Purge load port and nozzle gasket

Abstract

The embodiment of the utility model provides a nozzle gasket. The nozzle gasket comprises a central shaft, a first end, a second end opposite to the first end, a through hole which is aligned with the central shaft and extends from the first end to the second end, a sealing structure at the first end and a deformation structure at the second end, the sealing structure includes a first sealing portion extending around the central axis, a second sealing portion extending around the central extension axis and around the first sealing portion, and a recess between the first and second sealing portions, the recess extending around the central axis and around the first sealing portion, the deformation structure is configured to deform when the container is placed on the sealing structure in operation. The nozzle gasket prevents vibration from causing at least some of the purge fluid to escape or leak rather than being injected into the interior chamber of the container.

Description

Technical Field

[0001] The embodiments of the utility model relate to a purification loading port and a nozzle gasket, and in particular to a purification loading port with a nozzle gasket having a deformable structure. Background Art

[0002] When transporting wafers and workpieces within a semiconductor fabrication facility (FAB), one or more containers (e.g., front-opening wafer pods or front-opening universal pods (FOUPs)) are used to transport the wafers and workpieces for processing into corresponding electronic components (e.g., semiconductor dies, integrated circuits, or other similar or similar types of electronic components that can be manufactured within the FAB). These containers are transported between various processing tools used to process the wafers and workpieces into various electronic components via a transport system such as an overhead transport system (OHT). One or more purge load ports are provided, and containers are positioned, loaded, and mounted on the purge load ports so that purge fluid is injected from the purge load ports into or at the container to clean the corresponding surfaces of the container. When overdue debris, contaminants, or residual particles accumulate on the corresponding surfaces of the container, the container is cleaned. At least some of these corresponding surfaces define an internal chamber of the container, and when the workpieces and wafers are transported between various processing tools and locations within the FAB, the workpieces and wafers are inserted into the internal chamber of the container. Utility Model Content

[0003] An embodiment of the present invention provides a nozzle gasket comprising a central axis, a first end and a second end opposite to the first end, a through hole aligned with the central axis and extending from the first end to the second end, a sealing structure at the first end and a deformation structure at the second end, the sealing structure comprising a first sealing portion extending around the central axis, a second sealing portion extending around the central extension axis and around the first sealing portion, and a recess between the first and second sealing portions, the recess extending around the central axis and around the first sealing portion, and the deformation structure being configured to deform during operation when a container is placed on the sealing structure.

[0004] An embodiment of the present invention provides a purge loading port including a nozzle structure and a nozzle gasket mounted to the nozzle structure. The nozzle structure includes a base including a base surface, a nozzle protruding from the base surface of the base, the nozzle including an end spaced apart from the base surface of the base, the nozzle structure further including a nozzle hole extending into the end of the nozzle and a lip structure at the end of the nozzle. The nozzle gasket extends around the nozzle and includes a first end extending beyond the end of the nozzle, a second end opposite the first end, a through hole extending from the first end to the second end, a sealing structure at the first end, and a deformation structure at the second end, wherein the second end is on the base surface of the base.

[0005] Based on the above, the purge loading port includes a nozzle structure and a nozzle gasket mounted to the nozzle structure. The nozzle gasket prevents vibrations from causing at least some of the purge fluid to escape or leak instead of being injected into the corresponding internal chamber of the first container. When the purge fluid is injected into the internal chamber of the container, vibrations in the nozzle gasket cause the first container positioned above the nozzle gasket to deflect. Preventing vibrations in the nozzle gasket prevents or reduces the likelihood of the purge fluid escaping or leaking from the seal between the nozzle gasket and the first container positioned above the nozzle gasket. Preventing or reducing the escape or leakage of the purge fluid reduces operating and running costs, and little or no purge fluid is wasted when purging or cleaning the corresponding internal chambers of the plurality of containers.

[0006] In order to make the above features and advantages of the embodiments of the present invention more obvious and easy to understand, the following embodiments are specifically cited and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 is a perspective view of a purge loadport according to some embodiments.

[0008] Figure 2 According to some embodiments Figure 1 A perspective view of a decontamination loadport is shown with a container (e.g., a FOUP) mounted on the decontamination loadport.

[0009] Figure 3A It is a three-dimensional diagram of the nozzle gasket and nozzle structure.

[0010] Figure 3B It is along Figure 3A A cross-sectional perspective view of the nozzle gasket and nozzle structure in an undeformed state is shown, taken along line AA.

[0011] Figure 3C It is along Figure 3AA cross-sectional perspective view of the nozzle gasket and nozzle structure in a deformed state is shown, taken along line AA.

[0012] Figure 4A is a perspective view of a nozzle gasket and nozzle structure according to some embodiments.

[0013] Figure 4B According to some embodiments Figure 4A A cross-sectional perspective view of the nozzle gasket and nozzle structure in an undeformed state is shown, taken along line BB.

[0014] Figure 4C According to some embodiments Figure 4A A cross-sectional perspective view of the nozzle gasket and nozzle structure in a deformed state is shown, taken along line BB.

[0015] Figure 4D According to some embodiments Figure 4A A cross-sectional partial side view of the nozzle gasket and nozzle structure in a deformed state is shown, taken along line BB.

[0016] Figure 4E According to some embodiments Figure 4A A cross-sectional side view of the nozzle gasket in an undeformed state is shown taken along line BB.

[0017] Figure 5 is a flow chart of a method of purifying respective interior chambers of respective containers used to transfer wafers or workpieces between various processing tools or locations within a FAB, in accordance with some embodiments.

[0018] Figure 6 According to some embodiments, the detection Figure 1 A flow chart of a method for purging a leak within a loading port is shown.

[0019] Figure 7A According to some embodiments Figures 4A-4E Exploded perspective view of the fasteners, nozzle gasket, and nozzle structure shown.

[0020] Figure 7B According to some embodiments Figures 4A-4E A perspective view of the fasteners, nozzle gasket, and nozzle structure shown.

[0021] Description of Reference Numerals

[0022] 100: Purge loading port; 102: Container; 104: Internal chamber; 106: Receiving area; 108: Fluid source; 110: Regulator; 112a: Valve / first valve; 112b: Valve / second valve; 112c: Valve / third valve; 114: Solenoid valve; 116: Pressure sensor; 118: First flow sensor; 120: Filter; 122a, 122b: Purge nozzle / first pair of nozzles; 122c, 122d: Purge nozzle / second pair of nozzles; 124: Humidity and temperature sensor ; 126: second flow sensor; 128: guide structure; 130, 344: mounting surface; 200, 300: nozzle gasket; 202, 302: nozzle structure; 204, 308: deformable structure; 206, 310: first end; 208: base structure; 210, 312: second end; 212, 314: base; 214, 316: base surface; 216, 318: nozzle; 218, 320: third end; 220, 322: nozzle opening / nozzle hole; 222: First portion; 224: Second portion; 226: First angle; 228: Lip portion; 230, 340: Space; 304: Sealing structure; 306: Mounting structure; 321: Surface; 324: Threaded area; 326: First sealing portion; 328: Second sealing portion; 330: Recess; 332: Bevel portion; 334: Second angle; 336: Third angle; 338: Lip portion; 342: Receiving opening; 346: Fourth angle; 348: First point; 350: External bevel; 352 : second point; 354: inner bevel; 356: first inner angle surface; 358: second inner angle surface; 360: fifth angle; 362: sixth angle; 400, 500: flow chart; 402, 502: first step; 404, 504: second step; 406, 506: third step; 508: fourth step; 510: stop structure / threaded fastener; AA, BB: line; CA: axis; H0: height; H1: first height; H2: second height; H3: third height; W1: width. DETAILED DESCRIPTION

[0023] The following disclosure provides many different embodiments or examples for implementing the different features of the present disclosure. Specific examples of components and arrangements are described below to simplify the present disclosure. Of course, these are merely examples and are not intended to limit the scope of the present disclosure. For example, in the following description, a first feature is formed "above" or "on" a second feature, which may include an embodiment in which the first feature and the second feature are formed to be in direct contact, or an embodiment in which an additional feature is formed between the first feature and the second feature so that the first feature and the second feature are not in direct contact. In addition, the present disclosure may reuse component numbers and / or letters in various examples. Such repetition is for the purpose of simplifying and clarifying the description of the present disclosure, and is not intended to limit the relationship between the various embodiments and / or configurations.

