Absolute precision calibration tool for MEMS automatic inclinometer

Abstract

The absolute precision calibration tool for the MEMS automatic inclinometer comprises a supporting frame and a supporting plate fixedly installed on the supporting frame, a scale is arranged on the top of the supporting plate, a jig is arranged below the scale, and the jig is rotationally connected with a lead screw counting mechanism; the jig is further provided with a positioning mechanism, and the MEMS automatic inclinometer is installed on the jig through the positioning mechanism. A fixing rod is fixedly installed at the bottom of the supporting plate, a gradienter is installed between the fixing rod and the supporting plate, and the lower end of the jig is rotationally connected to the fixing rod. The device is suitable for improving the testing accuracy of the MEMS automatic inclinometer before leaving a factory, and has the advantages of simplicity and convenience in operation, high calibration speed, high accuracy and the like. Through the automatic calibration process, personal errors are reduced, and the repeatability and reliability of calibration are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of instrument calibration and inspection, in particular to an absolute precision calibration tool for a MEMS automated inclinometer. Background Art

[0002] MEMS automated inclinometers are widely used in civil engineering, geological exploration, and other fields. The accuracy of their measurements is directly related to project quality and safety. Currently, calibration of MEMS automated inclinometers relies primarily on manual adjustment or the use of standard angle blocks or angle molds. However, these methods are complex, inefficient, and difficult to achieve high-precision measurement requirements. Therefore, the development of a device that can automatically, quickly, and accurately calibrate MEMS automated inclinometers is crucial.

[0003] Through the above analysis, the problems and defects of the existing technology are as follows:

[0004] In the existing technology, the method of using standard angle blocks for calibration cannot achieve continuously adjustable angle settings, while the manual angle adjustment method has problems such as large human error, poor repeatability, and low efficiency. Both cannot meet the dual requirements of modern industry for the accuracy and efficiency of MEMS automated inclinometers. Utility Model Content

[0005] In response to the above-mentioned problems, the present invention proposes an absolute accuracy calibration tool for a MEMS automated inclinometer. The specific solution is as follows:

[0006] A fixture for calibrating the absolute accuracy of a MEMS automated inclinometer comprises a support frame and a support plate fixedly mounted on the support frame. The fixture is characterized in that a scale is provided on top of the support plate, a jig is provided below the scale, and the jig is rotatably connected to a lead screw counting mechanism. The jig is also provided with a positioning mechanism, and the MEMS automated inclinometer is mounted on the jig via the positioning mechanism.

[0007] A fixing rod is fixedly installed on the bottom of the support plate, a level is installed between the fixing rod and the support plate, and the lower end of the fixture is rotatably connected to the fixing rod.

[0008] Preferably, the positioning mechanism is provided in two groups, upper and lower, on the fixture.

[0009] Further preferably, the positioning mechanism includes a positioning slot, a positioning pin and a fixing bolt;

[0010] The MEMS automated inclinometer is installed in the positioning groove and is installed on the fixture through the positioning pin and the fixing bolt.

[0011] Further preferably, the positioning groove and the positioning pin are both gap positioned.

[0012] Preferably, casters are installed at the bottom of the support frame.

[0013] Preferably, the jig is provided in multiple groups, which are rotatably connected to the connecting rod, and the connecting rod is rotatably connected to the screw counting mechanism;

[0014] A sliding mechanism is fixedly mounted on the support plate, and the sliding mechanism is slidably connected to the fixture.

[0015] Further preferably, the sliding mechanism includes a slider and a slide rail, the slide rail is mounted on the support plate, the fixture is connected to the slider, and the slider is slidably connected to the slide rail.

[0016] Further preferably, the screw counting mechanism includes a screw counter connected to the support plate, the screw counter is connected to the screw, and the screw is rotatably connected to the connecting rod through a connecting module.

[0017] Further preferably, a handwheel is provided on the screw counter.

[0018] Further preferably, the fixture includes a pendulum rod with a pointed top, and the pendulum rod is connected to the slider;

[0019] The connecting rod is rotatably connected to the upper portion of the swing rod, and the fixing rod is rotatably connected to the bottom portion of the swing rod via a rotating shaft.

