Linear heating source crucible and deposition device

Abstract

The utility model relates to a linear heating source crucible and a deposition device, the linear heating source crucible comprises a crucible body and a jet assembly, and the cross section of the crucible body is in a flat peanut shape; the spraying assembly comprises a spraying plate and two partition plates, the two partition plates are arranged in the crucible body at equal intervals in the axial direction of the crucible body, and the crucible body is divided into three material filling areas by the two partition plates; the spraying plate is arranged at the top of the crucible body, a plurality of nozzles are arranged on the surface of the spraying plate and are uniformly distributed on the spraying plate, and the distribution surfaces of the nozzles are the same as the cross section of the crucible body. According to the crucible, the cross section of the crucible body is flat peanut-shaped, and the flat peanut-shaped structure enables the film thickness distribution of three sides of the LCR to be relatively uniform, the quantity difference of the films evaporated on a substrate is very small, the consumption is consistent, the film thicknesses of the three sides of the LCR are basically consistent, and the condition that the film thickness difference is very large is avoided, so that the film coating uniformity can be improved, and the film coating quality is improved. And the material utilization rate is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a linear heating source crucible and a deposition device. Background Art

[0002] Vacuum coating refers to a method in which organic or inorganic materials are heated by a heating wire using various physical or chemical methods under high vacuum conditions. The evaporated material evaporates due to the heat, and atoms or molecules escape from the surface to form a vapor flow, which is incident on the surface of the substrate and condenses to form a solid film. Vacuum coating technology is divided into physical vapor deposition (PVD) and chemical vapor deposition (CVD). Physical vapor deposition methods are mainly divided into vacuum evaporation coating, vacuum sputtering coating, and vacuum ion plating. In the preparation of perovskite layers, the mainstream method used is evaporation coating, referred to as evaporation.

[0003] Principle of evaporation: The physical process of evaporation includes: the deposition material evaporates or sublimates into gaseous particles → the gaseous particles are quickly transported from the evaporation source to the substrate surface → the gaseous particles attach to the substrate surface to form nuclei and grow into a solid film → the film atoms are reconstructed or chemically bonded.

[0004] In traditional evaporation technology, there are several problems: during the evaporation process, the temperature in the middle and on both sides of the crucible cannot be kept consistent, and there is a large temperature difference, so the film thickness uniformity is poor. In long-term production, the reproducibility of the film thickness also needs to be constantly adjusted. Utility Model Content

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect in the prior art that the linear heating source is heated unevenly, resulting in uneven coating.

[0006] In order to solve the above technical problems, the utility model provides a linear heating source crucible, comprising:

[0007] a crucible body, wherein the cross section of the crucible body is a flat peanut shape;

[0008] The injection assembly includes a spray plate and two partitions, the two partitions are equidistantly arranged inside the crucible body along the axial direction of the crucible body, and the two partitions divide the crucible body into three material filling areas; the spray plate is arranged on the top of the crucible body, and a plurality of nozzles are arranged on the surface of the spray plate, and the plurality of nozzles are evenly distributed on the spray plate, and the distribution surface of the plurality of nozzles is the same as the cross-section of the crucible body.

[0009] In one embodiment of the present invention, an inner plate is provided between the spray plate and the partition plate, and a plurality of equally spaced filter holes are provided on the surface of the inner plate.

[0010] In one embodiment of the present invention, a heating assembly is further included, wherein the heating assembly includes a heating dish and a heating wire. The crucible body is embedded in the heating dish, and the heating wire is arranged between the heating dish and the crucible body, and the heating wire is arranged closely to the crucible body.

[0011] In one embodiment of the present invention, a reflective plate is provided on the outer side of the heating wire, and the reflective plate is arranged closely against the inner wall of the heating dish.

[0012] In one embodiment of the present invention, the height of the heating wire near the middle of the crucible body surface is smaller than the height of the heating wire on both sides.

[0013] In one embodiment of the present invention, a heat-insulating cover is provided on the top of the heating dish, and a surface of the heat-insulating cover is provided with a plurality of through holes, and the distribution area of ​​the through holes corresponds to the distribution area of ​​the nozzles.

[0014] In one embodiment of the present invention, the size of the through hole is equal to the size of the nozzle.

[0015] In one embodiment of the present invention, a cooling plate is provided at the bottom of the heating dish, and the cooling plate is arranged closely against the bottom of the heating dish.

[0016] In one embodiment of the present invention, a mounting groove cooperating with the partition is provided inside the crucible body, and the partition is detachably connected to the mounting groove.

[0017] A deposition device comprises the linear heating source crucible.

