Automatic degumming line for crystal support
By designing automatic glue removal lines of crystal retention, and using high-frequency heating and water spray air-drying components, the surface, side and corner glue removal of the crystal retention surface is achieved, solving the problems of high labor intensity, high cost and low efficiency of traditional manual glue removal, and achieving efficient and convenient automated production.
Patent Information
- Application Number
- CN202422097851.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-28
- Publication Date
- 2025-08-26
- Estimated Expiration
- 2034-08-28
AI Technical Summary
The traditional crystal retention process relies on manual operations, resulting in dirty and messy site, high labor intensity, uneven cleaning, high cost and low efficiency. The existing equipment occupies a large area, has high accuracy, and is cumbersome to operate, which extends the working cycle.
The automatic glue removal line of the crystal support is designed, including conveying rollers, heating, rinsing, air drying and glue removal mechanisms. It uses high-frequency heating coils, water spray components and air knife components, combined with the PLC control system to achieve automatic glue removal to ensure the complete removal of the surface, side and corner glue surfaces of the crystal support.
The automation of crystal retention and removal of grease has been achieved, which has reduced production costs, reduced operators, shortened working hours, improved production efficiency, simplified operating procedures, and reduced overall labor costs.
Smart Images

Figure CN223264369U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of crystal support glue removal in the photovoltaic industry, and relates to an automatic crystal support glue removal line. Background Art
[0002] Traditional wafer tray degumming involves manual degumming and degumming, resulting in a messy, labor-intensive, and often incomplete degumming process, uneven wafer tray surface cleaning, or secondary degumming. Existing wafer tray degumming equipment is expensive, occupies a large workshop area, requires high precision, and is cumbersome to operate. This increases overall work time and complexity, takes up a long time, prolongs the entire pre-processing cycle, reduces production efficiency, and increases overall labor costs. Utility Model Content
[0003] In order to overcome the shortcomings of the existing technology, the utility model provides an automatic crystal tray glue removal line, which has a small overall footprint, reduces production costs, reduces the number of operators, greatly shortens working time, improves overall work efficiency, and is easy to operate.
[0004] The above-mentioned purpose of the utility model is achieved through the following technical solutions:
[0005] The automatic degumming line for wafer trays includes a conveying roller mechanism, a heating mechanism, a glue board stacking mechanism, a washing box, and an air drying mechanism, which are arranged in sequence. A washing loading and unloading mechanism is arranged on one side of the washing box, and a degumming mechanism is arranged on the top of the washing box. The conveying roller mechanism runs through the heating mechanism, the glue board stacking mechanism, the washing box and the washing loading and unloading mechanism, and the air drying mechanism.
[0006] The conveyor roller mechanism includes a material conveyor roller, a heating zone conveyor roller, a material separation zone conveyor roller, a flushing zone conveyor roller, and an air-drying zone conveyor roller, which are arranged in sequence. Material-in-place sensors and switches for detecting the presence of material are provided on the material conveyor rollers, the heating zone conveyor rollers, the material separation zone conveyor rollers, the flushing zone conveyor rollers, and the air-drying zone conveyor rollers, and each is provided with a stop assembly, which includes a stop cylinder, which is arranged below the conveyor rollers. A stop limiter is provided at the front end of the cylinder rod of the stop cylinder. The stop limiter is arranged to be inserted into the roller gap of the conveyor rollers through the movement of the stop cylinder. The material conveyor rollers, the heating zone conveyor rollers, the material separation zone conveyor rollers, the flushing zone conveyor rollers, and the air-drying zone conveyor rollers are not limited in model, as long as they can achieve their working functions.
[0007] The heating mechanism is used to heat the materials, the viscose sheet stacking mechanism is used to remove the viscose sheets, the conveying roller mechanism is used to convey the materials, and the flushing and loading and unloading mechanism is used to load and unload the materials.
[0008] The heating mechanism includes a heating box, in which a high-frequency heating coil for heating materials is arranged. The high-frequency heating coil is arranged above the conveying roller mechanism. A smoke exhaust pipe is arranged above the high-frequency heating coil. A draft fan is arranged on the smoke exhaust pipe. The end of the smoke exhaust pipe is connected to the smoke exhaust port. The smoke exhaust port is arranged at the top of the heating box and connected to the external smoke exhaust pipeline; the high-frequency heating coil is externally connected to the high-frequency machine.
[0009] The high frequency machine is an existing device, which includes a high frequency main machine, a high frequency auxiliary machine, and a high frequency cooling machine. The high frequency main machine is connected to the high frequency auxiliary machine, and the high frequency main machine and the high frequency auxiliary machine are respectively connected to the high frequency cooling machine.
[0010] Heating zone conveying roller channel openings are also provided at the lower parts of both sides of the heating box body, and a detachable glue splicing box for gluing is also provided at the bottom of the heating box body.
[0011] The viscose board stacking mechanism includes a material storage trolley and a viscose board removing assembly. The viscose board removing assembly is arranged above the conveying roller in the material separation area. The material storage trolley is arranged on one side of the conveying roller in the material separation area. The viscose board removing assembly includes a walking group and a gripper for driving the gripper to move. The walking group is connected to the gripper and a buffer spring is provided at the connection. The gripper includes a removing clamp. The removing clamp is clamped and released by a removing cylinder. A gripper positioning part for positioning the viscose board is provided on the gripper.
[0012] The adhesive plate removing assembly comprises an adhesive plate removing frame, and the walking group is arranged on the adhesive plate removing frame.
[0013] The walking group includes an adhesive plate removing X-axis component and an adhesive plate removing Z-axis component; the adhesive plate removing X-axis component and the adhesive plate removing Z-axis component are connected through an X-axis slide plate.
[0014] The adhesive plate removal X-axis assembly includes a servo motor, the servo motor is connected to a servo module, and a servo module slide of the servo module is connected to an X-axis slide.
[0015] The adhesive plate removal Z-axis assembly includes an adhesive plate removal Z-axis cylinder, the front end of the cylinder rod of the adhesive plate removal Z-axis cylinder is connected to the adhesive plate removal Z-axis connecting piece, the adhesive plate removal Z-axis connecting piece is connected to the gripper vertical rod, the bottom of the gripper vertical rod is connected to the gripper, and the gripper vertical rod is connected to the X-axis slide through a linear guide rail and a slider.
[0016] The Z-axis cylinder for removing the adhesive plate is arranged on the X-axis slide. The Z-axis cylinder for removing the adhesive plate is equipped with a pressure reducing valve, which works when the pressure reducing valve is lowered.