[0024] Furthermore, for ease of description, spatially relative terms such as "below," "beneath," "lower," "above," and "upper" may be used herein to describe the relationship of one component or feature to another component or feature as depicted in the figures. These spatially relative terms encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be in other orientations (rotated 90 degrees or at other orientations) and the spatially relative terms used therein may be interpreted in a similar manner.

[0025] Generally speaking, integrated circuits are manufactured using wafers or workpieces (e.g., semiconductor wafers or workpieces, silicon wafers or workpieces, etc.), which are transported between various processing tools and locations within a semiconductor fabrication facility (FAB) to manufacture electronic components (e.g., semiconductor dies, integrated circuits, or other similar or comparable electronic components that can be manufactured within the FAB). Multiple containers are used to transport the wafers or workpieces between the various processing tools and locations within the FAB. The multiple containers may be front-opening wafer pods or front-opening universal pods (FOUPs), which are configured to receive multiple wafers or workpieces during operation. The multiple containers are transported between the various processing tools and locations within the FAB by an overhead transport system (OHT) within the FAB. When the multiple containers are reused to transport wafers and workpieces between these different processing tools and locations, residual debris, contaminants, or particles may accumulate on respective surfaces of the multiple containers. At least some of these respective surfaces define respective internal chambers of the multiple containers.

[0026] After a selected period of use, a first container from the plurality of containers is cleaned by positioning, mounting, or loading it into a purge load port, such that a purge or cleaning fluid is injected from one or more air purge nozzles in the purge load port into the corresponding internal chamber of the first container. Purge fluid is injected from the one or more air purge nozzles into the corresponding internal chamber of the first container, thereby purifying or cleaning the corresponding surfaces and corresponding internal chambers of the first container by removing residual debris, contaminants, or particles accumulated on the corresponding surfaces or in the corresponding internal chambers of the first container. This process is repeated over and over again to continuously clean each corresponding surface and corresponding internal chamber of the various containers used to transport wafers and workpieces throughout the FAB. However, when the purge fluid is ejected from the air purge nozzles, the upper end of the nozzle gasket, which seals the air purge nozzle with the inlet of the first container and is fluidically connected to the corresponding internal chamber of the first container, vibrates. This vibration, which may be referred to as "beading," causes the container to shift on the purge load port. The deflection of the container due to vibration or deformation of the upper end of the nozzle gasket causes some of the purge fluid to escape or leak from the seal between the nozzle gasket and the first container. This escape or leakage of purge fluid increases costs because the escaping or leaking purge fluid is wasted rather than being injected into the corresponding internal chamber of the first container.

[0027] In light of the foregoing discussion, the present disclosure relates to one or more embodiments of a nozzle gasket that prevents vibrations from causing at least some of the purge fluid to escape or leak rather than being injected into the corresponding internal chamber of a first container. In other words, when the purge fluid is injected into the internal chamber of the container, vibrations in the nozzle gasket cause the first container positioned on the nozzle gasket to deflect. Preventing vibrations in the nozzle gasket prevents or reduces the likelihood of the purge fluid escaping or leaking from the seal between the nozzle gasket and the first container positioned on the nozzle gasket. Preventing or reducing the escape or leakage of the purge fluid reduces the cost of operating and running the FAB, and little or no purge fluid is wasted when purging or cleaning the corresponding internal chambers of the plurality of containers.

[0028] Figure 1 is a perspective view of a purge load port 100 according to some embodiments. The purge load port 100 is configured to receive a container 102 (see Figure 2), so that the interior chamber 104 of the container 102 can be purged or cleaned by injecting a purging or cleaning fluid into the interior chamber 104 of the container 102. The container 102 can be a front-loading wafer pod or a front-loading universal pod (FOUP), which is configured to receive a large number of wafers or workpieces during operation for refining and processing by various processing tools within a semiconductor fabrication facility (FAB). The purge loadport 100 includes a receiving area (or surface) 106, on which the container 102 is positioned, loaded, or mounted when the interior chamber 104 of the container 102 is purged or cleaned using the purge loadport 100.

[0029] A purge fluid source 108 is in fluid communication with the purge loading port 100. The purge or cleaning fluid source 108 provides a purge or cleaning fluid to the purge loading port 100. The purge or cleaning fluid is typically a gaseous fluid. For example, a purge or cleaning fluid such as clean dry air (CDA) may include nitrogen, oxygen, argon, or some other type of purge or cleaning fluid or combination of purge or cleaning fluids that are injected into the interior chamber 104 of the container 102 to purge or clean the interior chamber 104 of the container 102.

[0030] The regulator 110 of the purge loading port 100 is in fluid communication with the fluid source 108. The regulator 110 is configured to regulate the flow of fluid into and through the purge loading port 100 during operation. A plurality of valves (112a, 112b, 112c) are present within the purge loading port 100 and are configured to control the flow of the purge fluid through the corresponding fluid lines and connections within the purge loading port 100 during operation. The plurality of valves (112a, 112b, 112c) include a first valve 112a, a second valve 112b, and a third valve 112c. The first, second, and third valves (112a, 112b, 112c) may be pneumatic valves or may be some other similar or like type of valves suitable for controlling the flow of the purge fluid through the corresponding fluid lines and connections of the purge loading port 100.

[0031] A solenoid valve 114 is in fluid communication with the first, second, and third valves (112a, 112b, 112c). The solenoid valve 114 is configured to control or supply power to open and close the first, second, and third valves (112a, 112b, 112c). For example, each or all of the first, second, and third valves (112a, 112b, 112c) can be opened or closed to introduce CDA through each or all of the first, second, and third valves (112a, 112b, 112c).

[0032] Along the respective fluid lines extending from the first valve 112a to the second valve 112b, there is a pressure sensor (or gauge) 116. The pressure sensor 116 is configured to monitor and collect data regarding the pressure of the purified fluid as it flows through the respective fluid lines between the first valve 112a and the second valve 112b during operation.

[0033] A first flow sensor (or meter) 118 is present along the corresponding fluid line extending from the first valve 112a to the second valve 112b. The first flow sensor 118 is present between the pressure sensor 116 and the second valve 112b. The first flow sensor 118 is configured to monitor and collect data regarding the flow rate or flow rate of the purified fluid as it flows through the corresponding fluid line between the first valve 112a and the second valve 112b.

[0034] The filter 120 is in fluid communication with the second valve 112b via a corresponding fluid line and is located between the second valve 112b and at least one of the plurality of purge nozzles (122a, 122b, 122c, 122d). The filter 120 is configured to filter debris, contaminants, or particles from the purge fluid flowing through the purge loading port 100 during operation. Figure 1 As shown, the first pair of nozzles (122a, 122b) of the plurality of cleaning nozzles (122a, 122b, 122c, 122d) are in fluid communication with the filter 120 via respective fluid lines. Figure 1 As shown, the first pair of nozzles (122a, 122b) of the plurality of purge nozzles (122a, 122b, 122c, 122d) are injection or inlet purge nozzles through which purge fluid is injected into the interior chamber 104 of the container 102 to purge or clean the interior chamber 104 of the container 102 using the purge fluid flowing through the purge loading port 100. Figure 1 In the illustrated embodiment, a second pair of nozzles (122c, 122d) of the plurality of purge nozzles (122a, 122b, 122c, 122d) are exhaust or outlet purge nozzles through which the purge fluid is exhausted from the interior chamber 104 of the container 102 and returned to the purge loading port 100 after passing through the interior chamber 104 of the container 102. In some alternative embodiments, various combinations of the plurality of purge nozzles (122a, 122b, 122c, 122d) may be injection or inlet purge nozzles and exhaust or outlet purge nozzles that allow the purge fluid to enter and exit the interior chamber 104 of the container 102 as it is being purged or cleaned.

