Cooling structure of diamond growth table

Abstract

The utility model discloses a cooling structure of a diamond growing table, which comprises a growing table, a molybdenum ring is detachably mounted at the top end of the growing table, the molybdenum ring is attached to the growing table, a first water-cooling cavity and a second water-cooling cavity are arranged in the growing table, the first water-cooling cavity and the second water-cooling cavity are communicated through a plurality of through holes, and the first water-cooling cavity is communicated with the second water-cooling cavity through a plurality of through holes. A plurality of fin plate sets are arranged on the inner wall of the second water cooling cavity, and a gap is reserved between every two adjacent fin plate sets. A circulating pipeline communicated with the first water cooling cavity and the second water cooling cavity is arranged at the bottom end of the growth table, and the water inlet end of the circulating pipeline is communicated with the first water cooling cavity. The cooling liquid passes through the first water cooling cavity and the second water cooling cavity, heat of the growth table and the molybdenum ring attached to the growth table can be taken away, the growth table and the molybdenum ring are cooled, meanwhile, the contact area of the cooling liquid and the second water cooling cavity can be increased through the arranged fin plate sets, and the better cooling effect is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of accessories for MPCVD equipment, in particular to a cooling structure for a diamond growth table. Background Art

[0002] Microwave plasma chemical vapor deposition (MPCVD) is a method used to grow artificial diamonds. This method places a seed crystal in a vacuum chamber and introduces a carbon-containing mixed gas containing nitrogen, methane and hydrogen. Methane is the source of carbon atoms for synthetic diamonds, while nitrogen acts as a catalyst to increase the growth rate of diamonds. Hydrogen can inhibit the formation of graphite. Under the action of microwave plasma, the carbon-containing gas is dissociated and carbon atoms are deposited into a diamond film on the diamond substrate.

[0003] For example, the patent with patent number CN116695099B includes a base plate, a cover plate lifting drive device, an upper sealing cover, a lower sealing plate, a first water cooling assembly and a growth table lifting drive device; the upper sealing cover is connected to the cover plate lifting drive device; the upper sealing cover and the lower sealing plate form a reaction chamber; the lower sealing plate is provided with a diamond growth table, and the diamond growth table is provided with a lifting groove and a positioning ring; the positioning ring is sleeved in the lifting groove; the growth table lifting drive device is connected to the positioning ring, and the first water cooling assembly is used to cool the positioning ring.

[0004] Although the above device can adjust the distance between the sample diamond and the plasma to ensure continuous growth of the diamond, the cooling structure of the diamond growth table is relatively simple and the cooling effect is not good. Utility Model Content

[0005] In view of the above-mentioned defects, the purpose of the present invention is to provide a cooling structure for a diamond growth table, so as to solve the problem that the cooling structure of the existing diamond growth table is relatively simple and the cooling effect is poor.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] A cooling structure for a diamond growth table, comprising a growth table, a molybdenum ring detachably mounted on a top end of the growth table, the molybdenum ring being in contact with the growth table, a first water-cooling chamber and a second water-cooling chamber being provided within the growth table, the first water-cooling chamber and the second water-cooling chamber being connected by a plurality of through holes, and a plurality of fin plate groups being provided on an inner wall of the second water-cooling chamber, with gaps being left between adjacent fin plate groups;

[0008] A circulation pipeline communicating with the first water-cooling cavity and the second water-cooling cavity is provided at the bottom end of the growth platform, wherein the water inlet end of the circulation pipeline is communicated with the first water-cooling cavity, and the water outlet end of the circulation pipeline is communicated with the second water-cooling cavity.

[0009] Preferably, the growth platform includes an upper platform, a partition and a lower platform arranged in sequence from top to bottom, the upper platform and the lower platform form a chamber, the partition divides the chamber into the first water-cooling chamber and the second water-cooling chamber, and the first water-cooling chamber is located below the second water-cooling chamber;

[0010] A plurality of through hole annular arrays are distributed on the end surface of the partition.

[0011] Preferably, the top end of the upper pedestal is provided with an annular protrusion, and the bottom end of the molybdenum ring is provided with an annular groove, and the annular protrusion is engaged in the annular groove.

[0012] Preferably, the molybdenum ring is detachably mounted on the top of the upper pedestal by bolts.

