Floating torque transmission assembly, manipulator and wafer carrier lifting transmission equipment

Abstract

The utility model discloses a floating torque transmission assembly, a manipulator and wafer carrier lifting transmission equipment, and relates to the technical field of semiconductor equipment, the floating torque transmission assembly is applied to the wafer carrier lifting transmission equipment, the wafer carrier lifting transmission equipment comprises a cavity, a connecting rod assembly is arranged in the cavity, and the connecting rod assembly is provided with an assembling part used for transmitting power; the floating torque transmission assembly drives the connecting rod assembly to stretch out or retract and comprises a fixedly-arranged supporting unit. A driving unit; a floating unit; and the lifting path of the adaptive part is defined as a flexible assembling area, the flexible assembling area is provided with a first position and a second position, and when the connecting rod assembly ascends or descends in the Z-axis direction, the driving unit and the connecting rod assembly gradually complete assembling within the stroke from the first position to the second position. The problem that in the prior art, when a connecting rod assembly and a floating torque transmission assembly are assembled, rigid collision occurs, and consequently the connecting position is damaged can be solved at least.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a floating torque transmission component, a robot, and a wafer carrier lifting and transmission device. Background Art

[0002] The wafer box transfer arm is based on the convenience and quick removal of wafer boxes, shortening the box removal time. The wafer box transfer arm platform configuration can achieve barrier-free transmission and can be used for user interface docking.

[0003] The floating torque transmission component is the power source for the extension of the robot arm. When mapping the wafers in the wafer box, the wafer box needs to be raised. During this process, the driving part of the robot arm is separated from the arm part. When descending, the arm part is assembled together with the driving part, and then the driving part drives the arm part to extend.

[0004] In the prior art, if an error occurs during the reassembly of the arm portion (descending) and the drive portion, a rigid collision will occur, causing damage to the connection between the arm portion and the drive portion of the robot.

[0005] Therefore, it is necessary to provide a new floating torque transmission component, a robot arm, and a wafer carrier lifting and transmission device to solve the above-mentioned problems existing in the prior art. Summary of the Invention

[0006] The present invention aims to provide a floating torque transmission assembly, a robot, and a wafer carrier lifting and transmission device for wafer transportation, which can at least solve the following technical problems:

[0007] 1. In the prior art, a problem occurs in which a rigid collision occurs when the connecting rod assembly and the floating torque transmission assembly are assembled, causing damage to the connection between them.

[0008] To achieve the above object, the technical solution of the present invention is as follows:

[0009] A floating torque transmission assembly is applied to a wafer carrier lifting and transmission device. The wafer carrier lifting and transmission device includes a cavity, a connecting rod assembly is arranged in the cavity, and the connecting rod assembly has an assembly portion for transmitting power to drive the connecting rod assembly to extend or retract. The connecting rod assembly moves along the Z-axis direction in the cavity. The floating torque transmission assembly includes:

[0010] A fixed support unit;

[0011] a driving unit, movably disposed on the supporting unit along the Z-axis direction, the driving unit comprising a power source and a rotating shaft, the power source having a rotor end, one end of the rotating shaft being connected to the rotor end, the other end of the rotating shaft being connected to an adapter, and the adapter being connected to the assembly portion;

[0012] a floating unit, disposed between the driving unit and the supporting unit, wherein the floating unit causes the driving unit to rise along the Z-axis direction;

[0013] The adapting portion is defined as a flexible assembly area having a first position and a second position, wherein when the assembly portion is ascended or descended along the Z-axis, the adapting portion applies a force to the assembly portion in the same direction or in the opposite direction to the movement direction of the assembly portion;

[0014] In which, during the process of the assembly part descending along the Z-axis direction in the cavity, the assembly part contacts the adapter part at a first position, and during the process of the adapter part descending from the first position to the second position, under the restriction of the floating unit, the adapter part provides an upward force along the Z-axis direction to the assembly part, so that the drive unit and the connecting rod assembly are gradually assembled within the range from the first position to the second position.

[0015] By adopting the above technical solution, during the assembly process of the connecting rod assembly and the floating torque transmission assembly, when the connecting rod assembly descends in the flexible assembly area, the adapter always provides an upward force along the Z-axis direction to the assembly part, so that the drive unit and the connecting rod assembly are gradually assembled within the stroke from the first position to the second position, thereby reducing the possibility of rigid collision between the two and causing damage to the assembly part or the adapter.

[0016] Optionally, the support unit includes:

[0017] a fixing member fixedly connected to the bottom wall of the cavity, wherein the fixing member is provided with an accommodating cavity for accommodating the adapting portion;

[0018] A connecting seat, movably disposed on the fixing member along the Z-axis direction and connected to the power source;

[0019] The rotating shaft is movably arranged inside the fixing member to drive the adapting part to move;

[0020] The floating unit is connected to the fixing member and the connecting seat respectively;

[0021] In the working state, the connecting rod assembly drives the connecting seat to descend along the Z-axis direction, so as to drive the rotating shaft and the adapter to descend along the Z-axis direction. Under the action of the floating unit, the assembly part and the adapter are assembled in the flexible assembly area.

[0022] By adopting the above technical solution, the floating unit drives the connecting seat to move toward the fixing part, so that the connecting seat always has an upward force along the Z-axis direction. In the process of the connecting rod assembly driving the connecting seat to descend along the Z-axis direction, there are always forces in opposite directions between the assembly part and the adapter part, which facilitates the assembly of the assembly part and the adapter part in the flexible assembly area.