[0017] The bottom of the grab handle vertical rod is connected to the grab handle connecting frame body, and two grab handles are arranged below the grab handle connecting frame body.
[0018] The gripper includes a gripper connecting plate and a clamping jaw connecting plate, which are connected by a buffer spring. The gripper connecting plate is connected to the bottom of the gripper connecting frame. The clamping jaw connecting plate is provided with a removal cylinder, and the two ends of the removal cylinder are respectively connected to the clamping jaws. A limit pressure piece is provided on the outer side of the clamping jaw. The clamping jaw connecting plate is provided with several gripper positioning members. Preferably, three gripper positioning members are provided.
[0019] A switch for detecting the presence of adhesive sheets is installed on the conveyor rollers in the material separation area. A splicing tray for splicing glue is installed at the bottom of the conveyor rollers in the material separation area. The splicing tray is tilted and connected to a splicing box at its end. The splicing box is detachably installed at the bottom of the conveyor rollers in the material separation area.
[0020] The storage trolley is used to store and transport the adhesive board. The bottom of the storage trolley is provided with a universal wheel, the body of the storage trolley is equipped with a handle, and the top surface of the storage trolley is provided with a shooting switch for detecting whether it is full of material.
[0021] The flushing box includes a flushing box body, an observation window for operators to observe is provided on one side of the flushing box body, and a box door for opening and closing is provided on the other side. A crystal tray placement position for placing the crystal tray is provided inside the flushing box body, a pull-out glue connection drawer is provided at the lower part of the flushing box body, a water connection box is provided below the glue connection drawer, and the water connection box is provided at the bottom of the flushing box body.
[0022] A drainage pipe is provided on the upper part of the water receiving tank to discharge relatively clean water for subsequent filtration and reuse.
[0023] A slag discharge port is also provided on one side of the water receiving box, the bottom of the slag discharge port is connected to a slag discharge pipe, and a slag discharge valve is provided on the slag discharge pipe.
[0024] The bottom surface of the glue-connecting drawer is a mesh structure, and the flushing water can fall into the water receiving box through the mesh. The glue-connecting drawer is set at an angle.
[0025] Sound insulation cotton is installed inside the flushing box.
[0026] The door is opened and closed by an opening and closing cylinder, the front end of the cylinder rod of the opening and closing cylinder is connected to the side of the door by a cylinder connector, and the opening and closing cylinder is fixed to the lower part of the outer wall of the flushing box. Preferably, two opening and closing cylinders are provided, and the two opening and closing cylinders are provided below the two sides of the door.
[0027] A flushing inspection door is also provided on the top of the flushing box, which is used for box maintenance.
[0028] The observation window is made of high-strength tempered glass to ensure personnel safety during the flushing process. The observation window is used to observe the flushing cleanliness in real time and quickly adjust the cleaning speed and position.
[0029] The flushing loading and unloading mechanism is arranged above the conveyor roller in the flushing area. The flushing loading and unloading mechanism includes a loading and unloading frame. The loading and unloading frame is provided with an X-axis assembly and a Z-axis assembly for driving the grabbing assembly to move. The Z-axis assembly includes a cylinder fixing plate. Two grabbing cylinders are provided on the cylinder fixing plate to drive the grabbing gripper to move up and down. The bottom of the grabbing cylinder is connected to the grabbing gripper, and the gripping claws of the grabbing gripper are clamped and grasped by the centering cylinder.
[0030] The loading and unloading frame is made of carbon steel.
[0031] The X-axis assembly includes an X-axis servo motor, the output end of the X-axis servo motor is connected to the gear, the gear and the rack are meshed, the X-axis servo motor is arranged on a horizontal slide, the bottom of the horizontal slide is connected to the Z-axis assembly, the rack is arranged on the inner side of the upper part of the loading and unloading rack, and the horizontal slide is connected to the top surface of the loading and unloading rack through a linear guide rail and a slider.
[0032] The Z-axis assembly includes a Z-axis connecting rod, a cylinder fixing plate, and a grabbing cylinder; the top surface of the Z-axis connecting rod is connected to the horizontal slide, the bottom surface of the Z-axis connecting rod is connected to the cylinder fixing plate, and the grabbing cylinder is arranged on the cylinder fixing plate.
[0033] The front end of the cylinder rod of the grabbing cylinder is connected to the clamping claw fixing plate through a cylinder connecting piece, and a cylinder limiting buffer piece for limiting the grabbing cylinder is provided on the clamping claw fixing plate.
[0034] A gripper is provided on the clamp fixing plate; the gripper comprises two clamps and a centering cylinder, with one clamp connected to each end of the centering cylinder. A guide is also provided at the bottom of the clamp.
[0035] A lap frame is further provided at one end of the loading and unloading frame, and the lap frame is used to be fixed on the top surface of the flushing box to realize a fixed connection.
[0036] The glue removal mechanism includes a glue removal frame, a water spray assembly is arranged on the glue removal frame, and a walking and rotating group for driving the water spray assembly to move and rotate is also arranged on the glue removal frame. The bottom of the walking and rotating group is connected to the water spray assembly. The water spray assembly includes a main nozzle and a branch nozzle. The bottom side of the main nozzle is connected to the branch nozzle. The bottom of the main nozzle is connected to several top surface nozzles, and the end of the branch nozzle is connected to the end surface nozzle. The plane where the top surface nozzle is located and the plane where the end surface nozzle is located are perpendicular to each other.
[0037] Preferably, three top surface nozzles are provided, and the bottoms of the three top surface nozzles are located at the same height, wherein two top surface nozzles are provided in parallel, another top surface nozzle is provided in the middle area behind the two top surface nozzles, and the end surface nozzle is provided behind the separately provided top surface nozzle.
[0038] The water spray assembly is externally connected to a high-pressure water tank. The main nozzle of the water spray assembly is connected to the high-pressure water tank through a water inlet and a hose, and a solenoid valve is provided on the hose.
[0039] The glue removal frame is made of carbon steel.
[0040] The walking rotation group includes a glue removal X-axis assembly, a glue removal Y-axis assembly, and a glue removal R-axis assembly. The glue removal Y-axis assembly and the glue removal R-axis assembly are arranged on the glue removal X-axis sliding bracket of the glue removal X-axis assembly. The glue removal X-axis assembly includes a servo motor. The gear at the output end of the servo motor is engaged with the rack. The rack is arranged on the glue removal frame. The servo motor is fixed on the glue removal X-axis sliding bracket. The glue removal X-axis sliding bracket is connected to the top surface of the glue removal frame through a linear guide rail and a slider.