[0020] The beneficial effects of the utility model are:

[0021] By installing the MEMS automated inclinometer on a fixture, using a lead screw to pull the fixture, and using a lead screw counter and a ruler to measure the tilt distance, the absolute precision calibration of the MEMS automated inclinometer can be achieved.

[0022] This utility model can be used to test the absolute accuracy of MEMS automated inclinometers, and is suitable for improving the accuracy of MEMS automated inclinometers before shipment. It offers advantages such as ease of operation, fast calibration, and high accuracy. The automated calibration process reduces human error and improves calibration repeatability and reliability. Furthermore, this utility model offers excellent versatility and adaptability, meeting the calibration requirements of different MEMS automated inclinometer models. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. However, it should be understood that these drawings are designed for illustrative purposes only and are not intended to limit the scope of the present invention. In addition, unless otherwise specified, these drawings are intended only to conceptually illustrate the structures described herein and are not necessarily drawn to scale.

[0024] Figure 1 It is a schematic diagram of the plane structure of the utility model;

[0025] Figure 2 This is a schematic diagram of the utility model in the calibration tilt state;

[0026] Figure 3 yes Figure 1 A magnified schematic diagram of point A;

[0027] Figure 4 yes Figure 1 A magnified schematic diagram of point B;

[0028] Figure 5 yes Figure 3 An enlarged schematic diagram of point C;

[0029] Figure 6 This is a three-dimensional schematic diagram of the installation of the level in the utility model;

[0030] Figure 7 It is a three-dimensional schematic diagram of the MEMS automatic inclinometer in the present utility model;

[0031] Figure 8 It is a three-dimensional schematic diagram of two laterally mounted MEMS automated inclinometers in the present invention;

[0032] In the picture:

[0033] 1-screw counter; 2-fixed rod; 3-ruler; 4-connecting rod; 5-MEMS automated inclinometer;

[0034] 6- fixture; 61- rocker; 62- rotating shaft; 63- positioning mechanism; 601- positioning pin; 602- bolt; 603- positioning slot;

[0035] 7-Level;

[0036] 8-support frame; 81-support plate;

[0037] 9-sliding mechanism; 91-sliding block; 92-sliding rail;

[0038] 10-castor; 11-handwheel; 12-lead screw; 13-connection module. DETAILED DESCRIPTION

[0039] First, it should be noted that the specific structure, features, and advantages of the present invention will be described in detail below by way of example. However, all descriptions are for illustration only and should not be understood as limiting the present invention in any way. In addition, any single technical feature described or implied in the embodiments mentioned herein, or any single technical feature shown or implied in the drawings, can still be combined or deleted in any way between these technical features to obtain more other embodiments of the present invention that may not be directly mentioned herein. In addition, in order to simplify the drawings, the same or similar technical features may be marked in only one place in the same drawing.

[0040] In the present invention, unless otherwise clearly stipulated and limited, the terms "install", "set", "connect", "fix", "screw" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0041] The following is combined with Figure 1 -Attached Figure 8 The present utility model will be described in detail.

[0042] Example 1:

[0043] like Figure 1-Figure 2 As shown, a fixture for absolute accuracy calibration of a MEMS automated inclinometer includes a support frame 8 and a support plate 81 fixedly mounted on the support frame 8. A scale 3 is provided on top of the support plate 81, and a fixture 6 is provided below the scale 3. The fixture 6 is rotatably connected to a lead screw counting mechanism. The fixture 6 is also provided with a positioning mechanism 63, and the MEMS automated inclinometer 5 is mounted on the fixture 6 via the positioning mechanism 63.

[0044] The fixing rod 2 is fixedly mounted on the bottom of the support plate 81 , the level 7 is installed between the fixing rod 2 and the support plate 81 , and the lower end of the fixture 6 is rotatably connected to the fixing rod 2 .

[0045] Working principle:

[0046] This technical solution is realized by using the principle that the MEMS automatic inclinometer 5 measures the degree of inclination of the installation position. In this embodiment, the MEMS automatic inclinometer 5 is installed on the fixture 6, wherein the shape of the MEMS automatic inclinometer 5 is as follows: Figure 7As shown, the MEMS automatic inclinometer 5 itself does not move, and is used to measure the tilt angle of the fixture 6 relative to the support plate 81, and then convert the relationship between the measured tilt angle and the actual displacement distance.