[0035] A humidity and temperature sensor (or gauge) 124 is in fluid communication with a second pair of nozzles (122c, 122d) of the plurality of purge nozzles (122a, 122b, 122c, 122d) via corresponding fluid lines between the second pair of nozzles (122c, 122d) of the plurality of purge nozzles (122a, 122b, 122c, 122d) and the humidity and temperature sensor 124. The humidity and temperature sensor (or gauge) 124 is configured to monitor or collect data regarding humidity and temperature of the purge fluid passing through the purge loading port 100 during operation.

[0036] The second flow sensor (or meter) 126 is in fluid communication with the humidity and temperature sensor (or meter) 124 via corresponding fluid lines between the humidity and temperature sensor 124 and the second flow sensor 126. The second flow sensor 126 is configured to monitor and collect data regarding the flow rate or flow velocity of the purge fluid as it passes through the purge loading port 100 during operation.

[0037] Although not shown, a controller (not shown) is in electrical communication with corresponding features of the purge loading port 100 so that the controller can control or collect data from various features of the purge loading port 100. For example, the controller is in electrical communication with the plurality of valves (112a, 112b, 112c) and provides control signals to the plurality of valves (112a, 112b, 112c) to open and close the plurality of valves (112a, 112b, 112c), the controller is in electrical communication with the solenoid valve 114 and provides control signals to the solenoid valve 114 to open and close the solenoid valve 114, and the controller is in electrical communication with the first flow sensor 118, the pressure sensor 116, the humidity and temperature sensor 124, and the second flow sensor 126 to collect data about the purge fluid passing through the purge loading port 100, which data can be used to control various operations of the purge loading port 100. The controller may be in electrical communication with a filter sensor (not shown) that monitors the efficiency of the filter 120 in filtering debris, contaminants, or particulates from the purge fluid passing through the purge loading port 100 .

[0038] One or more guide structures (or pins) 128 are present at the receiving area 106, which receives the container 102. Figure 1In the illustrated embodiment, the one or more guide structures 128 are outwardly protruding pins. The one or more guide structures 128 are present and configured to, in operation, align a corresponding inlet (not shown) of the container 102 with a first pair of nozzles (122a, 122b) of the plurality of purge nozzles (122a, 122b, 122c, 122d) and align a corresponding outlet (not shown) of the container 102 with a second pair of nozzles (122c, 122d) of the plurality of purge nozzles (122a, 122b, 122c, 122d). When purging or cleaning the interior chamber 104 of the container 102, such alignment of the respective inlet and the respective outlet of the container 102 with the first pair of nozzles (122a, 122b) and the second pair of nozzles (122c, 122d), respectively, of the plurality of purge nozzles (122a, 122b, 122c, 122d), allows purge fluid to enter and exit the interior chamber 104. Although not shown, the container 102 may include a guide receiving opening configured to receive one or more guide structures 128 during operation so that the container 102 is properly positioned, loaded, or mounted onto the receiving area 106 of the purge loading port 100.

[0039] Figure 2 According to some embodiments Figure 1 A perspective view of the decontamination load port 100 is shown with a container 102 (e.g., a FOUP) positioned, loaded, or mounted on a receiving area 106 of the decontamination load port 100. The interior chamber 104 within the container 102 is in fluid communication with the plurality of decontamination nozzles (122a, 122b, 122c, 122d) via respective inlets and outlets (not shown) of the container, which provide fluid access to the interior chamber 104 within the container 102 when the container 102 is positioned, loaded, or mounted on the decontamination load port 100. The container 102 includes a receiving or mounting surface 130 that abuts the receiving area 106 when the container 102 is positioned, loaded, or mounted on the decontamination load port 100. The receiving or mounting surface 130 is based on the embodiment of the present invention. Figure 2 The orientation of the container is shown with respect to the lower surface of the container 102 .

[0040] Figure 3A is a perspective view of a nozzle gasket 200 and a nozzle or nozzle structure 202 that can be used to purge the plurality of purge nozzles (122a, 122b, 122c, 122d) of the load port 100. However, as shown in FIG. Figures 3A-3C As will become apparent from the following discussion, the nozzle gasket 200 allows at least some of the purge fluid from the purge loading port 100 to escape or leak when the purge fluid is injected into the interior chamber 104 of the vessel 102. This escape or leakage of purge fluid increases the cost of operating and running the FAB.

[0041] The nozzle gasket 200 is removably mounted or coupled to the nozzle structure 202. The nozzle gasket 200 includes a deformable structure 204 at a first end 206 of the nozzle gasket 200, based on the Figure 3A In the orientation shown, the first end 206 is the upper end of the nozzle gasket 200. When the container 102 is positioned, loaded, or mounted on the receiving area 106 of the purge loading port 100, the deformable structure 204 contacts the container 102. For example, the deformable structure 204 contacts the mounting surface 130 of the container 102 to form a seal between the corresponding outlet or inlet of the container that overlaps and aligns with the corresponding purge nozzle of the plurality of purge nozzles (122a, 122b, 122c, 122d). The nozzle gasket 200 also includes a base structure 208 at the second end 210 of the nozzle gasket 200, based on the Figure 3A In the orientation shown, the second end 210 is a lower end of the nozzle gasket 200. The second end 210 of the nozzle gasket 200 is opposite the first end 206 of the nozzle gasket 200. Figure 3A The deformable structure 204 in FIG. 2 is in an undeformed state, wherein the container 102 is not present on the nozzle gasket 200 , such that the deformable structure 204 of the nozzle gasket 200 is undeformed (ie, not deformed).

[0042] The nozzle structure 202 includes a base 212 having a seating surface 214 that abuts the second end 210 of the nozzle gasket 200 and includes a nozzle 216 that projects from the seating surface 214 of the base 212. The nozzle 216 of the nozzle structure 202 is within the nozzle gasket 200 such that the nozzle gasket 200 extends around the nozzle 216. The nozzle 216 includes a third end 218 at which the nozzle 216 terminates.

[0043] The nozzle structure 202 also includes a nozzle opening (or hole) 220 that extends into the third end 218 of the nozzle 216 and is an inlet or outlet through which a purification fluid can enter or exit, respectively. For example, when a first pair of nozzles (122a, 122b) of the plurality of purification nozzles (122a, 122b, 122c, 122d) injects purification fluid, the nozzle holes 220 corresponding to the first pair of nozzles (122a, 122b) are outlets through which the purification fluid is discharged, or when a second pair of nozzles (122c, 122d) of the plurality of purification nozzles (122a, 122b, 122c, 122d) receives purification fluid, the nozzle holes 220 corresponding to the second pair of nozzles (122c, 122d) are inlets through which the purification fluid enters.

[0044] Figure 3B It is along Figure 3AThe nozzle gasket 200 and the nozzle structure 202 are cut away from each other along the line AA. Figure 3B , which represents when the container 102 is not present on the nozzle gasket 200 because the container 102 is not present on the receiving area 106 of the purge loadport 100 .