[0041] The glue removal Y-axis assembly includes a servo motor and a glue removal Y-axis slide. The servo motor is arranged on the glue removal Y-axis slide. The gear at the output end of the servo motor is meshed with the rack. The rack is arranged on the glue removal X-axis sliding bracket. The glue removal Y-axis slide is connected to the top surface of the X-axis sliding bracket through a linear guide rail and a slider.
[0042] The glue removing R-axis assembly comprises an R-axis rotating servo motor, and the output end of the R-axis rotating servo motor is connected and fixed to the main nozzle in the water spray assembly through a shaft sleeve.
[0043] The R-axis rotation servo motor is set on the glue removal Y-axis slide.
[0044] The glue removal mechanism is arranged above the flushing box. The top surface of the flushing box body is provided with a groove for the water spray assembly to penetrate into the flushing box, and an accordion shield is provided at the connection between the main nozzle in the water spray assembly and the flushing tank.
[0045] The air-drying mechanism includes an air-drying frame, which is arranged above the conveying roller in the air-drying area. A top air knife assembly for air-drying the top surface of the crystal tray is arranged on the upper part of the air-drying frame, and side air knife assemblies for air-drying the side surfaces of the crystal tray are arranged on each side of the air-drying frame. A bottom air knife assembly for air-drying the bottom surface of the crystal tray is arranged below the air-drying frame, and a protective inspection door is arranged on the top surface of the air-drying frame.
[0046] An inspection window is provided on the protective inspection door.
[0047] The top surface air knife, bottom surface air knife and side surface air knife are respectively connected to the compressed air pipeline, and the electromagnetic valve is arranged on the compressed air pipeline.
[0048] The side air knife assembly includes a plurality of top air knives, which are fixed to the air drying frame through air knife fixing seats. The plurality of top air knives are arranged in parallel and equidistantly, and preferably three top air knives are arranged.
[0049] The side air knife assembly includes a plurality of side air knives, which are fixed to the air drying frame through air knife fixing seats. The plurality of side air knives are arranged in parallel and equidistantly, and preferably two side air knives are arranged on each side.
[0050] The bottom of the air-drying frame is arranged on the air-drying base. A seam-riding switch is also arranged on the air-drying frame.
[0051] The bottom air knife assembly is arranged on the air drying base. The bottom air knife assembly includes a bottom air knife, which is arranged at the angle of the upper part of the air drying frame. Preferably, one bottom air knife is provided.
[0052] The air-drying frame and air-drying base are both made of aluminum profiles.
[0053] The automatic degumming line for crystal trays is also equipped with a PLC control system. The high-frequency heating coil, high-frequency main machine, high-frequency auxiliary machine, high-frequency cooling machine, switch for detecting the presence of adhesive board, shooting switch, Z-axis cylinder for removing adhesive board, opening and closing cylinder, top air knife, bottom air knife, side air knife, grabbing cylinder, X-axis servo motor, cylinder limit buffer, top nozzle, end nozzle, material conveying roller, heating zone conveying roller, material separation zone conveying roller, flushing zone conveying roller, air drying zone conveying roller, material in place sensor, switch for detecting the presence of material, stop cylinder, induced draft fan, high-frequency machine, removing cylinder, servo motor, servo module, pressure reducing valve, slag discharge valve, grabbing cylinder, centering cylinder, water spray assembly, solenoid valve, high-pressure water tank, seam switch, and R-axis rotation servo motor are respectively connected to the PLC control system. There is no restriction on the specific model, as long as it can work.
[0054] The top of the crystal tray that needs to be cleaned is made of a plastic adhesive plate when it is transported to the heating mechanism. After removing the adhesive plate, the remaining adhesive surfaces on the crystal tray include the top adhesive surface of the top surface, the side adhesive surfaces of the sides, and the corner adhesive surfaces of the four corners.
[0055] The heating mechanism heats the upper surface of the wafer tray through the adhesive sheet, inactivating the adhesive through heating, allowing the wafer tray and adhesive sheet to separate naturally. The material conveyor roller conveys the adhesive sheet and wafer tray to the conveyor rollers in the heating zone. Once in place, the high-frequency machine is turned on, the high-frequency heating coil heats up, and the induced draft fan operates, removing smoke through the exhaust duct. The wafer tray is conveyed normally on the conveyor rollers in the heating zone. Once in place, the wafer tray adhesive sheet automatically separates.
[0056] The adhesive sheet stacking mechanism is used to grab the separated adhesive sheets and stack them on the storage trolley. The remaining crystal trays and stacked adhesive sheets are transferred to the next process respectively.
[0057] The flushing box is used to place the crystal tray and provide a flushing place for degumming work. The box door and high-strength tempered glass observation window are set to ensure the safety of personnel during the flushing process; the degumming mechanism is placed on the top of the flushing box to complete the degumming action together with the flushing box; the flushing box has a double-layer structure with sound insulation cotton in the middle to reduce impact noise. The glue drawer is used to receive waste glue, and the slag discharge port is used to clean glue particles and silicon mud.
[0058] The degumming mechanism is equipped with a walking and rotating group: the degumming X-axis component and the degumming Y-axis component drive the water spray component to move in the length and width directions of the crystal tray, and the degumming R-axis component rotates the corresponding end nozzle to the corresponding angle. The cooperation of the walking and rotating group ensures that all the glue surfaces of the crystal tray can be seamlessly spliced with the flushing trajectory; the main nozzle is divided into four nozzles, two of which are arranged in parallel, and the other top nozzle is just behind the center line of the two top nozzles. There is also an end nozzle arranged at 90 degrees to the main nozzle.
[0059] The air drying mechanism uses the conveying roller in the air drying area as the conveying medium. When it is transported to the front end of the air drying mechanism station, the air drying starts, and the air knife blows compressed air to the outer surface of the crystal tray for air drying. When the crystal tray passes through this air drying mechanism station, there will be a seam switch detection to turn off the air supply switch of the air knife, and the clean crystal tray is transported to the next station for reuse.
[0060] The beneficial effects of the present invention compared with the prior art are:
[0061] The utility model provides an automatic crystal tray glue removal line, which includes surface glue removal, side glue removal and four-corner glue removal of the crystal tray. The utility model realizes the reuse of the crystal tray after the crystal tray glue is removed.