[0047] In this embodiment, a MEMS automated inclinometer 5 is mounted on a jig 6. The jig 6 is pulled by a lead screw counter mechanism, causing the jig 6 to rotate and tilt, tilting its upper end a corresponding distance until it reaches a predetermined travel distance. The tilt distance of the jig 6's upper end can be viewed using a scale 3 or determined using the lead screw counter mechanism. A level 7, threaded between the fixed rod 2 and the support plate 81, monitors the horizontal state of the entire calibration fixture.

[0048] like Figure 6 As shown, the level 7 is installed between the fixed rod 2 and the support plate 81, with the horizontal support frame 8 below it, which serves as both a level 7 and a fixed position. If the calibration fixture is not in a horizontal position, the MEMS automated inclinometer 5 to be tested will have an initial angle, which will affect the absolute accuracy calibration.

[0049] At this time, the MEMS automated inclinometer 5 automatically calculates the distance the product has moved based on the tilt angle. The calculated distance data is subsequently uploaded to the host computer software through the matching data collector. The host computer software compares the upper end movement distance of the calibration fixture 6 with the movement distance calculated by the MEMS automated inclinometer 5, thereby achieving absolute precision calibration of the MEMS automated inclinometer.

[0050] The calibration tooling has two functions: first, collecting 24-hour data to calculate product stability when fixture 6 is vertical; second, verifying the accuracy of the product's tilt displacement data within a 0-50cm offset range. For example, if fixture 6 moves 10cm, the MEMS automated inclinometer 5 also moves 10cm. The data output by the MEMS automated inclinometer 5 is then checked to see if the error is within the acceptable range. The tooling then continues to move the fixture 6 at 5cm intervals to see if the error remains consistent. If the error remains within the acceptable range, the MEMS automated inclinometer 5 is considered qualified. If the error remains inconsistent, rework and confirmation are required.

[0051] Figure 2 This is a schematic diagram of the tilt state of the MEMS automated inclinometer 5 during calibration. It can be seen that the fixture 6 generates a tilt angle under the traction of the screw technical mechanism.

[0052] In this technical solution, the calibration tool is made of aviation aluminum as a whole, and the scale 3 is made of stainless steel. The scale 3 is connected to the support plate 81 through threads, and the maximum display length of the scale 3 is 50 cm.

[0053] Furthermore, in an embodiment, it can be considered that the positioning mechanism 63 is provided with two sets, one upper set and one lower set, on the fixture 6. The two sets of positioning mechanisms 63 can further reinforce the MEMS automatic inclinometer 5 so that it will not fall off when tilted.

[0054] Furthermore, it can also be considered in an embodiment that the positioning mechanism includes a positioning slot 603, a positioning pin 601 and a fixing bolt 602;

[0055] The MEMS automated inclinometer 5 is installed in the positioning groove 603 and is mounted on the fixture 6 via the positioning pin 601 and the fixing bolt 602 .

[0056] In this embodiment, both ends of the MEMS automatic inclinometer 5 are fixed on the fixture 6 through mounting holes, so that it is not easy to fall off.

[0057] like Figure 5 As shown, positioning groove 603 is a recess cut into fixture 6 based on the shape of MEMS automated inclinometer 5, and positioning pin 601 is a raised portion of fixture 6. Each end of the MEMS automated inclinometer 5 is provided with two mounting holes. The MEMS automated inclinometer 5 is installed into positioning groove 603, and positioning pin 601 is aligned with one mounting hole to secure it. The other mounting hole is then secured with fixing bolt 602, which is aligned with a screw hole in fixture 6 and tightened. Fixing bolt 602 is manually installed for ease of removal, and the nut style is not limited; in this embodiment, a round or flower-shaped nut is used.

[0058] Furthermore, in the embodiment, it can also be considered that the positioning groove 603 and the positioning pin 601 are both clearance positioning.

[0059] Furthermore, in the embodiment, it can also be considered that casters 10 are installed at the bottom of the support frame 8.

[0060] In this embodiment, the provision of the casters 10 can push the calibration tool to any place without being restricted by location.