[0045] The deformable structure 204 of the nozzle gasket 200 includes a first portion 222 and a second portion 224, and the first portion 222 and the second portion 224 are transverse to each other at a first angle 226. The first portion 222 extends from the first end 206 of the nozzle gasket 200 to the second portion 224 of the nozzle gasket 200. The second portion 224 extends from the first portion 222 to the base structure 208. In other words, the second portion 224 is between the first portion 222 and the base structure 208. The first portion 222 can be referred to as an upper portion, the second portion 224 can be referred to as a middle portion, and the base structure 208 can be referred to as a lower portion. When the first portion 222 and the second portion 224 are in a deformed state (see Figure 3C ), when the first portion 222 and the second portion 224 are in an undeformed state, the first portion 222 and the second portion 224 are substantially vertical.

[0046] The nozzle 216 includes a lip portion 228 at the third end 218 of the nozzle 216. The base structure 208 of the nozzle gasket 200 is configured to be inserted into a space 230 between the lip portion 228 and the base surface 214 of the base 212. The base structure 208 interlocks with the lip portion 228 such that the nozzle gasket 200 can be removably mounted or coupled to the nozzle 216 of the nozzle structure 202.

[0047] Figure 3C It is along Figure 3A The nozzle gasket 200 and the nozzle structure 202 are shown as a cross-sectional perspective view taken along line AA. Figure 3C , which represents the container 102 being present on the nozzle gasket 200 when the container 102 is present on the receiving area 106 of the purge load port 100 .

[0048] When the deformable structure 204 is in the Figure 3C In the deformed state shown, since the container 102 is present on the first portion 222 of the deformable structure 204 of the nozzle gasket 200, the first portion 222 and the second portion 224 of the deformable structure 204 of the nozzle gasket 200 are pushed downward by the container 102. When the container 102 is present on the receiving area 106 of the purge loading port 100, the downward force generated by the weight of the container 102 on the nozzle gasket 200 causes both the first portion 222 and the second portion 224 to deform and become bent, as shown in FIG. Figure 3CWhen the first portion 222 and the second portion 224 are deformed and become curved, the first angle 226 decreases compared to when the first portion 222 and the second portion 224 are in an undeformed state, as shown in FIG. Figure 3B shown.

[0049] Because the deformable structure 204 is at the first end of the nozzle gasket 200, the deformable structure 204 forms a seal with the container 102 when the container 102 is present on the receiving area 106 of the purge loadport 100. Once the seal is formed between the nozzle gasket 200 and the container 102, a purge fluid is introduced into the interior chamber 104 of the container 102. As the purge fluid is introduced into the interior chamber 104 through the first pair of nozzles (122a, 122b) of the plurality of purge nozzles (122a, 122b, 122c, 122d), the purge fluid flowing through the deformable structure 204 in its deformed state induces vibrations in the first portion 222 and the second portion 224 of the deformable structure 204. This vibration in the first and second portions (222, 224) causes the seal between the first end 206 of the nozzle gasket 200 and the container 102 to unseal for a short period of time, allowing at least some of the purge fluid to escape or leak between the first end of the nozzle gasket 200 and the container 102 into the environment outside of the container 102 rather than being introduced into the interior chamber 104.

[0050] Similarly, the purge fluid is allowed to exit the interior chamber 104 through a second pair of nozzles (122c, 122d) of the plurality of purge nozzles (122a, 122b, 122c, 122d), wherein the purge fluid flowing through the deformable structure 204 in its deformed state causes vibrations in the first portion 222 and the second portion 224. This vibration in the first and second portions (222, 224) causes the seal between the first end 206 of the nozzle gasket 200 and the container 102 to break within a short period of time, thereby allowing at least some of the purge fluid to escape or leak between the first end 206 of the nozzle gasket 200 and the container 102 into the environment outside of the container 102, rather than being introduced into the interior chamber 104.

[0051] When the container 102 is present on the receiving area 106 of the purge loading port, vibrations caused by the purge fluid flowing through the deformable structure 204 of the nozzle gaskets at the plurality of purge nozzles (122a, 122b, 122c, 122d) cause small deviations in the position of the container 102. These small deviations in the position of the container 102 may further cause or prompt the seals between the nozzle gaskets 200 at the plurality of purge nozzles (122a, 122b, 122c, 122d) to break within a short period of time, further causing or prompting the purge fluid to escape or leak into the environment outside the container 102 instead of being introduced into the internal chamber 104.

[0052] In view of the above discussion, the escape and leakage of purge fluid increases the cost of operating or running a FAB because the purge fluid is wasted rather than being used to purge or clean the interior chamber 104 of the container 102. In view of the above discussion, it is apparent that the presence of the deformable structure 204 at the first end 206 of the nozzle gasket 200, such that the deformable structure 204 forms a seal between the nozzle gasket 200 and the container 102, results in at least some purge fluid escaping and leaking between the deformable structure 204 of the nozzle gasket 200 and the container 102.

[0053] When the container 102 is present on the deformable structure 204 of the nozzle gasket 200, the base structure 208 of the nozzle gasket 200 remains unchanged. When the container 102 is not present on the deformable structure 204 of the nozzle gasket, the base structure 208 of the nozzle gasket 200 remains unchanged. In other words, the base structure 208 remains unchanged regardless of whether the container 102 is present on the deformable structure 204 of the nozzle gasket 200.

[0054] Figure 4A is a perspective view of a nozzle gasket 300 and a nozzle or nozzle structure 302 according to some embodiments, which may be used at the plurality of purge nozzles (122a, 122b, 122c, 122d) of a purge loading port according to some embodiments. Figures 4A-4E As will become readily apparent from the discussion herein, utilizing the nozzle gasket 300 and nozzle structure 302 rather than the nozzle gasket 200 and nozzle structure 202 prevents or reduces the likelihood of purge fluid escaping or leaking in the manner previously discussed herein when the nozzle gasket 200 and nozzle structure 202 are used. Preventing or reducing this likelihood of purge fluid escaping or leaking by utilizing the nozzle gasket 300 and nozzle structure 302 rather than the nozzle gasket 200 and nozzle structure 202 reduces the cost of operating and running the FAB.

[0055] The nozzle gasket 300 is removably mounted or coupled to the nozzle structure 302. The nozzle gasket 300 includes a sealing structure 304, a mounting structure 306, and a deformable structure 308. The sealing structure 304 is at a first end 310 of the nozzle gasket 300, based on the following example. Figure 4AThe nozzle gasket 300 is oriented as shown, with the first end 310 at the upper end of the nozzle gasket 300. When the container 102 is positioned, loaded, or mounted on the receiving area 106 of the purge loading port 100, the sealing structure 304 contacts the container 102. For example, the sealing structure 304 contacts the mounting surface 130 of the container 102 to form a seal between a corresponding outlet or inlet of the container that overlaps and aligns with a corresponding purge nozzle of the plurality of purge nozzles (122a, 122b, 122c, 122d). The deformable structure 308 of the nozzle gasket 300 is at the second end 312 of the nozzle gasket 300, based on the Figure 4A In the orientation of the nozzle gasket 300 shown, the second end 312 is at the lower end of the nozzle gasket 300. The second end 312 is opposite the first end 310. The mounting structure 306 is between the first end 310 and the second end 312 and between the sealing structure 304 and the deformable structure 308. The sealing structure 304 can be referred to as an upper portion, the mounting structure 306 can be referred to as a middle portion, and the deformable structure 308 can be referred to as a lower portion. Figure 4A The deformable structure 308 in FIG. 3 is in an undeformed state, wherein the container 102 is not present on the nozzle gasket 300 , such that the deformable structure 308 of the nozzle gasket 300 is undeformed (ie, not deformed).

[0056] The nozzle structure 302 includes a base 314 having a seating surface 316 that abuts the second end 312 of the nozzle gasket 300 and includes a nozzle 318 that projects from the seating surface 316 of the base 314. The nozzle 318 of the nozzle structure 302 is within the nozzle gasket 300 such that the nozzle gasket 300 extends around the nozzle 318. The nozzle 318 includes a third end 320 at which the nozzle 318 terminates.