[0023] Optionally, a guide member is fixedly provided on the connecting seat, a guide hole is opened on the fixing member, and the guide member is movably provided in the guide hole, so that the connecting seat moves along the Z-axis direction.

[0024] By adopting the above technical solution, the guide member is movably arranged in the guide hole to limit the movement direction of the connecting seat, so that the connecting seat rises or falls along the Z-axis direction when moving.

[0025] Optionally, the floating unit includes an elastic member and two positioning members, two ends of the elastic member are respectively connected to the two positioning members, and the two positioning members are respectively fixed to the fixing member and the connecting seat.

[0026] By adopting the above technical solution, the two ends of the elastic member are fixed on the positioning member, and the two positioning members are respectively fixed on the fixing member and the connecting seat, which facilitates the relative displacement between the connecting seat and the fixing member, thereby facilitating the floating unit to provide an upward force along the Z-axis direction to the driving unit.

[0027] A robot arm is used in a wafer carrier lifting and transmission device, comprising a connecting rod assembly and a floating torque transmission assembly;

[0028] The connecting rod assembly includes a drive shaft and a transmission assembly, one end of the drive shaft is connected to the transmission assembly, and the other end is fixedly provided with the assembly portion;

[0029] One of the adapting portion and the assembling portion is provided with an assembly groove, and the other is movably arranged in the assembly groove along the Z-axis direction, so that the adapting portion and the assembling portion can rotate synchronously;

[0030] During operation, the connecting rod assembly moves, driving the drive shaft to move, so that the assembly portion is engaged with the inner wall of the assembly groove opened on the adapter portion; or, the adapter portion is engaged with the inner wall of the assembly groove opened on the assembly portion; so that the connecting rod assembly is connected to the floating torque transmission assembly.

[0031] By adopting the above technical solution, during the process of the connecting rod assembly descending along the Z-axis direction, the assembly part is connected to the adapter part, so that the floating torque transmission assembly can transmit the power to the connecting rod assembly, facilitating the extension or retraction of the connecting rod assembly, thereby facilitating the transfer of the wafer box position.

[0032] Optionally, the cross-section of the assembly portion is circular, and the cross-section of the assembly groove is rectangular or wedge-shaped.

[0033] By adopting the above technical solution, when the shape of the assembly part is circular, it means that the assembly part is cylindrical at this time, and the cross-section at this time is the cross-section along the axial direction of the assembly part. Therefore, during the rotation of the adapter part, the inside of the assembly groove abuts against the side wall of the assembly part, driving the assembly part to move.

[0034] Optionally, the cross-section of the assembly portion is polygonal, and the cross-section of the assembly groove is rectangular or wedge-shaped.

[0035] By adopting the above technical solution, when the shape of the assembly part is a polygon, it means that the assembly part is block-shaped. At this time, the assembly part also has a length direction, so that during the rotation of the adapter part, the inside of the assembly groove abuts against the side wall of the assembly part, driving the assembly part to move.

[0036] Optionally, a guide surface is provided on the side wall of the assembly groove.

[0037] By adopting the above technical solution, the side wall of the assembly groove is provided with a guide surface, which facilitates the engagement of the assembly portion with the assembly groove and reduces the possibility of rigid collision between the assembly portion and the adapter portion.

[0038] Optionally, the transmission assembly includes:

[0039] A support member is movably arranged in the cavity along the Z-axis direction;

[0040] a support plate connected to the support member and used for placing a wafer box;

[0041] An active connecting rod, one end of which is rotatably mounted on the support member, and the other end of which is rotatably mounted on the support plate;

[0042] A driven connecting rod, one end of which is rotatably mounted on the support member, and the other end of which is rotatably mounted on the support plate;

[0043] a spring, one end of which is fixedly arranged on the supporting plate, and the other end of which is fixedly arranged on the active connecting rod;

[0044] The driving shaft is fixedly arranged on the active connecting rod;

[0045] In the working state, the driving shaft rotates to rotate the active connecting rod, and the driven connecting rod rotates in coordination with the active connecting rod to extend the pallet to transport the wafer box; the driving shaft rotates in the opposite direction, and the active connecting rod, the driven connecting rod and the spring cooperate to reset the pallet.

[0046] By adopting the above technical solution, the active connecting rod cooperates with the driven connecting rod, and both rotate simultaneously, driving the support plate to move, thereby completing the extension or retraction of the connecting rod assembly.

[0047] A wafer carrier lifting and transporting device, comprising a cavity, a lifting door and a manipulator;

[0048] The lifting door is fixedly arranged on the cavity;

[0049] The connecting rod assembly is movably arranged in the cavity along the Z-axis direction, and the floating torque transmission assembly is arranged in the lifting door;

[0050] In the working state, the connecting member is assembled with the assembly groove in the flexible assembly area along the Z-axis direction, so that the assembly portion and the connecting head can move synchronously.

[0051] By adopting the above technical solution, the adapter part and the assembly part are assembled in the flexible assembly area. After the assembly is completed, the assembly part and the adapter part can move synchronously, so that when the power source is started, the connecting rod assembly can be driven to extend or retract; when the connecting rod assembly descends along the Z-axis direction in the cavity, the adapter part and the assembly part are assembled and connected in the flexible assembly area. During this process, no rigid collision will occur between the adapter part and the assembly part, thereby reducing the possibility of damage to the connecting rod assembly of the manipulator when it contacts the drive assembly, and at the same time reducing the impact of difficult assembly due to errors.

