Observation window magnetic baffle structure for high vacuum coating equipment

By adopting a magnetic baffle structure in a high-vacuum coating equipment, the problem of insufficient sealing of the observation window is solved, and an efficient vacuum sealing effect is achieved.

CN223268746UActive Publication Date: 2025-08-26XINNA (YANGZHOU) MICROELECTRONICS EQUIPMENT CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202422598228.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-28
Publication Date
2025-08-26
Estimated Expiration
2034-10-28

AI Technical Summary

Technical Problem

The existing high-vacuum coating equipment has insufficient sealing properties, resulting in vacuum leakage.

Method used

The magnetic baffle structure is adopted to achieve the rotational obstruction viewing window of the baffle through the magnetic suction relationship between the baffle shaft and the rotating handle, avoiding the operation of the sealing area and ensuring sealing.

Benefits of technology

It effectively solves the vacuum leakage problem caused by dynamic sealing structure and ensures the sealing of vacuum equipment to the greatest extent.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223268746U_ABST
    Figure CN223268746U_ABST
Patent Text Reader

Abstract

The utility model discloses an observation window magnetic baffle structure for high-vacuum coating equipment in the technical field of coating equipment, which is mounted on a door plate of the high-vacuum coating equipment and comprises a baffle seat mounted on the door plate and used for mounting a baffle shaft; the baffle shaft is installed in a cavity in the baffle seat, used for installing a baffle and driving the baffle to rotate and rotatably installed in the airborne landing, the front end of the baffle shaft is connected with the baffle, and the rear end of the baffle shaft is provided with an inner magnetic attraction block; the baffle is mounted at the front end of the baffle shaft and shields the observation window through rotation; according to the utility model, the baffle plate is controlled to rotate in a magnetic attraction manner, so that the problem that a dynamic sealing structure is easy to leak air in vacuum is solved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a high vacuum coating machine. Background Art

[0002] With the rapid development of modern science and technology, coating technology plays a vital role in many fields. As the key equipment for realizing coating process, the performance and technical level of coating machine directly affect the quality and performance of the product.

[0003] Commonly used coating machines include vacuum boxes. The door panel of the vacuum box is generally equipped with an observation window. When coating according to actual production needs, the observation window needs to be blocked from the inside to prevent the observation window from being coated with a layer of film. Since the baffle is inside the vacuum box and the operation is outside, this puts forward requirements for the sealing of the vacuum box. Currently, dynamic sealing structures such as magnetic fluid seals and skeleton oil seals are mostly used. This structure has very high processing requirements and is prone to poor sealing, resulting in vacuum leakage. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a magnetic baffle structure for an observation window of a high vacuum coating device, which solves the problem of insufficient sealing performance.

[0005] The purpose of the utility model is achieved as follows: a magnetic baffle structure for an observation window of a high vacuum coating device, which is installed on a door panel of the high vacuum coating device, comprising:

[0006] Baffle seat, installed on the door panel, used to install the baffle shaft;

[0007] The baffle shaft is installed in the cavity inside the baffle seat, used to install the baffle and drive it to rotate. It is rotatably installed in the airdrop, with the front end connected to the baffle and the rear end equipped with an internal magnetic block;

[0008] The baffle is installed at the front end of the baffle shaft and blocks the observation window by rotating;

[0009] The rotating handle is sleeved on the baffle seat, and an external magnetic block is arranged inside the rotating handle.

[0010] Furthermore, an inner mounting hole is provided at the rear end of the baffle shaft, and the inner magnet block is installed in the inner mounting hole.

[0011] Furthermore, a plurality of radial holes communicating with the inner mounting hole are formed on the outer periphery of the baffle shaft, and fasteners for fixing the inner magnet block are provided in the radial holes.

[0012] Furthermore, a magnetic sleeve is provided in the rotating handle, a plurality of external mounting holes are opened in the magnetic sleeve, and the external magnet blocks are installed in the external mounting holes.

[0013] Furthermore, a plurality of radial holes communicating with the outer mounting hole are formed on the outer periphery of the magnetic sleeve, and fasteners for fixing the outer magnet block are provided in the radial holes.

[0014] Furthermore, the baffle shaft is rotatably mounted in the baffle seat via a bearing.

[0015] Compared with the prior art, the beneficial effect of the present invention is that the present invention adopts a magnetic attraction method to control the rotation of the baffle, thereby solving the problem of vacuum leakage in the dynamic sealing structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0017] Figure 1 This is a schematic structural diagram of the utility model.

[0018] Figure 2 This is a cross-sectional view of the structure of the utility model.

[0019] Figure 3 This is an exploded view of the structure of the utility model.

[0020] Figure 4 This is a schematic diagram of the installation of the utility model.

[0021] Among them, 100 baffle seat, 200 baffle shaft, 201 inner mounting hole, 202 inner magnet block, 300 baffle, 400 bearing, 500 rotating handle, 600 magnetic sleeve, 601 outer mounting hole, 602 outer magnet block, 700 door panel, 701 observation window. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] like Figure 1-4 The magnetic baffle structure of an observation window for a high vacuum coating device is shown, which is installed on a door panel 700 of the high vacuum coating device, and includes:

[0024] The baffle seat 100 is mounted on the door panel 700 and is used to install the baffle shaft 200;

[0025] The baffle shaft 200 is installed in the cavity inside the baffle seat 100 to install the baffle 300 and drive it to rotate. It is rotatably installed in the air drop, with the front end connected to the baffle 300 and the rear end equipped with an internal magnetic block;

[0026] The baffle 300 is mounted on the front end of the baffle shaft 200 and blocks the observation window 701 by rotating;

[0027] The rotating handle 500 is sleeved on the baffle seat 100 and has an external magnetic block inside.