[0013] Preferably, the plurality of through holes are arranged around the outside of the plurality of fin plate groups, and the plurality of fin plate groups are arranged in a circular array at the bottom end of the upper pedestal.

[0014] Preferably, the plurality of fin plate groups and the upper pedestal are an integrally formed structure.

[0015] Preferably, each group of the fin plate groups includes a plurality of arc-shaped plates, and the arc-shaped plates of the plurality of groups of the fin plate groups are coaxially arranged, with gaps being left between adjacent arc-shaped plates.

[0016] Preferably, the circulation pipeline includes a first water pipe, a second water pipe is provided on the outside of the first water pipe, a third water pipe is provided on the outside of the second water pipe, the first water pipe is fixedly connected to the bottom end of the upper pedestal, the second water pipe is fixedly connected to the bottom end of the partition, and the third water pipe is fixedly connected to the bottom end of the lower pedestal, a water outlet channel connected to the second water-cooling chamber is formed between the first water pipe and the second water pipe, and a water inlet channel connected to the first water-cooling chamber is formed between the second water pipe and the third water pipe.

[0017] Preferably, the growth platform is made of stainless steel.

[0018] The technical solution provided by the utility model may have the following beneficial effects:

[0019] By passing the coolant through the first water-cooling chamber and the second water-cooling chamber, the heat of the growth table and the molybdenum ring attached to the growth table can be taken away to cool the growth table and the molybdenum ring. At the same time, the contact area between the coolant and the second water-cooling chamber can be increased by setting up several fin plate groups, thereby achieving a better cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the internal structure of the growth platform of the present invention;

[0022] Figure 3 It is a top view of the internal structure of the second water-cooling chamber of the present invention.

[0023] Among them: 1. Molybdenum ring; 2. Growth table; 21. First water-cooling chamber; 22. Second water-cooling chamber; 23. Through hole; 24. Fin plate assembly; 25. Upper pedestal; 251. Annular protrusion; 26. Lower pedestal; 3. Partition; 4. Circulation pipeline; 41. First water pipe; 42. Second water pipe; 43. Third water pipe; 44. Water outlet channel; 45. Water inlet channel. DETAILED DESCRIPTION

[0024] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0025] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more such features, and are used to distinguish between the described features, without distinction of order or importance.

[0026] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0027] Below is the accompanying drawings Figures 1 to 3 The technical solution of the utility model is further illustrated through specific implementation methods.

[0028] like Figure 1-3As shown, a cooling structure for a diamond growth table includes a growth table 2, a molybdenum ring 1 being detachably mounted on the top of the growth table 2, the molybdenum ring 1 being in contact with the growth table 2, a first water-cooling chamber 21 and a second water-cooling chamber 22 being provided within the growth table 2, the first water-cooling chamber 21 and the second water-cooling chamber 22 being connected by a plurality of through holes 23, and a plurality of fin plate groups 24 being provided on the inner wall of the second water-cooling chamber 22, with gaps being left between adjacent fin plate groups 24;

[0029] A circulation pipeline 4 communicating with the first water-cooling chamber 21 and the second water-cooling chamber 22 is provided at the bottom end of the growth platform 2 . The water inlet end of the circulation pipeline 4 is connected to the first water-cooling chamber 21 , and the water outlet end of the circulation pipeline 4 is connected to the second water-cooling chamber 22 .

[0030] By passing the coolant through the first water-cooling chamber 21 and the second water-cooling chamber 22, the heat of the growth table 2 and the molybdenum ring 1 in contact with the growth table 2 can be taken away to cool the growth table 2 and the molybdenum ring 1. At the same time, by setting up several fin plate groups 24, the contact area between the coolant and the second water-cooling chamber 22 can be increased, thereby achieving a better cooling effect.

[0031] Specifically, the coolant enters the first water cooling chamber 21 through the water inlet of the circulation pipe 4 and flows into the second water cooling chamber 22 through the plurality of through holes 23 , and then flows out from the water outlet of the circulation pipe 4 after passing through the gaps between adjacent fin plate groups 24 .

[0032] like Figure 2-3 As shown, the growth platform 2 includes an upper base 25, a partition 3 and a lower base 26 arranged in sequence from top to bottom. A chamber is enclosed between the upper base 25 and the lower base 26. The partition 3 divides the chamber into the first water-cooling chamber 21 and the second water-cooling chamber 22. The first water-cooling chamber 21 is located below the second water-cooling chamber 22.