[0062] The automatic crystal tray glue removal line provided by the utility model solves the problems of the existing glue removal equipment that requires processes such as scraping glue and polishing in actual operation, which leads to increased costs, cumbersome debugging, and inconvenient operation. Compared with the existing glue removal equipment, the automatic crystal tray glue removal line provided by the utility model is easy to install, saves debugging time, has lower costs, is more convenient to operate, saves work rhythm, and reduces overall production costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0063] Figure 1 This is the main view of the automatic glue removal line for crystal trays of the utility model.
[0064] Figure 2 It is a top view of the automatic glue removal line for crystal trays of the present invention.
[0065] Figure 3 It is a three-dimensional diagram of the automatic glue removal line for crystal trays of the present invention.
[0066] Figure 4 Schematic diagram of the adhesive surface of the wafer tray. Figure (a) is the front view of the wafer tray with adhesive, Figure (b) is the side view of the wafer tray with adhesive, and Figure (c) is the top view of the wafer tray with adhesive.
[0067] Figure 5 This is a schematic diagram of the sequence for removing glue from the crystal tray.
[0068] Figure 6 It is a three-dimensional diagram of the heating mechanism.
[0069] Figure 7 It is a side view of the adhesive board stacking mechanism.
[0070] Figure 8 It is the main view of the adhesive board stacking mechanism.
[0071] Figure 9 It is a top view of the adhesive board stacking mechanism.
[0072] Figure 10 It is a three-dimensional diagram of the adhesive board stacking mechanism.
[0073] Figure 11 This is the front view of the flushing tank.
[0074] Figure 12 It is a cross-sectional view of a side view of the flushing tank.
[0075] Figure 13 This is a top view of the flushing tank.
[0076] Figure 14 It is a three-dimensional diagram of the flushing tank.
[0077] Figure 15 It is a side view of the flushing loading and unloading mechanism.
[0078] Figure 16 It is a three-dimensional diagram of the flushing loading and unloading mechanism.
[0079] Figure 17 It is a three-dimensional diagram of the glue removal mechanism.
[0080] Figure 18 It is a side view of the glue removal mechanism.
[0081] Figure 19 It is a top view of the glue removal mechanism.
[0082] Figure 20 It is a three-dimensional diagram of the air-drying mechanism.
[0083] Figure 21 It is a top view of the air-drying mechanism.
[0084] Figure 22 It is the main view of the air-drying mechanism.
[0085] Figure 23 It is a side view of the air-drying mechanism.
[0086] In the figure: 1. Heating mechanism, 2. Glue board stacking mechanism, 3. Flushing box, 4. Air drying mechanism, 5. Conveyor roller mechanism, 6. Flushing loading and unloading mechanism, 7. Glue removal mechanism, 8. Crystal tray, 101. Heating box, 102. High-frequency heating coil, 103. Conveyor roller channel opening in the heating zone, 104. Smoke exhaust port, 105. High-frequency main unit, 106. High-frequency auxiliary unit, 107. High-frequency cooling machine, 201. Storage trolley, 202. Conveyor roller in the material separation zone, 203. Glue board removal rack, 20 4. Gripper, 205. X-axis assembly for adhesive board removal, 206. Z-axis assembly for adhesive board removal, 207. Switch for detecting the presence of adhesive boards, 208. Opposing switch, 209. X-axis slide, 210. Z-axis cylinder for adhesive board removal, 211. Z-axis connector for adhesive board removal, 212. Gripper positioning member, 213. Buffer spring, 214. Glue splicing box, 301. Box door, 302. Opening and closing cylinder, 303. Crystal support placement position, 304. Flushing inspection door, 305. Observation window, 306. Glue splicing drawer , 307. Slag discharge port, 308. Drain pipe, 309. Flushing box, 310. Water receiving tank, 311. Slag discharge pipe, 401. Air drying base, 402. Air drying frame, 403. Inspection window, 404. Protective maintenance door, 405. Top air knife, 406. Bottom air knife, 407. Side air knife, 601. Loading and unloading frame, 602. X-axis assembly, 603. Z-axis assembly, 604. Grabbing cylinder B, 605. Grabbing cylinder A, 606. Grabbing gripper A, 607. Grabbing gripper B , 608. X-axis servo motor, 609. Overlap frame, 610. Gripper, 611. Cylinder limit buffer, 612. Cylinder fixing plate, 701. Glue removal X-axis assembly, 702. Glue removal Y-axis assembly, 703. Glue removal R-axis assembly, 704. Glue removal frame, 705. Main nozzle, 706. Branch nozzle, 707, water inlet, 708. Top nozzle, 709. End nozzle, 801. Top glue surface, 802. Side glue surface, 803. Corner glue surface, 804. Glue removal starting position. DETAILED DESCRIPTION
[0087] The present invention is described in detail below by means of specific examples, but the scope of protection of the present invention is not limited. Unless otherwise specified, the experimental methods used in the present invention are conventional methods, and the experimental equipment, materials, reagents, etc. used can be obtained from commercial channels.
[0088] Example 1
[0089] Automatic glue removal line for crystal tray, such as Figure 1-Figure 23As shown, the conveyor roller mechanism 5, the heating mechanism 1, the adhesive plate stacking mechanism 2, the washing box 3, and the air-drying mechanism 4 are arranged in sequence. A washing and loading and unloading mechanism 6 is arranged on one side of the washing box 3, and a glue removal mechanism 7 is arranged on the top of the washing box 3. The conveyor roller mechanism 5 passes through the heating mechanism 1, the adhesive plate stacking mechanism 2, the washing box 3 and the washing and loading and unloading mechanism 6, and the air-drying mechanism 4.
[0090] The conveying roller mechanism 5 includes a material conveying roller, a heating zone conveying roller, a material separation zone conveying roller 202, a flushing zone conveying roller, and an air-drying zone conveying roller, which are arranged in sequence. The material conveying roller, the heating zone conveying roller, the material separation zone conveying roller 202, the flushing zone conveying roller, and the air-drying zone conveying roller are all provided with a material arrival sensor and a switch for detecting the presence of material, and are all provided with a stop assembly, which includes a stop cylinder, which is arranged below the conveying roller, and a stop limiter is arranged at the front end of the cylinder rod of the stop cylinder, and the stop limiter is arranged to be inserted into the roller gap of the conveying roller by the movement of the stop cylinder. The material conveying roller, the heating zone conveying roller, the material separation zone conveying roller 202, the flushing zone conveying roller, and the air-drying zone conveying roller are not limited in model, as long as they can achieve their working functions.
[0091] The heating mechanism 1 is used for heating materials, the adhesive sheet stacking mechanism 2 is used for removing adhesive sheets, the conveying roller mechanism 5 is used for conveying and transferring materials, and the flushing and loading and unloading mechanism 6 is used for loading and unloading materials.