[0057] The nozzle structure 302 also includes a nozzle opening (or hole) 322 that extends into the third end 320 of the nozzle 318 and is an inlet or outlet through which a purification fluid can enter or exit, respectively. For example, when a first pair of nozzles (122a, 122b) of the plurality of purification nozzles (122a, 122b, 122c, 122d) injects purification fluid, the nozzle holes 322 corresponding to the first pair of nozzles (122a, 122b) are outlets through which the purification fluid is discharged, and when a second pair of nozzles (122c, 122d) of the plurality of purification nozzles (122a, 122b, 122c, 122d) receives purification fluid, the nozzle holes 322 corresponding to the second pair of nozzles (122c, 122d) are inlets through which the purification fluid enters. The nozzle bore 322 includes a threaded region (or portion) 324 that is threaded and configured to receive a threaded structure, such as a threaded fastener (see FIG. Figure 7A and7B ).

[0058] The sealing structure 304 further includes a first sealing portion 326 and a second sealing portion 328 that are spaced apart from each other by a recess 330. Figure 4A In the illustrated embodiment of the nozzle gasket, the first and second sealing portions (326, 328) are annular or ring-shaped portions and the recess 330 is an annular or ring-shaped recess.

[0059] Figure 4B According to some embodiments, Figure 4A The nozzle gasket 300 and the nozzle structure 302 are cut off at the line BB shown in FIG. Figure 4B , which represents when the container 102 is not present on the nozzle gasket 300 because the container 102 is not present on the receiving area 106 of the purge loadport 100 .

[0060] The deformable structure 308 includes an angled portion 332 that is at a second angle 334 relative to the base surface 316 of the base 314. The angled portion 332 is transverse to the mounting structure 306 at a third angle 336. The angled portion 332 extends from the mounting structure 306 to the base surface 316 of the base 314. When the angled portion 332 of the deformable structure 308 is in the deformed state relative to the nozzle gasket 300, the angled portion 332 of the nozzle gasket 300 is vertical (see FIG. 2 ). Figure 4C ).

[0061] The nozzle 318 includes a lip portion (or structure) 338 at the third end 320 of the nozzle 318. The mounting structure 306 of the nozzle gasket 300 is configured to be inserted into a space 340 between the lip portion 338 and the base surface 316 of the base 314. The mounting structure 306 interlocks with the lip portion 338 so that the nozzle gasket 300 can be removably mounted or coupled to the nozzle 318 of the nozzle structure 302.

[0062] Figure 4C According to some embodiments, Figure 4A A cross-sectional perspective view of the nozzle gasket 300 and the nozzle structure 302 is shown taken along line BB. Figure 4D According to some embodiments Figure 4A The nozzle gasket 300 and the nozzle structure 302 are shown in a cross-sectional side view taken along line BB. Figure 4C and 4D 1 is in a deformed state, which represents that when the container 102 is present on the receiving area 106 of the purge load port 100 , the container is present on the nozzle gasket 300 .

[0063] When the deformable structure 308 is in the Figure 4C In the deformed state shown, the angled portion 332 of the deformable structure 308 of the nozzle gasket 300 is pushed downward by the container 102 due to the container 102 being present on the sealing structure 304 of the nozzle gasket 300. When the container is present on the receiving area 106 of the purge loading port 100, the downward force generated by the weight of the container 102 on the nozzle gasket 300 causes the angled portion 332 to deform and become bent, as shown in FIG. Figure 4C As shown. With the bevel portion 332 in the Figure 4B As the angled portion 332 deforms and becomes curved, the second angle 334 and the third angle 336 decrease compared to the undeformed state shown.

[0064] When the container 102 is placed on the sealing structure 304 of the nozzle gasket 300, the mounting structure 306 is deformed due to the deformation of the bevel portion 332 of the deformable structure 308. Figure 4C When the container 102 is present on the sealing structure 304 of the nozzle gasket 300, the sealing structure 304 is deformed as shown in FIG. Figure 4C However, unlike the deformable structure 204 of the nozzle gasket 200, when the container 102 is present on the nozzle gasket 200, the deformable structure 204 of the nozzle gasket 200 deforms and forms a seal with the container 102, as previously described herein. Figure 3C As discussed, the sealing structure 304 of the nozzle gasket 300 forms a seal with the container 102 while remaining substantially undeformed because the sealing structure 304 moves downwardly only due to deformation in the angled portion 332 of the deformable structure 308 .

[0065] Because the sealing structure 304 is at the first end 310 of the nozzle gasket 300 and the deformable structure 308 is at the second end 312, unlike the deformable structure 204 that is present at the first end 206 of the nozzle gasket 200, when the container 102 is present on the receiving area 106 of the purge loading port 100, the sealing structure 304 (rather than the deformable structure 308) forms a seal with the container 102, unlike the nozzle gasket 200. Once the seal is formed between the nozzle gasket 300 and the container 102, the purge fluid is introduced into the interior chamber of the container. When the purge fluid is introduced into the interior chamber 104 through the first pair of nozzles (122a, 122b) of the plurality of purge nozzles (122a, 122b, 122c, 122d), the purge fluid flows only through the sealing structure 304 of the nozzle gasket 300 upon exiting the nozzle orifice 322, unlike the purge fluid that flows through the deformable structure 204 of the nozzle gasket 200 as described above. Figure 3C and 4BAs can be clearly seen, the sealing structure 304 is closer to the third end 320 of the nozzle 318 than the first portion 222 of the deformable structure 204 of the nozzle gasket is to the third end 218 of the nozzle 216. The closer proximity of the sealing structure 304 to the third end reduces the volume of space between the container 102 and the third end 320 of the nozzle 318, which prevents, mitigates, or reduces the likelihood of vibration within the nozzle gasket 300. This prevents, mitigates, or reduces the likelihood of purge fluid escaping or leaking from the seal between the sealing structure 304 and the container 102 compared to the use of the nozzle gasket 200.

[0066] Even if there is some vibration in the nozzle gasket 300, such vibration may cause some small shift in the position of the container 102 when the container 102 is positioned on the sealing structure 304 of the nozzle gasket 300, and the first and second sealing portions (326, 328) together with the recess 330 form a stronger seal with the container relative to the seal between the first portion 222 of the deformable structure of the nozzle gasket 200. Because the seal is stronger when the nozzle gasket 300 is used instead of the nozzle gasket 200, the likelihood of any escape or leakage of the purge fluid from the seal between the sealing structure 304 and the container 102 may be prevented, mitigated, or reduced when the nozzle gasket 200 is used instead of the nozzle gasket 300.

[0067] In light of the above discussion, because the deformable structure 308 is present at the second end 312 of the nozzle gasket 300, as opposed to the deformable structure 204 being present at the first end 206 of the nozzle gasket 200, the nozzle gasket 300 forms a stronger seal with the container 102 relative to the seal between the container 102 and the nozzle gasket 200. As previously discussed herein, because the nozzle gasket 300 forms a stronger seal with the container 102, the nozzle gasket 300 further prevents, mitigates, or reduces the likelihood of purge fluid escaping or leaking through the stronger seal formed between the deformable structure 204 of the nozzle gasket 200 and the container 102. Because no or less purge fluid is wasted by escaping or leaking into the environment outside of the container 102, using the nozzle gasket 300 instead of the nozzle gasket 200 to further prevent, mitigate, or reduce the likelihood of purge fluid escaping or leaking reduces the cost of operating or running the FAB.