[0033] A plurality of through holes 23 are distributed in an annular array on the end surface of the partition 3 .

[0034] Specifically, compared to directly machining the first water-cooling cavity 21 and the second water-cooling cavity 22 inside the growth platform 2 , the growth platform 2 is composed of the upper platform 25 , the partition 3 and the lower platform 26 , which can facilitate the manufacture of the growth platform 2 .

[0035] It is worth noting that, since the first water-cooling chamber 21 is located below the second water-cooling chamber 22, the coolant enters the first water-cooling chamber 21 through the water inlet end of the circulation pipe 4 and fills the first water-cooling chamber 21 before entering the second water-cooling chamber 22 through the plurality of through holes 23, thereby allowing the coolant to fully contact the first water-cooling chamber 21.

[0036] like Figure 2As shown, the top of the upper pedestal 25 is provided with an annular protrusion 251, and the bottom end of the molybdenum ring 1 is provided with an annular groove, and the annular protrusion 251 is engaged in the annular groove.

[0037] Specifically, by engaging the annular protrusion 251 with the annular groove, the positioning and installation of the molybdenum ring 1 can be facilitated, and the molybdenum ring 1 can be prevented from sliding and deflecting.

[0038] like Figure 2 As shown, the molybdenum ring 1 is detachably mounted on the top of the upper pedestal 25 by bolts.

[0039] Specifically, the molybdenum ring 1 is detachably mounted on the top of the upper pedestal 25 by means of bolts. The installation is simple, quick, and low-cost, and the molybdenum ring 1 and the upper pedestal 25 can be easily disassembled and assembled.

[0040] like Figure 2-3 As shown, the plurality of through holes 23 are arranged around the outside of the plurality of fin plate groups 24 , and the plurality of fin plate groups 24 are arranged in a circular array at the bottom end of the upper pedestal 25 .

[0041] Specifically, since the molybdenum ring 1 is installed on the top of the upper pedestal 25, the several fin plate groups 24 are arranged at the bottom end of the upper pedestal 25, so that the several fin plate groups 24 can be closer to the molybdenum ring 1, so that the heat of the molybdenum ring 1 can be transferred to the several fin plate groups 24 faster. The coolant contacts the several fin plate groups 24 to take away the heat of the several fin plate groups 24, thereby having a good cooling effect on the molybdenum ring 1.

[0042] like Figure 2-3 As shown, the plurality of fin plate groups 24 and the upper pedestal 25 are an integrally formed structure.

[0043] Specifically, the plurality of fin plate groups 24 and the upper platform 25 are an integrally formed structure, which can facilitate the manufacture of the growth platform 2 .

[0044] like Figure 3 As shown, each group of the fin plate groups 24 includes a plurality of arc-shaped plates. The arc-shaped plates of the plurality of groups of the fin plate groups 24 are coaxially arranged, and gaps are left between adjacent arc-shaped plates.

[0045] Specifically, the coolant flows in the gaps between adjacent curved plates, which allows the coolant to fully contact the curved plates, thereby increasing the contact area between the coolant and the second cooling cavity 22 to achieve a better cooling effect.

[0046] like Figure 2As shown, the circulation pipeline 4 includes a first water pipe 41, the outer part of the first water pipe 41 is provided with a second water pipe 42, the outer part of the second water pipe 42 is provided with a third water pipe 43, the first water pipe 41 is fixedly connected to the bottom end of the upper pedestal 25, the second water pipe 42 is fixedly connected to the bottom end of the partition 3, and the third water pipe 43 is fixedly connected to the bottom end of the lower pedestal 26. A water outlet channel 44 communicating with the second water-cooling chamber 22 is formed between the first water pipe 41 and the second water pipe 42, and a water inlet channel 45 communicating with the first water-cooling chamber 21 is formed between the second water pipe 42 and the third water pipe 43.

[0047] Specifically, the coolant enters the first water-cooling chamber 21 through the water inlet channel between the second water pipe 42 and the third water pipe 43. The coolant in the first water-cooling chamber 21 enters the second water-cooling chamber 22 through the plurality of through holes 23. The coolant in the second water-cooling chamber 22 passes through the gaps between the plurality of fin plate groups 24 and then flows out through the water outlet channel 44 between the first water pipe 41 and the second water pipe 42, so that the coolant flows in the first water-cooling chamber 21 and the second water-cooling chamber 22.