[0092] The heating mechanism 1 includes a heating box 101, in which a high-frequency heating coil 102 for heating materials is arranged. The high-frequency heating coil 102 is arranged above the conveying roller mechanism 5. A smoke exhaust pipe is arranged above the high-frequency heating coil 102, and a draft fan is arranged on the smoke exhaust pipe. The end of the smoke exhaust pipe is connected to the smoke exhaust port 104, and the smoke exhaust port 104 is arranged at the top of the heating box 101 and connected to the external smoke exhaust pipeline; the high-frequency heating coil 102 is externally connected to a high-frequency machine.
[0093] The high-frequency machine is an existing device, which includes a high-frequency main machine 105, a high-frequency auxiliary machine 106, and a high-frequency cooling machine 107. The high-frequency main machine 105 is connected to the high-frequency auxiliary machine 106, and the high-frequency main machine 105 and the high-frequency auxiliary machine 106 are respectively connected to the high-frequency cooling machine 107. There is no restriction on the model, as long as the working function is achieved.
[0094] Heating zone conveying roller channel openings 103 are further provided at the lower parts of both sides of the heating box body 101 , and a detachable glue splicing box for gluing is further provided at the bottom of the heating box body 101 .
[0095] The adhesive sheet stacking mechanism 2 includes a material storage trolley 201 and an adhesive sheet removal assembly. The adhesive sheet removal assembly is arranged above the conveyor roller 202 in the material separation area. The material storage trolley 201 is arranged on one side of the conveyor roller 202 in the material separation area. The adhesive sheet removal assembly includes a walking group for driving a gripper 204 to move, and the gripper 204. The walking group is connected to the gripper 204 and a buffer spring 213 is provided at the connection. The gripper 204 includes a removal clamping claw, which is clamped and released by a removal cylinder. The gripper is provided with a gripper positioning member 212 for positioning the adhesive sheet. Because the adhesive sheet is made of plastic, it has a curved arc shape after heating and debonding, which makes it difficult to grasp and position.
[0096] The adhesive plate removing assembly includes an adhesive plate removing frame 203 , and the walking group is arranged on the adhesive plate removing frame 203 .
[0097] The walking group includes an adhesive plate removing X-axis component 205 and an adhesive plate removing Z-axis component 206 ; the adhesive plate removing X-axis component 205 and the adhesive plate removing Z-axis component 206 are connected via an X-axis slide 209 .
[0098] The adhesive plate removal X-axis assembly 205 includes a servo motor, the servo motor is connected to a servo module, and the servo module slide of the servo module is connected to the X-axis slide 209.
[0099] The adhesive plate removal Z-axis assembly 206 includes an adhesive plate removal Z-axis cylinder 210, the front end of the cylinder rod of the adhesive plate removal Z-axis cylinder 210 is connected to the adhesive plate removal Z-axis connecting piece 211, the adhesive plate removal Z-axis connecting piece 211 is connected to the gripper vertical rod, the bottom of the gripper vertical rod is connected to the gripper 204, and the gripper vertical rod is connected to the X-axis slide 209 through a linear guide rail and a slider.
[0100] The adhesive plate removal Z-axis cylinder 210 is set on the X-axis slide 209. The adhesive plate removal Z-axis cylinder 210 is equipped with a pressure reducing valve, which works when it descends.
[0101] The bottom of the gripper vertical rod is connected to the gripper connecting frame, and two grippers 204 are arranged below the gripper connecting frame.
[0102] The gripper 204 includes a gripper connecting plate and a clamping jaw connecting plate, which are connected by a buffer spring 213. The gripper connecting plate is connected to the bottom of the gripper connecting frame. The clamping jaw connecting plate is provided with a removal cylinder, and the two ends of the removal cylinder are respectively connected to the clamping jaws. A limit pressure piece is provided on the outer side of the clamping jaw. The clamping jaw connecting plate is provided with a plurality of gripper positioning members 212. Preferably, three gripper positioning members 212 are provided.
[0103] A switch 207 for detecting the presence of adhesive sheets is provided on the conveyor roller 202 in the material separation area. A splicing tray for splicing glue is provided below the conveyor roller 202 in the material separation area. The splicing tray is tilted and connected to a splicing box 214 at its end. The splicing box 214 is detachably provided below the conveyor roller 202 in the material separation area.
[0104] The storage trolley 201 is used to store and transport the adhesive board. The bottom of the storage trolley 201 is provided with universal wheels, the body of the storage trolley 201 is provided with a handle, and the top surface of the storage trolley 201 is provided with a shooting switch 208 for detecting whether it is full of material.
[0105] The flushing box 3 includes a flushing box body 309, an observation window 305 for observation by the operator is provided on one side of the flushing box body 309, and a box door 301 for opening and closing is provided on the other side. A crystal holder placement position 303 for placing the crystal holder 8 is provided inside the flushing box 3, and a pull-out glue-connecting drawer 306 is provided at the lower part of the flushing box body 3. A water-connecting box 310 is provided below the glue-connecting drawer 306, and the water-connecting box 310 is provided at the bottom of the flushing box body 309.
[0106] A drain pipe 308 is provided on the upper portion of the water receiving box 310 for draining relatively clean water for subsequent filtration and reuse.
[0107] A slag discharge port 307 is further provided on one side of the water receiving box 310 . The bottom of the slag discharge port 307 is connected to a slag discharge pipe 311 , and a slag discharge valve is provided on the slag discharge pipe 311 .
[0108] The bottom surface of the glue-connecting drawer 306 is a mesh structure, and the flushing water can fall into the water receiving box 310 through the mesh. The glue-connecting drawer 306 is set at an angle.
[0109] Sound insulation cotton is arranged inside the flushing box 309 .
[0110] The door 301 is opened and closed by an opening and closing cylinder 302. The front end of the cylinder rod of the opening and closing cylinder 302 is connected to the side of the door 301 through a cylinder connector. The opening and closing cylinder 302 is fixed to the lower part of the outer wall of the flushing box 309. Preferably, two opening and closing cylinders 302 are provided, and the two opening and closing cylinders 302 are provided below the two sides of the door 301.
[0111] Flushing box 309 tops are also provided with a flushing inspection door 304. Flushing inspection door 304 is used for flushing box 309 inspections.
[0112] Observation window 305 is made of high-strength tempered glass to ensure personnel safety during the flushing process. Observation window 305 is used to observe the flushing cleanliness in real time and quickly adjust the cleaning speed and position.