[0052] The floating torque transmission assembly, robot, and wafer carrier lifting and transmission equipment provided by the present invention have at least the following beneficial effects:

[0053] 1. A floating assembly is provided to create a flexible assembly area between the connecting rod assembly and the floating torque transmission assembly, which prevents rigid collision between the two during assembly and reduces the possibility of damage.

[0054] 2. A spring is provided on the connecting rod assembly. When the active connecting rod and the driven connecting rod drive the support plate to move, the spring facilitates the support plate to return to its original position. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] Figure 1 Schematic diagram of the main structure of an embodiment of the present invention;

[0056] Figure 2 This is an assembly diagram of the floating torque transmission assembly at the highest position when the connecting rod assembly is retracted according to an embodiment of the present invention;

[0057] Figure 3 This is an assembly diagram of the floating torque transmission assembly at the lowest position when the connecting rod assembly according to an embodiment of the present invention is retracted;

[0058] Figure 4 This is an assembly diagram of the floating torque transmission assembly at the lowest position when the connecting rod assembly according to the embodiment of the present invention is extended;

[0059] Figure 5This is a schematic diagram of the connection relationship between the floating unit, the driving unit and the supporting unit according to an embodiment of the present invention;

[0060] Figure 6 A half-section diagram of the connection relationship among the floating unit, the driving unit, and the supporting unit according to an embodiment of the present invention;

[0061] Figure 7 This is a diagram of the connecting rod assembly in an extended state according to an embodiment of the present invention;

[0062] Figure 8 A diagram showing a retracted state of a connecting rod assembly according to an embodiment of the present invention;

[0063] Figure 9 A bottom view of the connecting rod assembly in an extended state according to an embodiment of the present invention;

[0064] Figure 10 Schematic diagram of a first assembly method of an assembly portion and an adapter portion according to an embodiment of the present invention;

[0065] Figure 11 Schematic diagram of a second assembly method of the assembly portion and the adapter portion according to an embodiment of the present invention;

[0066] Figure 12 Schematic diagram of a third assembly method of the assembly portion and the adapter portion according to an embodiment of the present invention;

[0067] Figure 13 Schematic diagram of a fourth assembly method of the assembly portion and the adapter portion according to an embodiment of the present invention;

[0068] Figure 14 Schematic diagram of a fifth assembly method of the assembly portion and the adapter portion according to an embodiment of the present invention;

[0069] Figure 15 Schematic diagram of a sixth assembly method of the assembly portion and the adapter portion according to an embodiment of the present invention.

[0070] Reference numerals:

[0071] 100, cavity; 200, connecting rod assembly; 210, drive shaft; 211, assembly portion; 221, support member; 222, base; 223, support plate; 224, active connecting rod; 225, driven connecting rod; 226, spring; 227, fixed arm; 228, support plate; 310, support unit; 311, fixing member; 312, connecting seat; 313, guide member; 314, guide hole; 321, through cavity; 322, sealing ring; 323, sleeve; 32 4. Linear bearing; 325. Accommodating cavity; 332. Guide surface; 333. Bearing; 334. Hemisphere; 340. Floating unit; 341. Elastic member; 342. Positioning member; 350. Flexible assembly area; 351. First position; 352. Second position; 400. Drive unit; 410. Rotating shaft; 411. Adapter; 412. Assembly groove; 420. Power source; 421. Reducer; 422. Motor; 500. Lifting door; 600. Wafer box. DETAILED DESCRIPTION

[0072] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0073] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0074] Reference Figure 1 、 Figure 2 and Figure 3 . An embodiment of the present invention provides a floating torque transmission component, which is applied to a wafer carrier lifting and transmission device, wherein the wafer carrier lifting and transmission device includes a cavity 100, the cavity 100 has an accommodating space inside, and a wafer box 600 and a connecting rod assembly 200 are arranged in the accommodating space. The connecting rod assembly 200 is used to drive the wafer box 600 to move in the accommodating space along the height direction of the accommodating space. At the same time, an opening is opened on the side wall of the cavity 100 to facilitate the transportation of the wafer box 600.

[0075] In order to better describe the present invention, a spatial rectangular coordinate system is established in the following embodiments, including an X-axis, a Y-axis and a Z-axis; the X-axis represents the front and rear positions in the horizontal direction in space, specifically in this embodiment, it is the direction of the opening opened on the side wall of the cavity 100; the Y-axis represents the left and right positions in the horizontal direction in space, specifically in this embodiment, it is the direction perpendicular to the X-axis on the horizontal plane; the Z-axis represents the up and down positions in the vertical direction in space, specifically in this embodiment, it is the movement direction of the wafer box 600 in the accommodation space.