[0061] Example 2:

[0062] On the basis of Example 1, the connection method between the fixture 6 and the lead screw counting mechanism is further optimized.

[0063] The jig 6 is provided with multiple groups, which are rotatably connected to the connecting rod 4, and the connecting rod 4 is rotatably connected to the screw counting mechanism;

[0064] A sliding mechanism 9 is fixedly mounted on the support plate 81 , and the sliding mechanism 9 is slidably connected to the fixture 6 .

[0065] In this embodiment, multiple sets of fixtures 6 are provided, and two MEMS automatic inclinometers 5 can be installed on each fixture 6 in a sideways or opposite direction. Figure 8 The diagram shows two MEMS automated inclinometers 5 mounted sideways. If mounted opposite each other, the other section is mounted on the back of the fixture 6. This installation method allows for mass installation and absolute accuracy calibration of MEMS automated inclinometers 5, significantly improving calibration efficiency.

[0066] In order to make the jig 6 swing more smoothly, the use of connecting rod 4 and sliding mechanism 9 can ensure that all jigs 6 can swing stably and smoothly under the traction of the screw counting mechanism. At the same time, the screw counting mechanism can accurately stop at the corresponding value and can lock the wire to avoid delaying the action.

[0067] Furthermore, in an embodiment, it can also be considered that the sliding mechanism 9 includes a slider 91 and a slide rail 92 , the slide rail 92 is installed on the support plate 81 , the fixture 6 is connected to the slider 91 , and the slider 91 is slidably connected to the slide rail 92 .

[0068] In this embodiment, the slide rail 92 is connected to the support plate 81 by screw threads, and the fixture 6 slides on the slide rail 92 following the slider 91, making the swing smoother and less stuck.

[0069] Furthermore, in an embodiment, it can also be considered that the screw counting mechanism includes a screw counter 1 connected to the support plate 81 , the screw counter is connected to a screw 12 , and the screw 12 is rotationally connected to the connecting rod 4 through a connecting module 13 .

[0070] In this embodiment, if Figure 4 As shown, the screw counter 1 is connected to the connecting rod 4 through a threaded connection. By shaking the screw counter 1, the screw 12 pulls the connecting rod 4 to swing, and the tilt distance of the upper end of the fixture 6 can be counted by the number of revolutions of the screw 12.

[0071] When the screw counter 1 rotates, the connecting rod 4 swings, and is supported by the sliding mechanism 9 to ensure that all the fixtures 6 swing stably and smoothly, and the screw 12 can accurately stop at the corresponding value.

[0072] In this technical solution, the screw counter 1 calculates the linear movement distance of the screw 12 by measuring the rotation angle of the screw 12 , and the rotation angle of the screw 12 is linearly related to the feed amount of the screw 12 .

[0073] Furthermore, in the embodiment, it can also be considered that the screw counter 1 is provided with a handwheel 11.

[0074] In this embodiment, the hand wheel 11 is provided to facilitate the rotation of the lead screw 12 .

[0075] Furthermore, in an embodiment, it can also be considered that the fixture 6 includes a rocker 61 with a pointed top, and the rocker 61 is connected to the slider 91;

[0076] The connecting rod 4 is rotatably connected to the upper portion of the rocker arm 61 , and the fixing rod 2 is rotatably connected to the bottom portion of the rocker arm 61 via a rotating shaft 62 .

[0077] In this embodiment, Figure 3 As shown, the upper end of the pendulum rod 61 is pointed, which is convenient for better reading of the value of the pointing scale 3. The setting of the rotation axis 62 also facilitates better tilting and rotation of the pendulum rod 61.

[0078] How to do it:

[0079] The MEMS automated inclinometer 5 is mounted on the calibration fixture of the present invention through the positioning pin 601 , the positioning slot 603 and the fixing bolt 602 , ensuring that the MEMS automated inclinometer 5 to be inspected is fixed and stable.