[0113] The flushing loading and unloading mechanism 6 is arranged above the conveying roller in the flushing area. The flushing loading and unloading mechanism 6 includes a loading and unloading frame 601. The loading and unloading frame 601 is provided with an X-axis assembly 602 and a Z-axis assembly 603 for driving the grabbing assembly to move. The Z-axis assembly 603 includes a cylinder fixing plate 612. Two grabbing cylinders are provided on the cylinder fixing plate 612 to drive the grabbing gripper to move up and down. The bottom of the grabbing cylinder is connected to the grabbing gripper, and the gripping claw 610 of the grabbing gripper is clamped and grasped by the centering cylinder.
[0114] The X-axis assembly 602 includes an X-axis servo motor 608, the output end of the X-axis servo motor 608 is connected to the gear, the gear and the rack are meshed, the X-axis servo motor 608 is set on a horizontal slide, the bottom of the horizontal slide is connected to the Z-axis assembly 603, the rack is set on the inner side of the upper part of the loading and unloading rack 601, and the horizontal slide is connected to the top surface of the loading and unloading rack 601 through a linear guide rail and a slider.
[0115] The Z-axis assembly 603 includes a Z-axis connecting rod, a cylinder fixing plate 612, and a grabbing cylinder; the top surface of the Z-axis connecting rod is connected to the horizontal slide, the bottom surface of the Z-axis connecting rod is connected to the cylinder fixing plate 612, and the grabbing cylinder is set on the cylinder fixing plate 612.
[0116] The front end of the cylinder rod of the grabbing cylinder is connected to the clamping claw fixing plate through a cylinder connecting piece, and a cylinder limiting buffer 611 for limiting the grabbing cylinder is provided on the clamping claw fixing plate.
[0117] The gripper includes two grippers 610 and a centering cylinder, with one gripper 610 connected to each end of the centering cylinder. A guide is also provided at the bottom of the gripper 610.
[0118] A lapped frame 609 is further provided at one end of the loading and unloading frame 601 , and the lapped frame 609 is used to be fixed on the top surface of the flushing box 3 to achieve a fixed connection.
[0119] The degumming mechanism 7 includes a degumming frame 704, on which a water spray assembly is arranged. The degumming frame 704 is also provided with a walking and rotating group for driving the water spray assembly to walk and rotate. The bottom of the walking and rotating group is connected to the water spray assembly. The water spray assembly includes a main nozzle 705 and a branch nozzle 706. The bottom side of the main nozzle 705 is connected to the branch nozzle 706. The bottom of the main nozzle 705 is connected to several top surface nozzles 708. The end of the branch nozzle 706 is connected to the end surface nozzle 709. The plane where the top surface nozzle 708 is located and the plane where the end surface nozzle 709 are located are perpendicular to each other.
[0120] Three top surface nozzles 708 are preferably provided, and the bottoms of the three top surface nozzles 708 are located at the same height, two of which are arranged in parallel, and another top surface nozzle 708 is arranged in the middle area behind the two top surface nozzles 708, and the end surface nozzle 709 is arranged behind the separately arranged top surface nozzle 708.
[0121] The water spray assembly is externally connected to a high-pressure water tank. The main nozzle 705 of the water spray assembly is connected to the high-pressure water tank through a water inlet 707 and a hose, and a solenoid valve is provided on the hose.
[0122] The walking rotation group includes a glue removal X-axis assembly 701, a glue removal Y-axis assembly 702, and a glue removal R-axis assembly 703. The glue removal Y-axis assembly 702 and the glue removal R-axis assembly 703 are arranged on the glue removal X-axis sliding bracket of the glue removal X-axis assembly 701. The glue removal X-axis assembly 701 includes a servo motor. The gear at the output end of the servo motor is engaged with the rack. The rack is arranged on the glue removal frame 704. The servo motor is fixed on the glue removal X-axis sliding bracket. The glue removal X-axis sliding bracket is connected to the top surface of the glue removal frame 704 through a linear guide rail and a slider.
[0123] The degumming Y-axis assembly 702 includes a servo motor and a degumming Y-axis slide. The servo motor is arranged on the degumming Y-axis slide. The gear at the output end of the servo motor is meshed with the rack. The rack is arranged on the degumming X-axis sliding bracket. The degumming Y-axis slide is connected to the top surface of the X-axis sliding bracket through a linear guide rail and a slider.
[0124] The glue removing R-axis assembly 703 includes an R-axis rotating servo motor, and the output end of the R-axis rotating servo motor is connected and fixed to the main nozzle 705 in the water spray assembly through a shaft sleeve.
[0125] The R-axis rotation servo motor is set on the glue removal Y-axis slide.
[0126] The glue removal mechanism 7 is arranged above the flushing box 3. The top surface of the flushing box body 309 of the flushing box 3 is provided with a groove for the water spray component to penetrate into the flushing box 3, and an accordion shield is provided at the connection between the main nozzle 705 in the water spray component and the flushing box 3.
[0127] The air-drying mechanism 4 includes an air-drying frame 402, which is arranged above the conveying roller in the air-drying area. A top air knife assembly for air-drying the top surface of the crystal tray 8 is arranged on the upper part of the air-drying frame 402, and side air knife assemblies for air-drying the side surfaces of the crystal tray 8 are arranged on the sides of the air-drying frame 402. A bottom air knife assembly for air-drying the bottom surface of the crystal tray 8 is arranged below the air-drying frame 402, and a protective inspection door 404 is arranged on the top surface of the air-drying frame 402.
[0128] An inspection window 403 is provided on the protective inspection door 404 .
[0129] The side wind knife assembly includes a plurality of top wind knives 405, and the top wind knives 405 are fixed on the air drying frame 402 through wind knife fixing seats. A plurality of top wind knives 405 are arranged in parallel and equidistantly, and preferably three top wind knives 405 are arranged.
[0130] The side air knife assembly includes a plurality of side air knives 406, which are fixed to the air drying frame 402 through air knife fixing seats. The plurality of side air knives 406 are arranged in parallel and equidistantly, and preferably two side air knives 406 are arranged on each side.
[0131] The bottom of the air-drying frame 402 is arranged on the air-drying base 401 .
[0132] The bottom air knife assembly is arranged on the air drying base 401. The bottom air knife assembly includes a bottom air knife 407, which is arranged at the angle of the upper part of the air drying base 401. Preferably, one bottom air knife 407 is provided.
[0133] The top air knife 405 , the bottom air knife 406 , and the side air knife 407 are respectively connected to compressed air pipelines, and electromagnetic valves are provided on the compressed air pipelines.