[0076] Among them, the connecting rod assembly 200 has an assembly part 211 for transmitting power. When the assembly part 211 rotates, the connecting rod assembly 200 is driven to extend or retract. At the same time, the connecting rod assembly 200 can move along the Z-axis direction in the accommodation space to drive the wafer box 600 to rise or fall along the Z-axis in the accommodation space; wherein the floating torque transmission assembly includes a fixed support unit 310, that is, the support unit 310 is fixed relative to the cavity 100, and can be connected to the cavity 100 or not. In this embodiment, the support unit 310 is selected to be connected to the cavity 100 to facilitate the fixation of the position of the support unit 310; at the same time, the floating torque transmission assembly also includes a driving unit 400 and a floating unit 340, which drives The unit 400 includes a power source 420 and a rotating shaft 410. The power source 420 has a rotor end. One end of the rotating shaft 410 is connected to the rotor end, so that when the power source 420 is started, the rotor end can drive the rotating shaft 410 to rotate. At the same time, the other end of the rotating shaft 410 is connected to the adapter 411, and the connection method can be welding, bolt fixing or one-piece molding, etc. In this embodiment, the adapter 411 is preferably fixedly connected to the end of the rotating shaft 410 by one-piece molding, and the adapter 411 is connected to the assembly part 211. When the adapter 411 is connected to the assembly part 211, the rotation of the rotating shaft 410 drives the adapter 411 to rotate, and can also drive the assembly part 211 to rotate, thereby facilitating the control of the movement of the connecting rod assembly 200.

[0077] During the movement of the assembly portion 211 in the connecting rod assembly 200 descending along the Z axis, it is necessary to ensure that there is a reverse force along the Z axis between the driving unit 400 and the connecting rod assembly 200. Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6, the floating unit 340 is arranged between the driving unit 400 and the supporting unit 310, and the floating unit 340 is connected to the driving unit 400. The floating unit 340 can make the driving unit 400 rise relative to the supporting unit 310 along the Z-axis direction. When the connecting rod assembly 200 descends, after contacting with the driving unit 400, the connecting rod assembly 200 and the driving unit 400 descend together, that is, the assembly portion 211 contacts the adapter portion 411 during the descending process and descends synchronously. At this time, under the restriction of the floating unit 340, the driving unit 400 has an upward force on the connecting rod assembly 200 along the Z-axis direction; at the same time, it is defined that the driving unit 40 0 is a lifting path of the flexible assembly area 350, wherein the flexible assembly area 350 has a first position 351 and a second position 352, wherein the first position 351 is the highest point of the movement path of the adapter 411 in the Z-axis direction, and the second position 352 is the lowest point of the movement path of the adapter 411 in the Z-axis direction. Specifically, in this embodiment, when the adapter 411 is in the first position 351, it means that the top of the adapter 411 is located at the first position 351; when the adapter 411 is in the second position 352, it means that the top of the adapter 411 is located at the second position 352; because the floating unit 340 provides force to the driving unit 400, Therefore, the floating unit 340 causes the driving unit 400 and the connecting rod assembly 200 to always have an interaction force along the Z-axis direction in the flexible assembly area 350; that is, the adapting portion 411 and the assembly portion 211 always have an interaction force along the Z-axis direction in the flexible assembly area 350. In the working state, when the connecting rod assembly 200 descends along the Z-axis direction in the cavity 100, when the assembly portion 211 contacts the adapting portion 411, the top of the adapting portion 411 is at the first position 351. In the process of the top of the adapting portion 411 descending from the first position 351 to the second position 352, the adapting portion 411 provides the assembly portion 211 with an interaction force along the Z-axis direction. The reverse force in the Z-axis direction, that is, the adapter part 411 provides an upward force along the Z-axis direction to the assembly part 211, and enables the drive unit 400 and the connecting rod assembly 200 to be gradually assembled in the flexible assembly area 350, that is, the assembly is completed in the process of descending from the first position 351 to the second position 352; when the connecting rod assembly 200 rises, the top of the adapter part 411 rises from the second position 352 to the first position 351. During this process, there is still a force between the adapter part 411 and the assembly part 211, but the force at this time is to drive the drive unit 400 to reset, and will not interfere with the movement process of the connecting rod assembly 200.

[0078] In order to facilitate the fixing of the support unit 310, refer to Figure 2 、 Figure 5 and Figure 6The support unit 310 includes a fixing member 311 and a connecting seat 312, wherein the fixing member 311 is fixedly connected to the bottom wall of the cavity 100, and its fixing method can be welding, integral molding or bolt fixing, etc. In this embodiment, the fixing member 311 is preferably fixed to the bottom wall of the cavity 100 by bolt fixing. In addition, the fixing member 311 is cylindrical, and its interior is hollow. The interior of the fixing member 311 has a through cavity 321 and a accommodating cavity 325, wherein the accommodating cavity 325 and the through cavity 321 are sequentially arranged downward along the Z-axis direction. The rotating shaft 410 is arranged through the connecting seat 312, the through cavity 321 and the accommodating cavity 325, and can The shaft 320 is fixed to the fixing member 310 by a screw thread 324 which is fixed to the fixing member 310. The fixing member 310 is provided with a screw thread 324 which is fixed to the fixing member 310 by a screw thread 324 which is fixed to the fixing member 310. The fixing member 310 is provided with a screw thread 324 which is fixed to the fixing member 310 by a screw thread 324 which is fixed to the fixing member 310 by a screw thread 324 which is fixed to the fixing member 310 by a screw thread 324 which is fixed to the fixing member 310 by a screw thread 324 which is fixed to the fixing member 310 The power source 420 is connected. In this embodiment, the power source 420 includes a motor 422 and a reducer 421. The motor 422 is connected to the end of the rotating shaft 410 through the reducer 421. At the same time, the reducer 421 is fixedly connected to the connecting seat 312, so that the connecting seat 312 can drive the power source 420 to move when it moves, thereby driving the rotating shaft 410 and the adapter 411 to move; the two ends of the floating unit 340 are respectively connected to the fixing member 311 and the connecting seat 312. In the working state, the assembly part 211 in the connecting rod assembly 200 is in contact with the adapter 411 in the first position 351, and the connecting rod assembly 200 continues to move along the Z axis. During the movement process The rotating shaft 410 and the power source 420 are pushed to move. Since the connecting seat 312 is connected to the power source 420, the connecting seat 312 is pushed to move synchronously during the movement, so that the connecting seat 312 and the fixing member 311 move relative to each other along the Z-axis direction, that is, away from the fixing member 311 along the Z-axis direction. At the same time, the rotating shaft 410 moves along the Z-axis direction inside the fixing member 311. In the process of the top of the adapter 411 moving from the first position 351 to the second position 352, there is always a reverse force along the Z-axis direction between the adapter 411 and the assembly part 211, which facilitates the assembly part 211 and the adapter 411 to complete the assembly in the flexible assembly area 350.