[0028] Specifically, a mounting slot is opened on the door panel 700, and the baffle seat 100 is fixed in the mounting slot by bolts. A sealing gasket is provided on the end face of the baffle seat 100. The middle part of the baffle seat 100 extends outward to form a boss, and a cavity is formed inside it. The baffle shaft 200 is extended into the cavity and arranged. The baffle shaft 200 is rotatably installed in the baffle seat 100 through a bearing 400. The baffle 300 is fixed to the front end of the baffle shaft 200 by bolts. The cross-section of the baffle shaft 200 is T-shaped, and the bearing 400 is sleeved in the middle of the baffle shaft 200. The rotating handle 500 is a circular knob-like structure with a cavity structure inside.

[0029] During operation, the rotating handle 500 is rotated, and due to the magnetic attraction between the outer magnet block 602 and the inner magnet block 202, the baffle shaft 200 is driven to rotate, thereby driving the rotation of the baffle 300, and realizing the opening and closing of the observation window 701 by the baffle 300; since the rotation operation process is realized by magnetic attraction, the operation area does not involve sealing issues, so the device can ensure sealing to the maximum extent.

[0030] Furthermore, an inner mounting hole 201 is formed at the rear end of the baffle shaft 200 , and the inner magnet block 202 is mounted in the inner mounting hole 201 .

[0031] Specifically, there are four inner mounting holes 201 corresponding to the four inner magnet blocks 202 , which are easy to install and maintain in the future and can be replaced according to usage.

[0032] Furthermore, a plurality of radial holes connected to the inner mounting hole 201 are formed on the outer periphery of the baffle shaft 200 , and fasteners for fixing the inner magnet block 202 are provided in the radial holes.

[0033] It should be noted that the fastener is a jackscrew, which is used to fix the inner magnet block 202 in the inner mounting hole 201, which is convenient and reliable.

[0034] Furthermore, a magnetic sleeve 600 is provided in the rotating handle 500 . A plurality of external mounting holes 601 are defined in the magnetic sleeve 600 . External magnet blocks 602 are mounted in the external mounting holes 601 .

[0035] Specifically, the magnetic sleeve 600 is also a cylindrical structure, with four external mounting holes 601, and four corresponding external magnet blocks 602 are installed inside the external mounting holes 601. The magnetic sleeve 600 is fixed in the rotating handle 500 by bolts.

[0036] Furthermore, a plurality of radial holes connected to the outer mounting hole 601 are opened on the outer periphery of the magnetic sleeve 600 , and fasteners for fixing the outer magnet block 602 are provided in the radial holes.

[0037] Furthermore, the fastener is a jackscrew, through which the outer magnet block 602 is fixed in the inner mounting hole 201, which is convenient and reliable.

[0038] The above embodiments are only intended to help understand the method and core concept of the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A magnetic baffle structure for an observation window of a high vacuum coating device, which is installed on a door panel (700) of the high vacuum coating device, and is characterized in that: include: A baffle seat (100) is mounted on the door panel (700) to mount the baffle shaft (200); The baffle shaft (200) is installed in the cavity inside the baffle seat (100) and is used to install the baffle (300) and drive it to rotate. It is rotatably installed in the cavity, with the front end connected to the baffle (300) and the rear end being installed with an inner magnet block (202; A baffle (300) is mounted on the front end of the baffle shaft (200) and blocks the observation window (701) by rotating; The rotating handle (500) is sleeved on the baffle seat (100) and has an external magnet block (602) disposed therein.

2. The magnetic baffle structure for an observation window of a high vacuum coating device according to claim 1, characterized in that: An inner mounting hole (201) is provided at the rear end of the baffle shaft (200), and the inner magnet block (202) is mounted in the inner mounting hole (201).

3. The magnetic baffle structure for an observation window of a high vacuum coating device according to claim 2, characterized in that: The outer circumference of the baffle shaft (200) is provided with a plurality of radial holes connected to the inner mounting hole (201), and fasteners for fixing the inner magnet block (202) are provided in the radial holes.

4. A magnetic baffle structure for an observation window of a high vacuum coating device according to any one of claims 1 to 3, characterized in that: A magnetic sleeve (600) is provided in the rotating handle (500), a plurality of external mounting holes (601) are provided in the magnetic sleeve (600), and the external magnet blocks (602) are installed in the external mounting holes (601).

5. The magnetic baffle structure for an observation window of a high vacuum coating device according to claim 4, characterized in that: The outer periphery of the magnetic sleeve (600) is provided with a plurality of radial holes connected to the outer mounting hole (601), and fasteners for fixing the outer magnet block (602) are provided in the radial holes.

6. A magnetic baffle structure for an observation window of a high vacuum coating device according to any one of claims 1 to 3, characterized in that: The baffle shaft (200) is rotatably mounted in the baffle seat (100) via a bearing (400).