[0048] like Figure 1 As shown, the growth platform 2 is made of stainless steel.

[0049] Specifically, stainless steel has good corrosion resistance, so that the growth platform 2 has a good service life in the diamond growth environment. At the same time, stainless steel has excellent welding reliability. Therefore, the upper platform 25, the partition 3 and the lower platform 26 can be welded to form the growth platform 2, so that the growth platform 2 has good sealing performance.

[0050] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are intended solely to illustrate the principles of the present invention and should not be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, those skilled in the art will be able to devise other specific implementations of the present invention without inventive effort, and such implementations will fall within the scope of protection of the present invention.

Claims

1. A cooling structure for a diamond growth table, characterized in that: The invention comprises a growth platform (2), a molybdenum ring (1) is detachably mounted on the top of the growth platform (2), the molybdenum ring (1) and the growth platform (2) are fitted together, a first water-cooling cavity (21) and a second water-cooling cavity (22) are provided inside the growth platform (2), the first water-cooling cavity (21) and the second water-cooling cavity (22) are connected through a plurality of through holes (23), the inner wall of the second water-cooling cavity (22) is provided with a plurality of fin plate groups (24), and gaps are left between adjacent fin plate groups (24); A circulation pipeline (4) connected to the first water-cooling chamber (21) and the second water-cooling chamber (22) is provided at the bottom end of the growth platform (2); the water inlet end of the circulation pipeline (4) is connected to the first water-cooling chamber (21), and the water outlet end of the circulation pipeline (4) is connected to the second water-cooling chamber (22).

2. The cooling structure of a diamond growth table according to claim 1, characterized in that: The growth platform (2) comprises an upper platform (25), a partition (3) and a lower platform (26) arranged in sequence from top to bottom, wherein a chamber is enclosed between the upper platform (25) and the lower platform (26), and the partition (3) divides the chamber into the first water-cooling chamber (21) and the second water-cooling chamber (22), wherein the first water-cooling chamber (21) is located below the second water-cooling chamber (22); A plurality of through holes (23) are distributed in an annular array on the end surface of the partition (3).

3. The cooling structure of a diamond growth table according to claim 2, characterized in that: The top end of the upper pedestal (25) is provided with an annular protrusion (251), and the bottom end of the molybdenum ring (1) is provided with an annular groove, and the annular protrusion (251) is engaged in the annular groove.

4. The cooling structure of a diamond growth table according to claim 2, wherein: The molybdenum ring (1) is detachably mounted on the top end of the upper pedestal (25) via bolts.

5. The cooling structure of a diamond growth table according to claim 2, characterized in that: The plurality of through holes (23) are arranged around the outside of the plurality of fin plate groups (24), and the plurality of fin plate groups (24) are arranged in an annular array at the bottom end of the upper pedestal (25).

6. The cooling structure of a diamond growth table according to claim 2, characterized in that: The plurality of fin plate groups (24) and the upper pedestal (25) are an integrally formed structure.

7. The cooling structure of a diamond growth table according to claim 1, characterized in that: Each group of the fin plate groups (24) comprises a plurality of arc-shaped plates, and the plurality of arc-shaped plates of the plurality of groups of the fin plate groups (24) are coaxially arranged, with gaps being left between adjacent arc-shaped plates.

8. The cooling structure of a diamond growth table according to claim 2, characterized in that: The circulation pipeline (4) comprises a first water pipe (41), a second water pipe (42) is provided on the outside of the first water pipe (41), a third water pipe (43) is provided on the outside of the second water pipe (42), the first water pipe (41) is fixedly connected to the bottom end of the upper pedestal (25), the second water pipe (42) is fixedly connected to the bottom end of the partition (3), and the third water pipe (43) is fixedly connected to the bottom end of the lower pedestal (26), a water outlet channel (44) communicating with the second water-cooling chamber (22) is formed between the first water pipe (41) and the second water pipe (42), and a water inlet channel (45) communicating with the first water-cooling chamber (21) is formed between the second water pipe (42) and the third water pipe (43).

9. The cooling structure of a diamond growth table according to claim 1, characterized in that: The growth platform (2) is made of stainless steel.

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