[0134] The automatic debonding line for wafer trays is also equipped with a PLC control system, including the high-frequency heating coil 102, high-frequency main unit 105, high-frequency auxiliary unit 106, high-frequency cooling machine 107, switch 207 for detecting the presence of adhesive sheets, shooting switch 208, Z-axis cylinder 210 for removing adhesive sheets, opening and closing cylinder 302, top air knife 405, bottom air knife 406, side air knife 407, grabbing cylinder, X-axis servo motor 608, cylinder limit buffer 611, top nozzle 708, end nozzle 70 9. Material conveying rollers, heating zone conveying rollers, material separation zone conveying rollers 202, washing zone conveying rollers, air drying zone conveying rollers, material in-place sensors, material presence detection switches, stop cylinders, induced draft fans, high-frequency machines, transfer cylinders, servo motors, servo modules, pressure reducing valves, slag discharge valves, grabbing cylinders, centering cylinders, water spraying components, solenoid valves, high-pressure water tanks, and R-axis rotating servo motors are connected to the PLC control system respectively. There is no limit on the specific model, as long as it can work.
[0135] The top of the crystal tray 8 that needs to be cleaned in the present invention is made of a plastic adhesive plate when it is transported to the heating mechanism 1. After removing the adhesive plate, the remaining adhesive surfaces on the crystal tray 8 include the top adhesive surface 801 of the top surface, the side adhesive surfaces 802 of the side surfaces, and the corner adhesive surfaces 803 of the four corners.
[0136] During specific operation, the crystal tray 8 material with the adhesive sheet is transported to the heating zone conveying roller in the heating box 101 in the heating mechanism 1 through the material conveying roller in the conveying roller mechanism 5. The high-frequency heating coil 102 is turned on for heating, and the crystal tray 8 is heated while being transported (the glue between the crystal tray 8 and the adhesive sheet can be automatically invalidated by heating) to achieve automatic separation of the adhesive sheet and the crystal tray 8, until it is transported to the stop position on the conveying roller in the heating zone. The crystal tray 8 is completely heated in the length direction, and the high-frequency heating is completed; the stop position The stop limiter falls and is transported to the next station. The material separation area conveyor roller 202 on the adhesive board stacking mechanism 2 stops the crystal support 8. The adhesive board removal Z-axis assembly 206 on the adhesive board stacking mechanism 2 drops into place. The gripper 204 clamps the adhesive board. The adhesive board removal Z-axis assembly 206 rises. The adhesive board removal X-axis assembly 205 moves the adhesive board to the top of the storage trolley 201. The adhesive board removal Z-axis assembly 206 drops into place. The gripper 204 clamps the adhesive board. 4 is released, and the adhesive sheet falls into the material slot of the storage trolley 201 (which can be set as needed). The adhesive sheets are placed one after another in this way. When the storage trolley 201 is full of materials, the shooting switch 208 feedbacks a signal, and the storage trolley 201 is manually pushed away for processing; after the adhesive sheet removal Z-axis assembly 206 rises to its position, the stop limiter on the material separation area conveyor roller 202 falls, and the material separation area conveyor roller 202 starts to send the crystal tray 8 to the washing area conveyor roller for washing and degumming. The stop limiter on the feeding roller stops the crystal holder 8, and the two grabbing cylinders on the flushing loading and unloading mechanism 6 that drive the grabbing grippers to move up and down are grabbing gripper A606, grabbing gripper B607, grabbing cylinder A605, and grabbing cylinder B604; grabbing cylinder A605 is connected to grabbing gripper A606, grabbing cylinder B604 is connected to grabbing gripper B607, grabbing gripper A606 and grabbing gripper B607 are arranged side by side, and grabbing gripper A606 is arranged on the outside of grabbing gripper B607;Driven by the X-axis assembly 602, the grabbing gripper A606 moves to the conveying roller of the rinsing area to pick up the un-debonded wafer tray 8. The grabbing cylinder A605 descends, and the centering cylinder drives the gripping gripper A606's claws to clamp the wafer tray 8. The grabbing cylinder A605 rises with the wafer tray 8, and the stop limiter on the conveying roller of the rinsing area falls. The door 301 of the rinsing box 3 opens, and the grabbing cylinder A605 places the wafer tray 8 in the wafer tray placement position driven by the walking group. Driven by the walking group, the grabbing gripper A606 leaves the rinsing box and resets. The door 301 of the rinsing box 3 closes, and preparations are made for high-pressure rinsing of the wafer tray 8. Preparation work, the degumming mechanism 7 starts working, the high-pressure water pump in the high-pressure water tank starts working, the top nozzle 708 and the end nozzle 709 start working, the top nozzle 708 and the end nozzle 709 are two-hole rotating flushing high-pressure nozzles, which can cover a 50mm flushing and degumming area, and the degumming surface of the crystal tray 8 to be degummed is flushed and degummed. The flushing divides the crystal tray 8 into two areas for flushing. The flushing order is to clean the 90-degree angle of the starting end of the crystal tray 8, the side of the crystal tray 8 in the first area, the top surface of the crystal tray 8 in the first area, another 90-degree angle in the first area, the 90-degree angle in the second area, and the side of the crystal tray 8 in the second area. , another 90-degree angle in the second zone, after all surfaces are debonded, the high-pressure water pump stops supplying water, the debonding mechanism 7 drives the water spray assembly to return to the initial position, the door 301 of the flushing box 3 is opened, and the flushing box 3 is loaded and unloaded again; the grabbing gripper A606 on the flushing loading and unloading mechanism 6 carries the uncleaned wafer support 8 into the cleaning box, and the grabbing gripper B607 on the flushing loading and unloading mechanism 6 grabs the cleaned wafer support 8. After the grabbing gripper B607 grabs the cleaned wafer support 8, the X-axis assembly 602 on the flushing loading and unloading mechanism 6 drives the Z-axis assembly 603 to move backward as a whole, and the grabbing gripper A606 is moved backward. 06 The unwashed wafer tray 8 is placed in the wafer tray placement position. The grabber A606, driven by the walking group, leaves the rinsing box and resets. The door 301 of the rinsing box 3 closes, and the next cleaning process begins. The cleaned wafer tray 8 is placed on the rinsing area conveyor roller by the grabber B607. From the rinsing area conveyor roller, it is conveyed to the air-drying area conveyor roller for air-drying. Air-drying uses a fixed air knife and compressed air to dry the top, bottom, left, and right sides of the wafer tray 8. After passing through the air-drying mechanism 4 station, the wafer tray 8 is a clean wafer tray 8 and will be transferred to the next process for reuse.