[0018] The above technical solution of the utility model has the following advantages compared with the prior art:

[0019] The linear heating source crucible and deposition device described in this utility model have a flat, peanut-shaped cross-section. The nozzles are distributed according to the cross-section of the crucible. During vapor deposition, the nozzle distribution compensates for temperature differences. This flat, peanut-shaped structure ensures relatively uniform film thickness distribution on all three sides of the LCR, minimizing the difference in the amount deposited onto the substrate and maintaining consistent consumption. This ensures essentially consistent film thickness on all three sides of the LCR, preventing significant variations in film thickness. This improves film uniformity and increases material utilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to make the content of the utility model easier to understand, the utility model is further described in detail below based on the specific embodiments of the utility model and in conjunction with the accompanying drawings, wherein

[0021] Figure 1This is a main sectional view of the overall structure of the utility model;

[0022] Figure 2 for Figure 1 Schematic diagram of the structure of the middle crucible body;

[0023] Figure 3 for Figure 1 Schematic diagram of the structure of the heating component;

[0024] Figure 4 This is a top view of the structure of the crucible body in the present invention;

[0025] Figure 5 This is a schematic diagram of the distribution of the heating wires in the present utility model;

[0026] Figure 6 for Figure 3 Schematic diagram of the structure of the middle sealing cover;

[0027] Explanation of the reference numerals in the specification: 1. Crucible body; 2. Spray assembly; 3. Heating assembly; 11. Mounting groove; 21. Spray plate; 22. Partition; 23. Inner plate; 31. Heating dish; 32. Insulation cover; 33. Reflection plate; 34. Heating wire; 211. Nozzle; 231. Filter hole; 321. Through hole. DETAILED DESCRIPTION

[0028] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0029] Example 1

[0030] Reference Figures 1-6 As shown, the utility model discloses a linear heating source crucible, comprising:

[0031] Crucible body 1, wherein the cross section of the crucible body 1 is a flat peanut shape;

[0032] The injection assembly 2 includes a spray plate 21 and two partitions 22. The two partitions 22 are equidistantly arranged inside the crucible body 1 along the axial direction of the crucible body 1, and the two partitions 22 divide the crucible body 1 into three material filling areas; the spray plate 21 is arranged on the top of the crucible body 1, and a plurality of nozzles 211 are provided on the surface of the spray plate 21. The plurality of nozzles 211 are evenly distributed on the spray plate 21, and the distribution surface of the plurality of nozzles 211 is the same as the cross-section of the crucible body 1.

[0033] It can be seen that the heating source crucible in the present invention consists of a crucible body 1 and an internal injection assembly 2. Specifically, the two partitions 22 in the injection assembly 2 of the present invention divide the interior of the crucible body 1 into three material filling areas, which are divided into three LCR sides (inductance L, capacitance C, resistance R). The spray plate 21 covers the top of the crucible body 1, and a number of spray groups are provided on the spray plate 21. During the actual evaporation process, the crucible body 1 is heated, and the material in the material filling area evaporates and sublimates and is ejected from the nozzle 211.

[0034] In the present invention, the crucible body 1 has a flat, peanut-shaped cross-section, and the nozzles 211 are distributed along the cross-section of the crucible body 1. During vapor deposition, the distribution of the nozzles 211 compensates for temperature differences. This flat, peanut-shaped structure ensures relatively uniform film thickness distribution on all three sides of the LCR, minimizing differences in the amount deposited onto the substrate and ensuring consistent film consumption. This ensures consistent film thickness on all three sides of the LCR, preventing significant variations in film thickness. This improves film uniformity and increases material utilization.

[0035] Furthermore, an inner plate 23 is provided between the spray plate 21 and the partition plate 22 , and a plurality of equidistantly distributed filtering holes 231 are provided on the surface of the inner plate 23 .

[0036] Specifically, the inner plate 23 is arranged between the partition 22 and the spray plate 21, and has multiple through holes 321 on its surface, which has a filtering effect. The steam molecules evaporated from the bottom of the crucible can be evenly emitted when passing through the inner plate 23; as a preferred embodiment of the present invention, the material of the inner plate 23 can be aluminum or stainless steel.

[0037] Furthermore, it also includes a heating component 3, which includes a heating dish 31 and a heating wire 34. The crucible body 1 is embedded in the heating dish 31, and the heating wire 34 is arranged between the heating dish 31 and the crucible body 1, and the heating wire 34 is arranged close to the crucible body 1.

[0038] Specifically, the crucible body 1 is heated by a heating wire 34. In the present invention, the heating wire 34 is placed in close contact with the surface of the crucible body 1. When the heating wire 34 is energized, the heating wire 34 generates heat to heat the crucible body 1. As a preferred embodiment of the present invention, the heating wire 34 can be made of a material selected from Ti, C, W, Mo, or Ta, and can be designed in a strip or wire shape.

[0039] Furthermore, a reflective plate 33 is provided on the outer side of the heating wire 34 , and the reflective plate 33 is provided close to the inner wall of the heating dish 31 .

[0040] Specifically, the reflective plate 33 is disposed on the outside of the heating wire 34 to emit the heat generated by the heating wire 34 to improve the heat preservation effect.

[0041] Furthermore, the height of the heating wires 34 near the middle of the crucible body 1 is smaller than the height of the heating wires 34 on both sides.