[0068] like Figure 4DAs shown, the height H0 extends from the surface 321 to the third end 320 of the nozzle 318. In this embodiment of the nozzle gasket 300 and the nozzle structure 302, the height H0 is greater than or equal to 1.8 millimeters (mm) to provide clearance. This clearance allows the container 102 to compress the nozzle gasket 300 when it is positioned, loaded, or installed on the nozzle gasket 300, while preventing damage to the nozzle 318 of the nozzle structure 302 when the container 102 is positioned on the nozzle gasket 300. Although the above dimensions are relative to the nozzle structure 302, the nozzle 318 of the nozzle structure 302 is not damaged. Figure 4D With reference to the embodiment of the nozzle gasket 300 shown, in alternative embodiments of the nozzle gasket 300, the height H0 may be sized to further prevent or reduce the likelihood of escape or leakage of the purge or cleaning fluid when the nozzle gasket 300 and the nozzle structure 302 are used at the plurality of purge nozzles (122a, 122b, 122c, 122d) of the purge loading port 100.

[0069] Figure 4E is a cross-sectional side view of the nozzle gasket 300 when removed from the nozzle structure 302 according to some embodiments. Figure 4E As shown, the sealing structure 304, the mounting structure 306, and the deformable structure 308 define a receiving opening 342, which may be referred to as a through-hole. The mounting structure 306 extends around the narrowest area of ​​the receiving opening 342. The receiving opening 342 is configured to receive the nozzle 318 or the nozzle structure 302 during operation.

[0070] like Figure 4E As shown, the mounting structure 306 includes a mounting surface 344. The mounting surface 344 abuts against a sidewall surface of the nozzle 318 and interlocks with the lip portion 338 to interlock the nozzle gasket 300 with the nozzle 318 when the nozzle gasket 300 is mounted to the nozzle 318 of the nozzle structure 302.

[0071] like Figure 4E As shown, the recess 330 between the first and second sealing portions (326, 328) of the sealing structure 304 is angled at a fourth angle 346 relative to the first end 310 and includes a sealing surface that forms a seal with the container 102. In other words, the recess 330 extends into the first end 310 of the nozzle gasket 300 at the fourth angle 346 relative to the sealing surface of the sealing structure 304 at the first end 310 of the nozzle gasket 300.

[0072] like Figure 4EAs shown, the nozzle gasket 300 includes a first point (or edge) 348 at the lower end of the mounting surface 344 of the mounting structure 306, an outer bevel 350 extending from the second end 312 to the second point (or edge) 352, and an inner bevel 354 extending from the second end 312 to the mounting structure 306. A first height H1 extends from the second end 312 to the second point 352, a second height H2 extends from the second point (or edge) 352 to the first end 310, a third height H3 extends from the second end 312 to the first point 348, and a width W1 extends from the inner bevel 354 to the outer bevel 350. In this embodiment of the nozzle gasket 300, the ratio of the third height H3 to the width W1 (i.e., H3 / W1) may be greater than or equal to 2. In this embodiment, the first height H1 is greater than the second height H2 and the second height H2 is greater than the third height H3. In this embodiment, the first height H1 is greater than 2 millimeters (mm). Although the above dimensions and dimensional relationships are relative to, for example, Figure 4E With reference to the embodiment of the nozzle gasket 300 shown, in alternative embodiments of the nozzle gasket 300, these dimensional relationships may be adjusted to further prevent or reduce the likelihood of escape or leakage of purge or cleaning fluid when the nozzle gasket 300 and nozzle structure 302 are used at the plurality of purge nozzles (122a, 122b, 122c, 122d) of the purge loading port 100.

[0073] like Figure 4E As shown, the first sealing portion 326 includes a first inner angled surface 356 that partially defines the nozzle receiving opening 342, and the second sealing portion 328 includes a second inner angled surface 358 that partially defines the recess 330. The first inner angled surface 356 is at a fifth angle 360 ​​relative to the first end 310 of the nozzle gasket 300, and the second inner angled surface 358 is at a sixth angle 362 relative to the first end 310 of the nozzle gasket 300. In this embodiment of the nozzle gasket 300, the fifth angle 360 ​​is greater than or equal to 55 degrees, less than or equal to 95 degrees, or equal to an angle between 55 degrees and 95 degrees. In this embodiment of the nozzle gasket 300, the sixth angle 362 is greater than the fifth angle 360. Although the above dimensions and dimensional relationships are relative to the first end 310 of the nozzle gasket 300, the sixth angle 362 is greater than the fifth angle 360. Figure 4E With reference to the embodiment of the nozzle gasket 300 shown, in alternative embodiments of the nozzle gasket 300, these dimensional relationships may be adjusted to further prevent or reduce the likelihood of escape or leakage of purge or cleaning fluid when the nozzle gasket 300 and nozzle structure 302 are used at the plurality of purge nozzles (122a, 122b, 122c, 122d) of the purge loading port 100.

[0074] like Figure 4B and 4C As shown, Figure 4B and 4CThe nozzle hole 322 in this embodiment is shown aligned with the axis CA. In other words, the corresponding axis of the nozzle hole 322 coincides with the axis CA. The axis CA is the central axis of the nozzle structure 302. In some embodiments, the axis CA of the nozzle structure may not be the central axis, as it may not coincide with the center of the nozzle structure 302, such as Figure 4B and 4C As shown in the embodiment.

[0075] Figure 5 4 is a flowchart 400 of a method for decontaminating the interior chamber 104 of a container 102 using a decontamination loading port 100 including a nozzle gasket 300 and a nozzle structure 302 located at a plurality of decontamination nozzles (122a, 122b, 122c, 122d) according to some embodiments. The flowchart 400 includes a first step 402, a second step 404, and a third step 406.

[0076] In a first step 402, a container 102 that does not include a workpiece or wafer is positioned, loaded, and mounted onto the receiving area 106 of the clean loadport 100. For example, the container 102 is transported from a location within the FAB to the clean loadport 100 via an overhead transport system (OHT). Once the container 102 is aligned with the clean loadport 100, the container 102 is lowered and positioned, loaded, and mounted onto the clean loadport 100. Although not shown, the container 102 includes a receiving structure or opening that is aligned with the guide structure 128 such that the guide structure 128 is inserted into the receiving structure or opening. Although not shown, the container includes respective inlets aligned with a first pair of nozzles (122a, 122b) of the plurality of purge nozzles (122a, 122b, 122c, 122d) and respective outlets aligned with a second pair of nozzles (122c, 122d) of the plurality of purge nozzles (122a, 122b, 122c, 122d), the respective inlets being in fluid communication with the first pair of nozzles (122a, 122b) and the respective outlets being in fluid communication with the second pair of nozzles (122c, 122d). The respective inlets and the respective outlets provide access to the interior chamber 104 within the container 102, allowing the purge fluid to be injected into and flow through the interior chamber 104 of the container 102.

[0077] When the container 102 is positioned on the purge loading port 100, a corresponding seal is formed at each of the plurality of purge nozzles (122a, 122b, 122c, 122d) by the corresponding sealing structure 304 of the nozzle gasket 300 at each of the plurality of purge nozzles (122a, 122b, 122c, 122d). For example, at each of the plurality of purge nozzles (122a, 122b, 122c, 122d), the corresponding first and second sealing portions (326, 328) of each corresponding sealing structure 304 abut or contact the corresponding surface of the container to form a corresponding seal, allowing the purge fluid to enter and exit the interior chamber without leaking or escaping between the container 102 and the sealing structure 304 at each of the plurality of purge nozzles (122a, 122b, 122c, 122d). Because the details of the nozzle gasket 300 that forms these seals with the container 102 have been discussed in detail previously herein, for simplicity and brevity of this disclosure, the discussion of why the nozzle gasket 300 is more effective than the nozzle gasket 200 in forming a seal with the container will not be repeated here.