[0080] Rotate the lead screw counter 1 to move the lead screw 12 and simultaneously drive the rocker arm 61 of the jig 6 connected thereto to move. The rotating shaft 62 of the jig 6 is fixed, and the upper end of the rocker arm 61 slides a corresponding distance to make it reach a predetermined moving distance. For example, the test is performed every 5 cm. At this time, the tilt distance of the upper end of the rocker arm 61 can be checked by the ruler 3, and can also be determined based on the number of rotations of the lead screw counter 1. The spirit level 7 is used to monitor the horizontal state of the entire tooling. If the tooling is in a non-horizontal state, the product to be inspected has an initial angle, which will affect the absolute accuracy calibration.

[0081] At this time, the MEMS automated inclinometer automatically calculates the distance the product has moved based on the tilt angle, and uploads the calculated distance data to the host computer software through the matching data collector. The host computer software compares the movement distance of the front end of the pendulum arm of the calibration fixture with the movement distance calculated by the MEMS automated inclinometer, thereby achieving absolute precision calibration of the MEMS automated inclinometer.

[0082] The above embodiments provide a detailed description of the present invention. However, the contents described are merely preferred embodiments of the present invention and should not be considered as limiting the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention shall still fall within the scope of the patent application of the present invention.

Claims

1. An absolute precision calibration tool for a MEMS automated inclinometer, comprising a support frame (8) and a support plate (81) fixedly mounted on the support frame (8), characterized in that: A scale (3) is provided on the top of the support plate (81), a jig (6) is provided below the scale (3), and the jig (6) is rotatably connected to a lead screw counting mechanism; a positioning mechanism (63) is also provided on the jig (6), and a MEMS automated inclinometer (5) is mounted on the jig (6) via the positioning mechanism (63); A fixing rod (2) is fixedly mounted on the bottom of the support plate (81), a level (7) is mounted between the fixing rod (2) and the support plate (81), and the lower end of the jig (6) is rotatably connected to the fixing rod (2).

2. The absolute accuracy calibration tool for a MEMS automated inclinometer according to claim 1, characterized in that: The positioning mechanism (63) is provided in two groups, upper and lower, on the jig (6).

3. The absolute accuracy calibration tool for a MEMS automated inclinometer according to claim 2, characterized in that: The positioning mechanism comprises a positioning groove (603), a positioning pin (601) and a fixing bolt (602); The MEMS automated inclinometer (5) is installed in the positioning groove (603) and is installed on the fixture (6) via the positioning pin (601) and the fixing bolt (602).

4. The absolute accuracy calibration tool for a MEMS automated inclinometer according to claim 3, characterized in that: The positioning groove (603) and the positioning pin (601) are both clearance positioning.

5. The absolute accuracy calibration tool for a MEMS automated inclinometer according to claim 1, characterized in that: Casters (10) are installed at the bottom of the support frame (8).

6. The absolute accuracy calibration tool for a MEMS automated inclinometer according to any one of claims 1 to 5, characterized in that: The jig (6) is provided with multiple groups, which are rotatably connected to the connecting rod (4), and the connecting rod (4) is rotatably connected to the screw counting mechanism; A sliding mechanism (9) is fixedly mounted on the support plate (81), and the sliding mechanism (9) is slidably connected to the jig (6).

7. The absolute accuracy calibration tool for a MEMS automated inclinometer according to claim 6, characterized in that: The sliding mechanism (9) comprises a slider (91) and a slide rail (92), wherein the slide rail (92) is mounted on the support plate (81), the jig (6) is connected to the slider (91), and the slider (91) is slidably connected to the slide rail (92).

8. The absolute accuracy calibration tool for a MEMS automated inclinometer according to claim 6, characterized in that: The screw counting mechanism comprises a screw counter (1) connected to the support plate (81), the screw counter is connected to a screw (12), and the screw (12) is rotationally connected to the connecting rod (4) through a connecting module (13).

9. The absolute accuracy calibration tool for a MEMS automated inclinometer according to claim 8, characterized in that: The screw counter (1) is provided with a hand wheel (11).

10. The absolute accuracy calibration tool for a MEMS automated inclinometer according to claim 7, characterized in that: The fixture (6) includes a pendulum rod (61) with a pointed top end, and the pendulum rod (61) is connected to the slider (91); The connecting rod (4) is rotatably connected to the upper portion of the swing rod (61), and the fixed rod (2) is rotatably connected to the bottom portion of the swing rod (61) via a rotating shaft (62).

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