[0079] During the relative movement between the connecting seat 312 and the fixing member 311, it is necessary to ensure that the relative movement between the connecting seat 312 and the fixing member 311 is in the Z-axis direction. Figure 2 、 Figure 5 and Figure 6, a guide member 313 is fixedly provided on the connecting seat 312, and the fixing method thereof can be bonding, welding or clamping, etc. In this embodiment, it is preferred that the guide member 313 is fixed to the connecting seat 312 by clamping, in addition, bolt fixing and other methods can also be used, as long as the guide member 313 and the connecting seat 312 do not have relative displacement; in this embodiment, the guide member 313 is selected to be a round rod, and the length direction of the guide member 313 is parallel to the Z-axis direction. At the same time, the guide member 313 can be provided with one or more. In this embodiment, Two guide members 313 are selected. In addition, a guide hole 314 is opened on the fixing member 311, and the guide hole 314 penetrates the fixing member 311 along the Z-axis direction. The number of guide holes 314 is not less than the number of guide members 313. At the same time, the guide members 313 are passed through the guide holes 314 and movably arranged in the guide holes 314. Specifically in this embodiment, the guide members 313 can slide in the guide holes 314 along the Z-axis direction, thereby limiting the movement of the connecting seat 312 along the Z-axis direction, and a relative displacement occurs between the connecting seat 312 and the fixing member 311 in the Z-axis direction.

[0080] In order to facilitate the floating unit 340 to drive the driving unit 400 to move, refer to Figure 2 、 Figure 5 and Figure 6 The floating unit 340 includes an elastic member 341 and two positioning members 342. One floating unit 340 can be set between the fixing member 311 and the connecting seat 312, or multiple floating units 340 can be set. In this example, two floating units 340 are selected, wherein the two positioning members 342 are fixedly arranged on the outer wall of the fixing member 311 and the outer wall of the connecting seat 312 respectively. The fixing method can be bonding, welding or integral molding, etc. In this embodiment, it is preferred that the positioning member 342 is fixedly arranged on the outer wall of the fixing member 311 by integral molding, and the positioning member 342 is fixedly arranged on the outer wall of the connecting seat 312 by integral molding. Outer wall; the elastic member 341 is elastic, and the two ends of the elastic member 341 are respectively fixedly arranged on the two positioning members 342. In this embodiment, the elastic member 341 is selected as a spring 226, one end of the spring 226 is connected to the positioning member 342 of the side wall of the fixing member 311, and the other end is connected to the positioning member 342 of the side wall of the connecting seat 312, so that the connecting seat 312 always has an upward force along the Z-axis direction. Therefore, in the process of the connecting rod assembly 200 moving from the first position 351 to the second position 352, the adapter 411 always provides the assembly part 211 with a force opposite to the movement direction of the assembly part 211, so as to facilitate the connection between the assembly part 211 and the adapter 411.

[0081] The embodiment of the present invention further provides a manipulator, referring to Figure 2 、 Figure 5 and Figure 6The manipulator includes a connecting rod assembly 200 and a floating torque transmission assembly, wherein the connecting rod assembly 200 includes a drive shaft 210 and a transmission assembly, one end of the drive shaft 210 is connected to the transmission assembly, and the other end is fixedly provided with an assembly portion 211, which can be fixed by bonding, welding or integral molding, etc. In this embodiment, it is preferred that the assembly portion 211 and the drive shaft 210 are fixed by integral molding, and the assembly portion 211 and the adapter portion 411 can be connected. In the manipulator, it is necessary to meet the following requirements: after the assembly portion 211 is connected to the adapter portion 411, the adapter portion 411 rotates, which can drive the assembly portion 211 to rotate. In this embodiment, one of the adapting portion 411 and the assembly portion 211 is provided with an assembly groove 412, and the other is movably arranged in the assembly groove 412 along the Z-axis direction, so that the adapting portion 411 and the assembly portion 211 can rotate synchronously; the assembly portion 211 can be provided with an assembly groove 412, and the adapting portion 411 can be movably arranged in the assembly groove 412 along the Z-axis direction; or the adapting portion 411 is provided with an assembly groove 412, and the assembly portion 211 can be movably arranged in the assembly groove 412 along the Z-axis direction; in the working state, the connecting rod assembly 200 descends along the Z-axis direction, driving the drive shaft 210 and the assembly portion 211 to move, so that The assembly portion 211 is connected to the assembly groove 412 provided on the adapter portion 411, and the assembly portion 211 is engaged with the inner wall of the assembly groove 412, so that the connecting rod assembly 200 is connected to the floating torque transmission assembly, and when the floating torque transmission assembly rotates, the connecting rod assembly 200 can be driven to extend or retract; or the connecting rod assembly 200 descends along the Z-axis direction, driving the drive shaft 210 and the assembly portion 211 to move, so that the adapter portion 411 is connected to the assembly groove 412 provided on the assembly portion 211, and the adapter portion 411 is engaged with the inner wall of the assembly groove 412, so that the connecting rod assembly 200 is connected to the floating torque transmission assembly, and when the floating torque transmission assembly rotates, the connecting rod assembly 200 can be driven to extend or retract; When moving, it can drive the connecting rod assembly 200 to extend or retract; in this embodiment, an assembly groove 412 is provided on the adapter part 411, and the assembly part 211 is movably arranged in the assembly groove 412 along the Z-axis direction. Therefore, in the working state, the connecting rod assembly 200 descends along the Z-axis direction, driving the drive shaft 210 and the assembly part 211 to move, so that the assembly part 211 is connected to the assembly groove 412 provided on the adapter part 411, and the assembly part 211 is clamped with the inner wall of the assembly groove 412, so that the connecting rod assembly 200 is connected to the floating torque transmission component, and when the floating torque transmission component rotates, it can drive the connecting rod assembly 200 to extend or retract.