[0137] The drain pipe 308 of the flushing tank 3 is connected to the sedimentation tank below the workshop via a pipe. After three layers of sedimentation and filtration, the wastewater is converted into clean water, which is then fed into the high-pressure water pump for repeated flushing. Furthermore, the heating box 101 door, the flushing tank 3 sidewalls, and the air-drying mechanism 4 are all fitted with transparent plexiglass, allowing for immediate inspection of material status and adjustment of equipment parameters. The flushing tank 3 glass is constructed of high-strength tempered glass to prevent injury from high-pressure water splashes.
[0138] The above-described embodiments are only preferred embodiments of the present invention, and are not intended to be all feasible embodiments of the present invention. For those skilled in the art, any obvious modifications made thereto without departing from the principles and spirit of the present invention should be considered to be within the scope of protection of the claims of the present invention.
Claims
1. A crystal support automatic glue removal line, characterized by: The invention comprises a conveying roller mechanism (5), a heating mechanism (1), a glue board stacking mechanism (2), a washing box (3), and an air drying mechanism (4) which are sequentially arranged; a washing loading and unloading mechanism (6) is arranged on one side of the washing box (3); a glue removal mechanism (7) is arranged on the top of the washing box (3); the conveying roller mechanism (5) passes through the heating mechanism (1), the glue board stacking mechanism (2), the washing box (3) and the washing loading and unloading mechanism (6), and the air drying mechanism (4).
2. The automatic adhesive removal line for wafer support according to claim 1, characterized in that: The heating mechanism (1) is used for heating materials, the adhesive plate stacking mechanism (2) is used for removing adhesive plates, the conveying roller mechanism (5) is used for conveying and transferring materials, and the flushing and loading and unloading mechanism (6) is used for loading and unloading materials.
3. The automatic adhesive removal line for wafer support according to claim 1, characterized in that: The conveying roller mechanism (5) comprises a material conveying roller, a heating zone conveying roller, a material separation zone conveying roller (202), a flushing zone conveying roller, and an air-drying zone conveying roller, which are arranged in sequence.
4. The automatic adhesive removal line for wafer trays according to claim 1, characterized in that: The heating mechanism (1) comprises a heating box (101), a high-frequency heating coil (102) for heating materials is arranged in the heating box (101), the high-frequency heating coil (102) is arranged above the conveying roller mechanism (5), a smoke exhaust pipe is arranged above the high-frequency heating coil (102), an induced draft fan is arranged on the smoke exhaust pipe, the end of the smoke exhaust pipe is connected to the smoke exhaust port (104), and the smoke exhaust port (104) is arranged at the top of the heating box (101) and connected to an external smoke exhaust pipeline.
5. The automatic adhesive removal line for wafer support according to claim 1, characterized in that: The adhesive sheet stacking mechanism (2) comprises a material storage trolley (201) and an adhesive sheet removal assembly. The adhesive sheet removal assembly is arranged above a conveying roller (202) in a material separation area. The material storage trolley (201) is arranged on one side of the conveying roller (202) in the material separation area. The adhesive sheet removal assembly comprises a walking group for driving a gripper (204) to walk, and a gripper (204). The walking group is connected to the gripper (204) and a buffer spring (213) is provided at the connection. The gripper (204) comprises a removal clamping claw. The removal clamping claw is clamped and released by a removal cylinder. A gripper positioning member (212) for positioning the adhesive sheet is provided on the gripper.
6. The automatic adhesive removal line for wafer support according to claim 1, characterized in that: The flushing box (3) comprises a flushing box body (309), one side of the flushing box body (309) is provided with an observation window (305) for observation by an operator, and the other side is provided with a box door (301) for opening and closing. A crystal tray placement position (303) for placing a crystal tray (8) is provided inside the flushing box body (3), a pull-out glue connection drawer (306) is provided at the lower part of the flushing box body (309), and a water connection box (310) is provided below the glue connection drawer (306).
7. The automatic adhesive removal line for wafer trays according to claim 1, characterized in that: The flushing loading and unloading mechanism (6) is arranged above the conveying roller in the flushing area, and the flushing loading and unloading mechanism (6) includes a loading and unloading frame (601), and the loading and unloading frame (601) is provided with an X-axis component (602) and a Z-axis component (603) for driving the grabbing component to move. The Z-axis component (603) includes a cylinder fixing plate (612), and two grabbing cylinders are arranged on the cylinder fixing plate (612) for driving the grabbing gripper to move up and down. The bottom of the grabbing cylinder is connected to the grabbing gripper, and the gripping claw (610) of the grabbing gripper is clamped and grasped by the centering cylinder.
8. The automatic adhesive removal line for wafer support according to claim 1, characterized in that: The glue removal mechanism (7) comprises a glue removal frame (704), a water spray assembly is arranged on the glue removal frame (704), and a walking rotation group for driving the water spray assembly to walk and rotate is also arranged on the glue removal frame (704), the bottom of the walking rotation group is connected to the water spray assembly, and the water spray assembly comprises a main nozzle (705) and a branch nozzle (706), the bottom side of the main nozzle (705) is connected to the branch nozzle (706), the bottom of the main nozzle (705) is connected to a plurality of top nozzles (708), and the end of the branch nozzle (706) is connected to the end nozzle (709), and the plane where the top nozzle (708) is located is perpendicular to the plane where the end nozzle (709) is located.
9. The automatic adhesive removal line for wafer trays according to claim 1, characterized in that: The air-drying mechanism (4) includes an air-drying frame (402), which is arranged above the conveying roller in the air-drying area. The upper part of the air-drying frame (402) is provided with a top surface air knife assembly for air-drying the top surface of the crystal holder (8), and the side parts of the air-drying frame (402) are each provided with a side air knife assembly for air-drying the side surfaces of the crystal holder (8). The lower part of the air-drying frame (402) is provided with a bottom surface air knife assembly for air-drying the bottom surface of the crystal holder (8).
10. The automatic adhesive removal line for wafer trays according to claim 2, characterized in that: The material conveying roller, the heating zone conveying roller, the material separation zone conveying roller (202), the washing zone conveying roller, and the air drying zone conveying roller are all provided with material arrival sensors and switches for detecting the presence or absence of materials, and are all provided with stop components, the stop components comprising a stop cylinder, which is provided below the conveying roller, a stop limit piece is provided at the front end of the cylinder rod of the stop cylinder, and the stop limit piece is provided through the roller gap of the conveying roller when the stop cylinder moves.