corrector according to claim 5, characterized in that: The included angle between the installation slope and the surface of the support portion is 45°.

7. The nozzle corrector according to claim 1, characterized in that: The flow rate monitoring component includes an indicator light and two flow rate monitors. The two flow rate monitors are respectively arranged in the two fluid channels for monitoring the flow rate of the fluid in the fluid channels. The indicator light is electrically connected to the two flow rate monitors at the same time.

8. The nozzle corrector according to claim 7, characterized in that: The indicator light is fitted on the side wall of the correction seat and is used to light up a red light when the flow rates of the fluids in the two fluid channels are different, and the indicator light is used to light up a green light when the flow rates of the fluids in the two fluid channels are the same.

9. The nozzle corrector according to any one of claims 1 to 8, characterized in that: The second correction port is provided with a positioning slot, and the positioning slot is used to hold the nozzle head.

10. A cleaning device, characterized in that: It comprises a cleaning mesh belt and a nozzle corrector as described in any one of claims 1 to 9, wherein a plurality of nozzle heads are provided on the cleaning mesh belt, the nozzle corrector is provided on the cleaning mesh belt, and the two second correction ports are used to connect and fix two of the nozzle heads.

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