[0082] The transmission assembly needs to extend or retract during operation to transport the wafer box 600, refer to Figure 7 、 Figure 8 and Figure 9The transmission assembly includes a support member 221, a support plate 223, an active connecting rod 224, a driven connecting rod 225 and a spring 226; wherein the support member 221 includes a base 222, a support plate 228 of a fixed wall, a fixed arm 227 arranged between the base 222 and the support plate 228, and the two ends of the fixed arm 227 are respectively fixed to the base 222 and the support plate 228. In this embodiment, one end of the fixed arm 227 is fixed to the base 222 by an integral molding method, and the other end is fixed to the support plate 228 by an integral molding method. 8, thereby fixing the support plate 228 to the base 222; one end of the active link 224 is rotated on the support plate 228 set in the support member 221 through the rotating shaft 410, and the other end is rotated on the supporting plate 223 through the rotating shaft 410; one end of the driven link 225 is rotated on the support plate 228 set in the support member 221 through the rotating shaft 410, and the other end is rotated on the supporting plate 223 through the rotating shaft 410, and the driven link 225 is rotated on one of the corners of the supporting plate 223, so that when the active link 224 rotates, the supporting plate 223 and the active link The stroke of the portion connected by the rod 224 is greater than the stroke of the portion connected to the support plate 223 and the driven link 225. Therefore, when the active link 224 rotates, the support plate 223 rotates around the connecting axis between itself and the driven link 225, and at the same time moves along the X-axis direction, extending or retracting into the cavity 100, so as to facilitate the transfer process of the wafer box 600; one end of the spring 226 is fixedly provided on the end surface of the support plate 223, and the other end is fixedly provided on the active link 224; the driving shaft 210 is fixed to the active link 224, so that the driving shaft 210 can rotate when The active link 224 is driven to rotate. During operation, the drive shaft 210 rotates to rotate the active link 224, thereby causing the driven link 225 to rotate in coordination with the active link 224. At this time, it extends along the X-axis direction to facilitate the transportation of the wafer box 600. When the drive shaft 210 rotates, the active link 224, the driven link 225 and the spring 226 cooperate to drive the support plate 223 to move. At this time, the support plate 223 retracts along the X-axis direction to facilitate the reset of the support plate 223. During this process, the spring 226 contracts to facilitate the rotation of the support plate 223 to the initial angle.

[0083] In order to facilitate the connection between the assembly portion 211 and the adapting portion 411 in the flexible assembly area 350, refer to Figure 10 、 Figure 11 、 Figure 12 、 Figure 13 、 Figure 14 and Figure 15The cross section of the assembly groove 412 can be rectangular or wedge-shaped. In order to facilitate the assembly of the assembly portion 211 and the assembly groove 412, in this embodiment, the shape of the assembly groove 412 is wedge-shaped. In addition, the shape of the assembly portion 211 can be circular or polygonal. When the shape of the assembly portion 211 is circular, it means that the assembly portion 211 is cylindrical at this time, and the cross section at this time is the cross section along the axial direction of the assembly portion 211. Therefore, during the rotation of the adapter 411, the interior of the assembly groove 412 abuts against the side wall of the assembly portion 211, driving the assembly portion 211 to move; when the shape of the assembly portion 211 is polygonal, it means that the assembly portion 211 is block-shaped at this time, and the assembly portion 211 also has a length direction, so that the adapter 411 can be rotated. During the rotation of the fitting portion 411, the interior of the assembly groove 412 abuts against the side wall of the assembly portion 211, driving the assembly portion 211 to move; in addition, bearings 333 or hemispherical bodies 334 structures, or other structures, can be additionally added at both ends of the assembly portion 211, as long as the fitting portion 411 can drive the assembly portion 211 to rotate synchronously during the rotation of the fitting portion 411, so that the connecting rod assembly 200 can be extended or retracted; in order to facilitate the assembly connection between the fitting portion 211 and the adapter portion 411, a guide surface 332 is further provided on the inner side wall of the assembly groove 412. The provision of the guide surface 332 further reduces the possibility that the fitting portion 211 and the assembly groove 412 of the adapter portion 411 are stuck in the flexible assembly area 350, resulting in the possibility of failure to assemble; refer to Figure 10 , the cross section of the assembly portion 211 is circular, the cross section of the assembly groove 412 is rectangular or wedge-shaped, and the side wall of the assembly groove 412 does not have a guide surface 332, wherein the side wall of the assembly portion 211 is additionally provided with a bearing 333; Figure 11 , the cross section of the assembly portion 211 is polygonal, the cross section of the assembly groove 412 is rectangular or wedge-shaped, and the side wall of the assembly groove 412 does not have a guide surface 332; refer to Figure 12 , the cross section of the assembly portion 211 is polygonal, the cross section of the assembly groove 412 is rectangular or wedge-shaped, and the side wall of the assembly groove 412 is provided with a guide surface 332; refer to Figure 13 , the cross section of the assembly portion 211 is circular, the cross section of the assembly groove 412 is rectangular or wedge-shaped, and the side wall of the assembly groove 412 does not have a guide surface 332, wherein the two ends of the assembly portion 211 are fixedly provided with a hemispherical structure 334 with the same diameter as the assembly portion 211; Figure 14 , the cross section of the assembly portion 211 is circular, the cross section of the assembly groove 412 is rectangular or wedge-shaped, and the side wall of the assembly groove 412 does not have a guide surface 332, wherein both ends of the assembly portion 211 are fixedly provided with a hemispherical structure 334 having a diameter greater than the diameter of the assembly portion 211; Figure 15, where the cross-section of the assembly portion 211 is circular, the cross-section of the assembly groove 412 is rectangular or wedge-shaped, and a guide surface 332 is provided on the side wall of the assembly groove 412, wherein a hemispherical structure 334 with the same diameter as the assembly portion 211 is fixedly provided at both ends of the assembly portion 211.