[0078] After the first step 402 in which the container 102 is positioned, loaded, or mounted on the purge loadport 100 is completed, in a second step 404, at least two corresponding valves (112a, 112b) of the plurality of valves (112a, 112b, 112c) are opened, allowing purge fluid from the purge or cleaning fluid source 108 to be injected and flow through the container 102. As the purge fluid flows through the interior chamber 104 of the container 102, any remaining debris, contaminants, or particles are removed from the interior chamber 104, causing the interior chamber 104 to be purged and cleaned by the purge fluid. Removing remaining debris, contaminants, or particles can prevent or reduce the likelihood of defects in workpieces and wafers transported within the container 102 after the interior chamber 104 of the container 102 is purged and removed from the purge loadport 100. At least in this embodiment, the purge fluid enters the interior chamber 104 of the container 102 via a first pair of nozzles (122a, 122b) of the plurality of purge nozzles (122a, 122b, 122c, 122d) and exits the interior chamber 104 of the container 102 via a second pair of nozzles (122c, 122d) of the plurality of purge nozzles (122a, 122b, 122c, 122d).

[0079] After the second step 404 is completed in which the purge fluid is injected into and flows through the interior chamber 104 of the container to purge and clean the interior chamber 104, in a third step 406, at least two corresponding valves (112a, 112b) of the plurality of valves (112a, 112b) are closed to stop the injection or introduction of the purge fluid into and flow through the interior chamber 104. After the purge fluid is no longer injected into and flows through the interior chamber 104, the OHT picks up the container 102 and removes the container 102 from the purge load port, as the interior chamber 104 of the container is now purge and clean and ready to receive workpieces or wafers to be transported through the FAB.

[0080] Since the nozzle gasket 300 and the nozzle structure 302 present at the multiple purification nozzles (122a, 122b, 122c, 122d) prevent or reduce the possibility of leakage or escape of the purification fluid at the seal formed by the multiple purification nozzles (122a, 122b, 122c, 122d) and the container 102, less purification fluid is wasted, which reduces waste and operating costs, thereby reducing the cost of operating or running the FAB.

[0081] Figure 6 Flowchart 500 is a method for detecting leaks within a purge load port 100, including a nozzle gasket 300 and a nozzle structure 302 present at a plurality of purge nozzles (122a, 122b, 122c, 122d), according to some embodiments. Flowchart 400 includes a first step 502, a second step 504, a third step 506, and a fourth step 508. In the method of flowchart 400, a container 102 is not present on a receiving area of ​​the purge load port 100. In other words, the container 102 is not currently positioned, loaded, or installed on the purge load port 100.

[0082] In a first step 502, a plurality of stop structures 510 are inserted into the nozzle holes 322 of the nozzle structure 302 at each of the plurality of purge nozzles (122a, 122b, 122c, 122d). In this embodiment, the stop structures 510 are threaded fasteners 510 (see Figure 7A and 7B ), which is inserted to threadably engage the threaded fastener 510 with the threaded area (or portion) 324 of the nozzle hole 322 of the nozzle structure 302 lining the plurality of purge nozzles (122a, 122b, 122c, 122d) to close the nozzle hole 322. The threaded fastener 510 seals the nozzle hole 322 of the nozzle structure 302 at each of the plurality of purge nozzles (122a, 122b, 122c, 122d) (see Figure 7BIn other words, in this embodiment, since there are four nozzle structures 302 and since there are four purge nozzles (122a, 122b, 122c, 122d) in the plurality of purge nozzles, there are four threaded fasteners 510, each of which is inserted into a corresponding one of the nozzle holes 322 of the nozzle structure 302 at each of the plurality of purge nozzles (122a, 122b, 122c, 122d).

[0083] After the first step 502 in which the plurality of stop structures 510 are inserted into the nozzle hole 322 of the nozzle structure 302 at each of the plurality of purge nozzles (122a, 122b, 122c, 122d), in a second step 504, a test fluid is introduced into the purge loading port 100 to test for leaks within the corresponding fluid lines and components of the purge loading port 100. For example, the solenoid valve 114 is in fluid communication with a test fluid source that provides the test fluid, and to introduce the test fluid into the fluid lines and components of the purge loading port 100, the solenoid valve 114 is opened and the plurality of valves (112a, 112b, 122) are opened to allow the test fluid to flow through the fluid lines and components of the purge loading port 100.

[0084] Following the second step 504 in which a test fluid is introduced into and flows through the respective fluid lines and components of the purge loadport 100, in a third step 506, the respective sensors (116, 118, 124, 126) are used to monitor the characteristics, quality, or amount of the test fluid in and flowing through the respective fluid lines and components of the purge loadport 100. Following the third step 506 in which the respective sensors (116, 118, 124, 126) are used to monitor the characteristics, quality, or amount of the test fluid in and flowing through the respective fluid lines and components of the purge loadport 100, in a fourth step 508, the measurements and data collected by the respective sensors (116, 118, 124, 126) are provided (i.e., transmitted) to a controller, a memory, or both (not shown) to determine if and where a leak exists within the purge loadport 100. The controller and memory then analyze the measurements and data to determine if there is a leak within the purge loadport 100 and, if so, the location of the leak.

[0085] If a leak is determined and the location of the leak is determined in the fourth step 508, a repair procedure can be initiated to repair the purge loading port 100 to repair the leak that occurred within the purge loading port 100. Repairing the leak can reduce the waste cost and operating cost of the FAB. Although a similar load test can be performed when the nozzle gasket 200 and the nozzle structure 202 are present at the plurality of purge nozzles (122a, 122b, 122c, 122d), the load test is more difficult to perform because the sealed nozzle hole 220 does not include a threaded area or portion. In order to seal the nozzle hole 220, a press fit stop structure (e.g., a rubber stopper) is inserted into the nozzle hole 220 to seal the nozzle hole, thereby performing the same operation as described above with reference to FIG. Figure 6 Similar leak or load tests as discussed above. However, when the nozzle structure 302 and nozzle gasket 300 are present at the plurality of purge nozzles (122a, 122b, 122c, 122d), it is generally more difficult for a maintainer or person to properly insert and press the stop structure (e.g., a rubber stopper) than to threadably engage the stop structure 510 with the threaded region (or portion) 324 lining the nozzle bore 322. In other words, performing a load or leak test using the nozzle gasket 300 and nozzle structure 302 is easier and faster than attempting to perform a similar or like load or leak test using the nozzle gasket 200 and nozzle structure 202.

[0086] Figure 7A According to some embodiments, the Figures 4A-4E An exploded perspective view of the stop structure 510 is shown in the nozzle structure 302. The stop structure 510 (ie, the threaded fastener 510) is to be inserted into the nozzle bore 322 of the nozzle 318 of the nozzle structure 302, as discussed above with respect to the method in the flowchart 500.

[0087] Figure 7B According to some embodiments Figures 4A-4E A perspective view of the stop structure 510 and the nozzle structure 302 is shown. The stop structure (ie, the threaded fastener 510 ) has been inserted into the nozzle hole 322 of the nozzle 318 of the nozzle structure 302 , sealing the nozzle hole 322 of the nozzle structure 302 .

[0088] The air flow through the nozzle gasket 300 and the nozzle structure 302 may be equal to 120 liters per minute (LPM).

[0089] As discussed herein, utilizing nozzle gasket 300 and nozzle structure 302 prevents or reduces the likelihood of purge or cleaning fluid escaping or leaking due to the seal between nozzle gasket 300 and container 102 being broken when injecting the purge or cleaning fluid into container 102, compared to utilizing nozzle gasket 200 and nozzle structure 202. In other words, utilizing nozzle gasket 300 and nozzle structure 302 instead of nozzle gasket 200 and nozzle structure 202 reduces waste costs and operating costs because no or less purge or cleaning fluid leaks or escapes. For example, because deformable structure 308 is located at the lower end of nozzle gasket 300 and does not form a seal with container 102, the seal between nozzle gasket 300 and container 102 may have a reduced likelihood of leaking, whereas deformable structure 204 of nozzle gasket 200 is located at the upper end of nozzle gasket 200 and forms a seal with container 102. At the same time, costs are reduced by preventing or reducing the escape or leakage of the purification or cleaning fluid, the nozzle structure 302 includes a threaded area (or portion) 324 (such as a threaded fastener) that receives the stop structure 510 to perform a load test to determine whether any leaks occur within the purification loading port 100 so that any leak locations can be located and repaired to reduce waste costs and operating costs of the FAB.