[0042] Specifically, the heating filament 34 is designed in a "bowl" shape, with higher sides and a lower center. Traditional evaporation source heating filaments 34 are typically "U"-shaped and arranged in parallel. During vapor deposition, material consumption on the two sides is higher than in the center. Therefore, designing the heating filament 34 in a "bowl" shape facilitates uniform heating of the material, improves film uniformity, increases material utilization, and saves costs. During normal film deposition, the material is evaporated onto the substrate surface in a parabolic pattern. The technical solution of this embodiment achieves essentially consistent temperatures on all three sides of the LCR during vapor deposition, resulting in uniform material consumption, increased continuous production time, and improved film uniformity on the substrate surface.

[0043] Furthermore, a heat-insulating cover 32 is provided on the top of the heating dish 31 , and a plurality of through holes 321 are provided on the surface of the heat-insulating cover 32 . The distribution area of ​​the through holes 321 corresponds to the distribution area of ​​the nozzles 211 .

[0044] Specifically, the insulation cover 32 is buckled on the top of the heating dish 31 to lock the heat generated by the heating wire 34 inside the heating dish 31. Secondly, in order not to affect the normal spraying of the nozzle 211, a through hole 321 is opened on the surface of the insulation cover 32 to cooperate with the nozzle 211, and the nozzle 211 is passed through the through hole 321.

[0045] Furthermore, as a preferred solution of the present invention, the size of the through hole 321 is equal to the size of the nozzle 211, so as to minimize the heat loss in the heating dish 31.

[0046] Furthermore, a cooling plate is provided at the bottom of the heating dish 31 , and the cooling plate is provided close to the bottom of the heating dish 31 .

[0047] As a preferred solution of the present invention, the cooling plate in the present invention is a water cooling cycle, and the cooling plate is close to the heating dish 31. After stopping heating, the water circulation of the cooling plate is turned on to quickly reduce the heat of the crucible body 1.

[0048] Furthermore, a mounting groove 11 cooperating with the partition 22 is provided inside the crucible body 1 , and the partition 22 and the mounting groove 11 are detachably connected.

[0049] Specifically, the installation of the mounting groove 11 facilitates the insertion and removal of the partition 22 and the adjustment of the height of the partition 22 .

[0050] Example 2

[0051] A deposition device includes the linear heating source crucible described in the first embodiment.

[0052] In summary, the present invention introduces a linear heating source crucible and deposition device. The crucible body 1 has a flat, peanut-shaped cross-section, and the nozzles 211 are distributed along the cross-section of the crucible body 1. During vapor deposition, the distribution area of ​​the nozzles 211 compensates for the differences caused by temperature differences. The flat, peanut-shaped structure ensures a relatively uniform film thickness distribution on the three sides of the LCR, with minimal variation in the amount deposited onto the substrate and consistent consumption. This ensures consistent film thickness on all three sides of the LCR, preventing significant variations in film thickness. This improves film uniformity and increases material utilization.

[0053] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A linear heating source crucible, characterized in that: include: a crucible body, wherein the cross section of the crucible body is a flat peanut shape; The injection assembly includes a spray plate and two partitions, the two partitions are equidistantly arranged inside the crucible body along the axial direction of the crucible body, and the two partitions divide the crucible body into three material filling areas; the spray plate is arranged on the top of the crucible body, and a plurality of nozzles are arranged on the surface of the spray plate, and the plurality of nozzles are evenly distributed on the spray plate, and the distribution surface of the plurality of nozzles is the same as the cross-section of the crucible body.

2. The linear heating source crucible according to claim 1, characterized in that: An inner plate is provided between the spray plate and the partition plate, and a plurality of equally distributed filtering holes are provided on the surface of the inner plate.

3. The linear heating source crucible according to claim 1, characterized in that: It also includes a heating component, which includes a heating dish and a heating wire. The crucible body is embedded in the heating dish, and the heating wire is arranged between the heating dish and the crucible body, and the heating wire is arranged closely to the crucible body.

4. The linear heating source crucible according to claim 3, characterized in that: A reflective plate is provided on the outer side of the heating wire, and the reflective plate is arranged close to the inner wall of the heating dish.

5. The linear heating source crucible according to claim 3, characterized in that: The height of the heating wires near the middle of the crucible body surface is smaller than the heights of the heating wires on both sides.

6. The linear heating source crucible according to claim 3, characterized in that: A heat-insulating cover is provided on the top of the heating dish, and a plurality of through holes are provided on the surface of the heat-insulating cover. The distribution area of ​​the through holes corresponds to the distribution area of ​​the nozzles.

7. The linear heating source crucible according to claim 6, characterized in that: The size of the through hole is equal to the size of the nozzle.

8. The linear heating source crucible according to claim 3, characterized in that: A cooling plate is provided at the bottom of the heating dish, and the cooling plate is arranged closely against the bottom of the heating dish.

9. The linear heating source crucible according to claim 1, characterized in that: The crucible body is provided with a mounting groove matched with the partition, and the partition is detachably connected to the mounting groove.

10. A deposition device, characterized in that: The linear heating source crucible comprises the linear heating source crucible according to any one of claims 1 to 9.

Images