[0084] The embodiment of the present invention also provides a wafer carrier lifting and transporting device, referring to Figure 1 The wafer carrier lifting and transferring equipment includes a chamber 100, a lifting door 500 and a robot, wherein the side wall of the chamber 100 is provided with an opening, the interior of the chamber 100 is used to place the wafer box 600, and the lifting door 500 is fixedly arranged on the side wall of the chamber 100 with the opening, and the fixing method thereof can be welding, clamping or bolting, etc. In this embodiment, the lifting door 500 is fixedly arranged on the side wall of the chamber 100 with the opening by bolting, and the lifting door 500 is also provided with a movable door, which can rise or fall along the Z-axis direction on the lifting door 500 to seal the opening; wherein the connecting rod assembly 200 is arranged inside the chamber 100 and can rise or fall along the Z-axis direction, that is, the connecting rod assembly 200 is movably arranged in the chamber 100 along the Z-axis direction; floating torque transmission The transfer assembly is arranged in the lifting door 500, and the floating torque transfer assembly passes through the cavity 100 and is connected to the connecting rod assembly 200; in the working state, the adapter part 411 and the assembly part 211 are assembled in the flexible assembly area 350. After the assembly is completed, the assembly part 211 and the adapter part 411 can move synchronously, so that the power source 420 is started, which can drive the connecting rod assembly 200 to extend or retract. When the connecting rod assembly 200 descends along the Z-axis direction in the cavity 100, the adapter part 411 is assembled and connected with the assembly part 211 in the flexible assembly area 350. During this process, no rigid collision will occur between the adapter part 411 and the assembly part 211, thereby reducing the possibility of damage to the connecting rod assembly 200 of the manipulator when it contacts the drive assembly, and at the same time reducing the impact of difficult assembly caused by errors.

[0085] The implementation principle of a floating torque transmission component, a robot and a wafer carrier lifting and transmission device in an embodiment of the present application is that the connecting rod assembly 200 moves along the Z-axis direction in the cavity 100, and when it descends along the Z-axis direction, the assembly part 211 in the connecting rod assembly 200 is assembled and connected with the adapter part 411 in the drive unit 400, and when the assembly part 211 abuts the adapter part 411, the top of the adapter part 411 is at the first position 351 at this time. After the assembly part 211 abuts the adapter part 411, the two simultaneously descend along the Z-axis direction, and before the top of the adapter part 411 moves to the second position 352, the assembly part 211 and the adapter part 411 are successfully assembled, that is, the assembly part 211 and the adapter part 411 are assembled in the flexible assembly area 350, so that the assembly part 211 and the adapter part 411 will not have a rigid collision when in contact, thereby preventing damage to the robot.

[0086] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations of these embodiments are possible. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the invention described herein is susceptible to other embodiments and may be practiced or implemented in a variety of ways.