[0090] At least one embodiment of the nozzle gasket of the present disclosure can be summarized as including: a central axis; a first end and a second end opposite the first end; a through hole aligned with the central axis and extending from the first end to the second end; a sealing structure at the first end, the sealing structure including: a first sealing portion extending around the central axis; a second sealing portion extending around the central axis and around the first sealing portion; and a recess between the first sealing portion and the second sealing portion, the recess extending around the central axis and the recess extending around the first sealing portion; a deformation structure at the second end, the deformation structure being configured to deform when a container is placed on the sealing structure during operation.

[0091] In some embodiments, the nozzle structure at least partially defines the through-hole, and the nozzle structure is configured to contact a surface of the nozzle structure during the operation. In some embodiments, the nozzle structure is configured to interlock with a lip portion of the nozzle structure during the operation. In some embodiments, the sealing structure defines a first portion of the through-hole, the deformation structure defines a second portion of the through-hole, and the nozzle structure defines a third portion of the through-hole, wherein the third portion is between the first portion and the second portion and the third portion extends from the first portion to the second portion. In some embodiments, the recess is at an angle relative to the surface of the first sealing portion. In some embodiments, the deformation structure is at an angle relative to the first surface of the first sealing portion and the second surface of the second sealing portion. In some embodiments, the deformation structure defines a deformation recess, which is configured to provide clearance for the deformation structure to deform when the container is positioned on the sealing structure during the operation. In some embodiments, the sealing structure and the deformation structure are made of a material having a Shore hardness of less than or equal to 70.

[0092] At least one embodiment of a purge loading port can be summarized as including: a nozzle structure including: a base including a base surface; a nozzle protruding from the base surface of the base, the nozzle including an end spaced apart from the base surface of the base; a nozzle hole extending into the end of the nozzle; and a lip structure at the end of the nozzle; a nozzle gasket mounted to the nozzle structure, the nozzle gasket extending around the nozzle, the nozzle gasket including: a first end extending beyond the end of the nozzle; a second end opposite the first end, wherein the second end is at the base surface of the base; a through hole extending from the first end to the second end; a sealing structure at the first end; and a deformation structure at the second end.

[0093] In some embodiments, the nozzle gasket further comprises a central axis and a sealing structure, the sealing structure comprising a first annular portion, a second annular portion extending around the central axis and around the first annular portion, and an annular recess between the first annular portion and the second annular portion, the annular recess extending around the first annular portion. In some embodiments, the deformation structure of the nozzle gasket is configured to deform during operation when a container is positioned on the sealing structure of the nozzle gasket. In some embodiments, the deformation structure defines a deformation recess, which is configured to provide clearance for the deformation structure to deform when the container is positioned on the sealing structure during operation. In some embodiments, the nozzle gasket is made of a material having a Shore hardness of less than or equal to 70. In some embodiments, the nozzle comprises a sidewall transverse to the base surface of the base, and the nozzle gasket further comprises a protrusion between the sealing structure and the deformation structure, wherein the protrusion is adjacent to the sidewall of the nozzle, extends around the nozzle, and is between the lip structure and the base surface of the base. In some embodiments, the protrusion is configured to abut the sidewall of the nozzle and interlock with the lip structure during operation to prevent the nozzle gasket from being removed from the nozzle. In some embodiments, the nozzle aperture is at least partially threaded. In some embodiments, the at least partially threaded nozzle is configured to receive a threaded fastener to close the nozzle aperture during operation.

[0094] At least one embodiment of the method of the present disclosure can be summarized as including positioning a container on a purge loading port, including aligning a purge fluid opening of the container with a purge nozzle structure and a purge nozzle gasket; placing the container on the purge nozzle gasket, sealing the purge fluid opening and placing the nozzle purge fluid opening in fluid communication with the purge fluid opening; and deforming a deformation structure of the nozzle gasket at a base surface of a base of the purge nozzle structure.

[0095] In some embodiments, placing the container on the purge nozzle gasket seals the purge fluid opening and places the nozzle purge fluid opening in fluid communication with the purge fluid opening by contacting a mounting surface of the container with a sealing structure of the nozzle gasket. In some embodiments, contacting the mounting surface of the container with the sealing structure of the nozzle gasket further comprises contacting the mounting surface with a first annular portion of the sealing structure; and / or the sealing gasket; and contacting the mounting surface with a second annular portion of the sealing structure, the second annular portion being spaced laterally outward from the first annular portion.

[0096] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present invention, rather than to limit them. Although the embodiments of the present invention have been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A nozzle gasket, characterized in that: include: central axis; a first end and a second end opposite the first end; a through hole aligned with the central axis and extending from the first end to the second end; A sealing structure, at the first end, comprising: a first sealing portion extending around the central axis; a second sealing portion extending about the centrally extending axis and about the first sealing portion; and a recess between the first sealing portion and the second sealing portion, the recess extending about the central axis and extending around the first sealing portion; A deformation structure is provided at the second end, the deformation structure being configured to deform in operation when a container is placed on the sealing structure.

2. The nozzle gasket according to claim 1, characterized in that wherein a nozzle structure at least partially defines the through-hole, and the nozzle structure is configured to contact a surface of the nozzle structure during the operation.

3. The nozzle gasket according to claim 2, characterized in that wherein the nozzle structure is configured to interlock with a lip portion of the nozzle structure during said operation.

4. The nozzle gasket according to claim 2, characterized in that in: The sealing structure defines a first portion of the through hole; The deformed structure defines a second portion of the through hole; as well as The nozzle structure defines a third portion of the through-hole, wherein the third portion is between the first portion and the second portion, and the third portion extends from the first portion to the second portion.

5. The nozzle gasket according to claim 1, wherein: The recess is angled relative to a surface of the first sealing portion.

6. The nozzle gasket according to claim 1, wherein: The deformed structure is angled relative to the first surface of the first sealing portion and the second surface of the second sealing portion.

7. A clean loading port, characterized in that: include: Nozzle structure, including: a base, including a base surface; a nozzle protruding from the base surface of the base, the nozzle including an end spaced apart from the base surface of the base; a nozzle aperture extending into the end of the nozzle; and a lip structure at said end of said nozzle; a nozzle gasket mounted to the nozzle structure, the nozzle gasket extending around the nozzle, and the nozzle gasket comprising: a first end extending beyond said end of said nozzle; a second end opposite the first end, wherein the second end is on the base surface of the base; a through hole extending from the first end to the second end; a sealing structure at the first end; and A deformable structure is provided at the second end.

8. The purge loading port according to claim 7, wherein: The nozzle gasket further comprises: central axis; Sealing structure, including: a first annular portion; a second annular portion extending about the central axis and about the first annular portion; and An annular recess is between the first annular portion and the second annular portion, and the annular recess extends around the first annular portion.

9. The purge loading port according to claim 7, wherein: in: The nozzle includes a sidewall transverse to the base surface of the base; and The nozzle gasket also includes a protrusion between the sealing structure and the deforming structure, wherein the protrusion is adjacent to the sidewall of the nozzle, extends around the nozzle and between the lip structure and the seat surface of the seat.

10. The purge loading port according to claim 7, wherein: Wherein the nozzle bore is at least partially threaded.

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