Claims

1. A floating torque transmission assembly, applied to a wafer carrier lifting and transmission device, the wafer carrier lifting and transmission device comprising a cavity (100), a connecting rod assembly (200) being arranged in the cavity (100), the connecting rod assembly (200) having an assembly portion (211) for transmitting power to drive the connecting rod assembly (200) to extend or retract, the connecting rod assembly (200) moving along the Z-axis direction in the cavity (100), characterized in that: The floating torque transfer assembly comprises: A fixed support unit (310); A driving unit (400) is movably arranged on the supporting unit (310) along the Z-axis direction. The driving unit (400) includes a power source (420) and a rotating shaft (410). The power source (420) has a rotor end. One end of the rotating shaft (410) is connected to the rotor end. The other end of the rotating shaft (410) is connected to an adapter (411). The adapter (411) is connected to the assembly portion (211). a floating unit (340) disposed between the driving unit (400) and the supporting unit (310), wherein the floating unit (340) causes the driving unit (400) to rise along the Z-axis direction; The adapting portion (411) is defined as a flexible assembly area (350), wherein the flexible assembly area (350) has a first position (351) and a second position (352); when the assembly portion (211) rises or falls along the Z-axis, the adapting portion (411) provides the assembly portion (211) with a force in the same direction as or opposite to the direction of movement of the assembly portion (211); In the process of the assembly part (211) descending along the Z-axis direction in the cavity (100), the assembly part (211) contacts the adapter part (411) at the first position (351); in the process of the adapter part (411) descending from the first position (351) to the second position (352), under the restriction of the floating unit (340), the adapter part (411) provides an upward force along the Z-axis direction to the assembly part (211), so that the drive unit (400) and the connecting rod assembly (200) are gradually assembled within the range from the first position (351) to the second position (352).

2. The floating torque transfer assembly according to claim 1, wherein: The support unit (310) comprises: A fixing member (311) is fixedly connected to the bottom wall of the cavity (100), and a receiving cavity is provided on the fixing member (311) for receiving the adapting portion (411); A connecting seat (312) is movably disposed on the fixing member (311) along the Z-axis direction and is connected to the power source (420); The rotating shaft (410) is movably arranged inside the fixing member (311) to drive the adapting portion (411) to move; The floating unit (340) is connected to the fixing member (311) and the connecting seat (312) respectively; In the working state, the connecting rod assembly (200) drives the connecting seat (312) to descend along the Z-axis direction, thereby driving the rotating shaft (410) and the adapter (411) to descend along the Z-axis direction. Under the action of the floating unit (340), the assembly part (211) and the adapter (411) are assembled in the flexible assembly area (350).

3. The floating torque transfer assembly according to claim 2, wherein: A guide member (313) is fixedly provided on the connecting seat (312), a guide hole (314) is provided on the fixing member (311), and the guide member (313) is movably provided in the guide hole (314) so ​​that the connecting seat (312) moves along the Z-axis direction.

4. The floating torque transfer assembly according to claim 2, wherein: The floating unit (340) includes an elastic member (341) and two positioning members (342), the two ends of the elastic member (341) are respectively connected to the two positioning members (342), and the two positioning members (342) are respectively fixed to the fixing member (311) and the connecting seat (312).

5. A robot arm, used in wafer carrier lifting and transmission equipment, characterized in that: It comprises a connecting rod assembly (200) and a floating torque transmission assembly according to any one of claims 1 to 4; The connecting rod assembly (200) includes a drive shaft (210) and a transmission assembly, one end of the drive shaft (210) is connected to the transmission assembly, and the other end is fixedly provided with the assembly portion (211); One of the adapting portion (411) and the assembling portion (211) is provided with an assembly groove (412), and the other is movably arranged in the assembly groove (412) along the Z-axis direction, so that the adapting portion (411) and the assembling portion (211) can rotate synchronously; During operation, the connecting rod assembly (200) moves, driving the drive shaft (210) to move, so that the assembly portion (211) is engaged with the inner wall of the assembly groove (412) opened on the adapter portion (411); or, the adapter portion (411) is engaged with the inner wall of the assembly groove (412) opened on the assembly portion (211); so that the connecting rod assembly (200) is connected to the floating torque transmission assembly.

6. The robot according to claim 5, characterized in that: The cross section of the assembly portion (211) is circular, and the cross section of the assembly groove (412) is rectangular or wedge-shaped.

7. The robot according to claim 5, characterized in that: The cross section of the assembly portion (211) is polygonal, and the cross section of the assembly groove (412) is rectangular or wedge-shaped.

8. The manipulator according to claim 6 or 7, characterized in that: A guide surface (332) is formed on the side wall of the assembly groove (412).

9. The robot according to claim 5, characterized in that: The transmission assembly comprises: A support member (221) is movably disposed in the cavity (100) along the Z-axis direction; A support plate (223) connected to the support member (221) and used for placing the wafer box (600); An active connecting rod (224), one end of which is rotatably mounted on the support member (221) and the other end of which is rotatably mounted on the supporting plate (223); A driven connecting rod (225), one end of which is rotatably mounted on the support member (221) and the other end of which is rotatably mounted on the supporting plate (223); a spring (226), one end of which is fixedly disposed on the supporting plate (223) and the other end of which is fixedly disposed on the active connecting rod (224); The drive shaft (210) is fixedly mounted on the active connecting rod (224); In the working state, the driving shaft (210) rotates to rotate the active connecting rod (224), and the driven connecting rod (225) rotates in conjunction with the active connecting rod (224) to extend the support plate (223) to transport the wafer box (600); the driving shaft (210) rotates in the opposite direction, and the active connecting rod (224), the driven connecting rod (225) and the spring (226) cooperate to reset the support plate (223).

10. A wafer carrier lifting and transporting device, characterized in that: It comprises a cavity (100), a lifting door (500) and the manipulator according to any one of claims 5 to 9; The lifting door (500) is fixedly arranged on the cavity (100); The connecting rod assembly (200) is movably arranged in the cavity (100) along the Z-axis direction, and the floating torque transmission assembly is arranged in the lifting door (500); In the working state, the assembly portion (211) is assembled with the assembly groove (412) in the flexible assembly area (350) along the Z-axis direction, so that the assembly portion (211) and the adapting portion (411) can move synchronously.

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